Works (2)
1999 journal article
Hydrogen plasma removal of post-RIE residue for backend processing
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(6), 2318–2321.
1997 journal article
Electrical and structural properties of zirconium germanosilicide formed by a bilayer solid state reaction of Zr with strained Si1-xGex alloys
JOURNAL OF APPLIED PHYSICS, 82(5), 2342–2348.