Works (39)

2014 | journal article

SIMS analysis of high-performance accelerator niobium

Surface and Interface Analysis, 46, 288–290.

By: P. Maheshwari, F. Stevie, G. Myneni, G. Ciovati, J. Rigsbee, P. Dhakal, D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

SIMS analysis of zinc oxide LED structures: quantification and analysis issues

Surface and Interface Analysis, 45(1), 352–355.

By: F. Stevie, P. Maheshwari, J. Pierce, B. Adekore & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Quantification of cesium surface contamination on silicon resulting from SIMS analysis

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 30(3).

By: C. Penley, F. Stevie & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Time-of-flight-secondary ion mass spectrometry method development for high-sensitivity analysis of acid dyes in nylon fibers

Analytical Chemistry, 84(22), 10085–10090.

By: C. Zhou, M. Li, R. Garcia, A. Crawford, K. Beck, D. Hinks, D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2011 | conference paper

Analysis of interstitial elements in niobium with secondary ion mass spectrometry (SIMS)

In International symposium on the superconducting science & technology of ingot niobium (Vol. 1352, pp. 151–160).

By: P. Maheshwari, F. Stevie, G. Myeneni, G. Ciovati, J. Rigsbee & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2011 | journal article

Chemical and spatial differentiation of syringyl and guaiacyl lignins in poplar wood via time-of-flight secondary ion mass spectrometry

Analytical Chemistry, 83(18), 7020–7026.

By: C. Zhou, Q. Li, V. Chiang, L. Lucia & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2011 | journal article

Surface analysis of Nb materials for SRF cavities

Surface and Interface Analysis, 43(1-2), 151–153.

By: P. Maheshwari, H. Tian, C. Reece, M. Kelley, G. Myneni, F. Stevie, J. Rigsbee, A. Batchelor, D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2010 | journal article

Focused ion beam characterization of bicomponent polymer fibers

Microscopy and Microanalysis, 16(3), 282–290.

By: K. Wong, C. Haslauer, N. Anantharamaiah, B. Pourdeyhimi, A. Batchelor & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2010 | journal article

High field Q slope and the baking effect: Review of recent experimental results and new data on Nb heat treatments

Physical Review Special Topics. Accelerators and Beams, 13(2).

By: G. Ciovati, G. Myneni, F. Stevie, P. Maheshwari & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2010 | journal article

Secondary ion mass spectrometry characterization of anomalous behavior for low dose ion implanted phosphorus in silicon

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 28(3), 511–516.

By: C. Penley, F. Stevie, D. Griffis, S. Siebel, L. Kulig & J. Lee

Source: NC State University Libraries
Added: August 6, 2018

2008 | journal article

Model study of electron beam charge compensation for positive secondary ion mass spectrometry using a positive primary ion beam

Applied Surface Science, 254(9), 2708–2711.

By: Z. Zhu, F. Stevie & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2008 | journal article

Quantification in dynamic SIMS: Current status and future needs

Applied Surface Science, 255(4), 1364–1367.

By: F. Stevie & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2007 | journal article

Improved understanding of an electron beam charge compensation method for magnetic sector secondary ion mass spectrometer analysis of insulators

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 25(4), 769–774.

By: Z. Zhu, C. Gu, F. Stevie & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2007 | journal article

Mass fractionation of carbon and hydrogen secondary ions upon Cs+ and O-2(+) bombardment of organic materials

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 25(3), 480–484.

By: S. Harton, Z. Zhu, F. Stevie, D. Griffis & H. Ade

Source: NC State University Libraries
Added: August 6, 2018

2007 | journal article

Transferable Internal Reservoir Device for Electron and Ion Beam Induced Chemistry

Microscopy and Analysis, 86, 5–6.

By: R. A.D. Garetto, C. A.D. Batchelor & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2006 | journal article

Back side SIMS analysis of hafnium silicate

Applied Surface Science, 252(19), 7179–7181.

By: C. Gu, F. Stevie, J. Bennett, R. Garcia & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2006 | journal article

SIMS depth profiling of deuterium labeled polymers in polymer multilayers

Applied Surface Science, 252(19), 7224–7227.

By: S. Harton, F. Stevie, D. Griffis & H. Ade

Source: NC State University Libraries
Added: August 6, 2018

2006 | journal article

SIMS quantification of matrix and impurity species in AlxGa1-xN

Applied Surface Science, 252(19), 7228–7231.

By: C. Gu, F. Stevie, C. Hitzman, Y. Saripalli, M. Johnson & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2006 | journal article

Thermal stability of lanthanum scandate dielectrics on Si(100)

Applied Physics Letters, 89(24).

By: P. Sivasubramani, T. Lee, M. Kim, J. Kim, B. Gnade, R. Wallace, L. Edge, D. Schlom ...

Source: NC State University Libraries
Added: August 6, 2018

2004 | journal article

Circuit editing of copper and low-k dielectrics in nanotechnology devices

Journal of Microscopy, 214(2004 Jun), 246–251.

By: F. Mosselveld, V. Makarov, T. Lundquist, D. Griffis & P. Russell

Source: NC State University Libraries
Added: August 6, 2018

2004 | journal article

Improved charge neutralization method for depth profiling of bulk insulators using O-2(+) primary beam on a magnetic sector SIMS instrument

Applied Surface Science, 231-232(2004 June 15), 786–790.

By: A. Pivovarov, F. Stevie & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2004 | journal article

O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices

Applied Surface Science, 231-232(2004 June 15), 684–687.

By: M. Kachan, J. Hunter, D. Kouzminov, A. Pivovarov, J. Gu, F. Stevie, D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2004 | journal article

Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 22(1), 350–354.

By: C. Gu, A. Pivovarov, R. Garcia, F. Stevie, D. Griffis, J. Moran, L. Kulig, J. Richards

Source: NC State University Libraries
Added: August 6, 2018

2004 | journal article

Site-specific SIMS backside analysis

Applied Surface Science, 231-232(2004 June 15), 663–667.

By: C. Gu, R. Garcia, A. Pivovarov, F. Stevie & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2004 | journal article

Utilization of electron impact ionization of gaseous and sputtered species in the secondary ion acceleration region of a magnetic sector SIMS instrument

Applied Surface Science, 231-232(2004 June 15), 781–785.

By: A. Pivovarov, C. Gu, F. Stevie & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2003 | patent

Chemically enhanced focused ion beam micro-machining of copper

Russell, P. E., Griffis, D. P., & Gonzales Perez, J. C. (2003, November 11). Washington, DC: U.S. Patent and Trademark Office.

By: P. Russell, D. Griffis & J. Gonzales Perez

Source: NC State University Libraries
Added: August 6, 2018

2003 | patent

Chemically enhanced focused ion beam micro-machining of copper

Russell, P. E., Griffis, D. P., & Gonzales Perez, J. C. (2003, February 4). Washington, DC: U.S. Patent and Trademark Office.

By: P. Russell, D. Griffis & J. Gonzales Perez

Source: NC State University Libraries
Added: August 6, 2018

2003 | journal article

Etching characteristics of chromium thin films by an electron beam induced surface reaction

Semiconductor Science and Technology, 18(4), 199–205.

By: J. Wang, D. Griffis, R. Garcia & P. Russell

Source: NC State University Libraries
Added: August 6, 2018

2003 | journal article

Optimization of secondary ion mass spectrometry detection limit for N in SiC

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 21(5), 1649–1654.

By: A. Pivovarov, F. Stevie, D. Griffis & G. Guryanov

Source: NC State University Libraries
Added: August 6, 2018

2002 | journal article

Comparison of secondary ion mass spectroscopy analysis of ultrashallow phosphorus using Cs+, O-2(+), and CsC6- primary ion beams

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(2), 507–511.

By: R. Loesing, G. Guryanov, M. Phillips & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2002 | journal article

Improvements in focused ion beam micromachining of interconnect materials

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(6), 2700–2704.

By: J. Gonzalez, M. Da Silva, D. Griffis & P. Russell

Source: NC State University Libraries
Added: August 6, 2018

2001 | journal article

Chemically enhanced focused ion beam micromachining of copper

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 19(6), 2539–2542.

By: J. Gonzalez, D. Griffis, T. Miau & P. Russell

Source: NC State University Libraries
Added: August 6, 2018

2000 | journal article

Channeling effects during focused-ion-beam micromachining of copper

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 18(4), 1061–1065.

By: J. Phillips, D. Griffis & P. Russell

Source: NC State University Libraries
Added: August 6, 2018

2000 | patent

Method for water vapor enhanced charged-particle-beam machining

Russell, P. E., Griffis, D. P., Shedd, G. M., Stark, T. J., & Vitarelli, J. (2000, October 31). Washington, DC: U.S. Patent and Trademark Office.

By: P. Russell, D. Griffis, G. Shedd, T. Stark & J. Vitarelli

Source: NC State University Libraries
Added: August 6, 2018

2000 | chapter

Optimization of SIMS analysis conditions for ultra-shallow phosphorus and arsenic implants

In Microbeam Analysis 2000: proceedings of the Second Conference of the International Union of Microbeam Analysis Societies held in Kailua-Kona, Hawaii, 9-14 July 2000 (Vol. 165, pp. 327–328). Bristol: Institute of Physics Publishing.

By: J. Hunter, T. Bates, S. Patel, R. Loesing, G. Guraynov & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2000 | journal article

Secondary ion mass spectrometry depth profiling of ultrashallow phosphorous in silicon

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 18(1), 509–513.

By: R. Loesing, G. Guryanov, J. Hunter & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

1999 | patent

Method for water vapor enhanced charged-particle-beam machining

Russell, P. E., Griffis, D. P., Shedd, G. M., Stark, T. J., & Vitarelli, J. (1999, September 28). Washington, DC: U.S. Patent and Trademark Office.

By: P. Russell, D. Griffis, G. Shedd, T. Stark & J. Vitarelli

Source: NC State University Libraries
Added: August 6, 2018

1998 | journal article

Acceptor and donor doping of AlxGa1 xN thin film alloys grown on 6H SiC(0001) substrates via metalorganic vapor phase epitaxy

Journal of Electronic Materials, 27(4), 229–232.

By: M. Bremser, W. Perry, O. Nam, D. Griffis, R. Loesing, D. Ricks, R. Davis

Source: NC State University Libraries
Added: August 6, 2018

1998 | journal article

Chemically and geometrically enhanced focused ion beam micromachining

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 16(4), 2494–2498.

By: P. Russell, T. Stark, D. Griffis, J. Phillips & K. Jarausch

Source: NC State University Libraries
Added: August 6, 2018