Works (10)

2000 journal article

Effect of Ar+ ion beam in the process of plasma surface modification of PET films

Journal of Applied Polymer Science, 77(8), 1679–1683.

Source: NC State University Libraries
Added: August 6, 2018

1998 journal article

Controlled nitrogen incorporation at Si-SiO2 interfaces by remote plasma-assisted processing

Japanese Journal of Applied Physics. Part 1, Regular Papers, Short Notes & Review Papers, 37(2), 709–714.

By: K. Koh, H. Niimi, G. Lucovsky & M. Green

Source: NC State University Libraries
Added: August 6, 2018

1998 journal article

Interfacial sub-oxide regions at Si-SiO2 interfaces: minimization by post-oxidation rapid thermal anneal

Applied Surface Science, 123(1998 Jan.), 490–495.

By: G. Lucovsky, K. Koh, B. Chaflin & B. Hinds

Source: NC State University Libraries
Added: August 6, 2018

1998 journal article

Monolayer nitrogen atom incorporation at buried Si SiO2 interfaces: preparation by remote plasma oxidation/nitridation and characterization by on line auger electron spectroscopy

Surface Review and Letters, 5(1), 167–173.

By: G. Lucovsky, H. Niimi, K. Koh & M. Green

Source: NC State University Libraries
Added: August 6, 2018

1998 journal article

Plasma-engineered Si-SiO2 interfaces: monolayer nitrogen atom incorporation by low-temperature remote plasma-assisted oxidation in N2O

Surface & Coatings Technology, 98(1-3), 1524–1528.

By: K. Koh, H. Niimi & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1997 journal article

Compact rings having a finite simple group of units

Journal of Pure and Applied Algebra, 119(1), 13–26.

By: J. Cohen & K. Koh

Source: NC State University Libraries
Added: August 6, 2018

1997 journal article

Elimination of suboxide transition regions at Si-SiO(2) interfaces by rapid thermal annealing at 900 degrees C

Applied Surface Science, 117(1997 June), 202–206.

By: G. Lucovsky, A. Banerjee, H. Niimi, K. Koh, B. Hinds, C. Meyer, G. Lupke, H. Kurz

Source: NC State University Libraries
Added: August 6, 2018

1997 journal article

Minimization of suboxide transition regions at Si-SiO2 interfaces by 900 degrees C rapid thermal annealing

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 15(4), 1074–1079.

Source: NC State University Libraries
Added: August 6, 2018

1997 journal article

Plasma-assisted formation of low defect density SiC-SiO2 interfaces

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 15(4), 1097–1104.

By: A. Golz, G. Lucovsky, K. Koh, D. Wolfe, H. Niimi & H. Kurz

Source: NC State University Libraries
Added: August 6, 2018

1997 journal article

Ultra-thin gate dielectrics prepared by low-temperature remote plasma-assisted oxidation

Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms, 127(1997 May), 364–368.

By: H. Niimi, K. Koh & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018