Works (10)
Updated: July 5th, 2023 16:04
2000 journal article
Effect of Ar+ ion beam in the process of plasma surface modification of PET films
JOURNAL OF APPLIED POLYMER SCIENCE, 77(8), 1679–1683.
author keywords: polymer; plasma; ion beam; crosslinking; hydrophilic
UN Sustainable Development Goal Categories
3. Good Health and Well-being
(Web of Science)
6. Clean Water and Sanitation
(OpenAlex)
Sources: Web Of Science, ORCID
Added: August 6, 2018
1998 journal article
Controlled nitrogen incorporation at Si-SiO2 interfaces by remote plasma-assisted processing
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 37(2), 709–714.
author keywords: low-temperature processing; plasma-assisted oxidation and nitridation; rapid thermal annealing; Si-SiO2 interfaces; Auger electron spectroscopy; optical second harmonic generation; chemical reaction pathways
UN Sustainable Development Goal Categories
6. Clean Water and Sanitation
(OpenAlex)
Source: Web Of Science
Added: August 6, 2018
1998 article
Interfacial sub-oxide regions at Si-SiO2 interfaces: minimization by post-oxidation rapid thermal anneal
Lucovsky, G., Koh, K., Chaflin, B., & Hinds, B. (1998, January). APPLIED SURFACE SCIENCE, Vol. 123, pp. 490–495.
Source: Web Of Science
Added: August 6, 2018
1998 article
Monolayer nitrogen atom incorporation at buried Si-SiO2 interfaces: Preparation by remote plasma oxidation/nitridation and characterization by on-line auger electron spectroscopy
Lucovsky, G., Niimi, H., Koh, K., & Green, M. L. (1998, February). SURFACE REVIEW AND LETTERS, Vol. 5, pp. 167–173.
UN Sustainable Development Goal Categories
6. Clean Water and Sanitation
(OpenAlex)
Source: Web Of Science
Added: August 6, 2018
1998 article
Plasma-engineered Si-SiO2 interfaces: monolayer nitrogen atom incorporation by low-temperature remote plasma-assisted oxidation in N2O
Koh, K., Niimi, H., & Lucovsky, G. (1998, January). SURFACE & COATINGS TECHNOLOGY, Vol. 98, pp. 1524–1528.
author keywords: Si-SiO2 interfaces; N-atoms; N2O; Auger electron spectroscopy
Source: Web Of Science
Added: August 6, 2018
1997 journal article
Compact rings having a finite simple group of units
JOURNAL OF PURE AND APPLIED ALGEBRA, 119(1), 13–26.
doi.org (publisher)
UN Sustainable Development Goal Categories
15. Life on Land
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
1997 article
Elimination of sub-oxide transition regions at Si-SiO2 interfaces by rapid thermal annealing at 900 degrees C
Lucovsky, G., Banerjee, A., Niimi, H., Koh, K., Hinds, B., Meyer, C., … Kurz, H. (1997, June). APPLIED SURFACE SCIENCE, Vol. 117, pp. 202–206.
author keywords: Si-SiO2 interfaces; sub-oxide transition regions; plasma processing; rapid thermal annealing
Source: Web Of Science
Added: August 6, 2018
1997 article
Minimization of sub-oxide transition regions at Si-SiO2 interfaces by 900 degrees C rapid thermal annealing
Lucovsky, G., Banerjee, A., Hinds, B., Claflin, B., Koh, K., & Yang, H. (1997, June). MICROELECTRONIC ENGINEERING, Vol. 36, pp. 207–210.
Source: Web Of Science
Added: August 6, 2018
1997 journal article
Plasma-assisted formation of low defect density SiC-SiO2 interfaces
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 15(4), 1097–1104.
Source: NC State University Libraries
Added: August 6, 2018
1997 article
Ultra-thin gate dielectrics prepared by low-temperature remote plasma-assisted oxidation
Niimi, H., Koh, K., & Lucovsky, G. (1997, May). NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol. 127, pp. 364–368.
Source: Web Of Science
Added: August 6, 2018
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