@article{hussain_wu_ampaw_grant_2007, title={Dissolution of polymer films in supercritical carbon dioxide using a quartz crystal microbalance}, volume={42}, ISSN={["1872-8162"]}, DOI={10.1016/j.supflu.2007.03.011}, abstractNote={Abstract The dissolution kinetics of polymeric materials in CO 2 is crucial to the understanding, design and control of CO 2 -based environmentally benign lithography processes. This study utilizes the quartz crystal microbalance (QCM) to monitor and evaluate the dissolution of poly(1,1-dihydroperfluorooctyl methacrylate- r -2-tetrahydropyranyl methacrylate), poly(FOMA- r -THPMA), polymer films in supercritical CO 2 over a range of temperatures and pressures. Polymer dissolution rates at the range of pressures studied were evaluated to quantify the dissolution kinetics for the polymer. The experiments revealed that the polymer dissolution in supercritical CO 2 undergoes two apparent processes: a rapid absorption of CO 2 into the polymer film followed by a gradual dissolution of polymer film into the CO 2 at the polymer–CO 2 interface. The nature of these interfacial phenomena and their associated effect on the rate are discussed.}, number={2}, journal={JOURNAL OF SUPERCRITICAL FLUIDS}, author={Hussain, Yazan and Wu, You-Ting and Ampaw, Paa-Joe and Grant, Christine S.}, year={2007}, month={Sep}, pages={255–264} }