2010 | journal article
Evaluation of oxygen plasma and UV ozone methods for cleaning of occluded areas in MEMS devices
Journal of Microelectromechanical Systems, 19(6), 1292–1298.
By: J. Krim & M. Dugger, J. Ohlhausen,
2009 | journal article
Wear of polysilicon surface micromachines operated in high vacuum
Journal of Microelectromechanical Systems, 18(2), 229–238.
By: S. Timpe, D. Alsem, , M. Dugger & K. Komvopoulos
2008 | journal article
Tribological degradation of fluorocarbon coated silicon microdevice surfaces in normal and sliding contact
Journal of Applied Physics, 104(3).
By: J. Krim, S. Timpe, M. Dugger &