Gregory N Parsons

Comparison of BCl3, TiCl4, and SOCl2 chlorinating agents for atomic layer etching of TiO2 and ZrO2 using tungsten hexafluoride

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 41(4).

Cover Feature: Toxin‐Blocking Textiles: Rapid, Benign, Roll‐to‐Roll Production of Robust MOF‐Fabric Composites for Organophosphate Separation and Hydrolysis (ChemSusChem 2/2023)

ChemSusChem.

Discovery of a Hybrid System for Photocatalytic CO₂ Reduction via Attachment of a Molecular Cobalt-Quaterpyridine Complex to a Crystalline Carbon Nitride

McGuigan, S., Tereniak, S. J., Donley, C. L., Smith, A., Jeon, S., Zhao, F., … Maggard, P. A. (2023, October 12). ACS APPLIED ENERGY MATERIALS, Vol. 10.

Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition

Nye, R. A., Van Dongen, K., De Simone, D., Oka, H., Parsons, G. N., & Delabie, A. (2023, February 23). CHEMISTRY OF MATERIALS, Vol. 2.

Factors and Limitations of Green, Rapid Metal-Organic Framework-Fabric Synthesis and Effects on Dual Chemical Warfare Agent Protection

Morgan, S. E. E., Rivera, C. D. D., Willis, M. L. L., Peterson, G. W. W., Mahle, J. J. J., Mundy, L., & Parsons, G. N. N. (2023, July 31). INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH, Vol. 7.

In situ analysis of nucleation reactions during TiCl4/H2O atomic layer deposition on SiO2 and H-terminated Si surfaces treated with a silane small molecule inhibitor

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 41(3).

Multi-Electron Transfer at H-Terminated p-Si Electrolyte Interfaces: Large Photovoltages under Inversion Conditions

Keller, N. D., Vecchi, P., Grills, D. C., Polyansky, D. E., Bein, G. P., Dempsey, J. L., … Meyer, G. J. (2023, May 10). JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, Vol. 5.

Quantified Uniformity and Selectivity of TiO2 Films in 45-nm Half Pitch Patterns Using Area-Selective Deposition Supercycles

Nye, R. A. A., Van Dongen, K., Marneffe, J.-F., Parsons, G. N. N., & Delabie, A. (2023, June 17). ADVANCED MATERIALS INTERFACES, Vol. 6.

Reduced fatigue and leakage of ferroelectric TiN/Hf0.5Zr0.5O2/TiN capacitors by thin alumina interlayers at the top or bottom interface

NANOTECHNOLOGY, 34(12).

Self-Aligned Nanopatterning and Controlled Lateral Growth by Dual-Material Orthogonal Area-Selective Deposition of Poly(3,4-ethylenedioxythiophene) and Tungsten

CHEMISTRY OF MATERIALS, 35(11), 4375–4384.

Vapor phase synthesis of metal–organic frameworks on a nanofibrous aerogel creates enhanced functionality

Journal of Materials Chemistry A.

Wake-up free ferroelectric hafnia-zirconia capacitors fabricated via vacuum-maintaining atomic layer deposition

JOURNAL OF APPLIED PHYSICS, 133(22).

(Invited) Introduction and Overview of Area-Selective Thin Film Deposition

ECS Meeting Abstracts.

Comparative In Situ Study of the Initial Growth Trends of Atomic Layer-Deposited Al(2)O(3 )Films br

JOURNAL OF PHYSICAL CHEMISTRY C, 126(16), 7036–7046.

Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO(2 )area-selective deposition

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, 21(4).

Creating hierarchically porous banana paper-metal organic framework (MOF) composites with multifunctionality

APPLIED MATERIALS TODAY, 28.

Green MOF-Fabrics: Benign, Scalable Sorption-Vapor Synthesis of Catalytic Composites to Protect against Phosphorus-Based Toxins

ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 10(8), 2699–2707.

Growth behavior and substrate selective deposition of polypyrrole, polythiophene, and polyaniline by oxidative chemical vapor deposition and molecular layer deposition

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(6).

Improving polymethacrylate EUV resists with TiO2 area-selective deposition

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIX, Vol. 12055.

Many routes to ferroelectric HfO2: A review of current deposition methods

[Review of ]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(1).

Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition

APPLIED PHYSICS LETTERS, 121(8).

Modeling of deposit formation in mesoporous substrates via atomic layer deposition: Insights from pore-scale simulation

Gu, H., Lee, D. T., Corkery, P., Miao, Y., Kim, J.-S., Yuan, Y., … Tsapatsis, M. (2022, September 7). AICHE JOURNAL, Vol. 9.

Role of Oxygen Source on Buried Interfaces in Atomic-Layer- Deposited Ferroelectric Hafnia-Zirconia Thin Films

Hsain, H. A., Lee, Y., Lancaster, S., Materano, M., Alcala, R., Xu, B., … Jones, J. L. (2022, September 7). ACS APPLIED MATERIALS & INTERFACES, Vol. 9.

Role of Oxygen Source on Buried Interfaces in Atomic-Layer- Deposited Ferroelectric Hafnia-Zirconia Thin Films

ACS APPLIED MATERIALS & INTERFACES, 14(37), 42232–42244.

The influence of crystallographic texture on structural and electrical properties in ferroelectric Hf0.5Zr0.5O2

JOURNAL OF APPLIED PHYSICS, 132(24).

Toxin-Blocking Textiles: Rapid, Benign, Roll-to-Roll Production of Robust MOF-Fabric Composites for Organophosphate Separation and Hydrolysis

Morgan, S. E. E., Willis, M. L. L., Dianat, G., Peterson, G. W. W., Mahle, J. J. J., & Parsons, G. N. N. (2022, November 18). CHEMSUSCHEM, Vol. 11.

Doubly Protective MOF-Photo-Fabrics: Facile Template-Free Synthesis of PCN-222-Textiles Enables Rapid Hydrolysis, Photo-Hydrolysis and Selective Oxidation of Multiple Chemical Warfare Agents and Simulants

CHEMISTRY-A EUROPEAN JOURNAL, 27(4), 1465–1472.

Fabrication of Non-Uniform Nanolattices with Spatially Varying Geometry and Material Composition

Chen, I.-T., Dai, Z., Chen, Y.-A., Parsons, G. N., & Chang, C.-H. (2021, July 26). ADVANCED MATERIALS INTERFACES, Vol. 7.

Fibre-based composites from the integration of metal-organic frameworks and polymers

[Review of ]. NATURE REVIEWS MATERIALS, 6(7), 605–621.

Freestanding Metal Organic Framework-Based Multifunctional Membranes Fabricated via Pseudomorphic Replication toward Liquid- and Gas-Hazards Abatement

Dai, Z., Pradeep, S., Zhu, J., Xie, W., Barton, H. F., Si, Y., … Parsons, G. N. (2021, October 24). ADVANCED MATERIALS INTERFACES, Vol. 10.

Highly Breathable Chemically-Protective MOF-Fiber Catalysts

Lee, D. T., Dai, Z., Peterson, G. W., Hall, M. G., Pomerantz, N. L., Hoffman, N., & Parsons, G. N. (2021, October 27). ADVANCED FUNCTIONAL MATERIALS, Vol. 10.

In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors

Nye, R. A., Wang, S., Uhlenbrock, S., Smythe, J. A., III, & Parsons, G. N. (2021, December 27). DALTON TRANSACTIONS, Vol. 51.

Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching

ACS NANO, 15(7), 12276–12285.

Nanopatterned Area-Selective Vapor Deposition of PEDOT on SiO2 vs Si-H: Improved Selectivity Using Chemical Vapor Deposition vs Molecular Layer Deposition

CHEMISTRY OF MATERIALS, 33(23), 9221–9230.

Oxidative molecular layer deposition of PEDOT using volatile antimony(V) chloride oxidant

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 39(3).

Stretchable and Multi-Metal-Organic Framework Fabrics Via High-Yield Rapid Sorption-Vapor Synthesis and Their Application in Chemical Warfare Agent Hydrolysis

ACS APPLIED MATERIALS & INTERFACES, 13(26), 31279–31284.

Toward understanding the phase-selective growth mechanism of films and geometrically-shaped flakes of 2D MoTe2

RSC ADVANCES, 11(61), 38839–38848.

Unexpectedly large remanent polarization of Hf0.5Zr0.5O2 metal-ferroelectric-metal capacitor fabricated without breaking vacuum

APPLIED PHYSICS LETTERS, 118(1).

An Advanced Dual-Function MnO2-Fabric Air Filter Combining Catalytic Oxidation of Formaldehyde and High-Efficiency Fine Particulate Matter Removal

ADVANCED FUNCTIONAL MATERIALS, 30(42).

Area-Selective Deposition: Fundamentals, Applications, and Future Outlook

[Review of ]. CHEMISTRY OF MATERIALS, 32(12), 4920–4953.

Compositional dependence of crystallization temperatures and phase evolution in hafnia-zirconia (HfxZr1-x)O-2 thin films

APPLIED PHYSICS LETTERS, 116(19).

Designing Intrinsically Microporous Polymer (PIM-1) Microfibers with Tunable Morphology and Porosity via Controlling Solvent/Nonsolvent/Polymer Interactions

ACS Applied Polymer Materials, 2(6), 2434–2443.

Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching

JOURNAL OF APPLIED PHYSICS, 128(10).

Fabrication of a freestanding metal organic framework predominant hollow fiber mat and its potential applications in gas separation and catalysis

Journal of Materials Chemistry A.

History of atomic layer deposition and its relationship with the American Vacuum Society (vol 31, 050818, 2013)

Parsons, G. N., Elam, J. W., George, S. M., Haukka, S., Jeon, H., Kessels, W. M. M., … Rossnagel, S. M. (2020, May). JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 38.

Polymer of intrinsic microporosity (PIM) based fibrous mat: combining particle filtration and rapid catalytic hydrolysis of chemical warfare agent simulants into a highly sorptive, breathable, and mechanically robust fiber matrix

Materials Today Advances, 8, 100085.

Protective Fabrics: Metal-Organic Framework Textiles for Rapid Photocatalytic Sulfur Mustard Simulant Detoxification

MATTER, 2(2), 404–415.

Shock Initiation of Reactive Nanolaminates

SHOCK COMPRESSION OF CONDENSED MATTER - 2019, Vol. 2272.

The Effect of Surface Hydroxylation on MOF Formation on ALD Metal Oxides: MOF-525 on TiO2/Polypropylene for Catalytic Hydrolysis of Chemical Warfare Agent Simulants

ACS APPLIED MATERIALS & INTERFACES, 12(13), 14690–14701.

Thermal atomic layer etching of metallic tungsten via oxidation and etch reaction mechanism using O-2 or O-3 for oxidation and WCl6 as the chlorinating etchant

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 38(2).

Understanding Molecular Layer Deposition Growth Mechanisms in Polyurea via Picosecond Acoustics Analysis

CHEMISTRY OF MATERIALS, 32(4), 1553–1563.

Air, Water Vapor, and Aerosol Transport through Textiles with Surface Functional Coatings of Metal Oxides and Metal-Organic Frameworks

ACS APPLIED MATERIALS & INTERFACES, 11(27), 24683–24690.

Functional model for analysis of ALD nucleation and quantification of area-selective deposition

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 37(2).

Functionalized Textiles: Water-Stable Chemical-Protective Textiles via Euhedral Surface-Oriented 2D Cu-TCPP Metal-Organic Frameworks (Small 10/2019)

Small, 15(10), 1970054.

Insight on the Sequential Vapor Infiltration Mechanisms of Trimethylaluminum with Poly(methyl methacrylate), Poly(vinylpyrrolidone), and Poly(acrylic acid)

JOURNAL OF PHYSICAL CHEMISTRY C, 123(26), 16146–16152.

Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO2

CHEMISTRY OF MATERIALS, 31(13), 4793–4804.

Investigation of the Corrosion Behavior of Atomic Layer Deposited Al2O3/TiO2 Nanolaminate Thin Films on Copper in 0.1 M NaCl

MATERIALS, 12(4).

Water-Stable Chemical-Protective Textiles via Euhedral Surface-Oriented 2D Cu-TCPP Metal-Organic Frameworks

SMALL, 15(10).

Ab initio analysis of nucleation reactions during tungsten atomic layer deposition on Si(100) and W(110) substrates

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36(6).

Area-Selective Atomic Layer Deposition of TiN, TiO2, and HfO2 on Silicon Nitride with inhibition on Amorphous Carbon

CHEMISTRY OF MATERIALS, 30(10), 3223–3232.

Atomic Layer Deposition: Conformal Physical Vapor Deposition Assisted by Atomic Layer Deposition and Its Application for Stretchable Conductors (Adv. Mater. Interfaces 22/2018)

Advanced Materials Interfaces, 5(22), 1870109.

Conformal Physical Vapor Deposition Assisted by Atomic Layer Deposition and Its Application for Stretchable Conductors

ADVANCED MATERIALS INTERFACES, 5(22).

Control of Micro- and Mesopores in Carbon Nanofibers and Hollow Carbon Nanofibers Derived from Cellulose Diacetate via Vapor Phase Infiltration of Diethyl Zinc

ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 6(11), 13844–13853.

Corrosion Mitigation Coatings for RF Sources and Components

IEEE Transactions on Electron Devices, 65(6), 2385–2392.

Modeling and experimental demonstration of high-throughput flow-through spatial atomic layer deposition of Al2O3 coatings on textiles at atmospheric pressure

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36(3).

Solvothermal Synthesis of MIL-96 and UiO-66-NH2 on Atomic Layer Deposited Metal Oxide Coatings on Fiber Mats

JOVE-JOURNAL OF VISUALIZED EXPERIMENTS, 6(136).

Synthesis of organic aerogels with tailorable morphology and strength by controlled solvent swelling following Hansen solubility

SCIENTIFIC REPORTS, 8.

Thermal atomic layer deposition of Sn metal using SnCl4 and a vapor phase silyl dihydropyrazine reducing agent

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36(6).

Thermally Driven Self-Limiting Atomic Layer Etching of Metallic Tungsten Using WF6 and O-2

ACS APPLIED MATERIALS & INTERFACES, 10(10), 9147–9154.

Toxic Organophosphate Hydrolysis Using Nanofiber-Templated UiO-66-NH2 Metal–Organic Framework Polycrystalline Cylinders

ACS Applied Materials & Interfaces, 10(30), 25794–25803.

Tungsten-Carbon Nanotube Composite Photonic Crystals as Thermally Stable Spectral-Selective Absorbers and Emitters for Thermophotovoltaics

ADVANCED ENERGY MATERIALS, 8(27).

Catalytic "MOF-Cloth" Formed via Directed Supramolecular Assembly of UiO-66-NH2 Crystals on Atomic Layer Deposition-Coated Textiles for Rapid Degradation of Chemical Warfare Agent Simulants

CHEMISTRY OF MATERIALS, 29(11), 4894–4903.

Corrosion Protection of Copper Using Al2O3, TiO2, ZnO, HfO2, and ZrO2 Atomic Layer Deposition

ACS APPLIED MATERIALS & INTERFACES, 9(4), 4192–4201.

Corrosion mitigation coatings for RF sources and components

2017 eighteenth international vacuum electronics conference (ivec).

Featherlight, Mechanically Robust Cellulose Ester Aerogels for Environmental Remediation

ACS Omega, 2(8), 4297–4305.

In Situ Time-Resolved Attenuated Total Reflectance Infrared Spectroscopy for Probing Metal–Organic Framework Thin Film Growth

Chemistry of Materials, 29(20), 8804–8810.

Intrinsic limitations of atomic layer deposition for pseudocapacitive metal oxides in porous electrochemical capacitor electrodes

JOURNAL OF MATERIALS CHEMISTRY A, 5(25), 13086–13097.

Large-Area Nanolattice Film with Enhanced Modulus, Hardness, and Energy Dissipation

Scientific Reports, 7(1).

Mapping differential cellular protein response of mouse alveolar epithelial cells to multi-walled carbon nanotubes as a function of atomic layer deposition coating

NANOTOXICOLOGY, 11(3), 313–326.

Reversible Low-Temperature Metal Node Distortion during Atomic Layer Deposition of Al2O3 and TiO2 on UiO-66-NH2 Metal-Organic Framework Crystal Surfaces

ACS APPLIED MATERIALS & INTERFACES, 9(26), 22042–22054.

STAT1-dependent and -independent pulmonary allergic and fibrogenic responses in mice after exposure to tangled versus rod-like multi-walled carbon nanotubes

PARTICLE AND FIBRE TOXICOLOGY, 14.

Thermal Selective Vapor Etching of TiO2: Chemical Vapor Etching via WF6 and Self-Limiting Atomic Layer Etching Using WF6 and BCl3

CHEMISTRY OF MATERIALS, 29(16), 6653–6665.

UiO-66-NH2 Metal Organic Framework (MOF) Nucleation on TiO2, ZnO, and Al2O3 Atomic Layer Deposition-Treated Polymer Fibers: Role of Metal Oxide on MOF Growth and Catalytic Hydrolysis of Chemical Warfare Agent Simulants

ACS APPLIED MATERIALS & INTERFACES, 9(51), 44847–44855.

Understanding inherent substrate selectivity during atomic layer deposition: Effect of surface preparation, hydroxyl density, and metal oxide composition on nucleation mechanisms during tungsten ALD

JOURNAL OF CHEMICAL PHYSICS, 146(5).

Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates

Advanced Materials Interfaces, 4(4).

Atomic Layer Deposition for Sensitized Solar Cells: Recent Progress and Prospects

Advanced Materials Interfaces, 3(21), 1600354.

Atomic layer deposition coating of carbon nanotubes with zinc oxide causes acute phase immune responses in human monocytes in vitro and in mice after pulmonary exposure

PARTICLE AND FIBRE TOXICOLOGY, 13.

Atomic layer deposition on polymer fibers and fabrics for multifunctional and electronic textiles

[Review of ]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(1).

Atomically Thin MoS2 Narrowband and Broadband Light Superabsorbers

ACS NANO, 10(8), 7493–7499.

Copper Benzenetricarboxylate Metal-Organic Framework Nucleation Mechanisms on Metal Oxide Powders and Thin Films formed by Atomic Layer Deposition

ACS APPLIED MATERIALS & INTERFACES, 8(14), 9514–9522.

Corrosion Mitigation Coatings for RF Sources and Components

In 2016 Ieee International Vacuum Electronics Conference (Ivec). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000386185700095&KeyUID=WOS:000386185700095

Corrosion mitigation coatings for RF sources and components

2016 ieee international vacuum electronics conference (ivec).

Diffusion of CO2 in Large Crystals of Cu-BTC MOF

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 138(36), 11449–11452.

Fabrication and design of metal nano-accordion structures using atomic layer deposition and interference lithography

NANOSCALE, 8(9), 4984–4990.

Inherent substrate-dependent growth initiation and selective-area atomic layer deposition of TiO2 using "water-free" metal-halide/metal alkoxide reactants

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(1).

Kevlar-Based Supercapacitor Fibers with Conformal Pseudocapacitive Metal Oxide and Metal Formed by ALD

Advanced Materials Interfaces, 3(21), 1600355.

Low temperature platinum atomic layer deposition on nylon-6 for highly conductive and catalytic fiber mats

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(1).

Rapid visible color change and physical swelling during water exposure in triethanolamine-metalcone films formed by molecular layer deposition

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(1).

Thin Films: Atomic Layer Deposition for Sensitized Solar Cells: Recent Progress and Prospects (Adv. Mater. Interfaces 21/2016)

Advanced Materials Interfaces, 3(21).

Ultra-Fast Degradation of Chemical Warfare Agents Using MOF-Nanofiber Kebabs

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 55(42), 13224–13228.

Using Hydrogen To Expand the Inherent Substrate Selectivity Window During Tungsten Atomic Layer Deposition

CHEMISTRY OF MATERIALS, 28(1), 117–126.

Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates

ADVANCED MATERIALS INTERFACES, 3(2).