Works (206)

2019 | journal article

Air, Water Vapor, and Aerosol Transport through Textiles with Surface Functional Coatings of Metal Oxides and Metal-Organic Frameworks

ACS APPLIED MATERIALS & INTERFACES, 11(27), 24683–24690.

By: N. Pomerantz, E. Anderson, N. Dugan, N. Hoffman, H. Barton, D. Lee, C. Oldham, G. Peterson, G. Parsons

Source: Web Of Science
Added: August 5, 2019

2019 | journal article

Functional model for analysis of ALD nucleation and quantification of area-selective deposition

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 37(2).

By: G. Parsons

Source: Web Of Science
Added: March 25, 2019

2019 | journal article

Insight on the Sequential Vapor Infiltration Mechanisms of Trimethylaluminum with Poly(methyl methacrylate), Poly(vinylpyrrolidone), and Poly(acrylic acid)

JOURNAL OF PHYSICAL CHEMISTRY C, 123(26), 16146–16152.

By: G. Hill, D. Lee, P. Williams, C. Needham, E. Dandley, C. Oldham, G. Parsons

Source: Web Of Science
Added: July 29, 2019

2019 | journal article

Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO2

CHEMISTRY OF MATERIALS, 31(13), 4793–4804.

By: S. Song, H. Saare & G. Parsons

Source: Web Of Science
Added: July 29, 2019

2019 | journal article

Investigation of the Corrosion Behavior of Atomic Layer Deposited Al2O3/TiO2 Nanolaminate Thin Films on Copper in 0.1 M NaCl

MATERIALS, 12(4).

By: M. Fusco, C. Oldham & G. Parsons

Source: Web Of Science
Added: March 25, 2019

2019 | journal article

Water-Stable Chemical-Protective Textiles via Euhedral Surface-Oriented 2D Cu-TCPP Metal-Organic Frameworks

SMALL, 15(10).

By: D. Lee, J. Jamir, G. Peterson & G. Parsons

Source: Web Of Science
Added: March 25, 2019

2018 | journal article

Ab initio analysis of nucleation reactions during tungsten atomic layer deposition on Si(100) and W(110) substrates

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36(6).

By: M. King, P. Theofanis, P. Lemaire, E. Santiso & G. Parsons

Source: NC State University Libraries
Added: December 10, 2018

2018 | journal article

Area-selective atomic layer deposition of TiN, TiO2, and HfO2 on silicon nitride with inhibition on amorphous carbon

Chemistry of Materials, 30(10), 3223–3232.

By: E. Stevens, Y. Tomczak, B. Chan, E. Sanchez, G. Parsons & A. Delabie

Source: NC State University Libraries
Added: August 6, 2018

2018 | journal article

Conformal Physical Vapor Deposition Assisted by Atomic Layer Deposition and Its Application for Stretchable Conductors

ADVANCED MATERIALS INTERFACES, 5(22).

By: J. Min, Y. Chen, I. Chen, T. Sun, D. Lee, C. Li, Y. Zhu, P. Brendan T., C. Gregory N.

Source: NC State University Libraries
Added: December 10, 2018

2018 | journal article

Control of Micro- and Mesopores in Carbon Nanofibers and Hollow Carbon Nanofibers Derived from Cellulose Diacetate via Vapor Phase Infiltration of Diethyl Zinc

ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 6(11), 13844–13853.

By: W. Xie, S. Khan, O. Rojas & G. Parsons

Source: NC State University Libraries
Added: December 3, 2018

2018 | journal article

Modeling and experimental demonstration of high-throughput flow-through spatial atomic layer deposition of Al2O3 coatings on textiles at atmospheric pressure

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 36(3).

By: M. Mousa, J. Ovental, A. Brozena, C. Oldham & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2018 | journal article

Solvothermal Synthesis of MIL-96 and UiO-66-NH2 on Atomic Layer Deposited Metal Oxide Coatings on Fiber Mats

JOVE-JOURNAL OF VISUALIZED EXPERIMENTS, (136).

By: H. Barton, A. Davis, D. Lee & G. Parsons

Source: NC State University Libraries
Added: October 16, 2018

2018 | journal article

Synthesis of organic aerogels with tailorable morphology and strength by controlled solvent swelling following Hansen solubility

Scientific Reports, 8.

By: A. Tripathi, G. Parsons, S. Khan & O. Rojas

Source: NC State University Libraries
Added: August 6, 2018

2018 | journal article

Thermal atomic layer deposition of Sn metal using SnCl4 and a vapor phase silyl dihydropyrazine reducing agent

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36(6).

By: E. Stevens, M. Mousa & G. Parsons

Source: NC State University Libraries
Added: December 10, 2018

2018 | journal article

Thermally driven self-limiting atomic layer etching of metallic Tungsten using WF6 and O-2

ACS Applied Materials & Interfaces, 10(10), 9147–9154.

By: W. Xie, P. Lemaire & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2018 | journal article

Tungsten-Carbon Nanotube Composite Photonic Crystals as Thermally Stable Spectral-Selective Absorbers and Emitters for Thermophotovoltaics

ADVANCED ENERGY MATERIALS, 8(27).

By: K. Cui, P. Lemaire, H. Zhao, T. Savas, G. Parsons & A. Hart

Source: NC State University Libraries
Added: October 16, 2018

2017 | journal article

Catalytic "MOF-Cloth" formed via directed supramolecular assembly of UiO-66-NH2 crystals on atomic layer deposition-coated textiles for rapid degradation of chemical warfare agent simulants

Chemistry of Materials, 29(11), 4894–4903.

By: D. Lee, J. Zhao, G. Peterson & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2017 | conference paper

Corrosion mitigation coatings for RF sources and components

In 2017 eighteenth international vacuum electronics conference (ivec).

By: R. Ives, G. Collins, D. Marsden, T. Bui, C. Oldham, J. Daubert, A. Gremaud, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2017 | journal article

Corrosion protection of copper using Al2O3, TiO2, ZnO, HfO2, and ZrO2 atomic layer deposition

ACS Applied Materials & Interfaces, 9(4), 4192–4201.

Source: NC State University Libraries
Added: August 6, 2018

2017 | journal article

Intrinsic limitations of atomic layer deposition for pseudocapacitive metal oxides in porous electrochemical capacitor electrodes

Journal of Materials Chemistry A, 5(25), 13086–13097.

By: J. Daubert, R. Wang, J. Ovental, H. Barton, R. Rajagopalan, V. Augustyn, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2017 | journal article

Mapping differential cellular protein response of mouse alveolar epithelial cells to multi-walled carbon nanotubes as a function of atomic layer deposition coating

Nanotoxicology, 11(3), 313–326.

By: G. Hilton, A. Taylor, S. Hussain, E. Dandley, E. Griffith, S. Garantziotis, G. Parsons, J. Bonner, M. Bereman

Source: NC State University Libraries
Added: August 6, 2018

2017 | journal article

Reversible low-temperature metal node distortion during atomic layer deposition of Al2O3 and TiO2 on UiO-66-NH2 metal-organic framework crystal surfaces

ACS Applied Materials & Interfaces, 9(26), 22042–22054.

By: P. Lemaire, D. Lee, J. Zhao & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2017 | journal article

STAT1-dependent and -independent pulmonary allergic and fibrogenic responses in mice after exposure to tangled versus rod-like multi-walled carbon nanotubes

Particle and Fibre Toxicology, 14.

By: K. Duke, A. Taylor-Just, M. Ihrie, K. Shipkowski, E. Thompson, E. Dandley, G. Parsons, J. Bonner

Source: NC State University Libraries
Added: August 6, 2018

2017 | journal article

Thermal selective vapor etching of TiO2: Chemical vapor etching via WF6 and self-limiting atomic layer etching using WF6 and BCl3

Chemistry of Materials, 29(16), 6653–6665.

By: P. Lemaire & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2017 | journal article

UiO-66-NH2 metal organic framework (MOF) nucleation on TiO2, ZnO, and Al2O3 atomic Layer deposition-treated polymer fibers: Role of metal oxide on MOF growth and catalytic hydrolysis of chemical warfare agent simulants

ACS Applied Materials & Interfaces, 9(51), 44847–44855.

By: D. Lee, J. Zhao, C. Oldham, G. Peterson & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2017 | journal article

Understanding inherent substrate selectivity during atomic layer deposition: Effect of surface preparation, hydroxyl density, and metal oxide composition on nucleation mechanisms during tungsten ALD

Journal of Chemical Physics, 146(5).

By: P. Lemaire, M. King & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2016 | journal article

Atomic layer deposition coating of carbon nanotubes with zinc oxide causes acute phase immune responses in human monocytes in vitro and in mice after pulmonary exposure

Particle and Fibre Toxicology, 13.

Source: NC State University Libraries
Added: August 6, 2018

2016 | review

Atomic layer deposition on polymer fibers and fabrics for multifunctional and electronic textiles

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films.

By: A. Brozena, C. Oldham & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2016 | journal article

Atomically thin MoS2 narrowband and broadband light superabsorbers

ACS Nano, 10(8), 7493–7499.

By: L. Huang, G. Li, A. Gurarslan, Y. Yu, R. Kirste, W. Guo, J. Zhao, R. Collazo ...

Source: NC State University Libraries
Added: August 6, 2018

2016 | journal article

Copper benzenetricarboxylate metal-organic framework nucleation mechanisms on metal oxide powders and thin films formed by atomic layer deposition

ACS Applied Materials & Interfaces, 8(14), 9514–9522.

By: P. Lemaire, J. Zhao, P. Williams, H. Walls, S. Shepherd, M. Losego, G. Peterson, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2016 | conference paper

Corrosion mitigation coatings for RF sources and components

In 2016 ieee international vacuum electronics conference (ivec).

By: R. Ives, G. Collins, C. Oldham, E. Stevens, P. Williams, M. Mantini, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2016 | journal article

Diffusion of CO2 in large crystals of Cu-BTC MOF

Journal of the American Chemical Society, 138(36), 11449–11452.

By: T. Tovar, J. Zhao, W. Nunn, H. Barton, G. Peterson, G. Parsons, M. Levan

Source: NC State University Libraries
Added: August 6, 2018

2016 | journal article

Fabrication and design of metal nano-accordion structures using atomic layer deposition and interference lithography

Nanoscale, 8(9), 4984–4990.

By: J. Min, A. Bagal, J. Mundy, C. Oldham, B. Wu, G. Parsons, C. Chang

Source: NC State University Libraries
Added: August 6, 2018

2016 | journal article

Inherent substrate-dependent growth initiation and selective-area atomic layer deposition of TiO2 using "water-free" metal-halide/metal alkoxide reactants

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 34(1).

By: S. Atanasov, B. Kalanyan & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2016 | journal article

Low temperature platinum atomic layer deposition on nylon-6 for highly conductive and catalytic fiber mats

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 34(1).

By: J. Mundy, A. Shafiefarhood, F. Li, S. Khan & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2016 | journal article

Rapid visible color change and physical swelling during water exposure in triethanolamine-metalcone films formed by molecular layer deposition

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 34(1).

By: P. Lemaire, C. Oldham & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2016 | journal article

Ultra-fast degradation of chemical warfare agents using MOF-nanofiber kebabs

Angewandte Chemie [International Edition in English], 55(42), 13224–13228.

By: J. Zhao, D. Lee, R. Yaga, M. Hall, H. Barton, I. Woodward, C. Oldham, H. Walls, G. Peterson, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2016 | journal article

Using hydrogen to expand the inherent substrate selectivity window during tungsten atomic layer deposition

Chemistry of Materials, 28(1), 117–126.

Source: NC State University Libraries
Added: August 6, 2018

2016 | journal article

Wafer-scale selective-area deposition of nanoscale metal oxide features using vapor saturation into patterned poly(methyl methacrylate) templates

Advanced Materials Interfaces, 3(2).

By: E. Dandley, P. Lemaire, Z. Zhu, A. Yoon, L. Sheet & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2016 | journal article

Wicking enhancement in three-dimensional hierarchical nanostructures

Langmuir, 32(32), 8029–8033.

By: Z. Wang, J. Zhao, A. Bagal, E. Dandley, C. Oldham, T. Fang, G. Parsons, C. Chang

Source: NC State University Libraries
Added: August 6, 2018

2015 | journal article

Charge recombination dynamics in sensitized SnO2/TiO2 core/shell photoanodes

Journal of Physical Chemistry. C, 119(51), 28353–28360.

By: R. Knauf, B. Kalanyan, G. Parsons & J. Dempsey

Source: NC State University Libraries
Added: August 6, 2018

2015 | journal article

Conductivity and touch-sensor application for atomic layer deposition ZnO and Al:ZnO on nylon nonwoven fiber mats

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 33(1).

By: W. Sweet, C. Oldham & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2015 | journal article

Conformal and highly adsorptive metal-organic framework thin films via layer-by-layer growth on ALD-coated fiber mats

Journal of Materials Chemistry A, 3(4), 1458–1464.

By: J. Zhao, B. Gong, W. Nunn, P. Lemaire, E. Stevens, F. Sidi, P. Williams, C. Oldham ...

Source: NC State University Libraries
Added: August 6, 2018

2015 | journal article

Effect of Al2O3 ALD coating and vapor infusion on the bulk mechanical response of elastic and viscoelastic polymers

Surface & Coatings Technology, 261, 411–417.

By: C. McClure, C. Oldham & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2015 | journal article

Effect of meso- and micro-porosity in carbon electrodes on atomic layer deposition of pseudocapacitive V2O5 for high performance supercapacitors

Chemistry of Materials, 27(19), 6524–6534.

By: J. Daubert, N. Lewis, H. Gotsch, J. Mundy, D. Monroe, E. Dickey, M. Losego, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2015 | journal article

Facile conversion of hydroxy double salts to metal-organic frameworks using metal oxide particles and atomic layer deposition thin-film templates

Journal of the American Chemical Society, 137(43), 13756–13759.

By: J. Zhao, W. Nunn, P. Lemaire, Y. Lin, M. Dickey, C. Oldham, H. Walls, G. Peterson, M. Losego, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2015 | journal article

In situ conductance analysis of zinc oxide nucleation and coalescence during atomic layer deposition on metal oxides and polymers

Langmuir, 31(26), 7274–7282.

By: W. Sweet & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2015 | journal article

Multifunctional nano-accordion structures for stretchable transparent conductors

Materials Horizons, 2(5), 486–494.

Source: NC State University Libraries
Added: August 6, 2018

2015 | journal article

Ordered 3d thin-shell nanolattice materials with near-unity refractive indices

Advanced Functional Materials, 25(42), 6644–6649.

By: X. Zhang, A. Bagal, E. Dandley, J. Zhao, C. Oldham, B. Wu, G. Parsons, C. Chang

Source: NC State University Libraries
Added: August 6, 2018

2015 | journal article

Platinum-free cathode for dye-sensitized solar cells using poly(3,4-ethylenedioxythiophene) (PEDOT) formed via oxidative molecular layer deposition

ACS Applied Materials & Interfaces, 7(7), 3866–3870.

By: D. Kim, S. Atanasov, P. Lemaire, K. Lee & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2015 | journal article

Precise nanoscale surface modification and coating of macroscale objects: Open-environment in loco atomic layer deposition on an automobile

ACS Applied Materials & Interfaces, 7(35), 19523–19529.

By: M. Mousa, C. Oldham & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2015 | journal article

Toxicoproteomic analysis of pulmonary carbon nanotube exposure using LC-MS/MS

Toxicology (Amsterdam, Netherlands), 329, 80–87.

Source: NC State University Libraries
Added: August 6, 2018

2014 | journal article

A hybrid solar-redox scheme for liquid fuel and hydrogen coproduction

Energy & Environmental Science, 7(6), 2033–2042.

By: F. He, J. Trainham, G. Parsons, J. Newman & F. Li

Source: NC State University Libraries
Added: August 6, 2018

2014 | journal article

Atmospheric pressure atomic layer deposition of Al2O3 using trimethyl aluminum and ozone

Langmuir, 30(13), 3741–3748.

By: M. Mousa, C. Oldham & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2014 | journal article

Atomic layer deposition coating of carbon nanotubes with aluminum oxide alters pro-fibrogenic cytokine expression by human mononuclear phagocytes in vitro and reduces lung fibrosis in mice in vivo

PLoS One, 9(9).

By: A. Taylor, C. McClure, K. Shipkowski, E. Thompson, S. Hussain, S. Garantziotis, G. Parsons, J. Bonner

Source: NC State University Libraries
Added: August 6, 2018

2014 | journal article

Atomic layer deposition of TiO2 on mesoporous nanolTO: Conductive core-shell photoanodes for dye-sensitized solar cells

Nano Letters, 14(6), 3255–3261.

By: L. Alibabaei, B. Farnum, B. Kalanyan, M. Brennaman, M. Losego, G. Parsons, T. Meyer

Source: NC State University Libraries
Added: August 6, 2018

2014 | journal article

Atomic layer deposition of metal oxide patterns on nonwoven fiber mats using localized physical compression

ACS Applied Materials & Interfaces, 6(12), 9280–9289.

By: W. Sweet, C. Oldham & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2014 | journal article

Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina (Al2O3)

Applied Physics Letters, 104(25).

By: C. Gorham, J. Gaskins, G. Parsons, M. Losego & P. Hopkins

Source: NC State University Libraries
Added: August 6, 2018

2014 | journal article

Free-floating synthetic nanosheets by atomic layer deposition

ACS Applied Materials & Interfaces, 6(14), 10981–10985.

By: K. Lee, D. Kim & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2014 | journal article

High performance photocatalytic metal oxide synthetic bi-component nanosheets formed by atomic layer deposition

Materials Horizons, 1(4), 419–423.

By: K. Lee, M. Losego, D. Kim & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2014 | journal article

Highly adsorptive, MOF-functionalized nonwoven fiber mats for hazardous gas capture enabled by atomic layer deposition

Advanced Materials Interfaces, 1(4).

By: J. Zhao, M. Losego, P. Lemaire, P. Williams, B. Gong, S. Atanasov, T. Blevins, C. Oldham ...

Source: NC State University Libraries
Added: August 6, 2018

2014 | journal article

Highly conductive and conformal poly(3,4-ethylenedioxythiophene) (PEDOT) thin films via oxidative molecular layer deposition

Chemistry of Materials, 26(11), 3471–3478.

Source: NC State University Libraries
Added: August 6, 2018

2014 | journal article

Improved cut-resistance of Kevlar (R) using controlled interface reactions during atomic layer deposition of ultrathin (< 50 angstrom) inorganic coatings

Improved cut-resistance of Kevlar (R) using controlled interface reactions during atomic layer deposition of ultrathin (< 50 angstrom) inorganic coatings. Journal of Materials Chemistry A, 2(41), 17371–17379.

By: S. Atanasov, C. Oldham, K. Slusarski, J. Taggart-Scarff, S. Sherman, K. Senecal, S. Filocamo, Q. McAllister, E. Wetzel, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2014 | journal article

Stabilizing chromophore binding on TiO2 for long-term stability of dye-sensitized solar cells using multicomponent atomic layer deposition

Physical Chemistry Chemical Physics, 16(18), 8615–8622.

By: D. Kim, M. Losego, K. Hanson, L. Alibabaei, K. Lee, T. Meyer, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2014 | journal article

Temperature-dependent reaction between trimethylaluminum and poly(methyl methacrylate) during sequential vapor infiltration: experimental and ab initio analysis

Journal of Materials Chemistry C, 2(44), 9416–9424.

Source: NC State University Libraries
Added: August 6, 2018

2014 | journal article

Visible light driven Benzyl alcohol dehydrogenation in a dye-sensitized photoelectrosynthesis cell

Journal of the American Chemical Society, 136(27), 9773–9779.

By: W. Song, A. Vannucci, B. Farnum, A. Lapides, M. Brennaman, B. Kalanyan, L. Alibabaei, J. Concepcion ...

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

Atomic layer deposition of high performance ultrathin TiO2 blocking layers for dye-sensitized solar cells

Chemsuschem, 6(6), 1014–1020.

By: D. Kim, M. Woodroof, K. Lee & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

Bi-layer Al2O3/ZnO atomic layer deposition for controllable conductive coatings on polypropylene nonwoven fiber mats

Journal of Applied Physics, 113(19).

By: W. Sweet, J. Jur & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

Crossing the divide between homogeneous and heterogeneous catalysis in water oxidation

Proceedings of the National Academy of Sciences of the United States of America, 110(52), 20918–20922.

By: A. Vannucci, L. Alibabaei, M. Losego, J. Concepcion, B. Kalanyan, G. Parsons, T. Meyer

Source: NC State University Libraries
Added: August 6, 2018

2013 | review

History of atomic layer deposition and its relationship with the American Vacuum Society

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films.

By: G. Parsons, J. Elam, S. George, S. Haukka, H. Jeon, W. Kessels, M. Leskela, P. Poodt, M. Ritala, S. Rossnagel

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

Large effect of titanium precursor on surface reactivity and mechanical strength of electrospun nanofibers coated with TiO2 by atomic layer deposition

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 31(6).

By: C. McClure, C. Oldham, H. Walls & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

Low-temperature atomic layer deposition of tungsten using tungsten hexafluoride and highly-diluted silane in argon

Chemical Vapor Deposition, 19(4-6), 161–166.

By: B. Kalanyan, M. Losego, C. Oldham & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2013 | review

Mechanisms and reactions during atomic layer deposition on polymers

Coordination Chemistry Reviews.

By: G. Parsons, S. Atanasov, E. Dandley, C. Devine, B. Gong, J. Jur, K. Lee, C. Oldham ...

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

Oxygen electroreduction on Ti- and Fe-containing carbon fibers

Journal of the Electrochemical Society, 160(8), F769–778.

By: J. McClure, C. Devine, R. Jiang, D. Chu, J. Cuomo, G. Parsons, P. Fedkiw

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

Prevention of ultraviolet (UV)-induced surface damage and cytotoxicity of polyethersulfone using atomic layer deposition (ALD) titanium dioxide

JOM: the Journal of the Minerals, Metals & Materials Society, 65(4), 550–556.

By: P. Petrochenko, G. Scarel, G. Hyde, G. Parsons, S. Skoog, Q. Zhang, P. Goering, R. Narayan

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

Solar water splitting in a molecular photoelectrochemical cell

Proceedings of the National Academy of Sciences of the United States of America, 110(50), 20008–20013.

By: L. Alibabaei, M. Brennaman, M. Norris, B. Kalanyan, W. Song, M. Losego, J. Concepcion, R. Binstead, G. Parsons, T. Meyer

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

Solid electrolyte interphase on lithium-ion carbon nanofiber electrodes by atomic and molecular layer deposition

Journal of the Electrochemical Society, 160(11), A1971–1978.

By: A. Loebl, C. Oldham, C. Devine, B. Gong, S. Atanasov, G. Parsons, P. Fedkiw

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

Solution-processed, antimony-doped tin oxide colloid films enable high-performance TIO2 photoanodes for water splitting

Nano Letters, 13(4), 1481–1488.

By: Q. Peng, B. Kalanyan, P. Hoertz, A. Miller, D. Kim, K. Hanson, L. Alibabaei, J. Liu ...

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

Spectroscopic detection of medium range order in device grade hydrogenated amorphous silicon

Japanese Journal of Applied Physics, 52(4).

By: G. Lucovsky, G. Parsons, D. Zeller & J. Kim

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

Stabilization of [Ru(bpy)(2)(4,4 '-(PO3H2)bpy)](2+) on mesoporous TiO2 with atomic layer deposition of Al2O3

Chemistry of Materials, 25(1), 3–5.

By: K. Hanson, M. Losego, B. Kalanyan, D. Ashford, G. Parsons & T. Meyer

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

Stabilizing small molecules on metal oxide surfaces using atomic layer deposition

Nano Letters, 13(10), 4802–4809.

By: K. Hanson, M. Losego, B. Kalanyan, G. Parsons & T. Meyer

Source: NC State University Libraries
Added: August 6, 2018

2013 | journal article

Three-dimensional self-assembled photonic crystals with high temperature stability for thermal emission modification

Nature Communications, 4.

By: K. Arpin, M. Losego, A. Cloud, H. Ning, J. Mallek, N. Sergeant, L. Zhu, Z. Yu ...

Source: NC State University Libraries
Added: August 6, 2018

2012 | review

Atomic layer deposition for electrochemical energy generation and storage systems

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films.

By: Q. Peng, J. Lewis, P. Hoertz, J. Glass & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Atomic layer deposition of Ru onto organic monolayers: Shifting metal effective work function using monolayer structure

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 30(1).

By: K. Park & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Caprolactone ring-opening molecular layer deposition of organic-aluminum oxide polymer films

ECS Journal of Solid State Science and Technology, 1(4), P210–215.

By: B. Gong & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Directed inorganic modification of bi-component polymer fibers by selective vapor reaction and atomic layer deposition

Polymer, 53(21), 4631–4636.

By: B. Gong, J. Spagnola, S. Arvidson, S. Khan & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Effect of temperature and gas velocity on growth per cycle during Al(2)O(3) and ZnO atomic layer deposition at atmospheric pressure

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 30(1).

By: M. Mousa, C. Oldham, J. Jur & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Hydrophilic mechanical buffer layers and stable hydrophilic finishes on polydimethylsiloxane using combined sequential vapor infiltration and atomic/molecular layer deposition

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 30(1).

By: B. Gong, J. Spagnola & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Mechanisms for hydrophilic/hydrophobic wetting transitions on cellulose cotton fibers coated using Al(2)O(3) atomic layer deposition

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 30(1).

By: K. Lee, J. Jur, D. Kim & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Mesoporous metal oxides by vapor infiltration and atomic layer deposition on ordered surfactant polymer films

Langmuir, 28(32), 11915–11922.

By: B. Gong, D. Kim & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Nanoscale ceramic surface modification of textiles by atomic layer deposition

American Ceramic Society Bulletin, 91(6), 24–27.

By: J. Jur & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Oligomer orientation in vapor-molecular-layer-deposited alkyl-aromatic polyamide films

Langmuir, 28(28), 10464–10470.

By: Q. Peng, K. Efimenko, J. Genzer & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Paper deacidification and UV protection using ZnO atomic layer deposition

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 30(1).

By: C. Hanson, C. Oldham & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition

Journal of Materials Chemistry, 22(31), 15672–15682.

By: B. Gong & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Resource-focused toolchain for rapid prototyping of embedded systems

Journal of Circuits, Systems, and Computers, 21(2).

By: S. Peng, G. Parsons & A. Dean

Source: NC State University Libraries
Added: August 6, 2018

2012 | review

Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films.

By: P. Poodt, D. Cameron, E. Dickey, S. George, V. Kuznetsov, G. Parsons, F. Roozeboom, G. Sundaram, A. Vermeer

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Stable anatase TiO2 coating on quartz fibers by atomic layer deposition for photoactive light-scattering in dye-sensitized solar cells

Nanoscale, 4(15), 4731–4738.

By: D. Kim, H. Koo, J. Jur, M. Woodroof, B. Kalanyan, K. Lee, C. Devine, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Temperature and exposure dependence of hybrid organic-inorganic layer formation by sequential vapor infiltration into polymer fibers

Langmuir, 28(44), 15697–15704.

By: H. Akyildiz, R. Padbury, G. Parsons & J. Jur

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Templating quantum dot to phase-transformed electrospun TiO2 nanofibers for enhanced photo-excited electron injection

ACS Applied Materials & Interfaces, 4(8), 3837–3845.

Source: NC State University Libraries
Added: August 6, 2018

2012 | journal article

Wetting properties induced in nano-composite POSS-MA polymer films by atomic layer deposited oxides

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 30(1).

By: K. Vasquez, A. Vincent-Johnson, W. Hughes, B. Augustine, K. Lee, G. Parsons, G. Scarel

Source: NC State University Libraries
Added: August 6, 2018

2011 | journal article

Atomic layer deposition of Al2O3 and ZnO at atmospheric pressure in a flow tube reactor

ACS Applied Materials & Interfaces, 3(2), 299–308.

By: J. Jur & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2011 | journal article

Atomic layer deposition of titanium dioxide on cellulose acetate for enhanced hemostasis

Biotechnology Journal, 6(2), 213–223.

By: G. Hyde, S. Stewart, G. Scarel, G. Parsons, C. Shih, C. Shih, S. Lin, Y. Su, N. Monteiro-Riviere, R. Narayan

Source: NC State University Libraries
Added: August 6, 2018

2011 | journal article

Conformal organic - inorganic hybrid network polymer thin films by molecular layer deposition using trimethylaluminum and glycidol

Journal of Physical Chemistry. B, Condensed Matter, Materials, Surfaces, Interfaces & Biophysical, 115(19), 5930–5938.

By: B. Gong, Q. Peng & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2011 | journal article

Encapsulation and chemical resistance of electrospun nylon nanofibers coated using integrated atomic and molecular layer deposition

Journal of the Electrochemical Society, 158(9), D549–556.

By: C. Oldham, B. Gong, J. Spagnola, J. Jur, K. Senecal, T. Godfrey, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2011 | journal article

Highly active photocatalytic ZnO nanocrystalline rods supported on polymer fiber mats: Synthesis using atomic layer deposition and hydrothermal crystal growth

Applied Catalysis. A, General, 407(1-2), 211–216.

By: B. Gong, Q. Peng, J. Na & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2011 | journal article

Making inert polypropylene fibers chemically responsive by combining atomic layer deposition and vapor phase chemical grafting

Nanotechnology, 22(15).

By: Q. Peng, B. Gong & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2011 | journal article

Progress and future directions for atomic layer deposition and ALD-based chemistry

MRS Bulletin, 36(11), 865–871.

By: G. Parsons, S. George & M. Knez

Source: NC State University Libraries
Added: August 6, 2018

2011 | journal article

SiN(x) charge-trap nonvolatile memory based on ZnO thin-film transistors

Applied Physics Letters, 99(11).

By: E. Kim, Y. Kim, D. Kim, K. Lee, G. Parsons & K. Park

Source: NC State University Libraries
Added: August 6, 2018

2011 | journal article

Sinter-free phase conversion and scanning transmission electron microscopy of FePt nanoparticle monolayers

Nanoscale, 3(10), 4142–4149.

Source: NC State University Libraries
Added: August 6, 2018

2011 | journal article

Spectroscopic detection of medium range order in device quality hydrogenated amorphous silicon, a-Si(H)

Journal of Optoelectronics and Advanced Materials, 13(11-12), 1586–1589.

By: G. Lucovsky, G. Parsons, D. Zeller, K. Wu, B. Papas, J. Whitten, R. Lujan, R. Street

Source: NC State University Libraries
Added: August 6, 2018

2010 | journal article

Angular behavior of the Berreman effect investigated in uniform Al2O3 layers formed by atomic layer deposition

Journal of Physics. Condensed Matter, 22(15).

By: G. Scarel, J. Na & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2010 | journal article

Atomic layer deposition and abrupt wetting transitions on nonwoven polypropylene and woven cotton fabrics

Langmuir, 26(4), 2550–2558.

By: G. Hyde, G. Scarel, J. Spagnola, Q. Peng, K. Lee, B. Gong, K. Roberts, K. Roth ...

Source: NC State University Libraries
Added: August 6, 2018

2010 | journal article

In situ analysis of dopant incorporation, activation, and film growth during thin film ZnO and ZnO:Al atomic layer deposition

Journal of Physical Chemistry. C, 114(1), 383–388.

By: J. Na, G. Scarel & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2010 | patent

Nano-structured photovoltaic solar cell and related methods

By: G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2010 | journal article

Phonon response in the infrared region to thickness of oxide films formed by atomic layer deposition

Applied Spectroscopy, 64(1), 120–126.

By: G. Scarel, J. Na, B. Gong & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2010 | journal article

Surface and sub-surface reactions during low temperature aluminium oxide atomic layer deposition on fiber-forming polymers

Journal of Materials Chemistry, 20(20), 4213–4222.

Source: NC State University Libraries
Added: August 6, 2018

2010 | journal article

Surface texture and wetting stability of polydimethylsiloxane coated with aluminum oxide at low temperature by atomic layer deposition

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 28(6), 1330–1337.

By: J. Spagnola, B. Gong & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2010 | journal article

Temperature-dependent subsurface growth during atomic layer deposition on polypropylene and cellulose fibers

Langmuir, 26(11), 8239–8244.

By: J. Jur, J. Spagnola, K. Lee, B. Gong, Q. Peng & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2009 | journal article

"Zincone" zinc oxide-organic hybrid polymer thin films formed by molecular layer deposition

Chemistry of Materials, 21(5), 820–830.

By: Q. Peng, B. Gong, R. VanGundy & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2009 | journal article

Atomic layer deposition and biocompatibility of titanium nitride nano-coatings on cellulose fiber substrates

Biomedical Materials, 4(2).

By: G. Hyde, S. McCullen, S. Jeon, S. Stewart, H. Jeon, E. Loboa, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2009 | journal article

Bi-directional Kirkendall effect in coaxial microtuble nanolaminate assemblies fabricated by atomic layer deposition

ACS Nano, 3(3), 546–554.

By: Q. Peng, X. Sun, J. Spagnola, C. Saquing, S. Khan, R. Spontak, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2009 | journal article

Role of Gas doping sequence in surface reactions and dopant incorporation during atomic layer deposition of Al-doped ZnO

Chemistry of Materials, 21(23), 5585–5593.

By: J. Na, Q. Peng, G. Scarel & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2009 | journal article

Surface polarity shielding and hierarchical zno nano-architectures produced using sequential hydrothermal crystal synthesis and thin film atomic layer deposition

ACS Nano, 3(10), 3191–3199.

By: J. Na, B. Gong, G. Scarel & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2008 | journal article

Berreman effect in infrared absorption spectroscopy of ionic oxide coatings formed by atomic layer deposition on three-dimensional structures

Journal of Applied Physics, 104(9).

By: G. Scarel, G. Hyde, D. Hojo & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2008 | journal article

Conformal metal oxide coatings on nanotubes by direct low temperature metal-organic pyrolysis in supercritical carbon dioxide

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 26(3), 978–982.

By: Q. Peng, J. Spagnola, H. Daisuke, K. Park & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2008 | journal article

Low temperature metal oxide film deposition and reaction kinetics in supercritical carbon dioxide

Thin Solid Films, 516(15), 4997–5003.

By: Q. Peng, D. Hojo, K. Park & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2008 | journal article

Nanoencapsulation and stabilization of single-molecule/particle electronic nanoassemblies using low-temperature atomic layer deposition

Journal of Physical Chemistry. C, 112(51), 20510–20517.

By: J. Na, J. Ayres, K. Chandra, C. Gorman & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2008 | journal article

Self-catalyzed hydrogenolysis of nickelocene: Functional metal coating of three-dimensional nanosystems at low temperature

Journal of the Electrochemical Society, 155(9), D580–582.

By: Q. Peng, J. Spagnola & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2007 | journal article

Atomic layer deposition of Conformal inorganic nanoscale coatings on three-dimensional natural fiber systems: Effect of surface topology on film growth characteristics

Langmuir, 23(19), 9844–9849.

By: G. Hyde, K. Park, S. Stewart, J. Hinestroza & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2007 | journal article

Atomic layer deposition on electrospun polymer fibers as a direct route to Al2O3 microtubes with precise wall thickness control

Nano Letters, 7(3), 719–722.

Source: NC State University Libraries
Added: August 6, 2018

2007 | journal article

Conduction mechanisms and stability of single molecule nanoparticle/molecule/nanoparticle junctions

Nanotechnology, 18(3).

By: J. Na, J. Ayres, K. Chandra, C. Chu, C. Gorman & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2007 | journal article

Conductivity in alkylamine/gold and alkanethiol/gold molecular junctions measured in molecule/nanoparticle/molecule bridges and conducting probe structures

Journal of the American Chemical Society, 129(8), 2287–2296.

By: C. Chu, J. Na & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2007 | journal article

Enhanced conduction through isocyanide terminal groups in alkane and biphenylene molecules measured in molecule/nanoparticle/molecule junctions

Journal of Physical Chemistry. C, 111(22), 8080–8085.

By: C. Chu, J. Ayres, D. Stefanescu, B. Walker, C. Gorman & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2007 | journal article

In situ Auger electron spectroscopy study of atomic layer deposition: Growth initiation and interface formation reactions during ruthenium ALD on Si-H, SiO2, and HfO2 surfaces

Langmuir, 23(11), 6106–6112.

By: K. Park, D. Terry, S. Stewart & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2007 | journal article

Real-time conductivity analysis through single-molecule electrical junctions

Nanotechnology, 18(42).

By: J. Na, J. Ayres, K. Chandra, C. Gorman & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2006 | journal article

Charge generation during oxidation of thin Hf metal films on silicon

Thin Solid Films, 513(1-2), 201–205.

By: T. Gougousi, D. Terry & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2006 | journal article

Selective area atomic layer deposition of rhodium and effective work function characterization in capacitor structures

Applied Physics Letters, 89(4).

By: K. Park & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2006 | journal article

Solvent enhanced resist flow for room temperature imprint lithography

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 24(2), 818–822.

By: C. Chu & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2006 | journal article

Supercritical-carbon dioxide-assisted cyclic deposition of metal oxide and metal thin films

Applied Physics Letters, 88(9).

By: D. Barua, T. Gougousi, E. Young & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2005 | journal article

In-situ infrared spectroscopy and density functional theory modeling of hafnium alkylamine adsorption on Si-OH and Si-H surfaces

Chemistry of Materials, 17(21), 5305–5314.

By: M. Kelly, J. Han, C. Musgrave & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2005 | journal article

Metal oxide thin films deposited from metal organic precursors in supercritical CO2 solutions

Chemistry of Materials, 17(20), 5093–5100.

By: T. Gougousi, D. Barua, E. Young & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2005 | journal article

Microcontact patterning of ruthenium gate electrodes by selective area atomic layer deposition

Applied Physics Letters, 86(5).

By: K. Park, J. Doub, T. Gougousi & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2004 | journal article

Bulk and interface charge in low temperature silicon nitride for thin film transistors on plastic substrates

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 22(6), 2256–2260.

By: K. Park & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2004 | journal article

Effect of N-2 plasma on yttrium oxide and yttrium-oxynitride dielectrics

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 22(3), 445–451.

By: D. Niu, R. Ashcraft, C. Hinkle & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2004 | patent

Non-crystalline oxides for use in microelectronic, optical, and other applications

Washington, DC: U.S. Patent and Trademark Office.

By: G. Lucovsky & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2004 | journal article

Postdeposition reactivity of sputter-deposited high-dielectric-constant films with ambient H2O and carbon-containing species

Journal of Applied Physics, 95(3), 1391–1396.

By: T. Gougousi & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2003 | journal article

Bonding and structure of ultrathin yttrium oxide films for Si field effect transistor gate dielectric applications

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 21(4), 1792–1797.

By: M. Ulrich, J. Rowe, D. Niu & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2003 | journal article

Carbonate formation during post-deposition ambient exposure of high-k dielectrics

Applied Physics Letters, 83(17), 3543–3545.

By: T. Gougousi, D. Niu, R. Ashcraft & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2003 | journal article

Chemical, physical, and electrical characterizations of oxygen plasma assisted chemical vapor deposited yttrium oxide on silicon

Journal of the Electrochemical Society, 150(5), F102–109.

By: D. Niu, R. Ashcraft, Z. Chen, S. Stemmer & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2003 | patent

High dielectric constant metal silicates formed by controlled metal-surface reactions

Washington, DC: U.S. Patent and Trademark Office.

By: G. Parsons, J. Chambers & M. Kelly

Source: NC State University Libraries
Added: August 6, 2018

2003 | journal article

Properties of La-silicate high-K dielectric films formed by oxidation of La on silicon

Journal of Applied Physics, 93(3), 1691–1696.

By: T. Gougousi, M. Kelly, D. Terry & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2002 | journal article

Ab initio analysis of silyl precursor physisorption and hydrogen abstraction during low temperature silicon deposition

Surface Science, 496(3), 307–317.

By: A. Gupta, H. Yang & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2002 | journal article

Effect of hydrogen on adsorbed precursor diffusion kinetics during hydrogenated amorphous silicon deposition

Applied Physics Letters, 80(13), 2356–2358.

By: K. Bray, A. Gupta & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2002 | journal article

Electron energy-loss spectroscopy analysis of interface structure of yttrium oxide gate dielectrics on silicon

Applied Physics Letters, 81(4), 676–678.

By: D. Niu, R. Ashcraft, Z. Chen, S. Stemmer & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2002 | journal article

Elementary reaction schemes for physical and chemical vapor deposition of transition metal oxides on silicon for high-k gate dielectric applications

Journal of Applied Physics, 91(9), 6173–6180.

By: D. Niu, R. Ashcraft, M. Kelly, J. Chambers, T. Klein & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2002 | journal article

Issues in high-kappa gate stack interfaces

MRS Bulletin, 27(3), 212–216.

By: V. Misra, G. Lucovsky & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2002 | journal article

Reactions of Y2O3 films with (001) Si substrates and with polycrystalline Si capping layers

Applied Physics Letters, 81(4), 712–714.

By: S. Stemmer, D. Klenov, Z. Chen, D. Niu, R. Ashcraft & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2002 | journal article

Surface transport kinetics in low-temperature silicon deposition determined from topography evolution - art. no. 035311

Physical Review. B, Condensed Matter and Materials Physics, 6503(3), 5311-.

By: K. Bray & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2002 | journal article

The role of the OH species in high-k/polycrystalline silicon gate electrode interface reactions

Applied Physics Letters, 80(23), 4419–4421.

By: T. Gougousi, M. Kelly & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2002 | journal article

Water absorption and interface reactivity of yttrium oxide gate dielectrics on silicon

Applied Physics Letters, 80(19), 3575–3577.

By: D. Niu, R. Ashcraft & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2001 | journal article

Effects of surface pretreatments on interface structure during formation of ultra-thin yttrium silicate dielectric films on silicon

Applied Surface Science, 181(1-2), 78–93.

By: J. Chambers, B. Busch, W. Schulte, T. Gustafsson, E. Garfunkel, S. Wang, D. Maher, T. Klein, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2001 | journal article

Physical and electrical characterization of ultrathin yttrium silicate insulators on silicon

Journal of Applied Physics, 90(2), 918–933.

By: J. Chambers & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2000 | journal article

Bond strain, chemical induction, and OH incorporation in low- temperature (350-100 degrees C) plasma deposited silicon dioxide films

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 18(3), 1764–1769.

By: A. Gupta & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2000 | journal article

Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 18(2), 683–689.

By: C. Yang, L. Smith, C. Arthur & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2000 | journal article

Surface reactions in very low temperature (< 150 degrees C) hydrogenated amorphous silicon deposition, and applications to thin film transistors

Surface reactions in very low temperature (< 150 degrees C) hydrogenated amorphous silicon deposition, and applications to thin film transistors. Journal of Non-Crystalline Solids, 266(2000 May), 23–30.

By: G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

2000 | journal article

Yttrium silicate formation on silicon: Effect of silicon preoxidation and nitridation on interface reaction kinetics

Applied Physics Letters, 77(15), 2385–2387.

By: J. Chambers & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1999 | journal article

Evidence of aluminum silicate formation during chemical vapor deposition of amorphous Al2o3 thin films on Si(100)

Applied Physics Letters, 75(25), 4001–4003.

By: T. Klein, D. Niu, W. Epling, W. Li, D. Maher, C. Hobbs, R. Hegde, I. Baumvol, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1999 | journal article

Hydrogenated silicon nitride thin films deposited between 50 and 250 degrees C using nitrogen/silane mixtures with helium dilution

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 17(1), 108–112.

By: T. Klein, T. Anderson, A. Chowdhury & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1999 | journal article

Plasma enhanced chemical vapor deposited silicon nitride thin films deposited at very low temperatures for thin film transistors on plastic substrates"

Journal of Vacuum Science & Technology, A(17), 108–112.

By: T. Klein, T. Anderson, A. Chowdhury & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1998 | journal article

Endpoint uniformity sensing and analysis in silicon dioxide plasma etching using in situ mass spectrometry

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 16(6), 2996–3002.

By: J. Chambers, K. Min & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1998 | journal article

Hydrogen abstraction kinetics and crystallization in low temperature plasma deposition of silicon

Applied and Environmental Microbiology, 72(4), 456–458.

By: E. Srinivasan & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1998 | journal article

In-situ mass spectrometry for real-time uniformity sensing in ECR silicon dioxide etching

Journal of Vacuum Science & Technology, B(16), 2996–3002.

By: J. Chambers, K. Min & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1998 | journal article

Plasma enhanced selective area microcrystalline silicon deposition on hydrogenated amorphous silicon: Surface modification for controlled nucleation

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 16(3 pt.1), 1316–1320.

By: L. Smith, W. Read, C. Yang, E. Srinivasan, C. Courtney, H. Lamb, G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1998 | journal article

Self-aligned gate and source drain contacts in inverted-staggered a-Si:H thin-film transistors fabricated using selective area silicon PECVD

IEEE Electron Device Letters, 19(6), 180–182.

By: C. Yang, W. Read, C. Arthur, E. Srinivasan & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1998 | journal article

Silane consumption and conversion analysis in amorphous silicon and silicon nitride plasma deposition using in situ mass spectroscopy

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 16(3 pt.2), 1852–1856.

By: A. Chowdhury, T. Klein, T. Anderson & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1997 | journal article

Dominant monohydride bonding in hydrogenated amorphous silicon thin films formed by plasma enhanced chemical vapor deposition at room temperature

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 15(1), 77–84.

By: E. Srinivasan, D. Lloyd & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1997 | journal article

Hydrogen elimination and phase transitions in pulsed-gas plasma deposition of amorphous and microcrystalline silicon

Journal of Applied Physics, 81(6), 2847–2855.

By: E. Srinivasan & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1997 | journal article

Investigation of substrate dependent nucleation of plasma-deposited microcrystalline silicon on glass and silicon substrates using atomic force microscopy

Journal of Applied Physics, 82(12), 6041–6046.

By: L. Smith, E. Srinivasan & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1997 | journal article

Real-time process sensing and metrology in amorphous and selective area silicon PECVD using in-situ mass spectrometry

Journal of Vacuum Science & Technology, B(15), 127–132.

By: A. Chowdhury, W. Read, G. Rubloff, L. Tedder & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1996 | journal article

Ab initio studies of hydrogen abstraction reactions of silicon hydrides

Journal of Chemical Physics, 105, 5467–5471.

By: E. Srinivasan, H. Yang & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1996 | journal article

Dynamic rate and thickness metrology during polysilicon RTCVD from SiH4 using real-time in-situ mass spectrometry

Journal of Vacuum Science & Technology, A(14), 267–270.

By: L. Tedder, G. Rubloff, B. Conaghan & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1995 | journal article

Real-time process diagnostics in RTCVD using in-situ mass spectroscopic sampling

Journal of Vacuum Science & Technology, B (13), 1924–1927.

By: L. Tedder, G. Rubloff, I. Shareef, M. Anderle, D. Kim & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1993 | journal article

Femtosecond spectroscopic study of ultrafast carrier relaxation in hydrogenated amorphous silicon a-Si:H

Journal of Applied Physics, 73, 1235.

By: A. Esser, K. H., W. H., P. C., . G.N. & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1993 | journal article

Optical-detection of photoconductivity in hydrogenated amorphous silicon, a-Si:H, in the subpicosecond time-domain

Journal of Non-Crystalline Solids, 166, 575–578.

By: E. Kurz H., L. Heesel H., . Wang C. & P. G.

Source: NC State University Libraries
Added: August 6, 2018

1993 | journal article

Transport processes of optically generated free carriers in amorphous silicon, a-Si:H in the femtosecond time regime

Physical Review, B(47), 3593.

By: A. Esser, K. H., W. H., P. C., . G.N. & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1992 | journal article

Bond selectivity in silicon film growth

Science, 256, 1304–1306.

By: J. Boland & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1992 | journal article

Enhanced mobility top-gate amorphous silicon thin film transistor using selectively deposited source/drain contacts

IEEE Electron Device Letters, 3, 80–83.

By: G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1992 | journal article

Selected area nucleation and bond strain relaxation in silicon PECVD using time modulated silane flow

Japanese Journal of Applied Physics, 31, 1943–1947.

By: G. Parsons, J. Boland & J. Tsang

Source: NC State University Libraries
Added: August 6, 2018

1991 | journal article

Low hydrogen content stoichiometric silicon nitride films deposited by plasma enhanced chemical vapor deposition

Journal of Applied Physics, 70, 1553–1560.

By: G. Parsons, J. Souk & J. Batey

Source: NC State University Libraries
Added: August 6, 2018

1991 | journal article

Selective deposition of silicon by plasma enhanced chemical vapor deposition using pulsed silane flow

Applied Physics Letters, 59, 2458–2546.

By: G. Parsons

Source: NC State University Libraries
Added: August 6, 2018

1990 | journal article

Annealing of intrinsic and photo-induced defects in hydrogenated amorphous silicon

Thin Solid Films, 193/194, 577–587.

By: G. Parsons, C. Wang & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1990 | journal article

Post-deposition relaxation of electronic defects in hydrogenated amorphous silicon

Applied Physics Letters, 56, 1895–1897.

By: G. Parsons, C. Wang & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1990 | journal article

Silicon-hydrogen bond-stretching vibrations in hydrogenated amorphous silicon, nitrogen alloys

Physical Review, B(41), 1664–1667.

By: G. Parsons & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1990 | journal article

Ultrafast recombination and trapping in amorphous silicon

Physical Review, B(41), 2879–2884.

By: A. Esser, K. Seibert, H. Kurz, G. Parsons, C. Wang, B. Davidson, G. Lucovsky, R. Nemanich

Source: NC State University Libraries
Added: August 6, 2018

1989 | journal article

Defects in a-Si:H films produced by remote plasma enhanced CVD

Journal of Non-Crystalline Solids, 107, 295–300.

By: G. Parsons, T. Tsu & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1989 | journal article

Dependence of the chemical, electrical and photoelectronic properties of a-Si:H/Si3N4 interfaces on the deposition sequence

Journal of Non-Cyrstalline Solids, 114.

By: S. Kim, G. Parsons & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1989 | journal article

Mass and optical emission spectroscopic studies of the gas phase during the deposition of SiO2 and a-Si:H by remote plasma enhanced chemical vapor deposition

Journal of Vacuum Science & Technology, A(7), 1115–1123.

By: D. Tsu, G. Parsons, G. Lucovsky & M. Watkins

Source: NC State University Libraries
Added: August 6, 2018

1989 | journal article

Precursors for the deposition of amorphous silicon hydrogen alloys by remote plasma enhanced CVD

Journal of Vacuum Science & Technology, A(7), 1124–1129.

By: G. Parsons, D. Tsu, C. Wang & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1989 | journal article

Reduction of defects by high temperature (180 degrees c-240 degrees c) annealing in room temperature deposited hydrogenated amorphous silicon

Journal of Non-Crystalline Solids, 114.

By: G. Parsons, C. Wang & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1988 | journal article

Properties of intrinsic and doped a-Si:H deposited by remote plasma enhanced chemical vapor deposition

Journal of Vacuum Science & Technology, A(6), 1912–1916.

By: G. Parsons, D. Tsu & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1988 | journal article

Spectroscopic emission studies of O2/He and N2/He plasmas in remote plasma enhanced chemical vapor deposition

Journal of Vacuum Science & Technology, A(6), 1849–1854.

By: D. Tsu, G. Parsons & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1987 | journal article

Optical and electrical properties of a-Si:H films grown by remote plasma enhanced chemical vapor deposition

Journal of Non-Crystalline Solids, 97 & 98, 1375–1378.

By: G. Parsons, D. Tsu & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1987 | journal article

Photoelectronic properties of a-Si:H and a-Ge:H thin films in surface cell structures

Journal of Vacuum Science & Technology, A(5), 1655–1660.

By: G. Parsons, C. Kusano & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1986 | journal article

Deposition of a-Si,Sn:H alloy films by reactive magnetron sputtering from separate Si and Sn targets

Journal of Vacuum Science & Technology, A(4), 470–474.

By: G. Parsons, J. Cook, G. Lucovsky, S. Lin & M. Mantini

Source: NC State University Libraries
Added: August 6, 2018

1985 | journal article

Low defect density Si,Ge:H alloy films produced by magnetron sputtering from separate Si and Ge cathodes

Journal of Non-Crystalline Solids, 77 & 78, 885–889.

By: R. Rudder, G. Parsons, J. Cook & G. Lucovsky

Source: NC State University Libraries
Added: August 6, 2018

1983 | journal article

Characterization of semiconductor electrolyte systems by surface photovoltage measured capacitance

Journal of the Electrochemical Society, 130(8), C329.

By: E. Kamieniecki & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018