Works (10)

Updated: July 5th, 2023 16:04

2000 journal article

Effect of Ar+ ion beam in the process of plasma surface modification of PET films

JOURNAL OF APPLIED POLYMER SCIENCE, 77(8), 1679–1683.

By: J. Hyun n, P. Barletta n, K. Koh n, S. Yoo n, J. Oh n, D. Aspnes n , J. Cuomo n

co-author countries: United States of America 🇺🇸
author keywords: polymer; plasma; ion beam; crosslinking; hydrophilic
Sources: Web Of Science, ORCID
Added: August 6, 2018

1998 journal article

Controlled nitrogen incorporation at Si-SiO2 interfaces by remote plasma-assisted processing

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 37(2), 709–714.

By: K. Koh*, H. Niimi*, G. Lucovsky n & M. Green

co-author countries: United States of America 🇺🇸
author keywords: low-temperature processing; plasma-assisted oxidation and nitridation; rapid thermal annealing; Si-SiO2 interfaces; Auger electron spectroscopy; optical second harmonic generation; chemical reaction pathways
Source: Web Of Science
Added: August 6, 2018

1998 article

Interfacial sub-oxide regions at Si-SiO2 interfaces: minimization by post-oxidation rapid thermal anneal

Lucovsky, G., Koh, K., Chaflin, B., & Hinds, B. (1998, January). APPLIED SURFACE SCIENCE, Vol. 123, pp. 490–495.

By: G. Lucovsky n, K. Koh n, B. Chaflin n & B. Hinds n

co-author countries: United States of America 🇺🇸
Source: Web Of Science
Added: August 6, 2018

1998 article

Monolayer nitrogen atom incorporation at buried Si-SiO2 interfaces: Preparation by remote plasma oxidation/nitridation and characterization by on-line auger electron spectroscopy

Lucovsky, G., Niimi, H., Koh, K., & Green, M. L. (1998, February). SURFACE REVIEW AND LETTERS, Vol. 5, pp. 167–173.

By: G. Lucovsky n, H. Niimi n, K. Koh n & M. Green

co-author countries: United States of America 🇺🇸
Source: Web Of Science
Added: August 6, 2018

1998 article

Plasma-engineered Si-SiO2 interfaces: monolayer nitrogen atom incorporation by low-temperature remote plasma-assisted oxidation in N2O

Koh, K., Niimi, H., & Lucovsky, G. (1998, January). SURFACE & COATINGS TECHNOLOGY, Vol. 98, pp. 1524–1528.

By: K. Koh n, H. Niimi n & G. Lucovsky n

co-author countries: United States of America 🇺🇸
author keywords: Si-SiO2 interfaces; N-atoms; N2O; Auger electron spectroscopy
Source: Web Of Science
Added: August 6, 2018

1997 journal article

Compact rings having a finite simple group of units

JOURNAL OF PURE AND APPLIED ALGEBRA, 119(1), 13–26.

By: J. Cohen n & K. Koh n

co-author countries: United States of America 🇺🇸
Source: Web Of Science
Added: August 6, 2018

1997 article

Elimination of sub-oxide transition regions at Si-SiO2 interfaces by rapid thermal annealing at 900 degrees C

Lucovsky, G., Banerjee, A., Niimi, H., Koh, K., Hinds, B., Meyer, C., … Kurz, H. (1997, June). APPLIED SURFACE SCIENCE, Vol. 117, pp. 202–206.

By: G. Lucovsky n, A. Banerjee n, H. Niimi n, K. Koh n, B. Hinds n, C. Meyer*, G. Lupke*, H. Kurz*

co-author countries: Germany 🇩🇪 United States of America 🇺🇸
author keywords: Si-SiO2 interfaces; sub-oxide transition regions; plasma processing; rapid thermal annealing
Source: Web Of Science
Added: August 6, 2018

1997 article

Minimization of sub-oxide transition regions at Si-SiO2 interfaces by 900 degrees C rapid thermal annealing

Lucovsky, G., Banerjee, A., Hinds, B., Claflin, B., Koh, K., & Yang, H. (1997, June). MICROELECTRONIC ENGINEERING, Vol. 36, pp. 207–210.

Source: Web Of Science
Added: August 6, 2018

1997 journal article

Plasma-assisted formation of low defect density SiC-SiO2 interfaces

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 15(4), 1097–1104.

By: A. Golz, G. Lucovsky, K. Koh, D. Wolfe, H. Niimi & H. Kurz

Source: NC State University Libraries
Added: August 6, 2018

1997 article

Ultra-thin gate dielectrics prepared by low-temperature remote plasma-assisted oxidation

Niimi, H., Koh, K., & Lucovsky, G. (1997, May). NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol. 127, pp. 364–368.

By: H. Niimi*, K. Koh* & G. Lucovsky*

Source: Web Of Science
Added: August 6, 2018