David Brian Aldrich

Works (2)

Updated: July 5th, 2023 16:04
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1999 journal article

Hydrogen plasma removal of post-RIE residue for backend processing

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(6), 2318–2321.

By: A. Somashekhar, H. Ying, P. Smith*, D. Aldrich* & R. Nemanich n

Source: Web Of Science
Added: August 6, 2018

1997 journal article

Electrical and structural properties of zirconium germanosilicide formed by a bilayer solid state reaction of Zr with strained Si1-xGex alloys

JOURNAL OF APPLIED PHYSICS, 82(5), 2342–2348.

By: Z. Wang n, D. Aldrich n, R. Nemanich n & D. Sayers n

Source: Web Of Science
Added: August 6, 2018