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2014 article
SIMS analysis of high-performance accelerator niobium
Maheshwari, P., Stevie, F. A., Myneni, G. R., Ciovati, G., Rigsbee, J. M., Dhakal, P., & Griffis, D. P. (2014, November). SURFACE AND INTERFACE ANALYSIS, Vol. 46, pp. 288–290.
2012 journal article
Quantification of cesium surface contamination on silicon resulting from SIMS analysis
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 30(3).
2012 article
SIMS analysis of zinc oxide LED structures: quantification and analysis issues
Stevie, F. A., Maheshwari, P., Pierce, J. M., Adekore, B. T., & Griffis, D. P. (2013, January). SURFACE AND INTERFACE ANALYSIS, Vol. 45, pp. 352–355.
2012 journal article
Time-of-Flight-Secondary Ion Mass Spectrometry Method Development for High-Sensitivity Analysis of Acid Dyes in Nylon Fibers
ANALYTICAL CHEMISTRY, 84(22), 10085–10090.
2011 article
Analysis of Interstitial Elements in Niobium with Secondary Ion Mass Spectrometry (SIMS)
INTERNATIONAL SYMPOSIUM ON THE SUPERCONDUCTING SCIENCE & TECHNOLOGY OF INGOT NIOBIUM, Vol. 1352, pp. 151-+.
2011 journal article
Chemical and Spatial Differentiation of Syringyl and Guaiacyl Lignins in Poplar Wood via Time-of-Flight Secondary Ion Mass Spectrometry
ANALYTICAL CHEMISTRY, 83(18), 7020–7026.
2010 journal article
Focused Ion Beam Characterization of Bicomponent Polymer Fibers
MICROSCOPY AND MICROANALYSIS, 16(3), 282–290.
2010 journal article
High field Q slope and the baking effect: Review of recent experimental results and new data on Nb heat treatments
PHYSICAL REVIEW SPECIAL TOPICS-ACCELERATORS AND BEAMS, 13(2).
2010 journal article
Secondary ion mass spectrometry characterization of anomalous behavior for low dose ion implanted phosphorus in silicon
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 28(3), 511–516.
2010 article
Surface analysis of Nb materials for SRF cavities
SURFACE AND INTERFACE ANALYSIS, Vol. 43, pp. 151–153.
2008 journal article
Quantification in dynamic SIMS: Current status and future needs
APPLIED SURFACE SCIENCE, 255(4), 1364–1367.
2007 journal article
Improved understanding of an electron beam charge compensation method for magnetic sector secondary ion mass spectrometer analysis of insulators
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 25(4), 769–774.
2007 journal article
Mass fractionation of carbon and hydrogen secondary ions upon Cs+ and O-2(+) bombardment of organic materials
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 25(3), 480–484.
2007 journal article
Model study of electron beam charge compensation for positive secondary ion mass spectrometry using a positive primary ion beam
Applied Surface Science, 254(9), 2708–2711.
2007 journal article
Transferable Internal Reservoir Device for Electron and Ion Beam Induced Chemistry
Microscopy and Analysis, 86, 5–6.
2006 article
Back side SIMS analysis of hafnium silicate
Gu, C., Stevie, F. A., Bennett, J., Garcia, R., & GriffiS, D. P. (2006, July 30). APPLIED SURFACE SCIENCE, Vol. 252, pp. 7179–7181.
2006 article
SIMS depth profiling of deuterium labeled polymers in polymer multilayers
Harton, S. E., Stevie, F. A., Griffis, D. P., & Ade, H. (2006, July 30). APPLIED SURFACE SCIENCE, Vol. 252, pp. 7224–7227.
2006 article
SIMS quantification of matrix and impurity species in AlxGa1-xN
Gu, C. J., Stevie, F. A., Hitzman, C. J., Saripalli, Y. N., Johnson, M., & Griffis, D. P. (2006, July 30). APPLIED SURFACE SCIENCE, Vol. 252, pp. 7228–7231.
2006 journal article
Thermal stability of lanthanum scandate dielectrics on Si(100)
APPLIED PHYSICS LETTERS, 89(24).
2004 article
Circuit editing of copper and low-k dielectrics in nanotechnology devices
Mosselveld, F., Makarov, VV, Lundquist, T. R., Griffis, D. P., & Russell, P. E. (2004, June). JOURNAL OF MICROSCOPY, Vol. 214, pp. 246–251.
2004 article
Improved charge neutralization method for depth profiling of bulk insulators using O-2(+) primary beam on a magnetic sector SIMS instrument
Pivovarov, A. L., Stevie, F. A., & Griffis, D. P. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 786–790.
2004 article
O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices
Kachan, M., Hunter, J., Kouzminov, D., Pivovarov, A., Gu, J., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 684–687.
2004 article
Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 22, pp. 350–354.
2004 article
Site-specific SIMS backside analysis
Gu, C., Garcia, R., Pivovarov, A., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 663–667.
2004 article
Utilization of electron impact ionization of gaseous and sputtered species in the secondary ion acceleration region of a magnetic sector SIMS instrument
Pivovarov, A., Gu, C., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 781–785.
2003 patent
Chemically enhanced focused ion beam micro-machining of copper
Washington, DC: U.S. Patent and Trademark Office.
2003 journal article
Etching characteristics of chromium thin films by an electron beam induced surface reaction
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 18(4), 199–205.
2003 journal article
Optimization of secondary ion mass spectrometry detection limit for N in SiC
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 21(5), 1649–1654.
2002 article
Comparison of secondary ion mass spectroscopy analysis of ultrashallow phosphorus using Cs+, O-2(+), and CsC6- primary ion beams
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 507–511.
2002 article
Improvements in focused ion beam micromachining of interconnect materials
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 2700–2704.
2001 article
Chemically enhanced focused ion beam micromachining of copper
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 19, pp. 2539–2542.
2000 article
Channeling effects during focused-ion-beam micromachining of copper
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 18, pp. 1061–1065.
2000 patent
Method for water vapor enhanced charged-particle-beam machining
Washington, DC: U.S. Patent and Trademark Office.
2000 chapter
Optimization of SIMS analysis conditions for ultra-shallow phosphorus and arsenic implants
In D. B. Williams & R. Shimizu (Eds.), Microbeam Analysis 2000: proceedings of the Second Conference of the International Union of Microbeam Analysis Societies held in Kailua-Kona, Hawaii, 9-14 July 2000 (Vol. 165, pp. 327–328). Bristol: Institute of Physics Publishing.
Ed(s): D. Williams & R. Shimizu
2000 article
Secondary ion mass spectrometry depth profiling of ultrashallow phosphorous in silicon
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 18, pp. 509–513.
1999 patent
Method for water vapor enhanced charged-particle-beam machining
Washington, DC: U.S. Patent and Trademark Office.
1998 article
Acceptor and donor doping of AlxGa1-xN thin film alloys grown on 6H-SiC(0001) substrates via metalorganic vapor phase epitaxy
Bremser, M. D., Perry, W. G., Nam, O. H., Griffis, D. P., Loesing, R., Ricks, D. A., & Davis, R. F. (1998, April). JOURNAL OF ELECTRONIC MATERIALS, Vol. 27, pp. 229–232.
1998 article
Chemically and geometrically enhanced focused ion beam micromachining
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 16, pp. 2494–2498.
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