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Works (9)
Updated: April 5th, 2024 07:06
2006 article
Fabrication of organic nano-particles by PRINT : Master generation using lithographic and RIE techniques
EMERGING LITHOGRAPHIC TECHNOLOGIES X, PTS 1 AND 2, Vol. 6151, pp. U1396–U1396.
UN Sustainable Development Goal Categories
3. Good Health and Well-being
(Web of Science; OpenAlex)
Source: Web Of Science
Added: August 6, 2018
2003 conference paper
Sel-selective formation of organic masks for Methane/Hydrogen reactive ion etching of InP
Proceedings of the Fourth International Conference on Indium Phosphide and Related Materials, 351.
Source: NC State University Libraries
Added: August 6, 2018
2002 conference paper
Ion damage propagation in dry-etched InP-based structures
Proceedings of the Eighth International Conference on Indium Phosphide and Related Materials, 107.
Source: NC State University Libraries
Added: August 6, 2018
1997 article
Comparing ion damage in GaAs and InP
Yu, D. G., Chen, C. H., Holmes, A. L., Hu, E. L., & DenBaars, S. P. (1997, February). MICROELECTRONIC ENGINEERING, Vol. 35, pp. 95–98.
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(OpenAlex)
Source: Web Of Science
Added: August 6, 2018
1997 article
Role of defect diffusion in the InP damage profile
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 15, pp. 2672–2675.
Source: Web Of Science
Added: August 6, 2018
1996 journal article
Investigation of improved regrowth material on InP surfaces etched with Methane/Hydrogen/Argon
Source: NC State University Libraries
Added: August 6, 2018
1996 journal article
Photoluminescence studies on radiation enhanced diffusion of dry-etch damage in GaAs and InP materials
Journal of Vacuum Science & Technology, B13, 3674.
Source: NC State University Libraries
Added: August 6, 2018
1995 article
Analysis of InP etched surfaces using metalorganic chemical vapor deposition regrown quantum well structures
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 13, pp. 2381–2385.
Source: Web Of Science
Added: August 6, 2018
1994 article
RADICAL BEAM ION-BEAM ETCHING OF INALAS/INP USING CL-2
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 12, pp. 3378–3381.
Source: Web Of Science
Added: August 6, 2018
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