Sean K. Eichenlaub

Works (1)

Updated: July 5th, 2023 15:55

2006 journal article

Studies on CO2-based slurries and fluorinated silica and alumina particles for chemical mechanical polishing of copper films

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 153(12), G1064–G1071.

By: P. Visintin*, S. Eichenlaub n, L. Portnow*, R. Carbonell*, S. Beaudoin  n, C. Schauer*, J. DeSimone n

UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
Source: Web Of Science
Added: August 6, 2018

Citation Index includes data from a number of different sources. If you have questions about the sources of data in the Citation Index or need a set of data which is free to re-distribute, please contact us.

Certain data included herein are derived from the Web of Science© and InCites© (2025) of Clarivate Analytics. All rights reserved. You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.