Works (2)
1999 article
Hydrogen Plasma Removal of Post‐RIE Residue for Backend Processing
Somashekhar, A., Ying, H., Smith, P. B., Aldrich, D. B., & Nemanich, R. J. (1999, June 1). Journal of The Electrochemical Society.
1997 article
Electrical and structural properties of zirconium germanosilicide formed by a bilayer solid state reaction of Zr with strained Si1−xGex alloys
Wang, Z., Aldrich, D. B., Nemanich, R. J., & Sayers, D. E. (1997, September 1). Journal of Applied Physics.