1997 article

Optimization of Process Conditions for Selective Silicon Epitaxy Using Disilane, Hydrogen, and Chlorine

O'Neil, P. A., Öztürk, M. C., Violette, K. E., Batchelor, D., Christensen, K., & Maher, D. M. (1997, September 1). Journal of The Electrochemical Society.

By: P. O'Neil n, M. Öztürk n, K. Violette n, D. Batchelor n, K. Christensen n & D. Maher n

topics (OpenAlex): Silicon and Solar Cell Technologies; Thin-Film Transistor Technologies; Semiconductor materials and devices
Source: Web Of Science
Added: August 6, 2018

1997 article

Rapid thermal chemical vapor deposition of in situ boron-doped polycrystalline silicon-germanium films on silicon dioxide for complimentary-metal-oxide-semiconductor applications

Li, V. Z.-Q., Mirabedini, M. R., Kuehn, R. T., Wortman, J. J., Öztürk, M. C., Batchelor, D., … Maher, D. M. (1997, December 8). Applied Physics Letters.

By: V. Li n, M. Mirabedini n, R. Kuehn n, J. Wortman n, M. Öztürk n, D. Batchelor n, K. Christensen n, D. Maher n

topics (OpenAlex): Semiconductor materials and devices; Silicon Nanostructures and Photoluminescence; Semiconductor materials and interfaces
Source: NC State University Libraries
Added: August 6, 2018

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