@article{sengupta_vaidya_szymanski_khachariya_bockowski_kamler_reddy_sitar_collazo_pavlidis_2023, title={Chemical Vapor Deposition of Monolayer MoS2 on Chemomechanically Polished N-Polar GaN for Future 2D/3D Heterojunction Optoelectronics}, volume={3}, ISSN={["2574-0970"]}, url={https://doi.org/10.1021/acsanm.3c00038}, DOI={10.1021/acsanm.3c00038}, abstractNote={The growth of monolayer MoS2 crystals on chemomechanically polished (CMP) N-polar GaN using PTAS-assisted chemical vapor deposition is demonstrated. The formation of monolayer MoS2 was initially prevented by the as-grown GaN’s large surface roughness. CMP reduces the roughness to 250 pm, enabling monolayer MoS2 triangles with edge lengths of 30 μm, a Raman peak separation of <20 cm–1, and an optical bandgap of 1.81 eV, which is on par with those obtained on smooth Ga-polar GaN. It is thus demonstrated that high-quality MoS2 monolayers can be obtained on N-polar GaN for future high-speed optoelectronic and quantum sensing applications.}, journal={ACS APPLIED NANO MATERIALS}, author={Sengupta, Rohan and Vaidya, Shipra and Szymanski, Dennis and Khachariya, Dolar and Bockowski, Michal and Kamler, Grzegorz and Reddy, Pramod and Sitar, Zlatko and Collazo, Ramon and Pavlidis, Spyridon}, year={2023}, month={Mar} }
 @article{szymanski_khachariya_eldred_bagheri_washiyama_chang_pavlidis_kirste_reddy_kohn_et al._2022, title={GaN lateral polar junction arrays with 3D control of doping by supersaturation modulated growth: A path toward III-nitride superjunctions}, volume={131}, ISSN={["1089-7550"]}, url={https://doi.org/10.1063/5.0076044}, DOI={10.1063/5.0076044}, abstractNote={We demonstrate a pathway employing crystal polarity controlled asymmetric impurity incorporation in the wide bandgap nitride material system to enable 3D doping control during the crystal growth process. The pathway involves polarity specific supersaturation modulated growth of lateral polar structures of alternating Ga- and N-polar GaN domains. A STEM technique of integrated differential phase contrast is used to image the atomic structure of the different polar domains and their single atomic plane boundaries. As a demonstration, 1 μm wide alternating Ga- and N-polar GaN domains exhibiting charge balanced and periodic domains for superjunction technology were grown. The challenges in characterizing the resulting 3D doping profile were addressed with atom probe tomography with atomic scale compositional resolution corroborating capacitance measurements and secondary-ion mass spectroscopy analysis.}, number={1}, journal={JOURNAL OF APPLIED PHYSICS}, author={Szymanski, Dennis and Khachariya, Dolar and Eldred, Tim B. and Bagheri, Pegah and Washiyama, Shun and Chang, Alexander and Pavlidis, Spyridon and Kirste, Ronny and Reddy, Pramod and Kohn, Erhard and et al.}, year={2022}, month={Jan} }
 @article{rathkanthiwar_szymanski_khachariya_bagheri_kim_mita_reddy_kohn_pavlidis_kirste_et al._2022, title={Low resistivity, p-type, N-Polar GaN achieved by chemical potential control}, volume={15}, ISSN={["1882-0786"]}, DOI={10.35848/1882-0786/ac8273}, abstractNote={Abstract}, number={8}, journal={APPLIED PHYSICS EXPRESS}, author={Rathkanthiwar, Shashwat and Szymanski, Dennis and Khachariya, Dolar and Bagheri, Pegah and Kim, Ji Hyun and Mita, Seiji and Reddy, Pramod and Kohn, Erhard and Pavlidis, Spyridon and Kirste, Ronny and et al.}, year={2022}, month={Aug} }
 @article{comstock_biliroglu_seyitliyev_mcconnell_vetter_reddy_kirste_szymanski_sitar_collazo_et al._2022, title={Spintronic Terahertz Emission in Ultrawide Bandgap Semiconductor/Ferromagnet Heterostructures}, volume={10}, ISSN={["2195-1071"]}, DOI={10.1002/adom.202201535}, abstractNote={Abstract}, journal={ADVANCED OPTICAL MATERIALS}, author={Comstock, Andrew and Biliroglu, Melike and Seyitliyev, Dovletgeldi and McConnell, Aeron and Vetter, Eric and Reddy, Pramod and Kirste, Ronny and Szymanski, Dennis and Sitar, Zlatko and Collazo, Ramon and et al.}, year={2022}, month={Oct} }
 @article{szymanski_wang_kaess_kirste_mita_reddy_sitar_collazo_2022, title={Systematic oxygen impurity reduction in smooth N-polar GaN by chemical potential control}, volume={37}, ISSN={["1361-6641"]}, DOI={10.1088/1361-6641/ac3638}, abstractNote={Abstract}, number={1}, journal={SEMICONDUCTOR SCIENCE AND TECHNOLOGY}, author={Szymanski, Dennis and Wang, Ke and Kaess, Felix and Kirste, Ronny and Mita, Seiji and Reddy, Pramod and Sitar, Zlatko and Collazo, Ramon}, year={2022}, month={Jan} }
 @article{breckenridge_tweedie_reddy_guan_bagheri_szymanski_mita_sierakowski_bockowski_collazo_et al._2021, title={High Mg activation in implanted GaN by high temperature and ultrahigh pressure annealing}, volume={118}, ISSN={["1077-3118"]}, url={https://doi.org/10.1063/5.0038628}, DOI={10.1063/5.0038628}, abstractNote={We demonstrate high p-type conductivity and hole concentrations >1018 cm−3 in Mg-implanted GaN. The implantation was performed at room temperature and by post-implantation annealing at 1 GPa of N2 and in a temperature range of 1200–1400 °C. The high pressure thermodynamically stabilized the GaN surface without the need of a capping layer. We introduce a “diffusion budget,” related to the diffusion length, as a convenient engineering parameter for comparing samples annealed at different temperatures and for different times. Although damage recovery, as measured by XRD, was achieved at relatively low diffusion budgets, these samples did not show p-type conductivity. Further analyses showed heavy compensation by the implantation-induced defects. Higher diffusion budgets resulted in a low Mg ionization energy (∼115 meV) and almost complete Mg activation. For even higher diffusion budgets, we observed significant loss of Mg to the surface and a commensurate reduction in the hole conductivity. High compensation at low diffusion budgets and loss of Mg at high diffusion budgets present a unique challenge for shallow implants. A direct control of the formation of compensating defects arising from the implantation damage may be necessary to achieve both hole conductivity and low Mg diffusion.}, number={2}, journal={APPLIED PHYSICS LETTERS}, publisher={AIP Publishing}, author={Breckenridge, M. Hayden and Tweedie, James and Reddy, Pramod and Guan, Yan and Bagheri, Pegah and Szymanski, Dennis and Mita, Seiji and Sierakowski, Kacper and Bockowski, Michal and Collazo, Ramon and et al.}, year={2021}, month={Jan} }
 @article{bagheri_reddy_mita_szymanski_kim_guan_khachariya_klump_pavlidis_kirste_et al._2021, title={On the Ge shallow-to-deep level transition in Al-rich AlGaN}, volume={130}, ISSN={["1089-7550"]}, url={https://doi.org/10.1063/5.0059037}, DOI={10.1063/5.0059037}, abstractNote={Contrary to the arsenides where donors undergo stable DX transition, we find that Ge in AlGaN does not suffer from the DX transition; instead, it undergoes a shallow donor (30 meV) to deep donor (150 meV) transition at ∼50% Al content in the alloy. This finding is of profound technological importance as it removes fundamental doping limitations in AlGaN and AlN imposed by the presumed DX−1 acceptor state. The charge state of Ge below and above the transition was determined by co-doping with Si, which remains a shallow donor in AlGaN for up to 80% Al. It was found that Ge occupied a donor state with a (0/+) thermodynamic transition for AlGaN alloys below and above the transition. Ge as a shallow donor was completely ionized at room temperature; however, the ionization of the deep donor required elevated temperatures, commensurate with its higher ionization energy. This behavior is not unique to Ge; preliminary findings show that Si and O in AlGaN may behave similarly.}, number={5}, journal={JOURNAL OF APPLIED PHYSICS}, author={Bagheri, Pegah and Reddy, Pramod and Mita, Seiji and Szymanski, Dennis and Kim, Ji Hyun and Guan, Yan and Khachariya, Dolar and Klump, Andrew and Pavlidis, Spyridon and Kirste, Ronny and et al.}, year={2021}, month={Aug} }
 @article{khachariya_szymanski_breckenridge_reddy_kohn_sitar_collazo_pavlidis_2021, title={On the characteristics of N-polar GaN Schottky barrier contacts with LPCVD SiN interlayers}, volume={118}, ISSN={["1077-3118"]}, url={https://doi.org/10.1063/5.0039888}, DOI={10.1063/5.0039888}, abstractNote={We study the behavior of N-polar GaN Schottky diodes with low-pressure chemical vapor deposited (LPCVD) SiN interlayers and unveil the important role of an amphoteric miniband formed in this interlayer due to a previously identified and dominating Si dangling bond defect. Through analysis of temperature-dependent current–voltage (I–V–T), capacitance–voltage (C–V), and x-ray photoelectron spectroscopy measurements, we observe that when nickel is deposited on LPCVD SiN pretreated with hydrofluoric acid, the SiN/GaN interface is responsible for determining the overall system's barrier height. By contrast, contact formation on oxidized LPCVD SiN leads to a metal/SiN-dominant barrier. We, consequently, propose band diagrams that account for an amphoteric miniband in LPCVD SiN, leading to a new understanding of LPCVD SiN as a lossy dielectric with surface barrier-dependent behavior.}, number={12}, journal={APPLIED PHYSICS LETTERS}, author={Khachariya, Dolar and Szymanski, Dennis and Breckenridge, M. Hayden and Reddy, Pramod and Kohn, Erhard and Sitar, Zlatko and Collazo, Ramon and Pavlidis, Spyridon}, year={2021}, month={Mar} }