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Works (9)
2006 article
Fabrication of organic nano-particles by PRINT : Master generation using lithographic and RIE techniques
EMERGING LITHOGRAPHIC TECHNOLOGIES X, PTS 1 AND 2, Vol. 6151, pp. U1396–U1396.
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2003 conference paper
Sel-selective formation of organic masks for Methane/Hydrogen reactive ion etching of InP
Proceedings of the Fourth International Conference on Indium Phosphide and Related Materials, 351.
2002 conference paper
Ion damage propagation in dry-etched InP-based structures
Proceedings of the Eighth International Conference on Indium Phosphide and Related Materials, 107.
1997 article
Comparing ion damage in GaAs and InP
Yu, D. G., Chen, C. H., Holmes, A. L., Hu, E. L., & DenBaars, S. P. (1997, February). MICROELECTRONIC ENGINEERING, Vol. 35, pp. 95–98.
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1997 article
Role of defect diffusion in the InP damage profile
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 15, pp. 2672–2675.
1996 journal article
Investigation of improved regrowth material on InP surfaces etched with Methane/Hydrogen/Argon
1996 journal article
Photoluminescence studies on radiation enhanced diffusion of dry-etch damage in GaAs and InP materials
Journal of Vacuum Science & Technology, B13, 3674.
1995 article
Analysis of InP etched surfaces using metalorganic chemical vapor deposition regrown quantum well structures
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 13, pp. 2381–2385.
1994 article
RADICAL BEAM ION-BEAM ETCHING OF INALAS/INP USING CL-2
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 12, pp. 3378–3381.