2024 article
"Dual-Tone" Area-Selective Deposition: Selectivity Inversion of Polymer on Patterned Si/SiO<sub>2</sub> Starting Surfaces
Carroll, N. M., Margavio, H. R. M., & Parsons, G. N. (2024, February 27). CHEMISTRY OF MATERIALS, Vol. 2.
2024 article
Control of ZIF-62 and a<sub>g</sub>ZIF-62 Film Thickness within Asymmetric Tubular Supports through Pressure and Dose Time Variation of Atomic Layer Deposition
Stone, D. M., Morgan, S. E., Abdelmigeed, M. O., Nguyen, J., Bennett, T. D., Parsons, G. N., & Cowan, M. G. (2024, February 2). SMALL, Vol. 2.
2024 article
Coordination of copper within a crystalline carbon nitride and its catalytic reduction of CO<sub>2</sub>
Pauly, M., White, E., Deegbey, M., Fosu, E. A., Keller, L., Mcguigan, S., … Maggard, P. A. (2024, March 21). DALTON TRANSACTIONS, Vol. 3.
2024 article
Covalent Functionalization of Silicon with Plasma-Grown "Fuzzy" Graphene: Robust Aqueous Photoelectrodes for CO<sub>2</sub> Reduction by Molecular Catalysts
Oyetade, O. A., Wang, Y., He, S., Margavio, H. R. M., Bottum, S. R., Rooney, C. L., … Cahoon, J. F. (2024, July 12). ACS APPLIED MATERIALS & INTERFACES, Vol. 7.
2024 article
Highly Mesoporous Zr-Based MOF-Fabric Composites: A Benign Approach for Expeditious Degradation of Chemical Warfare Agents and Simulants
Abdelmigeed, M. O., Mahle, J. J., Peterson, G. W., & Parsons, G. N. (2024, September 23). SMALL, Vol. 9.
2024 article
Low-Temperature Dual-Material Area-Selective Deposition: Molybdenum Hexafluoride-Mediated SiO<sub>2</sub> Fluorination/Passivation for Self-Aligned Molybdenum/Metal Oxide Nanoribbons
Oh, H., Thelven, J. M., Margavio, H. R. M., & Parsons, G. N. (2024, April 25). ADVANCED FUNCTIONAL MATERIALS, Vol. 4.
2024 journal article
Oxidation Temperature-Dependent Electrochemical Doping of WO3 Deposited via Atomic Layer Deposition
The Journal of Physical Chemistry C.
2024 article
Photoelectrochemical Proton-Coupled Electron Transfer of TiO<sub>2</sub> Thin Films on Silicon
Nedzbala, H. S., Westbroek, D., Margavio, H. R. M., Yang, H., Noh, H., Magpantay, S. V., … Mayer, J. M. (2024, April 2). JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, Vol. 4.
2024 article
Simultaneous Co-localized TiO<sub>2</sub> Etching and W Atomic Layer Deposition Using WF<sub>6</sub> as a Dual-Functional Reactant
Margavio, H. R. M., Arellano, N., Singh, I., Wojtecki, R., & Parsons, G. N. (2024, September 23). CHEMISTRY OF MATERIALS, Vol. 9.
2024 journal article
Stochastic lattice model for atomic layer deposition and area-selective deposition of metal oxides: Visualization and analysis of lateral overgrowth during area-selective deposition
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 42(6).
2024 journal article
Vapor-phase zeolitic imidazolate framework-8 growth on fibrous polymer substrates
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 42(1).
2023 journal article
Comparison of BCl3, TiCl4, and SOCl2 chlorinating agents for atomic layer etching of TiO2 and ZrO2 using tungsten hexafluoride
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 41(4).
2023 journal article
Cover Feature: Toxin‐Blocking Textiles: Rapid, Benign, Roll‐to‐Roll Production of Robust MOF‐Fabric Composites for Organophosphate Separation and Hydrolysis (ChemSusChem 2/2023)
ChemSusChem.
2023 article
Discovery of a Hybrid System for Photocatalytic CO<sub>2</sub> Reduction via Attachment of a Molecular Cobalt-Quaterpyridine Complex to a Crystalline Carbon Nitride
McGuigan, S., Tereniak, S. J., Donley, C. L., Smith, A., Jeon, S., Zhao, F., … Maggard, P. A. (2023, October 12). ACS APPLIED ENERGY MATERIALS, Vol. 10.
2023 article
Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition
Nye, R. A., Van Dongen, K., De Simone, D., Oka, H., Parsons, G. N., & Delabie, A. (2023, February 23). CHEMISTRY OF MATERIALS, Vol. 2.
2023 article
Factors and Limitations of Green, Rapid Metal-Organic Framework-Fabric Synthesis and Effects on Dual Chemical Warfare Agent Protection
Morgan, S. E. E., Rivera, C. D. D., Willis, M. L. L., Peterson, G. W. W., Mahle, J. J. J., Mundy, L., & Parsons, G. N. N. (2023, July 31). INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH, Vol. 7.
2023 journal article
In situ analysis of nucleation reactions during TiCl4/H2O atomic layer deposition on SiO2 and H-terminated Si surfaces treated with a silane small molecule inhibitor
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 41(3).
2023 article
Multi-Electron Transfer at H-Terminated p-Si Electrolyte Interfaces: Large Photovoltages under Inversion Conditions
Keller, N. D., Vecchi, P., Grills, D. C., Polyansky, D. E., Bein, G. P., Dempsey, J. L., … Meyer, G. J. (2023, May 10). JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, Vol. 5.
2023 article
Quantified Uniformity and Selectivity of TiO2 Films in 45-nm Half Pitch Patterns Using Area-Selective Deposition Supercycles
Nye, R. A. A., Van Dongen, K., Marneffe, J.-F., Parsons, G. N. N., & Delabie, A. (2023, June 17). ADVANCED MATERIALS INTERFACES, Vol. 6.
2023 journal article
Self-Aligned Nanopatterning and Controlled Lateral Growth by Dual-Material Orthogonal Area-Selective Deposition of Poly(3,4-ethylenedioxythiophene) and Tungsten
CHEMISTRY OF MATERIALS, 35(11), 4375–4384.
2023 article
Vapor phase synthesis of metal-organic frameworks on a nanofibrous aerogel creates enhanced functionality
Rahmanian, V., Ebrahim, M. Z. A., Razavi, S., Abdelmigeed, M., Barbieri, E., Menegatti, S., … Khan, S. A. (2023, November 6). JOURNAL OF MATERIALS CHEMISTRY A, Vol. 11.
2023 journal article
Wake-up free ferroelectric hafnia-zirconia capacitors fabricated via vacuum-maintaining atomic layer deposition
JOURNAL OF APPLIED PHYSICS, 133(22).
2022 journal article
(Invited) Introduction and Overview of Area-Selective Thin Film Deposition
ECS Meeting Abstracts.
2022 journal article
Comparative In Situ Study of the Initial Growth Trends of Atomic Layer-Deposited Al(2)O(3 )Films br
JOURNAL OF PHYSICAL CHEMISTRY C, 126(16), 7036–7046.
2022 journal article
Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO(2 )area-selective deposition
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, 21(4).
2022 journal article
Creating hierarchically porous banana paper-metal organic framework (MOF) composites with multifunctionality
APPLIED MATERIALS TODAY, 28.
2022 journal article
Green MOF-Fabrics: Benign, Scalable Sorption-Vapor Synthesis of Catalytic Composites to Protect against Phosphorus-Based Toxins
ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 10(8), 2699–2707.
2022 journal article
Growth behavior and substrate selective deposition of polypyrrole, polythiophene, and polyaniline by oxidative chemical vapor deposition and molecular layer deposition
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(6).
2022 article
Improving polymethacrylate EUV resists with TiO2 area-selective deposition
ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIX, Vol. 12055.
2022 journal article
Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition
APPLIED PHYSICS LETTERS, 121(8).
2022 article
Modeling of deposit formation in mesoporous substrates via atomic layer deposition: Insights from pore-scale simulation
Gu, H., Lee, D. T., Corkery, P., Miao, Y., Kim, J.-S., Yuan, Y., … Tsapatsis, M. (2022, September 7). AICHE JOURNAL, Vol. 9.
2022 journal article
Reduced fatigue and leakage of ferroelectric TiN/Hf0.5Zr0.5O2/TiN capacitors by thin alumina interlayers at the top or bottom interface
NANOTECHNOLOGY, 34(12).
2022 article
Role of Oxygen Source on Buried Interfaces in Atomic-Layer- Deposited Ferroelectric Hafnia-Zirconia Thin Films
Hsain, H. A., Lee, Y., Lancaster, S., Materano, M., Alcala, R., Xu, B., … Jones, J. L. (2022, September 7). ACS APPLIED MATERIALS & INTERFACES, Vol. 9.
2022 journal article
Role of Oxygen Source on Buried Interfaces in Atomic-Layer- Deposited Ferroelectric Hafnia-Zirconia Thin Films
ACS APPLIED MATERIALS & INTERFACES, 14(37), 42232–42244.
2022 journal article
The influence of crystallographic texture on structural and electrical properties in ferroelectric Hf0.5Zr0.5O2
JOURNAL OF APPLIED PHYSICS, 132(24).
2022 article
Toxin-Blocking Textiles: Rapid, Benign, Roll-to-Roll Production of Robust MOF-Fabric Composites for Organophosphate Separation and Hydrolysis
Morgan, S. E. E., Willis, M. L. L., Dianat, G., Peterson, G. W. W., Mahle, J. J. J., & Parsons, G. N. N. (2022, November 18). CHEMSUSCHEM, Vol. 11.
2021 article
Fabrication of Non-Uniform Nanolattices with Spatially Varying Geometry and Material Composition
Chen, I.-T., Dai, Z., Chen, Y.-A., Parsons, G. N., & Chang, C.-H. (2021, July 26). ADVANCED MATERIALS INTERFACES, Vol. 7.
2021 review
Fibre-based composites from the integration of metal-organic frameworks and polymers
[Review of ]. NATURE REVIEWS MATERIALS, 6(7), 605–621.
2021 article
Freestanding Metal Organic Framework-Based Multifunctional Membranes Fabricated via Pseudomorphic Replication toward Liquid- and Gas-Hazards Abatement
Dai, Z., Pradeep, S., Zhu, J., Xie, W., Barton, H. F., Si, Y., … Parsons, G. N. (2021, October 24). ADVANCED MATERIALS INTERFACES, Vol. 10.
2021 article
Highly Breathable Chemically-Protective MOF-Fiber Catalysts
Lee, D. T., Dai, Z., Peterson, G. W., Hall, M. G., Pomerantz, N. L., Hoffman, N., & Parsons, G. N. (2021, October 27). ADVANCED FUNCTIONAL MATERIALS, Vol. 10.
2021 article
In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors
Nye, R. A., Wang, S., Uhlenbrock, S., Smythe, J. A., III, & Parsons, G. N. (2021, December 27). DALTON TRANSACTIONS, Vol. 51.
2021 review
Many routes to ferroelectric HfO2: A review of current deposition methods
[Review of ]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(1).
2021 journal article
Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching
ACS NANO, 15(7), 12276–12285.
2021 journal article
Nanopatterned Area-Selective Vapor Deposition of PEDOT on SiO2 vs Si-H: Improved Selectivity Using Chemical Vapor Deposition vs Molecular Layer Deposition
CHEMISTRY OF MATERIALS, 33(23), 9221–9230.
2021 journal article
Oxidative molecular layer deposition of PEDOT using volatile antimony(V) chloride oxidant
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 39(3).
2021 journal article
Stretchable and Multi-Metal-Organic Framework Fabrics Via High-Yield Rapid Sorption-Vapor Synthesis and Their Application in Chemical Warfare Agent Hydrolysis
ACS APPLIED MATERIALS & INTERFACES, 13(26), 31279–31284.
2021 journal article
Toward understanding the phase-selective growth mechanism of films and geometrically-shaped flakes of 2D MoTe2
RSC ADVANCES, 11(61), 38839–38848.
2021 journal article
Unexpectedly large remanent polarization of Hf0.5Zr0.5O2 metal-ferroelectric-metal capacitor fabricated without breaking vacuum
APPLIED PHYSICS LETTERS, 118(1).
2020 journal article
An Advanced Dual-Function MnO2-Fabric Air Filter Combining Catalytic Oxidation of Formaldehyde and High-Efficiency Fine Particulate Matter Removal
ADVANCED FUNCTIONAL MATERIALS, 30(42).
2020 review
Area-Selective Deposition: Fundamentals, Applications, and Future Outlook
[Review of ]. CHEMISTRY OF MATERIALS, 32(12), 4920–4953.
2020 journal article
Compositional dependence of crystallization temperatures and phase evolution in hafnia-zirconia (HfxZr1-x)O-2 thin films
APPLIED PHYSICS LETTERS, 116(19).
2020 journal article
Designing Intrinsically Microporous Polymer (PIM-1) Microfibers with Tunable Morphology and Porosity via Controlling Solvent/Nonsolvent/Polymer Interactions
ACS Applied Polymer Materials, 2(6), 2434–2443.
2020 journal article
Doubly Protective MOF-Photo-Fabrics: Facile Template-Free Synthesis of PCN-222-Textiles Enables Rapid Hydrolysis, Photo-Hydrolysis and Selective Oxidation of Multiple Chemical Warfare Agents and Simulants
CHEMISTRY-A EUROPEAN JOURNAL, 27(4), 1465–1472.
2020 journal article
Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching
JOURNAL OF APPLIED PHYSICS, 128(10).
2020 journal article
Fabrication of a freestanding metal organic framework predominant hollow fiber mat and its potential applications in gas separation and catalysis
Journal of Materials Chemistry A.
2020 article
History of atomic layer deposition and its relationship with the American Vacuum Society (vol 31, 050818, 2013)
Parsons, G. N., Elam, J. W., George, S. M., Haukka, S., Jeon, H., Kessels, W. M. M., … Rossnagel, S. M. (2020, May). JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 38.
2020 journal article
Polymer of intrinsic microporosity (PIM) based fibrous mat: combining particle filtration and rapid catalytic hydrolysis of chemical warfare agent simulants into a highly sorptive, breathable, and mechanically robust fiber matrix
Materials Today Advances, 8, 100085.
2020 article
Shock Initiation of Reactive Nanolaminates
SHOCK COMPRESSION OF CONDENSED MATTER - 2019, Vol. 2272.
2020 journal article
The Effect of Surface Hydroxylation on MOF Formation on ALD Metal Oxides: MOF-525 on TiO2/Polypropylene for Catalytic Hydrolysis of Chemical Warfare Agent Simulants
ACS APPLIED MATERIALS & INTERFACES, 12(13), 14690–14701.
2020 journal article
Thermal atomic layer etching of metallic tungsten via oxidation and etch reaction mechanism using O-2 or O-3 for oxidation and WCl6 as the chlorinating etchant
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 38(2).
2020 journal article
Understanding Molecular Layer Deposition Growth Mechanisms in Polyurea via Picosecond Acoustics Analysis
CHEMISTRY OF MATERIALS, 32(4), 1553–1563.
2019 journal article
Air, Water Vapor, and Aerosol Transport through Textiles with Surface Functional Coatings of Metal Oxides and Metal-Organic Frameworks
ACS APPLIED MATERIALS & INTERFACES, 11(27), 24683–24690.
2019 journal article
Functional model for analysis of ALD nucleation and quantification of area-selective deposition
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 37(2).
2019 journal article
Functionalized Textiles: Water-Stable Chemical-Protective Textiles via Euhedral Surface-Oriented 2D Cu-TCPP Metal-Organic Frameworks (Small 10/2019)
Small, 15(10), 1970054.
2019 journal article
Insight on the Sequential Vapor Infiltration Mechanisms of Trimethylaluminum with Poly(methyl methacrylate), Poly(vinylpyrrolidone), and Poly(acrylic acid)
JOURNAL OF PHYSICAL CHEMISTRY C, 123(26), 16146–16152.
2019 journal article
Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO2
CHEMISTRY OF MATERIALS, 31(13), 4793–4804.
2019 journal article
Investigation of the Corrosion Behavior of Atomic Layer Deposited Al2O3/TiO2 Nanolaminate Thin Films on Copper in 0.1 M NaCl
MATERIALS, 12(4).
2019 journal article
Protective Fabrics: Metal-Organic Framework Textiles for Rapid Photocatalytic Sulfur Mustard Simulant Detoxification
MATTER, 2(2), 404–415.
2019 journal article
Water-Stable Chemical-Protective Textiles via Euhedral Surface-Oriented 2D Cu-TCPP Metal-Organic Frameworks
SMALL, 15(10).
2018 journal article
Ab initio analysis of nucleation reactions during tungsten atomic layer deposition on Si(100) and W(110) substrates
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36(6).
2018 journal article
Area-Selective Atomic Layer Deposition of TiN, TiO2, and HfO2 on Silicon Nitride with inhibition on Amorphous Carbon
CHEMISTRY OF MATERIALS, 30(10), 3223–3232.
2018 journal article
Atomic Layer Deposition: Conformal Physical Vapor Deposition Assisted by Atomic Layer Deposition and Its Application for Stretchable Conductors (Adv. Mater. Interfaces 22/2018)
Advanced Materials Interfaces, 5(22), 1870109.
2018 journal article
Conformal Physical Vapor Deposition Assisted by Atomic Layer Deposition and Its Application for Stretchable Conductors
ADVANCED MATERIALS INTERFACES, 5(22).
2018 journal article
Control of Micro- and Mesopores in Carbon Nanofibers and Hollow Carbon Nanofibers Derived from Cellulose Diacetate via Vapor Phase Infiltration of Diethyl Zinc
ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 6(11), 13844–13853.
2018 journal article
Corrosion Mitigation Coatings for RF Sources and Components
IEEE Transactions on Electron Devices, 65(6), 2385–2392.
2018 journal article
Modeling and experimental demonstration of high-throughput flow-through spatial atomic layer deposition of Al2O3 coatings on textiles at atmospheric pressure
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36(3).
2018 journal article
Solvothermal Synthesis of MIL-96 and UiO-66-NH2 on Atomic Layer Deposited Metal Oxide Coatings on Fiber Mats
JOVE-JOURNAL OF VISUALIZED EXPERIMENTS, 6(136).
2018 journal article
Synthesis of organic aerogels with tailorable morphology and strength by controlled solvent swelling following Hansen solubility
SCIENTIFIC REPORTS, 8.
2018 journal article
Thermal atomic layer deposition of Sn metal using SnCl4 and a vapor phase silyl dihydropyrazine reducing agent
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36(6).
2018 journal article
Thermally Driven Self-Limiting Atomic Layer Etching of Metallic Tungsten Using WF6 and O-2
ACS APPLIED MATERIALS & INTERFACES, 10(10), 9147–9154.
2018 journal article
Toxic Organophosphate Hydrolysis Using Nanofiber-Templated UiO-66-NH2 Metal–Organic Framework Polycrystalline Cylinders
ACS Applied Materials & Interfaces, 10(30), 25794–25803.
2018 journal article
Tungsten-Carbon Nanotube Composite Photonic Crystals as Thermally Stable Spectral-Selective Absorbers and Emitters for Thermophotovoltaics
ADVANCED ENERGY MATERIALS, 8(27).
2017 journal article
Catalytic "MOF-Cloth" Formed via Directed Supramolecular Assembly of UiO-66-NH2 Crystals on Atomic Layer Deposition-Coated Textiles for Rapid Degradation of Chemical Warfare Agent Simulants
CHEMISTRY OF MATERIALS, 29(11), 4894–4903.
2017 journal article
Corrosion Protection of Copper Using Al2O3, TiO2, ZnO, HfO2, and ZrO2 Atomic Layer Deposition
ACS APPLIED MATERIALS & INTERFACES, 9(4), 4192–4201.
2017 conference paper
Corrosion mitigation coatings for RF sources and components
2017 eighteenth international vacuum electronics conference (ivec).
2017 journal article
Featherlight, Mechanically Robust Cellulose Ester Aerogels for Environmental Remediation
ACS Omega, 2(8), 4297–4305.
2017 journal article
In Situ Time-Resolved Attenuated Total Reflectance Infrared Spectroscopy for Probing Metal–Organic Framework Thin Film Growth
Chemistry of Materials, 29(20), 8804–8810.
2017 journal article
Intrinsic limitations of atomic layer deposition for pseudocapacitive metal oxides in porous electrochemical capacitor electrodes
JOURNAL OF MATERIALS CHEMISTRY A, 5(25), 13086–13097.
2017 journal article
Large-Area Nanolattice Film with Enhanced Modulus, Hardness, and Energy Dissipation
Scientific Reports, 7(1).
2017 journal article
Mapping differential cellular protein response of mouse alveolar epithelial cells to multi-walled carbon nanotubes as a function of atomic layer deposition coating
NANOTOXICOLOGY, 11(3), 313–326.
2017 journal article
Reversible Low-Temperature Metal Node Distortion during Atomic Layer Deposition of Al2O3 and TiO2 on UiO-66-NH2 Metal-Organic Framework Crystal Surfaces
ACS APPLIED MATERIALS & INTERFACES, 9(26), 22042–22054.
2017 journal article
STAT1-dependent and -independent pulmonary allergic and fibrogenic responses in mice after exposure to tangled versus rod-like multi-walled carbon nanotubes
PARTICLE AND FIBRE TOXICOLOGY, 14.
2017 journal article
Thermal Selective Vapor Etching of TiO2: Chemical Vapor Etching via WF6 and Self-Limiting Atomic Layer Etching Using WF6 and BCl3
CHEMISTRY OF MATERIALS, 29(16), 6653–6665.
2017 journal article
UiO-66-NH2 Metal Organic Framework (MOF) Nucleation on TiO2, ZnO, and Al2O3 Atomic Layer Deposition-Treated Polymer Fibers: Role of Metal Oxide on MOF Growth and Catalytic Hydrolysis of Chemical Warfare Agent Simulants
ACS APPLIED MATERIALS & INTERFACES, 9(51), 44847–44855.
2016 journal article
Atomic Layer Deposition for Sensitized Solar Cells: Recent Progress and Prospects
Advanced Materials Interfaces, 3(21), 1600354.
2016 journal article
Atomically Thin MoS2 Narrowband and Broadband Light Superabsorbers
ACS NANO, 10(8), 7493–7499.
Contributors: L. Huang n, G. Li n, A. Gurarslan n, Y. Yu n, R. Kirste n, W. Guo n, J. Zhao n, R. Collazo n
2016 journal article
Copper Benzenetricarboxylate Metal-Organic Framework Nucleation Mechanisms on Metal Oxide Powders and Thin Films formed by Atomic Layer Deposition
ACS APPLIED MATERIALS & INTERFACES, 8(14), 9514–9522.
Contributors: P. Lemaire n, J. Zhao n, P. Williams n, H. Walls *, S. Shepherd*, M. Losego n, G. Peterson, n
2016 chapter
Corrosion Mitigation Coatings for RF Sources and Components
In 2016 Ieee International Vacuum Electronics Conference (Ivec). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000386185700095&KeyUID=WOS:000386185700095
2016 conference paper
Corrosion mitigation coatings for RF sources and components
2016 ieee international vacuum electronics conference (ivec).
2016 journal article
Diffusion of CO2 in Large Crystals of Cu-BTC MOF
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 138(36), 11449–11452.
Contributors: T. Tovar *, J. Zhao n, W. Nunn n, H. Barton n, G. Peterson *, n , M. LeVan *
2016 journal article
Fabrication and design of metal nano-accordion structures using atomic layer deposition and interference lithography
NANOSCALE, 8(9), 4984–4990.
2016 journal article
Kevlar-Based Supercapacitor Fibers with Conformal Pseudocapacitive Metal Oxide and Metal Formed by ALD
Advanced Materials Interfaces, 3(21), 1600355.
2016 journal article
Thin Films: Atomic Layer Deposition for Sensitized Solar Cells: Recent Progress and Prospects (Adv. Mater. Interfaces 21/2016)
Advanced Materials Interfaces, 3(21).
2016 journal article
Ultra-Fast Degradation of Chemical Warfare Agents Using MOF-Nanofiber Kebabs
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 55(42), 13224–13228.
Contributors: J. Zhao n, D. Lee n, R. Yaga*, M. Hall, H. Barton n, I. Woodward n, C. Oldham n, H. Walls *, G. Peterson, n
2016 journal article
Understanding inherent substrate selectivity during atomic layer deposition: Effect of surface preparation, hydroxyl density, and metal oxide composition on nucleation mechanisms during tungsten ALD
JOURNAL OF CHEMICAL PHYSICS, 146(5).
Contributors: P. Lemaire n, M. King n & n
2016 journal article
Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates
Advanced Materials Interfaces, 4(4).
2016 journal article
Wicking Enhancement in Three-Dimensional Hierarchical Nanostructures
LANGMUIR, 32(32), 8029–8033.
2015 journal article
Atomic layer deposition coating of carbon nanotubes with zinc oxide causes acute phase immune responses in human monocytes in vitro and in mice after pulmonary exposure
PARTICLE AND FIBRE TOXICOLOGY, 13.
Contributors: E. Dandley n, A. Taylor n, K. Duke n, M. Ihrie n, K. Shipkowski n, n , J. Bonner n
2015 review
Atomic layer deposition on polymer fibers and fabrics for multifunctional and electronic textiles
[Review of ]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(1).
Contributors: A. Brozena n, C. Oldham n & n
2015 journal article
Charge Recombination Dynamics in Sensitized SnO2/TiO2 Core/Shell Photoanodes
Journal of Physical Chemistry C, 119(51), 28353–28360.
Contributors: R. Knauf*, B. Kalanyan n, n & J. Dempsey *
2015 journal article
Delayed Dissolution and Small Molecule Release from Atomic Layer Deposition Coated Electrospun Nanofibers
Advanced Materials Interfaces, 2(18), 1500229.
Contributors: N. Vogel n, P. Williams n, A. Brozena n, D. Sen n, S. Atanasov n, n , S. Khan n
2015 journal article
Effect of Meso- and Micro-Porosity in Carbon Electrodes on Atomic Layer Deposition of Pseudocapacitive V2O5 for High Performance Supercapacitors
Chemistry of Materials, 27(19), 6524–6534.
Contributors: J. Daubert n, N. Lewis n, H. Gotsch n, J. Mundy n, D. Monroe n, E. Dickey n , M. Losego *, n
2015 journal article
Facile Conversion of Hydroxy Double Salts to Metal-Organic Frameworks Using Metal Oxide Particles and Atomic Layer Deposition Thin-Film Templates
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 137(43), 13756–13759.
Contributors: J. Zhao n, W. Nunn n, P. Lemaire n, Y. Lin n, M. Dickey n , C. Oldham n, H. Walls *, G. Peterson, M. Losego *, n
2015 journal article
In Situ Conductance Analysis of Zinc Oxide Nucleation and Coalescence during Atomic Layer Deposition on Metal Oxides and Polymers
LANGMUIR, 31(26), 7274–7282.
2015 journal article
Inherent substrate-dependent growth initiation and selective-area atomic layer deposition of TiO2 using "water-free" metal-halide/metal alkoxide reactants
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(1).
Contributors: S. Atanasov n, B. Kalanyan n & n
2015 journal article
Low temperature platinum atomic layer deposition on nylon-6 for highly conductive and catalytic fiber mats
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(1).
Contributors: J. Mundy n, A. Shafiefarhood n, F. Li n , S. Khan n & n
2015 journal article
Multifunctional nano-accordion structures for stretchable transparent conductors
MATERIALS HORIZONS, 2(5), 486–494.
2015 journal article
Ordered 3D Thin-Shell Nanolattice Materials with Near-Unity Refractive Indices
ADVANCED FUNCTIONAL MATERIALS, 25(42), 6644–6649.
2015 journal article
Platinum-Free Cathode for Dye-Sensitized Solar Cells Using Poly(3,4-ethylenedioxythiophene) (PEDOT) Formed via Oxidative Molecular Layer Deposition
ACS APPLIED MATERIALS & INTERFACES, 7(7), 3866–3870.
Contributors: D. Kim n, S. Atanasov n, P. Lemaire n, K. Lee n & n
2015 journal article
Precise Nanoscale Surface Modification and Coating of Macroscale Objects: Open-Environment in Loco Atomic Layer Deposition on an Automobile
ACS APPLIED MATERIALS & INTERFACES, 7(35), 19523–19529.
2015 journal article
Rapid visible color change and physical swelling during water exposure in triethanolamine-metalcone films formed by molecular layer deposition
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(1).
Contributors: P. Lemaire n, C. Oldham n & n
2015 journal article
Toxicoproteomic analysis of pulmonary carbon nanotube exposure using LC-MS/MS
TOXICOLOGY, 329, 80–87.
Contributors: G. Hilton n, A. Taylor n, C. McClure n, n , J. Bonner n & M. Bereman n
2015 journal article
Using Hydrogen To Expand the Inherent Substrate Selectivity Window During Tungsten Atomic Layer Deposition
CHEMISTRY OF MATERIALS, 28(1), 117–126.
Contributors: B. Kalanyan n, P. Lemaire n, S. Atanasov n, M. Ritz n & n
2015 journal article
Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates
ADVANCED MATERIALS INTERFACES, 3(2).
Contributors: E. Dandley n, P. Lemaire n, Z. Zhu *, A. Yoon*, L. Sheet* & n
2014 journal article
A hybrid solar-redox scheme for liquid fuel and hydrogen coproduction
ENERGY & ENVIRONMENTAL SCIENCE, 7(6), 2033–2042.
Contributors: F. He n, J. Trainham *, n , J. Newman * & F. Li n
2014 journal article
Atmospheric Pressure Atomic Layer Deposition of Al2O3 Using Trimethyl Aluminum and Ozone
LANGMUIR, 30(13), 3741–3748.
2014 journal article
Atomic Layer Deposition Coating of Carbon Nanotubes with Aluminum Oxide Alters Pro-Fibrogenic Cytokine Expression by Human Mononuclear Phagocytes In Vitro and Reduces Lung Fibrosis in Mice In Vivo
PLOS ONE, 9(9).
Contributors: A. Taylor n, C. McClure n, K. Shipkowski n, E. Thompson n, S. Hussain *, S. Garantziotis *, n , J. Bonner n
2014 journal article
Atomic Layer Deposition of Metal Oxide Patterns on Nonwoven Fiber Mats using Localized Physical Compression
ACS APPLIED MATERIALS & INTERFACES, 6(12), 9280–9289.
Contributors: W. Sweet n, C. Oldham n & n
2014 journal article
Atomic Layer Deposition of TiO2 on Mesoporous nanolTO: Conductive Core-Shell Photoanodes for Dye-Sensitized Solar Cells
NANO LETTERS, 14(6), 3255–3261.
Contributors: L. Alibabaei *, B. Farnum *, B. Kalanyan n, M. Brennaman *, M. Losego n, n , T. Meyer *
2014 journal article
Coatings for electrospun nanofibers for use in harsh environments
Abstracts of Papers of the American Chemical Society, 247. http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000348457604158&KeyUID=WOS:000348457604158
2014 journal article
Conductivity and touch-sensor application for atomic layer deposition ZnO and Al:ZnO on nylon nonwoven fiber mats
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 33(1).
Contributors: W. Sweet n, C. Oldham n & n
2014 journal article
Conformal and highly adsorptive metal-organic framework thin films via layer-by-layer growth on ALD-coated fiber mats
JOURNAL OF MATERIALS CHEMISTRY A, 3(4), 1458–1464.
Contributors: J. Zhao n, B. Gong n, W. Nunn n, P. Lemaire n, E. Stevens n, F. Sidi n, P. Williams n, C. Oldham n
2014 journal article
Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina (Al2O3)
APPLIED PHYSICS LETTERS, 104(25).
Contributors: C. Gorham *, J. Gaskins *, n , M. Losego n & P. Hopkins *
2014 journal article
Effect of Al2O3 ALD coating and vapor infusion on the bulk mechanical response of elastic and viscoelastic polymers
Surface &Amp; Coatings Technology, 261, 411–417.
Contributors: C. McClure n, C. Oldham n & n
2014 journal article
Free-Floating Synthetic Nanosheets by Atomic Layer Deposition
ACS APPLIED MATERIALS & INTERFACES, 6(14), 10981–10985.
2014 journal article
High performance photocatalytic metal oxide synthetic bi-component nanosheets formed by atomic layer deposition
MATERIALS HORIZONS, 1(4), 419–423.
2014 journal article
Highly Adsorptive, MOF-Functionalized Nonwoven Fiber Mats for Hazardous Gas Capture Enabled by Atomic Layer Deposition
Advanced Materials Interfaces, 1(4), 1400040.
Contributors: J. Zhao n, M. Losego n, P. Lemaire n, P. Williams n, B. Gong n, S. Atanasov n, T. Blevins n, C. Oldham n
2014 journal article
Highly Conductive and Conformal Poly(3,4-ethylenedioxythiophene) (PEDOT) Thin Films via Oxidative Molecular Layer Deposition
CHEMISTRY OF MATERIALS, 26(11), 3471–3478.
Contributors: S. Atanasov n, M. Losego n, B. Gong n, E. Sachet n, J. Maria n, P. Williams n, n
2014 journal article
Improved cut-resistance of Kevlar (R) using controlled interface reactions during atomic layer deposition of ultrathin (< 50 angstrom) inorganic coatings
Improved cut-resistance of Kevlar (R) using controlled interface reactions during atomic layer deposition of ultrathin (< 50 angstrom) inorganic coatings. JOURNAL OF MATERIALS CHEMISTRY A, 2(41), 17371–17379.
Contributors: S. Atanasov n, C. Oldham n, K. Slusarski*, J. Taggart-Scarff *, S. Sherman*, K. Senecal *, S. Filocamo*, Q. McAllister*, E. Wetzel *, n
2014 journal article
Metal-Organic Frameworks: Highly Adsorptive, MOF-Functionalized Nonwoven Fiber Mats for Hazardous Gas Capture Enabled by Atomic Layer Deposition (Adv. Mater. Interfaces 4/2014)
Advanced Materials Interfaces, 1(4), n/a-n/a.
2014 journal article
Solar water splitting in a molecular photoelectrochemical cell
Abstracts of Papers of the American Chemical Society, 247. http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000348457601193&KeyUID=WOS:000348457601193
2014 journal article
Stabilizing chromophore binding on TiO2 for long-term stability of dye-sensitized solar cells using multicomponent atomic layer deposition
PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 16(18), 8615–8622.
Contributors: D. Kim n, M. Losego n, K. Hanson *, L. Alibabaei *, K. Lee n, T. Meyer *, n
2014 journal article
Temperature-dependent reaction between trimethylaluminum and poly(methyl methacrylate) during sequential vapor infiltration: experimental and ab initio analysis
JOURNAL OF MATERIALS CHEMISTRY C, 2(44), 9416–9424.
Contributors: E. Dandley n, C. Needham n, P. Williams n, A. Brozena n, C. Oldham n & n
2014 journal article
Visible Light Driven Benzyl Alcohol Dehydrogenation in a Dye-Sensitized Photoelectrosynthesis Cell
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 136(27), 9773–9779.
Contributors: W. Song*, A. Vannucci *, B. Farnum *, A. Lapides*, M. Brennaman *, B. Kalanyan n, L. Alibabaei *, J. Concepcion *
2013 journal article
Atomic Layer Deposition of High Performance Ultrathin TiO2 Blocking Layers for Dye-Sensitized Solar Cells
CHEMSUSCHEM, 6(6), 1014–1020.
2013 journal article
Atomic Layer Deposition of High Performance Ultrathin TiO2 Blocking Layers for Dye-Sensitized Solar Cells
ChemSusChem, 6(6), 930–930.
2013 journal article
Bi-layer Al2O3/ZnO atomic layer deposition for controllable conductive coatings on polypropylene nonwoven fiber mats
JOURNAL OF APPLIED PHYSICS, 113(19).
Contributors: W. Sweet n, J. Jur n & n
2013 journal article
Cover Picture: Atomic Layer Deposition of High Performance Ultrathin TiO2Blocking Layers for Dye-Sensitized Solar Cells (ChemSusChem 6/2013)
ChemSusChem, 6(6), 929–929.
2013 journal article
Crossing the divide between homogeneous and heterogeneous catalysis in water oxidation
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 110(52), 20918–20922.
Contributors: A. Vannucci *, L. Alibabaei *, M. Losego n, J. Concepcion *, B. Kalanyan n, n , T. Meyer *
2013 journal article
Highly Conductive and Flexible Nylon-6 Nonwoven Fiber Mats Formed using Tungsten Atomic Layer Deposition
ACS Applied Materials & Interfaces, 5(11), 5253–5259.
Contributors: B. Kalanyan n, C. Oldham n, W. Sweet n & n
2013 review
History of atomic layer deposition and its relationship with the American Vacuum Society
[Review of ]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 31(5).
Contributors: , J. Elam *, S. George *, S. Haukka*, H. Jeon *, W. Kessels *, M. Leskela *, P. Poodt *, M. Ritala *, S. Rossnagel n
2013 journal article
Large effect of titanium precursor on surface reactivity and mechanical strength of electrospun nanofibers coated with TiO2 by atomic layer deposition
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 31(6).
Contributors: C. McClure n, C. Oldham n, H. Walls* & n
2013 journal article
Low-Temperature Atomic Layer Deposition of Tungsten using Tungsten Hexafluoride and Highly-diluted Silane in Argon
CHEMICAL VAPOR DEPOSITION, 19(4-6), 161–166.
Contributors: B. Kalanyan n, M. Losego n, C. Oldham n & n
2013 review
Mechanisms and reactions during atomic layer deposition on polymers
[Review of ]. COORDINATION CHEMISTRY REVIEWS, 257(23-24), 3323–3331.
Contributors: , S. Atanasov n, E. Dandley n, C. Devine n, B. Gong n, J. Jur n, K. Lee n, C. Oldham n n
2013 journal article
Oxygen Electroreduction on Ti- and Fe-Containing Carbon Fibers
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 160(8), F769–F778.
Contributors: J. McClure n, C. Devine n, R. Jiang *, D. Chu*, J. Cuomo n, n , P. Fedkiw n
2013 journal article
Prevention of Ultraviolet (UV)-Induced Surface Damage and Cytotoxicity of Polyethersulfone Using Atomic Layer Deposition (ALD) Titanium Dioxide
JOM, 65(4), 550–556.
Contributors: P. Petrochenko n, G. Scarel n, G. Hyde n, n , S. Skoog n, Q. Zhang *, P. Goering *, R. Narayan n
2013 journal article
Solar water splitting in a molecular photoelectrochemical cell
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 110(50), 20008–20013.
Contributors: L. Alibabaei *, M. Brennaman *, M. Norris *, B. Kalanyan n, W. Song*, M. Losego n, J. Concepcion *, R. Binstead*, n , T. Meyer *
2013 journal article
Solid Electrolyte Interphase on Lithium-Ion Carbon Nanofiber Electrodes by Atomic and Molecular Layer Deposition
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 160(11), A1971–A1978.
Contributors: A. Loebl n, C. Oldham n, C. Devine n, B. Gong n, S. Atanasov n, n , P. Fedkiw n
2013 journal article
Solution-Processed, Antimony-Doped Tin Oxide Colloid Films Enable High-Performance TiO2 Photoanodes for Water Splitting
NANO LETTERS, 13(4), 1481–1488.
Contributors: Q. Peng *, B. Kalanyan n, P. Hoertz*, A. Miller *, D. Kim n, K. Hanson *, L. Alibabaei *, J. Liu *
2013 journal article
Spectroscopic Detection of Medium Range Order in Device Grade Hydrogenated Amorphous Silicon
JAPANESE JOURNAL OF APPLIED PHYSICS, 52(4).
2013 journal article
Spectroscopic Detection of Medium Range Order in Hydrogenated Amorphous Silicon, a-Si(H): Applications in Photovolatics, Thin Film Transistors and Si-based Microelectronics
Physics Procedia, 44, 91–98.
2013 journal article
Stabilizing Small Molecules on Metal Oxide Surfaces Using Atomic Layer Deposition
NANO LETTERS, 13(10), 4802–4809.
Contributors: K. Hanson *, M. Losego n, B. Kalanyan n, n & T. Meyer *
2013 journal article
Synthesis of Mixed Ceramic MgxZn1–xO Nanofibers via Mg2+ Doping Using Sol–Gel Electrospinning
Langmuir, 29(12), 4159–4166.
Contributors: Y. Aykut n, n , B. Pourdeyhimi n & S. Khan n
2013 journal article
Three-dimensional self-assembled photonic crystals with high temperature stability for thermal emission modification
NATURE COMMUNICATIONS, 4.
Contributors: K. Arpin *, M. Losego n, A. Cloud*, H. Ning *, J. Mallek*, N. Sergeant*, L. Zhu *, Z. Yu *
2012 journal article
Atomic layer deposition of Ru onto organic monolayers: Shifting metal effective work function using monolayer structure
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1).
Contributors: K. Park n & n
2012 journal article
Caprolactone Ring-Opening Molecular Layer Deposition of Organic-Aluminum Oxide Polymer Films
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 1(4), P210–P215.
Contributors: B. Gong n & n
2012 journal article
Directed inorganic modification of bi-component polymer fibers by selective vapor reaction and atomic layer deposition
POLYMER, 53(21), 4631–4636.
Contributors: B. Gong*, J. Spagnola*, S. Arvidson*, S. Khan* & *
2012 journal article
Mechanisms for hydrophilic/hydrophobic wetting transitions on cellulose cotton fibers coated using Al2O3 atomic layer deposition
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1).
2012 journal article
Mesoporous Metal Oxides by Vapor Infiltration and Atomic Layer Deposition on Ordered Surfactant Polymer Films
LANGMUIR, 28(32), 11915–11922.
2012 journal article
Nanoscale ceramic surface modification of textiles by atomic layer deposition
American Ceramic Society Bulletin, 91(6), 24–27. http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000307316900013&KeyUID=WOS:000307316900013
Contributors: J. Jur &
2012 journal article
Oligomer Orientation in Vapor-Molecular-Layer-Deposited Alkyl-Aromatic Polyamide Films
LANGMUIR, 28(28), 10464–10470.
Contributors: Q. Peng n, K. Efimenko n , J. Genzer n & n
2012 journal article
Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition
JOURNAL OF MATERIALS CHEMISTRY, 22(31), 15672–15682.
Contributors: B. Gong n & n
2012 journal article
RESOURCE-FOCUSED TOOLCHAIN FOR RAPID PROTOTYPING OF EMBEDDED SYSTEMS
JOURNAL OF CIRCUITS SYSTEMS AND COMPUTERS, 21(2).
2012 journal article
Stabilization of [Ru(bpy)(2)(4,4 '-(PO3H2)bpy)](2+) on Mesoporous TiO2 with Atomic Layer Deposition of Al2O3
CHEMISTRY OF MATERIALS, 25(1), 3–5.
Contributors: K. Hanson *, M. Losego n, B. Kalanyan n, D. Ashford *, n & T. Meyer *
2012 journal article
Stable anatase TiO2 coating on quartz fibers by atomic layer deposition for photoactive light-scattering in dye-sensitized solar cells
NANOSCALE, 4(15), 4731–4738.
Contributors: D. Kim n, H. Koo n, J. Jur n, M. Woodroof n, B. Kalanyan n, K. Lee n, C. Devine n, n
2012 journal article
Temperature and Exposure Dependence of Hybrid Organic-Inorganic Layer Formation by Sequential Vapor Infiltration into Polymer Fibers
LANGMUIR, 28(44), 15697–15704.
Contributors: H. Akyildiz n, R. Padbury n, n & J. Jur n
2012 journal article
Templating Quantum Dot to Phase-Transformed Electrospun TiO2 Nanofibers for Enhanced Photo-Excited Electron Injection
ACS APPLIED MATERIALS & INTERFACES, 4(8), 3837–3845.
Contributors: Y. Aykut n, C. Saquing n, B. Pourdeyhimi n , n & S. Khan n
2011 journal article
Atomic Layer Deposited Oxides for Passivation of Silicon Photoanodes for Solar Photoelectrochemical Cells
Atomic Layer Deposition Applications 7, 41(2), 285–292.
Contributors: B. Kalanyan n, n , J. Elam, A. Londergan, O. VanDerStraten, F. Roozeboom, S. DeGendt, S. Bent, A. Delabie
2011 journal article
Atomic Layer Deposition of Al2O3 and ZnO at Atmospheric Pressure in a Flow Tube Reactor
ACS APPLIED MATERIALS & INTERFACES, 3(2), 299–308.
Contributors: J. Jur n & n
2011 journal article
Atomic Layer Deposition of Conductive Coatings on Cotton, Paper, and Synthetic Fibers: Conductivity Analysis and Functional Chemical Sensing Using “All-Fiber” Capacitors
Advanced Functional Materials, 21(11), 1993–2002.
2011 review
Atomic layer deposition for electrochemical energy generation and storage systems
[Review of ]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1).
2011 journal article
Atomic layer deposition of titanium dioxide on cellulose acetate for enhanced hemostasis
Biotechnology Journal, 6(2), 213–223.
Contributors: G. Hyde n, S. Stewart n, G. Scarel n, n , C. Shih*, C. Shih*, S. Lin*, Y. Su*, N. Monteiro-Riviere n , R. Narayan n
2011 journal article
Coating Alumina on Catalytic Iron Oxide Nanoparticles for Synthesizing Vertically Aligned Carbon Nanotube Arrays
ACS Applied Materials & Interfaces, 3(11), 4180–4184.
Contributors: X. Wang n, P. Krommenhoek n, P. Bradford n, B. Gong n, J. Tracy n , n , T. Luo n, Y. Zhu n
2011 journal article
Conformal Organic - Inorganic Hybrid Network Polymer Thin Films by Molecular Layer Deposition using Trimethylaluminum and Glycidol
JOURNAL OF PHYSICAL CHEMISTRY B, 115(19), 5930–5938.
2011 journal article
Correction to “Conformal Organic-Inorganic Hybrid Network Polymer Thin Films by Molecular Layer Deposition using Trimethylaluminum and Glycidol”
Correction to “Conformal Organic-Inorganic Hybrid Network Polymer Thin Films by Molecular Layer Deposition using Trimethylaluminum and Glycidol.” The Journal of Physical Chemistry B, 115(37), 11028–11028.
2011 journal article
Effect of temperature and gas velocity on growth per cycle during Al2O3 and ZnO atomic layer deposition at atmospheric pressure
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1).
2011 journal article
Electronic Textiles: Atomic Layer Deposition of Conductive Coatings on Cotton, Paper, and Synthetic Fibers: Conductivity Analysis and Functional Chemical Sensing Using “All-Fiber” Capacitors (Adv. Funct. Mater. 11/2011)
Advanced Functional Materials, 21(11), 1948–1948.
2011 journal article
Encapsulation and Chemical Resistance of Electrospun Nylon Nanofibers Coated Using Integrated Atomic and Molecular Layer Deposition
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 158(9), D549–D556.
Contributors: C. Oldham*, B. Gong*, J. Spagnola n, J. Jur*, K. Senecal *, T. Godfrey*, *
2011 journal article
Fiber Containment for Improved Laboratory Handling and Uniform Nanocoating of Milligram Quantities of Carbon Nanotubes by Atomic Layer Deposition
Langmuir, 27(23), 14497–14507.
Contributors: C. Devine n, C. Oldham n, J. Jur n, B. Gong n & n
2011 journal article
Highly active photocatalytic ZnO nanocrystalline rods supported on polymer fiber mats: Synthesis using atomic layer deposition and hydrothermal crystal growth
APPLIED CATALYSIS A-GENERAL, 407(1-2), 211–216.
2011 journal article
Hydrophilic mechanical buffer layers and stable hydrophilic finishes on polydimethylsiloxane using combined sequential vapor infiltration and atomic/molecular layer deposition
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1).
Contributors: B. Gong n, J. Spagnola n & n
2011 journal article
Making inert polypropylene fibers chemically responsive by combining atomic layer deposition and vapor phase chemical grafting
NANOTECHNOLOGY, 22(15).
2011 journal article
Order-Disorder Phase Conversion of FePt Nanoparticles for Ultrahigh-Density Magnetic Recording
Microscopy and Microanalysis, 17(S2), 1830–1831.
2011 journal article
Paper deacidification and UV protection using ZnO atomic layer deposition
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1).
2011 journal article
Progress and future directions for atomic layer deposition and ALD-based chemistry
MRS BULLETIN, 36(11), 865–871.
Contributors: , S. George * & M. Knez * n
2011 journal article
Sequential Vapor Infiltration of Metal Oxides into Sacrificial Polyester Fibers: Shape Replication and Controlled Porosity of Microporous/Mesoporous Oxide Monoliths
Chemistry of Materials, 23(15), 3476–3485.
2011 conference paper
SiNx Charge Trap Nonvolatile Memory Based on ZnO Thin Film Transistor Prepared by Atomic Layer Deposition
Presented at the PHYSICS OF SEMICONDUCTORS: 30th International Conference on the Physics of Semiconductors.
Event: PHYSICS OF SEMICONDUCTORS: 30th International Conference on the Physics of Semiconductors
2011 journal article
SiNx charge-trap nonvolatile memory based on ZnO thin-film transistors
APPLIED PHYSICS LETTERS, 99(11).
2011 journal article
Sinter-free phase conversion and scanning transmission electron microscopy of FePt nanoparticle monolayers
NANOSCALE, 3(10), 4142–4149.
Contributors: A. Johnston-Peck n, G. Scarel n, J. Wang n, n & J. Tracy n
2011 review
Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition
[Review of ]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1).
Contributors: P. Poodt, D. Cameron *, E. Dickey, S. George *, V. Kuznetsov, n , F. Roozeboom *, G. Sundaram, A. Vermeer
2011 journal article
Spectroscopic detection of medium range order in device quality hydrogenated amorphous silicon, a-Si(H)
Journal of Optoelectronics and Advanced Materials, 13(11-12), 1586–1589.
2011 journal article
Wetting properties induced in nano-composite POSS-MA polymer films by atomic layer deposited oxides
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1).
Contributors: K. Vasquez*, A. Vincent-Johnson*, W. Hughes *, B. Augustine *, K. Lee n, n , G. Scarel*
2010 journal article
Angular behavior of the Berreman effect investigated in uniform Al2O3 layers formed by atomic layer deposition
JOURNAL OF PHYSICS-CONDENSED MATTER, 22(15).
Contributors: G. Scarel n, J. Na n & n
2010 journal article
Atomic Layer Deposition on Polymers: Applications to Physical Encapsulation of Electrospun Nylon Nanofibers
Atomic Layer Deposition Applications 6, 33(2), 279–290. http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000313617900030&KeyUID=WOS:000313617900030
2010 patent
Nano-structured photovoltaic solar cell and related methods
2010 journal article
Phonon Response in the Infrared Region to Thickness of Oxide Films Formed by Atomic Layer Deposition
APPLIED SPECTROSCOPY, 64(1), 120–126.
2010 journal article
Surface and sub-surface reactions during low temperature aluminium oxide atomic layer deposition on fiber-forming polymers
JOURNAL OF MATERIALS CHEMISTRY, 20(20), 4213–4222.
Contributors: J. Spagnola n, B. Gong n, S. Arvidson n, J. Jur n, S. Khan n & n
2010 journal article
Surface texture and wetting stability of polydimethylsiloxane coated with aluminum oxide at low temperature by atomic layer deposition
Journal of Vacuum Science &Amp; Technology a, 28(6), 1330–1337.
Contributors: J. Spagnola n, B. Gong n & n
2010 journal article
Temperature-Dependent Subsurface Growth during Atomic Layer Deposition on Polypropylene and Cellulose Fibers
LANGMUIR, 26(11), 8239–8244.
Contributors: J. Jur n, J. Spagnola n, K. Lee n, B. Gong n, Q. Peng n & n
2009 journal article
"Zincone" Zinc Oxide-Organic Hybrid Polymer Thin Films Formed by Molecular Layer Deposition
CHEMISTRY OF MATERIALS, 21(5), 820–830.
Contributors: Q. Peng n, B. Gong n, R. VanGundy n & n
2009 journal article
Antifungal Textiles Formed Using Silver Deposition in Supercritical Carbon Dioxide
Journal of Materials Engineering and Performance, 19(3), 368–373.
Contributors: S. Gittard n, D. Hojo n, G. Hyde n, G. Scarel n, R. Narayan n & n
2009 journal article
Atomic Layer Deposition and Abrupt Wetting Transitions on Nonwoven Polypropylene and Woven Cotton Fabrics
LANGMUIR, 26(4), 2550–2558.
2009 journal article
Atomic layer deposition and biocompatibility of titanium nitride nano-coatings on cellulose fiber substrates
BIOMEDICAL MATERIALS, 4(2).
Contributors: G. Hyde n, S. McCullen*, S. Jeon *, S. Stewart n, H. Jeon *, E. Loboa *, n
2009 journal article
Bi-directional Kirkendall Effect in Coaxial Microtuble Nanolaminate Assemblies Fabricated by Atomic Layer Deposition
ACS NANO, 3(3), 546–554.
Contributors: Q. Peng*, X. Sun, J. Spagnola n, C. Saquing*, S. Khan* , R. Spontak n , *
2009 journal article
In Situ Analysis of Dopant Incorporation, Activation, and Film Growth during Thin Film ZnO and ZnO:Al Atomic Layer Deposition
JOURNAL OF PHYSICAL CHEMISTRY C, 114(1), 383–388.
2009 journal article
Role of Gas Doping Sequence in Surface Reactions and Dopant Incorporation during Atomic Layer Deposition of Al-Doped ZnO
CHEMISTRY OF MATERIALS, 21(23), 5585–5593.
2009 journal article
Surface Polarity Shielding and Hierarchical ZnO Nano-Architectures Produced Using Sequential Hydrothermal Crystal Synthesis and Thin Film Atomic Layer Deposition
ACS NANO, 3(10), 3191–3199.
2008 journal article
Berreman effect in infrared absorption spectroscopy of ionic oxide coatings formed by atomic layer deposition on three-dimensional structures
JOURNAL OF APPLIED PHYSICS, 104(9).
2008 journal article
Conformal metal oxide coatings on nanotubes by direct low temperature metal-organic pyrolysis in supercritical carbon dioxide
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 26(3), 978–982.
Contributors: Q. Peng n, J. Spagnola n, H. Daisuke n, K. Park n & n
2008 journal article
Nanoencapsulation and Stabilization of Single-Molecule/Particle Electronic Nanoassemblies Using Low-Temperature Atomic Layer Deposition
JOURNAL OF PHYSICAL CHEMISTRY C, 112(51), 20510–20517.
Contributors: J. Na n, J. Ayres n, K. Chandra n, C. Gorman n & n
2008 journal article
Self-catalyzed hydrogenolysis of nickelocene: Functional metal coating of three-dimensional nanosystems at low temperature
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 155(9), D580–D582.
Contributors: Q. Peng*, J. Spagnola n & *
2007 journal article
Atomic layer deposition of Conformal inorganic nanoscale coatings on three-dimensional natural fiber systems: Effect of surface topology on film growth characteristics
LANGMUIR, 23(19), 9844–9849.
Contributors: G. Hyde n, K. Park n, S. Stewart n, J. Hinestroza n & n
2007 journal article
Atomic layer deposition on electrospun polymer fibers as a direct route to Al2O3 microtubes with precise wall thickness control
NANO LETTERS, 7(3), 719–722.
Contributors: Q. Peng n, X. Sun n, J. Spagnola n, G. Hyde n, R. Spontak n & n
2007 journal article
Conduction mechanisms and stability of single molecule nanoparticle/molecule/nanoparticle junctions
Nanotechnology, 18(3), 035203.
Contributors: J. Na n, J. Ayres n, K. Chandra n, C. Chu n, C. Gorman n & n
2007 journal article
Conductivity in alkylamine/gold and alkanethiol/gold molecular junctions measured in molecule/nanoparticle/molecule bridges and conducting probe structures
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 129(8), 2287–2296.
2007 journal article
Enhanced conduction through isocyanide terminal groups in alkane and biphenylene molecules measured in molecule/nanoparticle/molecule junctions
JOURNAL OF PHYSICAL CHEMISTRY C, 111(22), 8080–8085.
2007 journal article
In situ Auger electron spectroscopy study of atomic layer deposition: Growth initiation and interface formation reactions during ruthenium ALD on Si-H, SiO2, and HfO2 surfaces
LANGMUIR, 23(11), 6106–6112.
2007 journal article
Low temperature metal oxide film deposition and reaction kinetics in supercritical carbon dioxide
THIN SOLID FILMS, 516(15), 4997–5003.
2007 journal article
Real-time conductivity analysis through single-molecule electrical junctions
Nanotechnology, 18(42), 424001.
Contributors: J. Na n, J. Ayres*, K. Chandra*, C. Gorman* & *
2006 journal article
Charge generation during oxidation of thin Hf metal films on silicon
THIN SOLID FILMS, 513(1-2), 201–205.
Contributors: T. Gougousi n, D. Terry n & n
2006 journal article
Selective area atomic layer deposition of rhodium and effective work function characterization in capacitor structures
APPLIED PHYSICS LETTERS, 89(4).
Contributors: K. Park n & n
2006 journal article
Solvent enhanced resist flow for room temperature imprint lithography
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 24(2), 818–822.
Contributors: C. Chu n & n
2006 journal article
Supercritical-carbon dioxide-assisted cyclic deposition of metal oxide and metal thin films
APPLIED PHYSICS LETTERS, 88(9).
Contributors: D. Barua n, T. Gougousi n, E. Young n & n
2005 journal article
Designing interface composition and structure in high dielectric constant gate stacks
High Dielectric Constant Materials, 16, 287–310. http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=CCC&KeyUT=CCC:000227551500010&KeyUID=CCC:000227551500010
2005 journal article
In-situ infrared spectroscopy and density functional theory modeling of hafnium alkylamine adsorption on Si-OH and Si-H surfaces
CHEMISTRY OF MATERIALS, 17(21), 5305–5314.
Contributors: M. Kelly n, J. Han n, C. Musgrave n & n
2005 journal article
Metal oxide thin films deposited from metal organic precursors in supercritical CO2 solutions
CHEMISTRY OF MATERIALS, 17(20), 5093–5100.
Contributors: T. Gougousi n, D. Barua n, E. Young n & n
2005 journal article
Microcontact patterning of ruthenium gate electrodes by selective area atomic layer deposition
APPLIED PHYSICS LETTERS, 86(5).
Contributors: K. Park n, J. Doub n, T. Gougousi n & n
2005 chapter
Thermal stability studies of advanced gate stack structures on Si (100)
In Characterization and Metrology for ULSI Technology 2005 (Vol. 788, pp. 156–160). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000233588000023&KeyUID=WOS:000233588000023
2004 journal article
Bulk and interface charge in low temperature silicon nitride for thin film transistors on plastic substrates
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 22(6), 2256–2260.
Contributors: K. Park n & n
2004 article
Effect of N-2 plasma on yttrium oxide and yttrium-oxynitride dielectrics
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 22, pp. 445–451.
Contributors: D. Niu n, R. Ashcraft n, C. Hinkle n & n
2004 patent
Non-crystalline oxides for use in microelectronic, optical, and other applications
Washington, DC: U.S. Patent and Trademark Office.
2004 journal article
Postdeposition reactivity of sputter-deposited high-dielectric-constant films with ambient H2O and carbon-containing species
JOURNAL OF APPLIED PHYSICS, 95(3), 1391–1396.
Contributors: T. Gougousi n & n
2003 article
Bonding and structure of ultrathin yttrium oxide films for Si field effect transistor gate dielectric applications
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 21, pp. 1792–1797.
2003 journal article
Carbonate formation during post-deposition ambient exposure of high-k dielectrics
APPLIED PHYSICS LETTERS, 83(17), 3543–3545.
Contributors: T. Gougousi n, D. Niu n, R. Ashcraft n & n
2003 journal article
Chemical, physical, and electrical characterizations of oxygen plasma assisted chemical vapor deposited yttrium oxide on silicon
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 150(5), F102–F109.
Contributors: D. Niu n, R. Ashcraft n, Z. Chen *, S. Stemmer * & n
2003 patent
High dielectric constant metal silicates formed by controlled metal-surface reactions
Washington, DC: U.S. Patent and Trademark Office.
2003 chapter
Kinetics of charge generation during formation of Hf and Zr silicate dielectrics
In Comos Front-End Materials and Process Technology (Vol. 765, pp. 79–84). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000186232900011&KeyUID=WOS:000186232900011
2003 journal article
Properties of La-silicate high-K dielectric films formed by oxidation of La on silicon
JOURNAL OF APPLIED PHYSICS, 93(3), 1691–1696.
Contributors: T. Gougousi n, M. Kelly n, D. Terry n & n
2002 journal article
Ab initio analysis of silyl precursor physisorption and hydrogen abstraction during low temperature silicon deposition
SURFACE SCIENCE, 496(3), 307–317.
Contributors: A. Gupta n, H. Yang n & n
2002 journal article
Effect of hydrogen on adsorbed precursor diffusion kinetics during hydrogenated amorphous silicon deposition
Applied Physics Letters, 80(13), 2356–2358.
2002 journal article
Electron energy-loss spectroscopy analysis of interface structure of yttrium oxide gate dielectrics on silicon
APPLIED PHYSICS LETTERS, 81(4), 676–678.
Contributors: D. Niu n, R. Ashcraft n, Z. Chen*, S. Stemmer * & n
2002 journal article
Elementary reaction schemes for physical and chemical vapor deposition of transition metal oxides on silicon for high-k gate dielectric applications
JOURNAL OF APPLIED PHYSICS, 91(9), 6173–6180.
Contributors: D. Niu n, R. Ashcraft n, M. Kelly n, J. Chambers *, T. Klein * & n
2002 chapter
Interface reactions during oxygen plasma assisted chemical vapor deposition of yttrium oxide on silicon
In Semiconductor Silicon 2002, Vols 1 and 2 (Vol. 2002, pp. 429–439). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000180812100038&KeyUID=WOS:000180812100038
2002 journal article
Issues in high-kappa gate stack interfaces
MRS BULLETIN, 27(3), 212–216.
Contributors: V. Misra* , G. Lucovsky* & *
2002 journal article
Reactions of Y2O3 films with (001) Si substrates and with polycrystalline Si capping layers
APPLIED PHYSICS LETTERS, 81(4), 712–714.
Contributors: S. Stemmer *, D. Klenov*, Z. Chen *, D. Niu n, R. Ashcraft n & n
2002 journal article
The role of the OH species in high-k/polycrystalline silicon gate electrode interface reactions
APPLIED PHYSICS LETTERS, 80(23), 4419–4421.
Contributors: T. Gougousi n, M. Kelly n & n
2002 journal article
Water absorption and interface reactivity of yttrium oxide gate dielectrics on silicon
APPLIED PHYSICS LETTERS, 80(19), 3575–3577.
Contributors: D. Niu n, R. Ashcraft n & n
2001 journal article
Effects of surface pretreatments on interface structure during formation of ultra-thin yttrium silicate dielectric films on silicon
APPLIED SURFACE SCIENCE, 181(1-2), 78–93.
Contributors: J. Chambers n, B. Busch*, W. Schulte*, T. Gustafsson*, E. Garfunkel *, S. Wang n, D. Maher n, T. Klein*, n
2001 journal article
Physical and electrical characterization of ultrathin yttrium silicate insulators on silicon
JOURNAL OF APPLIED PHYSICS, 90(2), 918–933.
Contributors: J. Chambers n & n
2001 journal article
Surface transport kinetics in low-temperature silicon deposition determined from topography evolution
PHYSICAL REVIEW B, 65(3).
Contributors: K. Bray n & n
2000 article
Bond strain, chemical induction, and OH incorporation in low-temperature (350-100 degrees C) plasma deposited silicon dioxide films
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 18, pp. 1764–1769.
Contributors: A. Gupta n & n
2000 article
Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 18, pp. 683–689.
Contributors: C. Yang n, L. Smith n, C. Arthur n & n
2000 article
Surface reactions in very low temperature (< 150 degrees C) hydrogenated amorphous silicon deposition, and applications to thin film transistors
Parsons, G. N. (2000, May). Surface reactions in very low temperature (< 150 degrees C) hydrogenated amorphous silicon deposition, and applications to thin film transistors. JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 266, pp. 23–30.
2000 journal article
Yttrium silicate formation on silicon: Effect of silicon preoxidation and nitridation on interface reaction kinetics
APPLIED PHYSICS LETTERS, 77(15), 2385–2387.
Contributors: J. Chambers n & n
1999 journal article
Evidence of aluminum silicate formation during chemical vapor deposition of amorphous Al2O3 thin films on Si(100)
APPLIED PHYSICS LETTERS, 75(25), 4001–4003.
Contributors: T. Klein n, D. Niu n, W. Epling n, W. Li n, D. Maher n, C. Hobbs*, R. Hegde*, I. Baumvol*, n
1999 article
Hydrogenated silicon nitride thin films deposited between 50 and 250 degrees C using nitrogen/silane mixtures with helium dilution
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 17, pp. 108–112.
Contributors: T. Klein n, T. Anderson n, A. Chowdhury n & n
1999 journal article
Plasma enhanced chemical vapor deposited silicon nitride thin films deposited at very low temperatures for thin film transistors on plastic substrates"
Journal of Vacuum Science & Technology, A(17), 108–112.
1998 journal article
Endpoint uniformity sensing and analysis in silicon dioxide plasma etching using in situ mass spectrometry
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 16(6), 2996–3002.
Contributors: J. Chambers n, K. Min n & n
1998 chapter
High conductivity gate metallurgy for TFT/LCD's
In Flat-Panel Display Materials-1998 (Vol. 508, pp. 37–46). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000077248500006&KeyUID=WOS:000077248500006
Contributors: P. Fryer, E. Colgan, E. Galligan, W. Graham, R. Horton, L. Jenkins, R. John, Y. Kuo
1998 journal article
Hydrogen abstraction kinetics and crystallization in low temperature plasma deposition of silicon
APPLIED PHYSICS LETTERS, 72(4), 456–458.
Contributors: E. Srinivasan n & n
1998 journal article
In-situ mass spectrometry for real-time uniformity sensing in ECR silicon dioxide etching
Journal of Vacuum Science & Technology, B(16), 2996–3002.
1998 journal article
Plasma enhanced selective area microcrystalline silicon deposition on hydrogenated amorphous silicon: Surface modification for controlled nucleation
Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 16(3), 1316–1320.
Contributors: L. Smith n, W. Read n, C. Yang n, E. Srinivasan n, C. Courtney n, H. Lamb n, n
1998 journal article
Reaction processes for low temperature (< 150 degrees C) plasma enhanced deposition of hydrogenated amorphous silicon thin film transistors on transparent plastic substrates
Amorphous and Microcrystalline Silicon Technology-1998, 507, 19–24. http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000079335700003&KeyUID=WOS:000079335700003
1998 chapter
Reaction processes for low temperature (< 150 degrees C) plasma enhanced deposition of hydrogenated amorphous silicon thin film transistors on transparent plastic substrates
In Flat-Panel Display Materials-1998 (Vol. 508, pp. 19–24). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000077248500003&KeyUID=WOS:000077248500003
1998 journal article
Self-aligned gate and source drain contacts in inverted-staggered a-Si : H thin-film transistors fabricated using selective area silicon PECVD
IEEE ELECTRON DEVICE LETTERS, 19(6), 180–182.
Contributors: C. Yang n, W. Read n, C. Arthur n, E. Srinivasan n & n
1998 article
Silane consumption and conversion analysis in amorphous silicon and silicon nitride plasma deposition using in situ mass spectroscopy
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 16, pp. 1852–1856.
Contributors: A. Chowdhury n, T. Klein n, T. Anderson n & n
1998 chapter
Synthesis and characterization of luminescent ZnO powders produced by thermally-induced doping
In Flat-Panel Display Materials-1998 (Vol. 508, pp. 275–280). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000077248500042&KeyUID=WOS:000077248500042
1998 chapter
Thin film transistors fabricated with poly-Si films crystallized by microwave annealing
In Flat-Panel Display Materials-1998 (Vol. 508, pp. 139–144). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000077248500021&KeyUID=WOS:000077248500021
1997 chapter
Comparison of conventional and self-aligned a-Si:H thin film transistors
In Flat Panel Display Materials Iii (Vol. 471, pp. 179–184). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1997BJ69K00027&KeyUID=WOS:A1997BJ69K00027
1997 journal article
Dominant monohydride bonding in hydrogenated amorphous silicon thin films formed by plasma enhanced chemical vapor deposition at room temperature
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 15(1), 77–84.
Contributors: E. Srinivasan n, D. Lloyd n & n
1997 journal article
Hydrogen elimination and phase transitions in pulsed-gas plasma deposition of amorphous and microcrystalline silicon
JOURNAL OF APPLIED PHYSICS, 81(6), 2847–2855.
Contributors: E. Srinivasan n & n
1997 journal article
Investigation of substrate dependent nucleation of plasma-deposited microcrystalline silicon on glass and silicon substrates using atomic force microscopy
JOURNAL OF APPLIED PHYSICS, 82(12), 6041–6046.
Contributors: L. Smith n, E. Srinivasan n & n
1997 chapter
Real-time kinetic analysis of hydrogen abstraction and etching reactions using pulsed-gas PECVD of amorphous and microcrystalline silicon
In Amorphous and Microcrystalline Silicon Technology - 1997 (Vol. 467, pp. 501–506). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000071462000075&KeyUID=WOS:000071462000075
1997 journal article
Real-time process sensing and metrology in amorphous and selective area silicon plasma enhanced chemical vapor deposition using in situ mass spectrometry
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 15(1), 127–132.
Contributors: A. Chowdhury n, W. Read n, G. Rubloff n, L. Tedder n & n
1996 journal article
Ab initio calculation of hydrogen abstraction energetics from silicon hydrides
JOURNAL OF CHEMICAL PHYSICS, 105(13), 5467–5471.
Contributors: E. Srinivasan n, H. Yang n & n
1996 journal article
Dynamic rate and thickness metrology during poly-Si rapid thermal chemical vapor deposition from SiH4 using real time in situ mass spectrometry
Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 14(2), 267–270.
Contributors: L. Tedder n, G. Rubloff n, B. Cohaghan* & n
1996 journal article
Dynamic rate and thickness metrology during poly-Si rapid thermal chemical vapor deposition from SiH4 using real time in situ mass spectrometry (vol 14, pg 267, 1996)
Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 14(4), 2680.
Contributors: L. Tedder n, G. Rubloff n, B. Conaghan* & n
1996 chapter
Inert gas dilution and ion bombardment effects in room temperature (35 degrees C) plasma deposition of a-Si:H
In Amorphous Silicon Technology - 1996 (Vol. 420, pp. 399–404). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1996BH07P00064&KeyUID=WOS:A1996BH07P00064
1995 article
REAL-TIME PROCESS AND PRODUCT DIAGNOSTICS IN RAPID THERMAL CHEMICAL-VAPOR-DEPOSITION USING IN-SITU MASS-SPECTROMETRIC SAMPLING
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 13, pp. 1924–1927.
Contributors: L. Tedder n, G. Rubloff n, I. Shareef*, M. Anderle*, D. Kim n & n
1994 chapter
PROGRESS IN LARGE AREA SELECTIVE SILICON DEPOSITION FOR TFT LCD APPLICATIONS
In Amorphous Silicon Technology-1994 (Vol. 336, pp. 19–24). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1994BC30G00003&KeyUID=WOS:A1994BC30G00003
1993 journal article
FEMTOSECOND SPECTROSCOPIC STUDY OF ULTRAFAST CARRIER RELAXATION IN HYDROGENATED AMORPHOUS-SILICON A-SI-H
Journal of Applied Physics, 73(3), 1235–1239.
Contributors: A. Esser*, H. Heesel*, H. Kurz*, C. Wang n, n & G. Lucovsky n
1993 journal article
Femtosecond spectroscopic study of ultrafast carrier relaxation in hydrogenated amorphous silicon a-Si:H
Journal of Applied Physics, 73, 1235.
1993 chapter
MICROSTRUCTURAL EVOLUTION AND SUBSTRATE SELECTIVITY IN PECVD MU-C-SI
In Microcrystalline Semiconductors : Materials Science & Devices (Vol. 283, pp. 495–500). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1993BY10P00077&KeyUID=WOS:A1993BY10P00077
1993 journal article
Optical-detection of photoconductivity in hydrogenated amorphous silicon, a-Si:H, in the subpicosecond time-domain
Journal of Non-Crystalline Solids, 166, 575–578.
1993 journal article
TRANSPORT-PROPERTIES OF OPTICALLY GENERATED FREE-CARRIERS IN HYDROGENATED AMORPHOUS-SILICON IN THE FEMTOSECOND TIME REGIME
Physical Review B, 47(7), 3593–3597.
Contributors: A. Esser*, H. Heesel*, H. Kurz*, C. Wang n, n & G. Lucovsky n
1993 journal article
Transport processes of optically generated free carriers in amorphous silicon, a-Si:H in the femtosecond time regime
Physical Review, B(47), 3593.
1992 journal article
BOND SELECTIVITY IN SILICON FILM GROWTH
SCIENCE, 256(5061), 1304–1306.
Contributors: J. Boland * & *
1992 journal article
ENHANCED MOBILITY TOP-GATE AMORPHOUS-SILICON THIN-FILM TRANSISTOR WITH SELECTIVELY DEPOSITED SOURCE DRAIN CONTACTS
IEEE ELECTRON DEVICE LETTERS, 13(2), 80–82.
1992 article
SELECTIVE DEPOSITION AND BOND STRAIN RELAXATION IN SILICON PECVD USING TIME MODULATED SILANE FLOW
PARSONS, G. N., BOLAND, J. J., & TSANG, J. C. (1992, June). JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, Vol. 31, pp. 1943–1947.
Contributors: , J. Boland * & J. Tsang* *
1991 chapter
COMPOSITION AND PROPERTIES OF PECVD SILICON-NITRIDE FILMS DEPOSITED FROM SIH4, N-2, HE GASES
In Amorphous Silicon Technology - 1991 (Vol. 219, pp. 787–792).
1991 journal article
LOW HYDROGEN CONTENT STOICHIOMETRIC SILICON-NITRIDE FILMS DEPOSITED BY PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION
JOURNAL OF APPLIED PHYSICS, 70(3), 1553–1560.
1991 journal article
SELECTIVE DEPOSITION OF SILICON BY PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION USING PULSED SILANE FLOW
APPLIED PHYSICS LETTERS, 59(20), 2546–2548.
1990 journal article
ANNEALING OF INTRINSIC AND PHOTOINDUCED DEFECTS IN HYDROGENATED AMORPHOUS-SILICON
THIN SOLID FILMS, 193(1-2), 577–587.
Contributors: , C. Wang n & G. Lucovsky n n
1990 journal article
FORMATION OF SILICON-BASED HETEROSTRUCTURES IN MULTICHAMBER INTEGRATED-PROCESSING THIN-FILM DEPOSITION SYSTEMS
Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 8(3), 1947–1954.
Contributors: G. Lucovsky n, S. Kim n, D. Tsu n, n & J. Fitch n
1990 journal article
POSTDEPOSITION RELAXATION OF ELECTRONIC DEFECTS IN HYDROGENATED AMORPHOUS-SILICON
Applied Physics Letters, 56(19), 1895–1897.
Contributors: , C. Wang n, M. Williams n & G. Lucovsky n n
1990 journal article
Post-deposition relaxation of electronic defects in hydrogenated amorphous silicon
Applied Physics Letters, 56, 1895–1897.
1990 chapter
RAMAN-SCATTERING FROM MICROCRYSTALLINE FILMS - CONSIDERATIONS OF COMPOSITE STRUCTURES WITH DIFFERENT OPTICAL-ABSORPTION PROPERTIES
In Materials Issues in Microcrystalline Semiconductors (Vol. 164, pp. 265–270). http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1990BR31R00039&KeyUID=WOS:A1990BR31R00039
1990 journal article
SILICON-HYDROGEN BOND-STRETCHING VIBRATIONS IN HYDROGENATED AMORPHOUS SILICON-NITROGEN ALLOYS
Physical Review B, 41(3), 1664–1667.
Contributors: & G. Lucovsky n n
1990 journal article
ULTRAFAST RECOMBINATION AND TRAPPING IN AMORPHOUS-SILICON
Physical Review B, 41(5), 2879–2884.
Contributors: A. Esser*, K. Seibert*, H. Kurz*, n , C. Wang n, B. Davidson n, G. Lucovsky n, R. Nemanich n
1989 journal article
DEFECTS IN A-SI-H FILMS PRODUCED BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION
Journal of Non-Crystalline Solids, 107(2-3), 295–300.
Contributors: , D. Tsu n & G. Lucovsky n n
1989 journal article
DEPENDENCE OF A-SI-H/SI3N4 INTERFACE PROPERTIES ON THE DEPOSITION SEQUENCE IN AMORPHOUS-SILICON THIN-FILM TRANSISTOR PRODUCED BY REMOTE PECVD PROCESS
Journal of Non-Crystalline Solids, 115(1-3), 69–71.
1989 journal article
Defects in a-Si:H films produced by remote plasma enhanced CVD
Journal of Non-Crystalline Solids, 107, 295–300.
1989 journal article
Dependence of the chemical, electrical and photoelectronic properties of a-Si:H/Si3N4 interfaces on the deposition sequence
Journal of Non-Cyrstalline Solids, 114.
1989 journal article
EFFECTS OF GAS ADDITIVES ON THE PROPERTIES OF A-SI-H FILMS
Journal of Non-Crystalline Solids, 114, 193–195.
Contributors: C. Wang n, n & G. Lucovsky n
1989 journal article
INCORPORATION OF POLYHYDRIDE BONDING GROUPS INTO THIN-FILMS OF HYDROGENATED AMORPHOUS-SILICON (A-SI-H)
Journal of Non-Crystalline Solids, 114, 154–156.
Contributors: G. Lucovsky n, B. Davidson n, n & C. Wang n
1989 journal article
LOW-TEMPERATURE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON (A-SI-H) - CONTROL OF POLYHYDRIDE INCORPORATION AND ITS EFFECTS ON THIN-FILM PROPERTIES
Solar Cells, 27(1-4), 121–136.
1989 journal article
Mass and optical emission spectroscopic studies of the gas phase during the deposition of SiO2 and a-Si:H by remote plasma enhanced chemical vapor deposition
Journal of Vacuum Science & Technology, A(7), 1115–1123.
1989 journal article
OPTICAL-EMISSION AND MASS SPECTROSCOPIC STUDIES OF THE GAS-PHASE DURING THE DEPOSITION OF SIO2 AND A-SI-H BY REMOTE PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION
Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 7(3), 1115–1123.
Contributors: D. Tsu n, n , G. Lucovsky n & M. Watkins n
1989 journal article
PRECURSORS FOR THE DEPOSITION OF AMORPHOUS-SILICON HYDROGEN ALLOYS BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION
Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 7(3), 1124–1129.
1989 journal article
Precursors for the deposition of amorphous silicon hydrogen alloys by remote plasma enhanced CVD
Journal of Vacuum Science & Technology, A(7), 1124–1129.
1989 journal article
RAMAN-SCATTERING FROM MICROCRYSTALLINE SI FILMS - CONSIDERATIONS OF COMPOSITE STRUCTURES WITH DIFFERENT OPTICAL-ABSORPTION PROPERTIES
Journal of Non-Crystalline Solids, 114, 813–815.
Contributors: R. Nemanich n, E. Buehler n, Y. Legrice n, R. Shroder n, n , C. Wang n, G. Lucovsky n, J. Boyce*
1989 journal article
REDUCTION OF DEFECTS BY HIGH-TEMPERATURE ANNEALING (150-DEGREES-C-240-DEGREES-C) IN HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED AT ROOM-TEMPERATURE
Journal of Non-Crystalline Solids, 114, 178–180.
Contributors: , C. Wang n, M. Williams n & G. Lucovsky n n
1989 journal article
Reduction of defects by high temperature (180 degrees c-240 degrees c) annealing in room temperature deposited hydrogenated amorphous silicon
Journal of Non-Crystalline Solids, 114.
1989 journal article
ULTRAFAST RECOMBINATION AND TRAPPING IN AMORPHOUS-SILICON
Journal of Non-Crystalline Solids, 114, 573–575.
Contributors: A. Esser*, K. Seibert*, H. Kurz*, n , C. Wang n, B. Davidson n, G. Lucovsky n, R. Nemanich n
1988 journal article
PROPERTIES OF INTRINSIC AND DOPED A-SI-H DEPOSITED BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION
Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 6(3), 1912–1916.
Contributors: , D. Tsu n & G. Lucovsky n n
1988 journal article
SPECTROSCOPIC EMISSION STUDIES OF O2/HE AND N2/HE PLASMAS IN REMOTE PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION
Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 6(3), 1849–1854.
Contributors: D. Tsu n, n & G. Lucovsky n
1987 journal article
BONDING DEFECTS IN AMORPHOUS-SILICON ALLOYS
Solar Cells, 21, 387–397.
Contributors: J. Cook n, n , C. Kusano n & G. Lucovsky n
1987 journal article
OPTICAL AND ELECTRICAL-PROPERTIES OF A-SI-H FILMS GROWN BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION (RPECVD)
JOURNAL OF NON-CRYSTALLINE SOLIDS, 97-8, 1375–1378.
Contributors: , D. Tsu n & G. Lucovsky n n
1987 journal article
PHOTOELECTRONIC PROPERTIES OF A-SI=H AND A-GE=H THIN-FILMS IN SURFACE CELL STRUCTURES
Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 5(4), 1655–1660.
1987 journal article
Photoelectronic properties of a-Si:H and a-Ge:H thin films in surface cell structures
Journal of Vacuum Science & Technology, A(5), 1655–1660.
1986 journal article
DEPOSITION OF ALPHA-SI,SN H ALLOY-FILMS BY REACTIVE MAGNETRON SPUTTERING FROM SEPARATE SI AND SN TARGETS
Journal of Vacuum Science &Amp; Technology a-Vacuum Surfaces and Films, 4(3), 470–474.
1986 journal article
Deposition of a-Si,Sn:H alloy films by reactive magnetron sputtering from separate Si and Sn targets
Journal of Vacuum Science & Technology, A(4), 470–474.
1985 journal article
LOW DEFECT DENSITY A-SI,GE-H ALLOY-FILMS PRODUCED BY MAGNETRON SPUTTERING FROM SEPARATE SI AND GE CATHODES
Journal of Non-Crystalline Solids, 77-8, 885–888.
Contributors: R. Rudder*, * , J. Cook * & G. Lucovsky*
1983 journal article
CHARACTERIZATION OF SEMICONDUCTOR ELECTROLYTE SYSTEMS BY SURFACE PHOTO-VOLTAGE MEASURED CAPACITANCE
Journal of the Electrochemical Society, 130(8), C329. http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1983RC47600386&KeyUID=WOS:A1983RC47600386
1983 journal article
Characterization of semiconductor electrolyte systems by surface photovoltage measured capacitance
Journal of the Electrochemical Society, 130(8), C329.
Updated: January 5th, 2015 11:31
1992 - present
Funding history based on the linked ORCID record. Updated: August 21st, 2023 07:26
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