1999 journal article

Hydrogenplasma removal of post-Rie residue for backend processing

Journal of the Electrochemical Society, 146(6), 2318–2321.

By: A. Somashekhar, H. Ying, P. Smith, D. Aldrich & R. Nemanich

Source: NC State University Libraries
Added: August 6, 2018

1997 journal article

Electrical and structural properties of zirconium germanosilicide formed by a bilayer solid state reaction of Zr with strained Si1 XGEX alloys

Journal of Applied Physics, 82(5), 2342–2348.

By: Z. Wang, D. Aldrich, R. Nemanich & D. Sayers

Source: NC State University Libraries
Added: August 6, 2018