Works (1)
Updated: July 5th, 2023 15:55
2006 journal article
Studies on CO2-based slurries and fluorinated silica and alumina particles for chemical mechanical polishing of copper films
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 153(12), G1064–G1071.
UN Sustainable Development Goal Categories
3. Good Health and Well-being
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
Citation Index includes data from a number of different sources. If you have questions about the sources of data in the Citation Index or need a set of data which is free to re-distribute, please contact us.
Certain data included herein are derived from the Web of Science© and InCites© (2024) of Clarivate Analytics. All rights reserved. You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.