Works (7)
1999 article
Thermochemical stability of silicon–oxygen–carbon alloy thin films: A model system for chemical and structural relaxation at SiC–SiO2 interfaces
Wolfe, D. M., Hinds, B. J., Wang, F., Lucovsky, G., Ward, B. L., Xu, M., … Maher, D. M. (1999, July 1). Journal of Vacuum Science & Technology A Vacuum Surfaces and Films.
1998 article
Interfacial sub-oxide regions at SiSiO2 interfaces: minimization by post-oxidation rapid thermal anneal
Lucovsky, G., Koh, K., Chaflin, B., & Hinds, B. (1998, January 1). Applied Surface Science.
1998 journal article
Investigation of postoxidation thermal treatments of Si/SiO2 interface in relationship to the kinetics of amorphous Si suboxide decomposition
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 16(4), 2171–2176.
1998 journal article
Study of SiOx decomposition kinetics and formation of Si nanocrystals in an SiOx matrix
Journal of Non-Crystalline Solids, 230 (part A)(1998 May), 507–512.
1997 article
Elimination of sub-oxide transition regions at SiSiO2 interfaces by rapid thermal annealing at 900°C
Lucovsky, G., Banerjee, A., Niimi, H., Koh, K., Hinds, B., Meyer, C., … Kurz, H. (1997, June 1). Applied Surface Science.
1997 conference paper
Low pH chemical etch route for smooth H-terminated Si(100) and study of subsequent chemical stability
Environmental, safety, and health issues in IC production: Symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A. (Materials Research Society Symposium proceedings, no. 447), 191–196. Pittsburgh, PA: Materials Research Society.
Ed(s):
1997 article
Minimization of sub-oxide transition regions at SiSiO2 interfaces by 900°C rapid thermal annealing
Lucovsky, G., Banerjee, A., Hinds, B., Claflin, B., Koh, K., & Yang, H. (1997, June 1). Microelectronic Engineering.