Gregory Parsons Carroll, N. M., Margavio, H. R. M., & Parsons, G. N. (2024, February 27). "Dual-Tone" Area-Selective Deposition: Selectivity Inversion of Polymer on Patterned Si/SiO₂ Starting Surfaces. CHEMISTRY OF MATERIALS, Vol. 2. https://doi.org/10.1021/acs.chemmater.3c03158 Stone, D. M., Morgan, S. E., Abdelmigeed, M. O., Nguyen, J., Bennett, T. D., Parsons, G. N., & Cowan, M. G. (2024, February 2). Control of ZIF-62 and a_gZIF-62 Film Thickness within Asymmetric Tubular Supports through Pressure and Dose Time Variation of Atomic Layer Deposition. SMALL, Vol. 2. https://doi.org/10.1002/smll.202307202 Pauly, M., White, E., Deegbey, M., Fosu, E. A., Keller, L., Mcguigan, S., … Maggard, P. A. (2024, March 21). Coordination of copper within a crystalline carbon nitride and its catalytic reduction of CO₂. DALTON TRANSACTIONS, Vol. 3. https://doi.org/10.1039/d4dt00359d Oyetade, O. A., Wang, Y., He, S., Margavio, H. R. M., Bottum, S. R., Rooney, C. L., … Cahoon, J. F. (2024, July 12). Covalent Functionalization of Silicon with Plasma-Grown "Fuzzy" Graphene: Robust Aqueous Photoelectrodes for CO₂ Reduction by Molecular Catalysts. ACS APPLIED MATERIALS & INTERFACES, Vol. 7. https://doi.org/10.1021/acsami.4c04691 Abdelmigeed, M. O., Mahle, J. J., Peterson, G. W., & Parsons, G. N. (2024, September 23). Highly Mesoporous Zr-Based MOF-Fabric Composites: A Benign Approach for Expeditious Degradation of Chemical Warfare Agents and Simulants. SMALL, Vol. 9. https://doi.org/10.1002/smll.202405831 Oh, H., Thelven, J. M., Margavio, H. R. M., & Parsons, G. N. (2024, April 25). Low-Temperature Dual-Material Area-Selective Deposition: Molybdenum Hexafluoride-Mediated SiO₂ Fluorination/Passivation for Self-Aligned Molybdenum/Metal Oxide Nanoribbons. ADVANCED FUNCTIONAL MATERIALS, Vol. 4. https://doi.org/10.1002/adfm.202316872 Bredar, A. R. C., Margavio, H. R. M., Donley, C., Spinner, N., Amin, N., Parsons, G. N., & Dempsey, J. L. (2024). Oxidation Temperature-Dependent Electrochemical Doping of WO3 Deposited via Atomic Layer Deposition. The Journal of Physical Chemistry C. https://doi.org/10.1021/acs.jpcc.4c06105 Nedzbala, H. S., Westbroek, D., Margavio, H. R. M., Yang, H., Noh, H., Magpantay, S. V., … Mayer, J. M. (2024, April 2). Photoelectrochemical Proton-Coupled Electron Transfer of TiO₂ Thin Films on Silicon. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, Vol. 4. https://doi.org/10.1021/jacs.4c00014 Margavio, H. R. M., Arellano, N., Singh, I., Wojtecki, R., & Parsons, G. N. (2024, September 23). Simultaneous Co-localized TiO₂ Etching and W Atomic Layer Deposition Using WF₆ as a Dual-Functional Reactant. CHEMISTRY OF MATERIALS, Vol. 9. https://doi.org/10.1021/acs.chemmater.4c01773 Carroll, N. M., & Parsons, G. N. (2024). Stochastic lattice model for atomic layer deposition and area-selective deposition of metal oxides: Visualization and analysis of lateral overgrowth during area-selective deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 42(6). https://doi.org/10.1116/6.0003838 Nye, R. A., Carroll, N. M., Morgan, S. E., & Parsons, G. N. (2024). Vapor-phase zeolitic imidazolate framework-8 growth on fibrous polymer substrates. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 42(1). https://doi.org/10.1116/6.0003183 Saare, H., Xie, W., & Parsons, G. N. (2023). Comparison of BCl3, TiCl4, and SOCl2 chlorinating agents for atomic layer etching of TiO2 and ZrO2 using tungsten hexafluoride. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 41(4). https://doi.org/10.1116/6.0002708 Morgan, S. E., Willis, M. L., Dianat, G., Peterson, G. W., Mahle, J. J., & Parsons, G. N. (2023). Cover Feature: Toxin‐Blocking Textiles: Rapid, Benign, Roll‐to‐Roll Production of Robust MOF‐Fabric Composites for Organophosphate Separation and Hydrolysis (ChemSusChem 2/2023). ChemSusChem. https://doi.org/10.1002/cssc.202202342 McGuigan, S., Tereniak, S. J., Donley, C. L., Smith, A., Jeon, S., Zhao, F., … Maggard, P. A. (2023, October 12). Discovery of a Hybrid System for Photocatalytic CO₂ Reduction via Attachment of a Molecular Cobalt-Quaterpyridine Complex to a Crystalline Carbon Nitride. ACS APPLIED ENERGY MATERIALS, Vol. 10. https://doi.org/10.1021/acsaem.3c01670 Nye, R. A., Van Dongen, K., De Simone, D., Oka, H., Parsons, G. N., & Delabie, A. (2023, February 23). Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition. CHEMISTRY OF MATERIALS, Vol. 2. https://doi.org/10.1021/acs.chemmater.2c03404 Morgan, S. E. E., Rivera, C. D. D., Willis, M. L. L., Peterson, G. W. W., Mahle, J. J. J., Mundy, L., & Parsons, G. N. N. (2023, July 31). Factors and Limitations of Green, Rapid Metal-Organic Framework-Fabric Synthesis and Effects on Dual Chemical Warfare Agent Protection. INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH, Vol. 7. https://doi.org/10.1021/acs.iecr.3c01282 Clerix, J.-W. J., Dianat, G., Delabie, A., & Parsons, G. N. (2023). In situ analysis of nucleation reactions during TiCl4/H2O atomic layer deposition on SiO2 and H-terminated Si surfaces treated with a silane small molecule inhibitor. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 41(3). https://doi.org/10.1116/6.0002493 Keller, N. D., Vecchi, P., Grills, D. C., Polyansky, D. E., Bein, G. P., Dempsey, J. L., … Meyer, G. J. (2023, May 10). Multi-Electron Transfer at H-Terminated p-Si Electrolyte Interfaces: Large Photovoltages under Inversion Conditions. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, Vol. 5. https://doi.org/10.1021/jacs.3c01990 Nye, R. A. A., Van Dongen, K., Marneffe, J.-F., Parsons, G. N. N., & Delabie, A. (2023, June 17). Quantified Uniformity and Selectivity of TiO2 Films in 45-nm Half Pitch Patterns Using Area-Selective Deposition Supercycles. ADVANCED MATERIALS INTERFACES, Vol. 6. https://doi.org/10.1002/admi.202300163 Oh, H., Kim, J.-S., Margavio, H. R. M., & Parsons, G. N. (2023). Self-Aligned Nanopatterning and Controlled Lateral Growth by Dual-Material Orthogonal Area-Selective Deposition of Poly(3,4-ethylenedioxythiophene) and Tungsten. CHEMISTRY OF MATERIALS, 35(11), 4375–4384. https://doi.org/10.1021/acs.chemmater.3c00530 Rahmanian, V., Ebrahim, M. Z. A., Razavi, S., Abdelmigeed, M., Barbieri, E., Menegatti, S., … Khan, S. A. (2023, November 6). Vapor phase synthesis of metal-organic frameworks on a nanofibrous aerogel creates enhanced functionality. JOURNAL OF MATERIALS CHEMISTRY A, Vol. 11. https://doi.org/10.1039/D3TA05299K Hsain, H. A., Lee, Y., Lomenzo, P. D., Alcala, R., Xu, B., Mikolajick, T., … Jones, J. L. (2023). Wake-up free ferroelectric hafnia-zirconia capacitors fabricated via vacuum-maintaining atomic layer deposition. JOURNAL OF APPLIED PHYSICS, 133(22). https://doi.org/10.1063/5.0147124 Parsons, G. (2022). (Invited) Introduction and Overview of Area-Selective Thin Film Deposition. ECS Meeting Abstracts. https://doi.org/10.1149/MA2022-02311113mtgabs Saare, H., Dianat, G., & Parsons, G. N. (2022). Comparative In Situ Study of the Initial Growth Trends of Atomic Layer-Deposited Al(2)O(3 )Films br. JOURNAL OF PHYSICAL CHEMISTRY C, 126(16), 7036–7046. https://doi.org/10.1021/acs.jpcc.2c01033 Nye, R. A. A., Van Dongen, K., Oka, H., De Simone, D., Parsons, G. N. N., & Delabie, A. (2022). Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO(2 )area-selective deposition. JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, 21(4). https://doi.org/10.1117/1.JMM.21.4.041407 Wang, S., Pirzada, T., Xie, W., Barbieri, E., Hossain, O., Opperman, C. H., … Khan, S. A. (2022). Creating hierarchically porous banana paper-metal organic framework (MOF) composites with multifunctionality. APPLIED MATERIALS TODAY, 28. https://doi.org/10.1016/j.apmt.2022.101517 Morgan, S. E., Willis, M. L., Peterson, G. W., Mahle, J. J., & Parsons, G. N. (2022). Green MOF-Fabrics: Benign, Scalable Sorption-Vapor Synthesis of Catalytic Composites to Protect against Phosphorus-Based Toxins. ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 10(8), 2699–2707. https://doi.org/10.1021/acssuschemeng.1c07512 Kim, J.-S., Oh, H., & Parsons, G. N. (2022). Growth behavior and substrate selective deposition of polypyrrole, polythiophene, and polyaniline by oxidative chemical vapor deposition and molecular layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(6). https://doi.org/10.1116/6.0002036 Nye, R. A., Van Dongen, K., Oka, H., Furutani, H., Parsons, G., De Simone, D., & Delabie, A. (2022). Improving polymethacrylate EUV resists with TiO2 area-selective deposition. ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIX, Vol. 12055. https://doi.org/10.1117/12.2613815 Nye, R. A., Song, S. K., Van Dongen, K., Delabie, A., & Parsons, G. N. (2022). Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition. APPLIED PHYSICS LETTERS, 121(8). https://doi.org/10.1063/5.0106132 Gu, H., Lee, D. T., Corkery, P., Miao, Y., Kim, J.-S., Yuan, Y., … Tsapatsis, M. (2022, September 7). Modeling of deposit formation in mesoporous substrates via atomic layer deposition: Insights from pore-scale simulation. AICHE JOURNAL, Vol. 9. https://doi.org/10.1002/aic.17889 Hsain, H. A., Lee, Y., Lancaster, S., Lomenzo, P. D., Xu, B., Mikolajick, T., … Jones, J. L. (2023). Reduced fatigue and leakage of ferroelectric TiN/Hf0.5Zr0.5O2/TiN capacitors by thin alumina interlayers at the top or bottom interface. NANOTECHNOLOGY, 34(12). https://doi.org/10.1088/1361-6528/acad0a Hsain, H. A., Lee, Y., Lancaster, S., Materano, M., Alcala, R., Xu, B., … Jones, J. L. (2022, September 7). Role of Oxygen Source on Buried Interfaces in Atomic-Layer- Deposited Ferroelectric Hafnia-Zirconia Thin Films. ACS APPLIED MATERIALS & INTERFACES, Vol. 9. https://doi.org/10.1021/acsami.2c11073 Hsain, H. A., Lee, Y., Lancaster, S., Materano, M., Alcala, R., Xu, B., … Jones, J. L. (2022). Role of Oxygen Source on Buried Interfaces in Atomic-Layer- Deposited Ferroelectric Hafnia-Zirconia Thin Films. ACS APPLIED MATERIALS & INTERFACES, 14(37), 42232–42244. https://doi.org/10.1021/acsami.2c1107342232 Lee, Y., Broughton, R. A., Hsain, H. A., Song, S. K., Edgington, P. G., Horgan, M. D., … Jones, J. L. (2022). The influence of crystallographic texture on structural and electrical properties in ferroelectric Hf0.5Zr0.5O2. JOURNAL OF APPLIED PHYSICS, 132(24). https://doi.org/10.1063/5.0128038 Morgan, S. E. E., Willis, M. L. L., Dianat, G., Peterson, G. W. W., Mahle, J. J. J., & Parsons, G. N. N. (2022, November 18). Toxin-Blocking Textiles: Rapid, Benign, Roll-to-Roll Production of Robust MOF-Fabric Composites for Organophosphate Separation and Hydrolysis. CHEMSUSCHEM, Vol. 11. https://doi.org/10.1002/cssc.202201744 Chen, I.-T., Dai, Z., Chen, Y.-A., Parsons, G. N., & Chang, C.-H. (2021, July 26). Fabrication of Non-Uniform Nanolattices with Spatially Varying Geometry and Material Composition. ADVANCED MATERIALS INTERFACES, Vol. 7. https://doi.org/10.1002/admi.202100690 Peterson, G. W., Lee, D. T., Barton, H. F., Epps, T. H., III, & Parsons, G. N. (2021). [Review of Fibre-based composites from the integration of metal-organic frameworks and polymers]. NATURE REVIEWS MATERIALS, 6(7), 605–621. https://doi.org/10.1038/s41578-021-00291-2 Dai, Z., Pradeep, S., Zhu, J., Xie, W., Barton, H. F., Si, Y., … Parsons, G. N. (2021, October 24). Freestanding Metal Organic Framework-Based Multifunctional Membranes Fabricated via Pseudomorphic Replication toward Liquid- and Gas-Hazards Abatement. ADVANCED MATERIALS INTERFACES, Vol. 10. https://doi.org/10.1002/admi.202101178 Lee, D. T., Dai, Z., Peterson, G. W., Hall, M. G., Pomerantz, N. L., Hoffman, N., & Parsons, G. N. (2021, October 27). Highly Breathable Chemically-Protective MOF-Fiber Catalysts. ADVANCED FUNCTIONAL MATERIALS, Vol. 10. https://doi.org/10.1002/adfm.202108004 Nye, R. A., Wang, S., Uhlenbrock, S., Smythe, J. A., III, & Parsons, G. N. (2021, December 27). In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors. DALTON TRANSACTIONS, Vol. 51. https://doi.org/10.1039/D1DT03689K Hsain, H. A., Lee, Y., Materano, M., Mittmann, T., Payne, A., Mikolajick, T., … Jones, J. L. (2022). [Review of Many routes to ferroelectric HfO2: A review of current deposition methods]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(1). https://doi.org/10.1116/6.0001317 Song, S. K., Kim, J.-S., Margavio, H. R. M., & Parsons, G. N. (2021). Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching. ACS NANO, 15(7), 12276–12285. https://doi.org/10.1021/acsnano.1c04086 Kim, J.-S., & Parsons, G. N. (2021). Nanopatterned Area-Selective Vapor Deposition of PEDOT on SiO2 vs Si-H: Improved Selectivity Using Chemical Vapor Deposition vs Molecular Layer Deposition. CHEMISTRY OF MATERIALS, 33(23), 9221–9230. https://doi.org/10.1021/acs.chemmater.1c02842 Volk, A. A., Kim, J.-S., Jamir, J., Dickey, E. C., & Parsons, G. N. (2021). Oxidative molecular layer deposition of PEDOT using volatile antimony(V) chloride oxidant. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 39(3). https://doi.org/10.1116/6.0000791 Morgan, S. E., Andie M. O'Connell, Jansson, A., Peterson, G. W., Mahle, J. J., Eldred, T. B., … Parsons, G. N. (2021). Stretchable and Multi-Metal-Organic Framework Fabrics Via High-Yield Rapid Sorption-Vapor Synthesis and Their Application in Chemical Warfare Agent Hydrolysis. ACS APPLIED MATERIALS & INTERFACES, 13(26), 31279–31284. https://doi.org/10.1021/acsami.1c07366 Limbu, T. B., Adhikari, B., Song, S. K., Chitara, B., Tang, Y., Parsons, G. N., & Yan, F. (2021). Toward understanding the phase-selective growth mechanism of films and geometrically-shaped flakes of 2D MoTe2. RSC ADVANCES, 11(61), 38839–38848. https://doi.org/10.1039/d1ra07787b Lee, Y., Hsain, H. A., Fields, S. S., Jaszewski, S. T., Horgan, M. D., Edgington, P. G., … Jones, J. L. (2021). Unexpectedly large remanent polarization of Hf0.5Zr0.5O2 metal-ferroelectric-metal capacitor fabricated without breaking vacuum. APPLIED PHYSICS LETTERS, 118(1). https://doi.org/10.1063/5.0029532 Dai, Z., Zhu, J., Yan, J., Su, J., Gao, Y., Zhang, X., … Parsons, G. N. (2020). An Advanced Dual-Function MnO2-Fabric Air Filter Combining Catalytic Oxidation of Formaldehyde and High-Efficiency Fine Particulate Matter Removal. ADVANCED FUNCTIONAL MATERIALS, 30(42). https://doi.org/10.1002/adfm.202001488 Parsons, G. N., & Clark, R. D. (2020). [Review of Area-Selective Deposition: Fundamentals, Applications, and Future Outlook]. CHEMISTRY OF MATERIALS, 32(12), 4920–4953. https://doi.org/10.1021/acs.chemmater.0c00722 Hsain, H. A., Lee, Y., Parsons, G. N., & Jones, J. L. (2020). Compositional dependence of crystallization temperatures and phase evolution in hafnia-zirconia (HfxZr1-x)O-2 thin films. APPLIED PHYSICS LETTERS, 116(19). https://doi.org/10.1063/5.0002835 Wang, S., Shi, K., Tripathi, A., Chakraborty, U., Parsons, G. N., & Khan, S. A. (2020). Designing Intrinsically Microporous Polymer (PIM-1) Microfibers with Tunable Morphology and Porosity via Controlling Solvent/Nonsolvent/Polymer Interactions. ACS Applied Polymer Materials, 2(6), 2434–2443. https://doi.org/10.1021/acsapm.0c00386 Barton, H. F., Jamir, J. D., Davis, A. K., Peterson, G. W., & Parsons, G. N. (2021). Doubly Protective MOF-Photo-Fabrics: Facile Template-Free Synthesis of PCN-222-Textiles Enables Rapid Hydrolysis, Photo-Hydrolysis and Selective Oxidation of Multiple Chemical Warfare Agents and Simulants. CHEMISTRY-A EUROPEAN JOURNAL, 27(4), 1465–1472. https://doi.org/10.1002/chem.202003716 Saare, H., Song, S. K., Kim, J.-S., & Parsons, G. N. (2020). Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching. JOURNAL OF APPLIED PHYSICS, 128(10). https://doi.org/10.1063/5.0013552 Dai, Z., Lee, D. T., Shi, K., Wang, S., Barton, H. F., Zhu, J., … Parsons, G. N. (2020). Fabrication of a freestanding metal organic framework predominant hollow fiber mat and its potential applications in gas separation and catalysis. Journal of Materials Chemistry A. https://doi.org/10.1039/C9TA11701F Parsons, G. N., Elam, J. W., George, S. M., Haukka, S., Jeon, H., Kessels, W. M. M., … Rossnagel, S. M. (2020, May). History of atomic layer deposition and its relationship with the American Vacuum Society (vol 31, 050818, 2013). JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 38. https://doi.org/10.1116/6.0000143 Wang, S., Pomerantz, N. L., Dai, Z., Xie, W., Anderson, E. E., Miller, T., … Parsons, G. N. (2020). Polymer of intrinsic microporosity (PIM) based fibrous mat: combining particle filtration and rapid catalytic hydrolysis of chemical warfare agent simulants into a highly sorptive, breathable, and mechanically robust fiber matrix. Materials Today Advances, 8, 100085. https://doi.org/10.1016/j.mtadv.2020.100085 Matveev, S. M., Dlott, D. D., Hanusova, P., Maria, J.-P., Nye, R., & Parsons, G. (2020). Shock Initiation of Reactive Nanolaminates. SHOCK COMPRESSION OF CONDENSED MATTER - 2019, Vol. 2272. https://doi.org/10.1063/12.0000877 Barton, H. F., Davis, A. K., & Parsons, G. N. (2020). The Effect of Surface Hydroxylation on MOF Formation on ALD Metal Oxides: MOF-525 on TiO2/Polypropylene for Catalytic Hydrolysis of Chemical Warfare Agent Simulants. ACS APPLIED MATERIALS & INTERFACES, 12(13), 14690–14701. https://doi.org/10.1021/acsami.9b20910 Xie, W., & Parsons, G. N. (2020). Thermal atomic layer etching of metallic tungsten via oxidation and etch reaction mechanism using O-2 or O-3 for oxidation and WCl6 as the chlorinating etchant. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 38(2). https://doi.org/10.1116/1.5134430 Nye, R. A., Kelliher, A. P., Gaskins, J. T., Hopkins, P. E., & Parsons, G. N. (2020). Understanding Molecular Layer Deposition Growth Mechanisms in Polyurea via Picosecond Acoustics Analysis. CHEMISTRY OF MATERIALS, 32(4), 1553–1563. https://doi.org/10.1021/acs.chemmater.9b04702 Pomerantz, N. L., Anderson, E. E., Dugan, N. P., Hoffman, N. F., Barton, H. F., Lee, D. T., … Parsons, G. N. (2019). Air, Water Vapor, and Aerosol Transport through Textiles with Surface Functional Coatings of Metal Oxides and Metal-Organic Frameworks. ACS APPLIED MATERIALS & INTERFACES, 11(27), 24683–24690. https://doi.org/10.1021/acsami.9b04091 Parsons, G. N. (2019). Functional model for analysis of ALD nucleation and quantification of area-selective deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 37(2). https://doi.org/10.1116/1.5054285 Lee, D. T., Jamir, J. D., Peterson, G. W., & Parsons, G. N. (2019). Functionalized Textiles: Water-Stable Chemical-Protective Textiles via Euhedral Surface-Oriented 2D Cu-TCPP Metal-Organic Frameworks (Small 10/2019). Small, 15(10), 1970054. https://doi.org/10.1002/SMLL.201970054 Hill, G. T., Lee, D. T., Williams, P. S., Needham, C. D., Dandley, E. C., Oldham, C. J., & Parsons, G. N. (2019). Insight on the Sequential Vapor Infiltration Mechanisms of Trimethylaluminum with Poly(methyl methacrylate), Poly(vinylpyrrolidone), and Poly(acrylic acid). JOURNAL OF PHYSICAL CHEMISTRY C, 123(26), 16146–16152. https://doi.org/10.1021/acs.jpcc.9b02153 Song, S. K., Saare, H., & Parsons, G. N. (2019). Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO2. CHEMISTRY OF MATERIALS, 31(13), 4793–4804. https://doi.org/10.1021/acs.chemmater.9b01143 Fusco, M. A., Oldham, C. J., & Parsons, G. N. (2019). Investigation of the Corrosion Behavior of Atomic Layer Deposited Al2O3/TiO2 Nanolaminate Thin Films on Copper in 0.1 M NaCl. MATERIALS, 12(4). https://doi.org/10.3390/ma12040672 Lee, D. T., Jamir, J. D., Peterson, G. W., & Parsons, G. N. (2020). Protective Fabrics: Metal-Organic Framework Textiles for Rapid Photocatalytic Sulfur Mustard Simulant Detoxification. MATTER, 2(2), 404–415. https://doi.org/10.1016/j.matt.2019.11.005 Lee, D. T., Jamir, J. D., Peterson, G. W., & Parsons, G. N. (2019). Water-Stable Chemical-Protective Textiles via Euhedral Surface-Oriented 2D Cu-TCPP Metal-Organic Frameworks. SMALL, 15(10). https://doi.org/10.1002/smll.201805133 King, M. J., Theofanis, P. L., Lemaire, P. C., Santiso, E. E., & Parsons, G. N. (2018). Ab initio analysis of nucleation reactions during tungsten atomic layer deposition on Si(100) and W(110) substrates. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36(6). https://doi.org/10.1116/1.5044740 Stevens, E., Tomczak, Y., Chan, B. T., Sanchez, E. A., Parsons, G. N., & Delabie, A. (2018). Area-Selective Atomic Layer Deposition of TiN, TiO2, and HfO2 on Silicon Nitride with inhibition on Amorphous Carbon. CHEMISTRY OF MATERIALS, 30(10), 3223–3232. https://doi.org/10.1021/acs.chemmater.8b00017 Min, J. H., Chen, Y. A., Chen, I. T., Sun, T., Lee, D. T., Li, C., … Chang, C. H. (2018). Atomic Layer Deposition: Conformal Physical Vapor Deposition Assisted by Atomic Layer Deposition and Its Application for Stretchable Conductors (Adv. Mater. Interfaces 22/2018). Advanced Materials Interfaces, 5(22), 1870109. https://doi.org/10.1002/ADMI.201870109 Min, J.-H., Chen, Y.-A., Chen, I.-T., Sun, T., Lee, D. T., Li, C., … Chang, C.-H. (2018). Conformal Physical Vapor Deposition Assisted by Atomic Layer Deposition and Its Application for Stretchable Conductors. ADVANCED MATERIALS INTERFACES, 5(22). https://doi.org/10.1002/admi.201801379 Xie, W., Khan, S., Rojas, O. J., & Parsons, G. N. (2018). Control of Micro- and Mesopores in Carbon Nanofibers and Hollow Carbon Nanofibers Derived from Cellulose Diacetate via Vapor Phase Infiltration of Diethyl Zinc. ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 6(11), 13844–13853. https://doi.org/10.1021/acssuschemeng.8b02014 Ives, R. L., Oldham, C. J., Daubert, J. S., Gremaud, A. P., Collins, G., Marsden, D., … Parsons, G. N. (2018). Corrosion Mitigation Coatings for RF Sources and Components. IEEE Transactions on Electron Devices, 65(6), 2385–2392. https://doi.org/10.1109/TED.2017.2788379 Mousa, M. B. M., Ovental, J. S., Brozena, A. H., Oldham, C. J., & Parsons, G. N. (2018). Modeling and experimental demonstration of high-throughput flow-through spatial atomic layer deposition of Al2O3 coatings on textiles at atmospheric pressure. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36(3). https://doi.org/10.1116/1.5022077 Barton, H. F., Davis, A. K., Lee, D. T., & Parsons, G. N. (2018). Solvothermal Synthesis of MIL-96 and UiO-66-NH2 on Atomic Layer Deposited Metal Oxide Coatings on Fiber Mats. JOVE-JOURNAL OF VISUALIZED EXPERIMENTS, 6(136). https://doi.org/10.3791/57734 Tripathi, A., Parsons, G. N., Khan, S. A., & Rojas, O. J. (2018). Synthesis of organic aerogels with tailorable morphology and strength by controlled solvent swelling following Hansen solubility. SCIENTIFIC REPORTS, 8. https://doi.org/10.1038/s41598-018-19720-4 Stevens, E. C., Mousa, M. B. M., & Parsons, G. N. (2018). Thermal atomic layer deposition of Sn metal using SnCl4 and a vapor phase silyl dihydropyrazine reducing agent. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36(6). https://doi.org/10.1116/1.5055212 Xie, W., Lemaire, P. C., & Parsons, G. N. (2018). Thermally Driven Self-Limiting Atomic Layer Etching of Metallic Tungsten Using WF6 and O-2. ACS APPLIED MATERIALS & INTERFACES, 10(10), 9147–9154. https://doi.org/10.1021/acsami.7b19024 Dwyer, D. B., Lee, D. T., Boyer, S., Bernier, W. E., Parsons, G. N., & Jones, W. E., Jr. (2018). Toxic Organophosphate Hydrolysis Using Nanofiber-Templated UiO-66-NH2 Metal–Organic Framework Polycrystalline Cylinders. ACS Applied Materials & Interfaces, 10(30), 25794–25803. https://doi.org/10.1021/ACSAMI.8B08167 Cui, K., Lemaire, P., Zhao, H., Savas, T., Parsons, G., & Hart, A. J. (2018). Tungsten-Carbon Nanotube Composite Photonic Crystals as Thermally Stable Spectral-Selective Absorbers and Emitters for Thermophotovoltaics. ADVANCED ENERGY MATERIALS, 8(27). https://doi.org/10.1002/aenm.201801471 Lee, D. T., Zhao, J., Peterson, G. W., & Parsons, G. N. (2017). Catalytic "MOF-Cloth" Formed via Directed Supramolecular Assembly of UiO-66-NH2 Crystals on Atomic Layer Deposition-Coated Textiles for Rapid Degradation of Chemical Warfare Agent Simulants. CHEMISTRY OF MATERIALS, 29(11), 4894–4903. https://doi.org/10.1021/acs.chemmater.7b00949 Daubert, J. S., Hill, G. T., Gotsch, H. N., Gremaud, A. P., Ovental, J. S., Williams, P. S., … Parsons, G. N. (2017). Corrosion Protection of Copper Using Al2O3, TiO2, ZnO, HfO2, and ZrO2 Atomic Layer Deposition. ACS APPLIED MATERIALS & INTERFACES, 9(4), 4192–4201. https://doi.org/10.1021/acsami.6b13571 Ives, R. L., Collins, G., Marsden, D., Bui, T., Oldham, C. J., Daubert, J. S., … Parsons, G. N. (2017). Corrosion mitigation coatings for RF sources and components. 2017 eighteenth international vacuum electronics conference (ivec). https://doi.org/10.1109/ivec.2017.8289559 Tripathi, A., Parsons, G. N., Rojas, O. J., & Khan, S. A. (2017). Featherlight, Mechanically Robust Cellulose Ester Aerogels for Environmental Remediation. ACS Omega, 2(8), 4297–4305. https://doi.org/10.1021/ACSOMEGA.7B00571 Zhao, J., Kalanyan, B., Barton, H. F., Sperling, B. A., & Parsons, G. N. (2017). In Situ Time-Resolved Attenuated Total Reflectance Infrared Spectroscopy for Probing Metal–Organic Framework Thin Film Growth. Chemistry of Materials, 29(20), 8804–8810. https://doi.org/10.1021/ACS.CHEMMATER.7B03096 Daubert, J. S., Wang, R., Ovental, J. S., Barton, H. F., Rajagopalan, R., Augustyn, V., & Parsons, G. N. (2017). Intrinsic limitations of atomic layer deposition for pseudocapacitive metal oxides in porous electrochemical capacitor electrodes. JOURNAL OF MATERIALS CHEMISTRY A, 5(25), 13086–13097. https://doi.org/10.1039/c7ta02719b Bagal, A., Zhang, X. A., Shahrin, R., Dandley, E. C., Zhao, J., Poblete, F. R., … Chang, C.-H. (2017). Large-Area Nanolattice Film with Enhanced Modulus, Hardness, and Energy Dissipation. Scientific Reports, 7(1). https://doi.org/10.1038/S41598-017-09521-6 Hilton, G. M., Taylor, A. J., Hussain, S., Dandley, E. C., Griffith, E. H., Garantziotis, S., … Bereman, M. S. (2017). Mapping differential cellular protein response of mouse alveolar epithelial cells to multi-walled carbon nanotubes as a function of atomic layer deposition coating. NANOTOXICOLOGY, 11(3), 313–326. https://doi.org/10.1080/17435390.2017.1299888 Lemaire, P. C., Lee, D. T., Zhao, J., & Parsons, G. N. (2017). Reversible Low-Temperature Metal Node Distortion during Atomic Layer Deposition of Al2O3 and TiO2 on UiO-66-NH2 Metal-Organic Framework Crystal Surfaces. ACS APPLIED MATERIALS & INTERFACES, 9(26), 22042–22054. https://doi.org/10.1021/acsami.7b05214 Duke, K. S., Taylor-Just, A. J., Ihrie, M. D., Shipkowski, K. A., Thompson, E. A., Dandley, E. C., … Bonner, J. C. (2017). STAT1-dependent and -independent pulmonary allergic and fibrogenic responses in mice after exposure to tangled versus rod-like multi-walled carbon nanotubes. PARTICLE AND FIBRE TOXICOLOGY, 14. https://doi.org/10.1186/s12989-017-0207-3 Lemaire, P. C., & Parsons, G. N. (2017). Thermal Selective Vapor Etching of TiO2: Chemical Vapor Etching via WF6 and Self-Limiting Atomic Layer Etching Using WF6 and BCl3. CHEMISTRY OF MATERIALS, 29(16), 6653–6665. https://doi.org/10.1021/acs.chemmater.7b00985 Lee, D. T., Zhao, J., Oldham, C. J., Peterson, G. W., & Parsons, G. N. (2017). UiO-66-NH2 Metal Organic Framework (MOF) Nucleation on TiO2, ZnO, and Al2O3 Atomic Layer Deposition-Treated Polymer Fibers: Role of Metal Oxide on MOF Growth and Catalytic Hydrolysis of Chemical Warfare Agent Simulants. ACS APPLIED MATERIALS & INTERFACES, 9(51), 44847–44855. https://doi.org/10.1021/acsami.7b15397 Kim, D. H., Losego, M. D., Peng, Q., & Parsons, G. N. (2016). Atomic Layer Deposition for Sensitized Solar Cells: Recent Progress and Prospects. Advanced Materials Interfaces, 3(21), 1600354. https://doi.org/10.1002/ADMI.201600354 Huang, L., Li, G., Gurarslan, A., Yu, Y., Kirste, R., Guo, W., … Cao, L. (2016). Atomically Thin MoS2 Narrowband and Broadband Light Superabsorbers. ACS NANO, 10(8), 7493–7499. https://doi.org/10.1021/acsnano.6b02195 Lemaire, P. C., Zhao, J., Williams, P. S., Walls, H. J., Shepherd, S. D., Losego, M. D., … Parsons, G. N. (2016). Copper Benzenetricarboxylate Metal-Organic Framework Nucleation Mechanisms on Metal Oxide Powders and Thin Films formed by Atomic Layer Deposition. ACS APPLIED MATERIALS & INTERFACES, 8(14), 9514–9522. https://doi.org/10.1021/acsami.6b01195 Ives, R. L., Collins, G., Oldham, C. J., Stevens, E. C., Williams, P. S., Mantini, M. J., … IEEE. (2016). Corrosion Mitigation Coatings for RF Sources and Components. In 2016 Ieee International Vacuum Electronics Conference (Ivec). Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000386185700095&KeyUID=WOS:000386185700095 Ives, R. L., Collins, G., Oldham, C. J., Stevens, E. C., Williams, P. S., Mantini, M. J., & Parsons, G. N. (2016). Corrosion mitigation coatings for RF sources and components. 2016 ieee international vacuum electronics conference (ivec). https://doi.org/10.1109/ivec.2016.7561851 Tovar, T. M., Zhao, J., Nunn, W. T., Barton, H. F., Peterson, G. W., Parsons, G. N., & LeVan, M. D. (2016). Diffusion of CO2 in Large Crystals of Cu-BTC MOF. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 138(36), 11449–11452. https://doi.org/10.1021/jacs.6b05930 Min, J.-H., Bagal, A., Mundy, J. Z., Oldham, C. J., Wu, B.-I., Parsons, G. N., & Chang, C.-H. (2016). Fabrication and design of metal nano-accordion structures using atomic layer deposition and interference lithography. NANOSCALE, 8(9), 4984–4990. https://doi.org/10.1039/c5nr08566g Daubert, J. S., Mundy, J. Z., & Parsons, G. N. (2016). Kevlar-Based Supercapacitor Fibers with Conformal Pseudocapacitive Metal Oxide and Metal Formed by ALD. Advanced Materials Interfaces, 3(21), 1600355. https://doi.org/10.1002/ADMI.201600355 Kim, D. H., Losego, M. D., Peng, Q., & Parsons, G. N. (2016). Thin Films: Atomic Layer Deposition for Sensitized Solar Cells: Recent Progress and Prospects (Adv. Mater. Interfaces 21/2016). Advanced Materials Interfaces, 3(21). https://doi.org/10.1002/ADMI.201670102 Zhao, J., Lee, D. T., Yaga, R. W., Hall, M. G., Barton, H. F., Woodward, I. R., … Parsons, G. N. (2016). Ultra-Fast Degradation of Chemical Warfare Agents Using MOF-Nanofiber Kebabs. ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 55(42), 13224–13228. https://doi.org/10.1002/anie.201606656 Lemaire, P. C., King, M., & Parsons, G. N. (2017). Understanding inherent substrate selectivity during atomic layer deposition: Effect of surface preparation, hydroxyl density, and metal oxide composition on nucleation mechanisms during tungsten ALD. JOURNAL OF CHEMICAL PHYSICS, 146(5). https://doi.org/10.1063/1.4967811 Dandley, E. C., Lemaire, P. C., Zhu, Z., Yoon, A., Sheet, L., & Parsons, G. N. (2017). Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates. Advanced Materials Interfaces, 4(4). https://doi.org/10.1002/ADMI.201601178 Wang, Z., Zhao, J., Bagal, A., Dandley, E. C., Oldham, C. J., Fang, T., … Chang, C.-H. (2016). Wicking Enhancement in Three-Dimensional Hierarchical Nanostructures. LANGMUIR, 32(32), 8029–8033. https://doi.org/10.1021/acs.langmuir.6b01864 Dandley, E. C., Taylor, A. J., Duke, K. S., Ihrie, M. D., Shipkowski, K. A., Parsons, G. N., & Bonner, J. C. (2016). Atomic layer deposition coating of carbon nanotubes with zinc oxide causes acute phase immune responses in human monocytes in vitro and in mice after pulmonary exposure. PARTICLE AND FIBRE TOXICOLOGY, 13. https://doi.org/10.1186/s12989-016-0141-9 Brozena, A. H., Oldham, C. J., & Parsons, G. N. (2016). [Review of Atomic layer deposition on polymer fibers and fabrics for multifunctional and electronic textiles]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(1). https://doi.org/10.1116/1.4938104 Knauf, R. R., Kalanyan, B., Parsons, G., & Dempsey, J. L. (2015). Charge Recombination Dynamics in Sensitized SnO2/TiO2 Core/Shell Photoanodes. Journal of Physical Chemistry C, 119(51), 28353–28360. https://doi.org/10.1021/acs.jpcc.5b10574 Vogel, N. A., Williams, P. S., Brozena, A. H., Sen, D., Atanasov, S., Parsons, G. N., & Khan, S. A. (2015). Delayed Dissolution and Small Molecule Release from Atomic Layer Deposition Coated Electrospun Nanofibers. Advanced Materials Interfaces, 2(18), 1500229. https://doi.org/10.1002/ADMI.201500229 Daubert, J. S., Lewis, N. P., Gotsch, H. N., Mundy, J. Z., Monroe, D. N., Dickey, E. C., … Parsons, G. N. (2015). Effect of Meso- and Micro-Porosity in Carbon Electrodes on Atomic Layer Deposition of Pseudocapacitive V2O5 for High Performance Supercapacitors. Chemistry of Materials, 27(19), 6524–6534. https://doi.org/10.1021/acs.chemmater.5b01602 Zhao, J., Nunn, W. T., Lemaire, P. C., Lin, Y., Dickey, M., Oldham, C. J., … al. (2015). Facile Conversion of Hydroxy Double Salts to Metal-Organic Frameworks Using Metal Oxide Particles and Atomic Layer Deposition Thin-Film Templates. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 137(43), 13756–13759. https://doi.org/10.1021/jacs.5b08752 Sweet, W. J., III, & Parsons, G. N. (2015). In Situ Conductance Analysis of Zinc Oxide Nucleation and Coalescence during Atomic Layer Deposition on Metal Oxides and Polymers. LANGMUIR, 31(26), 7274–7282. https://doi.org/10.1021/acs.langmuir.5b00665 Atanasov, S. E., Kalanyan, B., & Parsons, G. N. (2016). Inherent substrate-dependent growth initiation and selective-area atomic layer deposition of TiO2 using "water-free" metal-halide/metal alkoxide reactants. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(1). https://doi.org/10.1116/1.4938481 Mundy, J. Z., Shafiefarhood, A., Li, F., Khan, S. A., & Parsons, G. N. (2016). Low temperature platinum atomic layer deposition on nylon-6 for highly conductive and catalytic fiber mats. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(1). https://doi.org/10.1116/1.4935448 Bagal, A., Dandley, E. C., Zhao, J., Zhang, X. A., Oldham, C. J., Parsons, G. N., & Chang, C.-H. (2015). Multifunctional nano-accordion structures for stretchable transparent conductors. MATERIALS HORIZONS, 2(5), 486–494. https://doi.org/10.1039/c5mh00070j Zhang, X. A., Bagal, A., Dandley, E. C., Zhao, J., Oldham, C. J., Wu, B.-I., … Chang, C.-H. (2015). Ordered 3D Thin-Shell Nanolattice Materials with Near-Unity Refractive Indices. ADVANCED FUNCTIONAL MATERIALS, 25(42), 6644–6649. https://doi.org/10.1002/adfm.201502854 Kim, D. H., Atanasov, S. E., Lemaire, P., Lee, K., & Parsons, G. N. (2015). Platinum-Free Cathode for Dye-Sensitized Solar Cells Using Poly(3,4-ethylenedioxythiophene) (PEDOT) Formed via Oxidative Molecular Layer Deposition. ACS APPLIED MATERIALS & INTERFACES, 7(7), 3866–3870. https://doi.org/10.1021/am5084418 Mousa, M. B. M., Oldham, C. J., & Parsons, G. N. (2015). Precise Nanoscale Surface Modification and Coating of Macroscale Objects: Open-Environment in Loco Atomic Layer Deposition on an Automobile. ACS APPLIED MATERIALS & INTERFACES, 7(35), 19523–19529. https://doi.org/10.1021/acsami.5b05262 Lemaire, P. C., Oldham, C. J., & Parsons, G. N. (2016). Rapid visible color change and physical swelling during water exposure in triethanolamine-metalcone films formed by molecular layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(1). https://doi.org/10.1116/1.4937222 Hilton, G. M., Taylor, A. J., McClure, C. D., Parsons, G. N., Bonner, J. C., & Bereman, M. S. (2015). Toxicoproteomic analysis of pulmonary carbon nanotube exposure using LC-MS/MS. TOXICOLOGY, 329, 80–87. https://doi.org/10.1016/j.tox.2015.01.011 Kalanyan, B., Lemaire, P. C., Atanasov, S. E., Ritz, M. J., & Parsons, G. N. (2016). Using Hydrogen To Expand the Inherent Substrate Selectivity Window During Tungsten Atomic Layer Deposition. CHEMISTRY OF MATERIALS, 28(1), 117–126. https://doi.org/10.1021/acs.chemmater.5b03319 Dandley, E. C., Lemaire, P. C., Zhu, Z., Yoon, A., Sheet, L., & Parsons, G. N. (2016). Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates. ADVANCED MATERIALS INTERFACES, 3(2). https://doi.org/10.1002/admi.201500431 He, F., Trainham, J., Parsons, G. N., Newman, J. S., & Li, F. (2014). A hybrid solar-redox scheme for liquid fuel and hydrogen coproduction. ENERGY & ENVIRONMENTAL SCIENCE, 7(6), 2033–2042. https://doi.org/10.1039/c4ee00038b Mousa, M. B. M., Oldham, C. J., & Parsons, G. N. (2014). Atmospheric Pressure Atomic Layer Deposition of Al2O3 Using Trimethyl Aluminum and Ozone. LANGMUIR, 30(13), 3741–3748. https://doi.org/10.1021/la500796r Taylor, A. J., McClure, C. D., Shipkowski, K. A., Thompson, E. A., Hussain, S., Garantziotis, S., … Bonner, J. C. (2014). Atomic Layer Deposition Coating of Carbon Nanotubes with Aluminum Oxide Alters Pro-Fibrogenic Cytokine Expression by Human Mononuclear Phagocytes In Vitro and Reduces Lung Fibrosis in Mice In Vivo. PLOS ONE, 9(9). https://doi.org/10.1371/journal.pone.0106870 Sweet, W. J., III, Oldham, C. J., & Parsons, G. N. (2014). Atomic Layer Deposition of Metal Oxide Patterns on Nonwoven Fiber Mats using Localized Physical Compression. ACS APPLIED MATERIALS & INTERFACES, 6(12), 9280–9289. https://doi.org/10.1021/am501582p Alibabaei, L., Farnum, B. H., Kalanyan, B., Brennaman, M. K., Losego, M. D., Parsons, G. N., & Meyer, T. J. (2014). Atomic Layer Deposition of TiO2 on Mesoporous nanolTO: Conductive Core-Shell Photoanodes for Dye-Sensitized Solar Cells. NANO LETTERS, 14(6), 3255–3261. https://doi.org/10.1021/nl5006433 Walls, H. J., Oldham, C. J., Yaga, R. W., Hoertz, P. G., Guzan, K. A., Parsons, G. N., & Ensor, D. S. (2014). Coatings for electrospun nanofibers for use in harsh environments. Abstracts of Papers of the American Chemical Society, 247. Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000348457604158&KeyUID=WOS:000348457604158 Sweet, W. J., III, Oldham, C. J., & Parsons, G. N. (2015). Conductivity and touch-sensor application for atomic layer deposition ZnO and Al:ZnO on nylon nonwoven fiber mats. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 33(1). https://doi.org/10.1116/1.4900718 Zhao, J., Gong, B., Nunn, W. T., Lemaire, P. C., Stevens, E. C., Sidi, F. I., … Parsons, G. N. (2015). Conformal and highly adsorptive metal-organic framework thin films via layer-by-layer growth on ALD-coated fiber mats. JOURNAL OF MATERIALS CHEMISTRY A, 3(4), 1458–1464. https://doi.org/10.1039/c4ta05501b Gorham, C. S., Gaskins, J. T., Parsons, G. N., Losego, M. D., & Hopkins, P. E. (2014). Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina (Al2O3). APPLIED PHYSICS LETTERS, 104(25). https://doi.org/10.1063/1.4885415 McClure, C. D., Oldham, C. J., & Parsons, G. (2015). Effect of Al2O3 ALD coating and vapor infusion on the bulk mechanical response of elastic and viscoelastic polymers. Surface Coatings Technology, 261, 411–417. https://doi.org/10.1016/j.surfcoat.2014.10.029 Lee, K., Kim, D. H., & Parsons, G. N. (2014). Free-Floating Synthetic Nanosheets by Atomic Layer Deposition. ACS APPLIED MATERIALS & INTERFACES, 6(14), 10981–10985. https://doi.org/10.1021/am502850p Lee, K., Losego, M. D., Kim, D. H., & Parsons, G. N. (2014). High performance photocatalytic metal oxide synthetic bi-component nanosheets formed by atomic layer deposition. MATERIALS HORIZONS, 1(4), 419–423. https://doi.org/10.1039/c4mh00012a Zhao, J., Losego, M. D., Lemaire, P. C., Williams, P. S., Gong, B., Atanasov, S. E., … Parsons, G. N. (2014). Highly Adsorptive, MOF-Functionalized Nonwoven Fiber Mats for Hazardous Gas Capture Enabled by Atomic Layer Deposition. Advanced Materials Interfaces, 1(4), 1400040. https://doi.org/10.1002/ADMI.201400040 Atanasov, S. E., Losego, M. D., Gong, B., Sachet, E., Maria, J.-P., Williams, P. S., & Parsons, G. N. (2014). Highly Conductive and Conformal Poly(3,4-ethylenedioxythiophene) (PEDOT) Thin Films via Oxidative Molecular Layer Deposition. CHEMISTRY OF MATERIALS, 26(11), 3471–3478. https://doi.org/10.1021/cm500825b Atanasov, S. E., Oldham, C. J., Slusarski, K. A., Taggart-Scarff, J., Sherman, S. A., Senecal, K. J., … Parsons, G. N. (2014). Improved cut-resistance of Kevlar (R) using controlled interface reactions during atomic layer deposition of ultrathin (< 50 angstrom) inorganic coatings. JOURNAL OF MATERIALS CHEMISTRY A, 2(41), 17371–17379. https://doi.org/10.1039/c4ta03662j Zhao, J., Losego, M. D., Lemaire, P. C., Williams, P. S., Gong, B., Atanasov, S. E., … Parsons, G. N. (2014). Metal-Organic Frameworks: Highly Adsorptive, MOF-Functionalized Nonwoven Fiber Mats for Hazardous Gas Capture Enabled by Atomic Layer Deposition (Adv. Mater. Interfaces 4/2014). Advanced Materials Interfaces, 1(4), n/a-n/a. https://doi.org/10.1002/ADMI.201470023 Meyer, T. J., Alibabaei, L., Brennaman, M. K., Norris, M. R., Kalanyan, B., Song, W., … Parsons, G. N. (2014). Solar water splitting in a molecular photoelectrochemical cell. Abstracts of Papers of the American Chemical Society, 247. Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000348457601193&KeyUID=WOS:000348457601193 Kim, D. H., Losego, M. D., Hanson, K., Alibabaei, L., Lee, K., Meyer, T. J., & Parsons, G. N. (2014). Stabilizing chromophore binding on TiO2 for long-term stability of dye-sensitized solar cells using multicomponent atomic layer deposition. PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 16(18), 8615–8622. https://doi.org/10.1039/c4cp01130a Dandley, E. C., Needham, C. D., Williams, P. S., Brozena, A. H., Oldham, C. J., & Parsons, G. N. (2014). Temperature-dependent reaction between trimethylaluminum and poly(methyl methacrylate) during sequential vapor infiltration: experimental and ab initio analysis. JOURNAL OF MATERIALS CHEMISTRY C, 2(44), 9416–9424. https://doi.org/10.1039/c4tc01293c Song, W., Vannucci, A. K., Farnum, B. H., Lapides, A. M., Brennaman, M. K., Kalanyan, B., … Meyer, T. J. (2014). Visible Light Driven Benzyl Alcohol Dehydrogenation in a Dye-Sensitized Photoelectrosynthesis Cell. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 136(27), 9773–9779. https://doi.org/10.1021/ja505022f Kim, D. H., Woodroof, M., Lee, K., & Parsons, G. N. (2013). Atomic Layer Deposition of High Performance Ultrathin TiO2 Blocking Layers for Dye-Sensitized Solar Cells. CHEMSUSCHEM, 6(6), 1014–1020. https://doi.org/10.1002/cssc.201300067 Kim, D. H., Woodroof, M., Lee, K., & Parsons, G. N. (2013). Atomic Layer Deposition of High Performance Ultrathin TiO2 Blocking Layers for Dye-Sensitized Solar Cells. ChemSusChem, 6(6), 930–930. https://doi.org/10.1002/CSSC.201300468 Sweet, W. J., III, Jur, J. S., & Parsons, G. N. (2013). Bi-layer Al2O3/ZnO atomic layer deposition for controllable conductive coatings on polypropylene nonwoven fiber mats. JOURNAL OF APPLIED PHYSICS, 113(19). https://doi.org/10.1063/1.4804960 Kim, D. H., Woodroof, M., Lee, K., & Parsons, G. N. (2013). Cover Picture: Atomic Layer Deposition of High Performance Ultrathin TiO2Blocking Layers for Dye-Sensitized Solar Cells (ChemSusChem 6/2013). ChemSusChem, 6(6), 929–929. https://doi.org/10.1002/CSSC.201390023 Vannucci, A. K., Alibabaei, L., Losego, M. D., Concepcion, J. J., Kalanyan, B., Parsons, G. N., & Meyer, T. J. (2013). Crossing the divide between homogeneous and heterogeneous catalysis in water oxidation. PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 110(52), 20918–20922. https://doi.org/10.1073/pnas.1319832110 Kalanyan, B., Oldham, C. J., Sweet, W. J., III, & Parsons, G. N. (2013). Highly Conductive and Flexible Nylon-6 Nonwoven Fiber Mats Formed using Tungsten Atomic Layer Deposition. ACS Applied Materials & Interfaces, 5(11), 5253–5259. https://doi.org/10.1021/AM401095R Parsons, G. N., Elam, J. W., George, S. M., Haukka, S., Jeon, H., Kessels, W. M. M., … Rossnagel, S. M. (2013). [Review of History of atomic layer deposition and its relationship with the American Vacuum Society]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 31(5). https://doi.org/10.1116/1.4816548 McClure, C. D., Oldham, C. J., Walls, H. J., & Parsons, G. N. (2013). Large effect of titanium precursor on surface reactivity and mechanical strength of electrospun nanofibers coated with TiO2 by atomic layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 31(6). https://doi.org/10.1116/1.4817718 Kalanyan, B., Losego, M. D., Oldham, C. J., & Parsons, G. N. (2013). Low-Temperature Atomic Layer Deposition of Tungsten using Tungsten Hexafluoride and Highly-diluted Silane in Argon. CHEMICAL VAPOR DEPOSITION, 19(4-6), 161–166. https://doi.org/10.1002/cvde.201307053 Parsons, G. N., Atanasov, S. E., Dandley, E. C., Devine, C. K., Gong, B., Jur, J. S., … Williams, P. S. (2013). [Review of Mechanisms and reactions during atomic layer deposition on polymers]. COORDINATION CHEMISTRY REVIEWS, 257(23-24), 3323–3331. https://doi.org/10.1016/j.ccr.2013.07.001 McClure, J. P., Devine, C. K., Jiang, R., Chu, D., Cuomo, J. J., Parsons, G. N., & Fedkiw, P. S. (2013). Oxygen Electroreduction on Ti- and Fe-Containing Carbon Fibers. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 160(8), F769–F778. https://doi.org/10.1149/2.029308jes Petrochenko, P. E., Scarel, G., Hyde, G. K., Parsons, G. N., Skoog, S. A., Zhang, Q., … Narayan, R. J. (2013). Prevention of Ultraviolet (UV)-Induced Surface Damage and Cytotoxicity of Polyethersulfone Using Atomic Layer Deposition (ALD) Titanium Dioxide. JOM, 65(4), 550–556. https://doi.org/10.1007/s11837-013-0565-8 Alibabaei, L., Brennaman, M. K., Norris, M. R., Kalanyan, B., Song, W., Losego, M. D., … Meyer, T. J. (2013). Solar water splitting in a molecular photoelectrochemical cell. PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 110(50), 20008–20013. https://doi.org/10.1073/pnas.1319628110 Loebl, A. J., Oldham, C. J., Devine, C. K., Gong, B., Atanasov, S. E., Parsons, G. N., & Fedkiw, P. S. (2013). Solid Electrolyte Interphase on Lithium-Ion Carbon Nanofiber Electrodes by Atomic and Molecular Layer Deposition. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 160(11), A1971–A1978. https://doi.org/10.1149/2.020311jes Peng, Q., Kalanyan, B., Hoertz, P. G., Miller, A., Kim, D. H., Hanson, K., … Glass, J. T. (2013). Solution-Processed, Antimony-Doped Tin Oxide Colloid Films Enable High-Performance TiO2 Photoanodes for Water Splitting. NANO LETTERS, 13(4), 1481–1488. https://doi.org/10.1021/nl3045525 Lucovsky, G., Parsons, G., Zeller, D., & Kim, J. (2013). Spectroscopic Detection of Medium Range Order in Device Grade Hydrogenated Amorphous Silicon. JAPANESE JOURNAL OF APPLIED PHYSICS, 52(4). https://doi.org/10.7567/jjap.52.04cr10 Lucovsky, G., Parsons, G., Zeller, D., Wu, K., Papas, B., Whitten, J., … Street, R. A. (2013). Spectroscopic Detection of Medium Range Order in Hydrogenated Amorphous Silicon, a-Si(H): Applications in Photovolatics, Thin Film Transistors and Si-based Microelectronics. Physics Procedia, 44, 91–98. https://doi.org/10.1016/J.PHPRO.2013.04.012 Hanson, K., Losego, M. D., Kalanyan, B., Parsons, G. N., & Meyer, T. J. (2013). Stabilizing Small Molecules on Metal Oxide Surfaces Using Atomic Layer Deposition. NANO LETTERS, 13(10), 4802–4809. https://doi.org/10.1021/nl402416s Aykut, Y., Parsons, G. N., Pourdeyhimi, B., & Khan, S. A. (2013). Synthesis of Mixed Ceramic MgxZn1–xO Nanofibers via Mg2+ Doping Using Sol–Gel Electrospinning. Langmuir, 29(12), 4159–4166. https://doi.org/10.1021/LA400281C Arpin, K. A., Losego, M. D., Cloud, A. N., Ning, H., Mallek, J., Sergeant, N. P., … Braun, P. V. (2013). Three-dimensional self-assembled photonic crystals with high temperature stability for thermal emission modification. NATURE COMMUNICATIONS, 4. https://doi.org/10.1038/ncomms3630 Park, K. J., & Parsons, G. N. (2012). Atomic layer deposition of Ru onto organic monolayers: Shifting metal effective work function using monolayer structure. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1). https://doi.org/10.1116/1.3671938 Gong, B., & Parsons, G. N. (2012). Caprolactone Ring-Opening Molecular Layer Deposition of Organic-Aluminum Oxide Polymer Films. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 1(4), P210–P215. https://doi.org/10.1149/2.023204jss Gong, B., Spagnola, J. C., Arvidson, S. A., Khan, S. A., & Parsons, G. N. (2012). Directed inorganic modification of bi-component polymer fibers by selective vapor reaction and atomic layer deposition. POLYMER, 53(21), 4631–4636. https://doi.org/10.1016/j.polymer.2012.08.018 Lee, K., Jur, J. S., Kim, D. H., & Parsons, G. N. (2012). Mechanisms for hydrophilic/hydrophobic wetting transitions on cellulose cotton fibers coated using Al2O3 atomic layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1). https://doi.org/10.1116/1.3671942 Gong, B., Kim, D. H., & Parsons, G. N. (2012). Mesoporous Metal Oxides by Vapor Infiltration and Atomic Layer Deposition on Ordered Surfactant Polymer Films. LANGMUIR, 28(32), 11915–11922. https://doi.org/10.1021/la302027b Jur, J. S., & Parsons, G. N. (2012). Nanoscale ceramic surface modification of textiles by atomic layer deposition. American Ceramic Society Bulletin, 91(6), 24–27. Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000307316900013&KeyUID=WOS:000307316900013 Peng, Q., Efimenko, K., Genzer, J., & Parsons, G. N. (2012). Oligomer Orientation in Vapor-Molecular-Layer-Deposited Alkyl-Aromatic Polyamide Films. LANGMUIR, 28(28), 10464–10470. https://doi.org/10.1021/la3017936 Gong, B., & Parsons, G. N. (2012). Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition. JOURNAL OF MATERIALS CHEMISTRY, 22(31), 15672–15682. https://doi.org/10.1039/c2jm32343e Peng, S., Parsons, G., & Dean, A. G. (2012). RESOURCE-FOCUSED TOOLCHAIN FOR RAPID PROTOTYPING OF EMBEDDED SYSTEMS. JOURNAL OF CIRCUITS SYSTEMS AND COMPUTERS, 21(2). https://doi.org/10.1142/s0218126612400038 Hanson, K., Losego, M. D., Kalanyan, B., Ashford, D. L., Parsons, G. N., & Meyer, T. J. (2013). Stabilization of [Ru(bpy)(2)(4,4 '-(PO3H2)bpy)](2+) on Mesoporous TiO2 with Atomic Layer Deposition of Al2O3. CHEMISTRY OF MATERIALS, 25(1), 3–5. https://doi.org/10.1021/cm303172w Kim, D. H., Koo, H.-J., Jur, J. S., Woodroof, M., Kalanyan, B., Lee, K., … Parsons, G. N. (2012). Stable anatase TiO2 coating on quartz fibers by atomic layer deposition for photoactive light-scattering in dye-sensitized solar cells. NANOSCALE, 4(15), 4731–4738. https://doi.org/10.1039/c2nr30939d Akyildiz, H. I., Padbury, R. P., Parsons, G. N., & Jur, J. S. (2012). Temperature and Exposure Dependence of Hybrid Organic-Inorganic Layer Formation by Sequential Vapor Infiltration into Polymer Fibers. LANGMUIR, 28(44), 15697–15704. https://doi.org/10.1021/la302991c Aykut, Y., Saquing, C. D., Pourdeyhimi, B., Parsons, G. N., & Khan, S. A. (2012). Templating Quantum Dot to Phase-Transformed Electrospun TiO2 Nanofibers for Enhanced Photo-Excited Electron Injection. ACS APPLIED MATERIALS & INTERFACES, 4(8), 3837–3845. https://doi.org/10.1021/am300524a Kalanyan, B., Parsons, G. N., Elam, J. W., Londergan, A., VanDerStraten, O., Roozeboom, F., … Delabie, A. (2011). Atomic Layer Deposited Oxides for Passivation of Silicon Photoanodes for Solar Photoelectrochemical Cells. Atomic Layer Deposition Applications 7, 41(2), 285–292. https://doi.org/10.1149/1.3633679 Jur, J. S., & Parsons, G. N. (2011). Atomic Layer Deposition of Al2O3 and ZnO at Atmospheric Pressure in a Flow Tube Reactor. ACS APPLIED MATERIALS & INTERFACES, 3(2), 299–308. https://doi.org/10.1021/am100940g Jur, J. S., Sweet, W. J., III, Oldham, C. J., & Parsons, G. N. (2011). Atomic Layer Deposition of Conductive Coatings on Cotton, Paper, and Synthetic Fibers: Conductivity Analysis and Functional Chemical Sensing Using “All-Fiber” Capacitors. Advanced Functional Materials, 21(11), 1993–2002. https://doi.org/10.1002/adfm.201001756 Peng, Q., Lewis, J. S., Hoertz, P. G., Glass, J. T., & Parsons, G. N. (2012). [Review of Atomic layer deposition for electrochemical energy generation and storage systems]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1). https://doi.org/10.1116/1.3672027 Hyde, G. K., Stewart, S. M., Scarel, G., Parsons, G. N., Shih, C.-C., Shih, C.-M., … al. (2011). Atomic layer deposition of titanium dioxide on cellulose acetate for enhanced hemostasis. Biotechnology Journal, 6(2), 213–223. https://doi.org/10.1002/biot.201000342 Wang, X., Krommenhoek, P. J., Bradford, P. D., Gong, B., Tracy, J. B., Parsons, G. N., … Zhu, Y. T. (2011). Coating Alumina on Catalytic Iron Oxide Nanoparticles for Synthesizing Vertically Aligned Carbon Nanotube Arrays. ACS Applied Materials & Interfaces, 3(11), 4180–4184. https://doi.org/10.1021/am201082m Gong, B., Peng, Q., & Parsons, G. N. (2011). Conformal Organic - Inorganic Hybrid Network Polymer Thin Films by Molecular Layer Deposition using Trimethylaluminum and Glycidol. JOURNAL OF PHYSICAL CHEMISTRY B, 115(19), 5930–5938. https://doi.org/10.1021/jp201186k Gong,, B., Peng,, Q., & Parsons, G. N. (2011). Correction to “Conformal Organic-Inorganic Hybrid Network Polymer Thin Films by Molecular Layer Deposition using Trimethylaluminum and Glycidol.” The Journal of Physical Chemistry B, 115(37), 11028–11028. https://doi.org/10.1021/jp205915n Mousa, M. B. M., Oldham, C. J., Jur, J. S., & Parsons, G. N. (2012). Effect of temperature and gas velocity on growth per cycle during Al2O3 and ZnO atomic layer deposition at atmospheric pressure. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1). https://doi.org/10.1116/1.3670961 Jur, J. S., Sweet, W. J., III, Oldham, C. J., & Parsons, G. N. (2011). Electronic Textiles: Atomic Layer Deposition of Conductive Coatings on Cotton, Paper, and Synthetic Fibers: Conductivity Analysis and Functional Chemical Sensing Using “All-Fiber” Capacitors (Adv. Funct. Mater. 11/2011). Advanced Functional Materials, 21(11), 1948–1948. https://doi.org/10.1002/adfm.201190035 Oldham, C. J., Gong, B., Spagnola, J. C., Jur, J. S., Senecal, K. J., Godfrey, T. A., & Parsons, G. N. (2011). Encapsulation and Chemical Resistance of Electrospun Nylon Nanofibers Coated Using Integrated Atomic and Molecular Layer Deposition. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 158(9), D549–D556. https://doi.org/10.1149/1.3609046 Devine, C. K., Oldham, C. J., Jur, J. S., Gong, B., & Parsons, G. N. (2011). Fiber Containment for Improved Laboratory Handling and Uniform Nanocoating of Milligram Quantities of Carbon Nanotubes by Atomic Layer Deposition. Langmuir, 27(23), 14497–14507. https://doi.org/10.1021/la202677u Gong, B., Peng, Q., Na, J.-S., & Parsons, G. N. (2011). Highly active photocatalytic ZnO nanocrystalline rods supported on polymer fiber mats: Synthesis using atomic layer deposition and hydrothermal crystal growth. APPLIED CATALYSIS A-GENERAL, 407(1-2), 211–216. https://doi.org/10.1016/j.apcata.2011.08.041 Gong, B., Spagnola, J. C., & Parsons, G. N. (2012). Hydrophilic mechanical buffer layers and stable hydrophilic finishes on polydimethylsiloxane using combined sequential vapor infiltration and atomic/molecular layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1). https://doi.org/10.1116/1.3670963 Peng, Q., Gong, B., & Parsons, G. N. (2011). Making inert polypropylene fibers chemically responsive by combining atomic layer deposition and vapor phase chemical grafting. NANOTECHNOLOGY, 22(15). https://doi.org/10.1088/0957-4484/22/15/155601 Johnston-Peck, A., Scarel, G., Wang, J., Parsons, G., & Tracy, J. (2011). Order-Disorder Phase Conversion of FePt Nanoparticles for Ultrahigh-Density Magnetic Recording. Microscopy and Microanalysis, 17(S2), 1830–1831. https://doi.org/10.1017/S1431927611010026 Hanson, C. A., Oldham, C. J., & Parsons, G. N. (2012). Paper deacidification and UV protection using ZnO atomic layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1). https://doi.org/10.1116/1.3656251 Parsons, G. N., George, S. M., & Knez, M. (2011). Progress and future directions for atomic layer deposition and ALD-based chemistry. MRS BULLETIN, 36(11), 865–871. https://doi.org/10.1557/mrs.2011.238 Gong, B., Peng, Q., Jur, J. S., Devine, C. K., Lee, K., & Parsons, G. N. (2011). Sequential Vapor Infiltration of Metal Oxides into Sacrificial Polyester Fibers: Shape Replication and Controlled Porosity of Microporous/Mesoporous Oxide Monoliths. Chemistry of Materials, 23(15), 3476–3485. https://doi.org/10.1021/cm200694w Kim, E., Lee, K., Kim, D., Parsons, G. N., Park, K., Ihm, J., & Cheong, H. (2011). SiNx Charge Trap Nonvolatile Memory Based on ZnO Thin Film Transistor Prepared by Atomic Layer Deposition. Presented at the PHYSICS OF SEMICONDUCTORS: 30th International Conference on the Physics of Semiconductors. https://doi.org/10.1063/1.3666301 Kim, E., Kim, Y., Kim, D. H., Lee, K., Parsons, G. N., & Park, K. (2011). SiNx charge-trap nonvolatile memory based on ZnO thin-film transistors. APPLIED PHYSICS LETTERS, 99(11). https://doi.org/10.1063/1.3640221 Johnston-Peck, A. C., Scarel, G., Wang, J., Parsons, G. N., & Tracy, J. B. (2011). Sinter-free phase conversion and scanning transmission electron microscopy of FePt nanoparticle monolayers. NANOSCALE, 3(10), 4142–4149. https://doi.org/10.1039/c1nr10567a Poodt, P., Cameron, D. C., Dickey, E., George, S. M., Kuznetsov, V., Parsons, G. N., … Vermeer, A. (2012). [Review of Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1). https://doi.org/10.1116/1.3670745 Lucovsky, G., Parsons, G., Zeller, D., Wu, K., Papas, B., Whitten, J., … Street, R. A. (2011). Spectroscopic detection of medium range order in device quality hydrogenated amorphous silicon, a-Si(H). Journal of Optoelectronics and Advanced Materials, 13(11-12), 1586–1589. Vasquez, K. A., Vincent-Johnson, A. J., Hughes, W. C., Augustine, B. H., Lee, K., Parsons, G. N., & Scarel, G. (2012). Wetting properties induced in nano-composite POSS-MA polymer films by atomic layer deposited oxides. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1). https://doi.org/10.1116/1.3639134 Scarel, G., Na, J.-S., & Parsons, G. N. (2010). Angular behavior of the Berreman effect investigated in uniform Al2O3 layers formed by atomic layer deposition. JOURNAL OF PHYSICS-CONDENSED MATTER, 22(15). https://doi.org/10.1088/0953-8984/22/15/155401 Oldham, C. J., Gong, B., Spagnola, J. C., Jur, J. S., Senecal, K. J., Godfrey, T. A., … Roozeboom, F. (2010). Atomic Layer Deposition on Polymers: Applications to Physical Encapsulation of Electrospun Nylon Nanofibers. Atomic Layer Deposition Applications 6, 33(2), 279–290. Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000313617900030&KeyUID=WOS:000313617900030 Parsons, G. (2010). Nano-structured photovoltaic solar cell and related methods. Scarel, G., Na, J.-S., Gong, B., & Parsons, G. N. (2010). Phonon Response in the Infrared Region to Thickness of Oxide Films Formed by Atomic Layer Deposition. APPLIED SPECTROSCOPY, 64(1), 120–126. https://doi.org/10.1366/000370210790571954 Spagnola, J. C., Gong, B., Arvidson, S. A., Jur, J. S., Khan, S. A., & Parsons, G. N. (2010). Surface and sub-surface reactions during low temperature aluminium oxide atomic layer deposition on fiber-forming polymers. JOURNAL OF MATERIALS CHEMISTRY, 20(20), 4213–4222. https://doi.org/10.1039/c0jm00355g Spagnola, J. C., Gong, B., & Parsons, G. (2010). Surface texture and wetting stability of polydimethylsiloxane coated with aluminum oxide at low temperature by atomic layer deposition. Journal of Vacuum Science Technology a, 28(6), 1330–1337. https://doi.org/10.1116/1.3488604 Jur, J. S., Spagnola, J. C., Lee, K., Gong, B., Peng, Q., & Parsons, G. N. (2010). Temperature-Dependent Subsurface Growth during Atomic Layer Deposition on Polypropylene and Cellulose Fibers. LANGMUIR, 26(11), 8239–8244. https://doi.org/10.1021/la904604z Peng, Q., Gong, B., VanGundy, R. M., & Parsons, G. N. (2009). "Zincone" Zinc Oxide-Organic Hybrid Polymer Thin Films Formed by Molecular Layer Deposition. CHEMISTRY OF MATERIALS, 21(5), 820–830. https://doi.org/10.1021/cm8020403 Gittard, S. D., Hojo, D., Hyde, G. K., Scarel, G., Narayan, R. J., & Parsons, G. N. (2009). Antifungal Textiles Formed Using Silver Deposition in Supercritical Carbon Dioxide. Journal of Materials Engineering and Performance, 19(3), 368–373. https://doi.org/10.1007/s11665-009-9514-7 Hyde, G. K., Scarel, G., Spagnola, J. C., Peng, Q., Lee, K., Gong, B., … Parsons, G. N. (2010). Atomic Layer Deposition and Abrupt Wetting Transitions on Nonwoven Polypropylene and Woven Cotton Fabrics. LANGMUIR, 26(4), 2550–2558. https://doi.org/10.1021/la902830d Hyde, G. K., McCullen, S. D., Jeon, S., Stewart, S. M., Jeon, H., Loboa, E. G., & Parsons, G. N. (2009). Atomic layer deposition and biocompatibility of titanium nitride nano-coatings on cellulose fiber substrates. BIOMEDICAL MATERIALS, 4(2). https://doi.org/10.1088/1748-6041/4/2/025001 Peng, Q., Sun, X.-Y., Spagnola, J. C., Saquing, C., Khan, S. A., Spontak, R. J., & Parsons, G. N. (2009). Bi-directional Kirkendall Effect in Coaxial Microtuble Nanolaminate Assemblies Fabricated by Atomic Layer Deposition. ACS NANO, 3(3), 546–554. https://doi.org/10.1021/nn8006543 Na, J.-S., Scarel, G., & Parsons, G. N. (2010). 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JOURNAL OF APPLIED PHYSICS, 104(9). https://doi.org/10.1063/1.3013439 Peng, Q., Spagnola, J. C., Daisuke, H., Park, K. J., & Parsons, G. N. (2008). Conformal metal oxide coatings on nanotubes by direct low temperature metal-organic pyrolysis in supercritical carbon dioxide. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 26(3), 978–982. https://doi.org/10.1116/1.2917072 Na, J.-S., Ayres, J. A., Chandra, K. L., Gorman, C. B., & Parsons, G. N. (2008). Nanoencapsulation and Stabilization of Single-Molecule/Particle Electronic Nanoassemblies Using Low-Temperature Atomic Layer Deposition. JOURNAL OF PHYSICAL CHEMISTRY C, 112(51), 20510–20517. https://doi.org/10.1021/jp8066298 Peng, Q., Spagnola, J. C., & Parsons, G. N. (2008). Self-catalyzed hydrogenolysis of nickelocene: Functional metal coating of three-dimensional nanosystems at low temperature. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 155(9), D580–D582. https://doi.org/10.1149/1.2946723 Hyde, G. K., Park, K. J., Stewart, S. M., Hinestroza, J. P., & Parsons, G. N. (2007). Atomic layer deposition of Conformal inorganic nanoscale coatings on three-dimensional natural fiber systems: Effect of surface topology on film growth characteristics. LANGMUIR, 23(19), 9844–9849. https://doi.org/10.1021/la701449t Peng, Q., Sun, X.-Y., Spagnola, J. C., Hyde, G. K., Spontak, R. J., & Parsons, G. N. (2007). Atomic layer deposition on electrospun polymer fibers as a direct route to Al2O3 microtubes with precise wall thickness control. NANO LETTERS, 7(3), 719–722. https://doi.org/10.1021/nl062948i Na, J.-S., Ayres, J., Chandra, K. L., Chu, C., Gorman, C. B., & Parsons, G. N. (2007). Conduction mechanisms and stability of single molecule nanoparticle/molecule/nanoparticle junctions. Nanotechnology, 18(3), 035203. https://doi.org/10.1088/0957-4484/18/3/035203 Chu, C., Na, J.-S., & Parsons, G. N. (2007). Conductivity in alkylamine/gold and alkanethiol/gold molecular junctions measured in molecule/nanoparticle/molecule bridges and conducting probe structures. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 129(8), 2287–2296. https://doi.org/10.1021/ja064968s Chu, C., Ayres, J. A., Stefanescu, D. M., Walker, B. R., Gorman, C. B., & Parsons, G. N. (2007). Enhanced conduction through isocyanide terminal groups in alkane and biphenylene molecules measured in molecule/nanoparticle/molecule junctions. JOURNAL OF PHYSICAL CHEMISTRY C, 111(22), 8080–8085. https://doi.org/10.1021/jp065377r Park, K. J., Terry, D. B., Stewart, S. M., & Parsons, G. N. (2007). In situ Auger electron spectroscopy study of atomic layer deposition: Growth initiation and interface formation reactions during ruthenium ALD on Si-H, SiO2, and HfO2 surfaces. LANGMUIR, 23(11), 6106–6112. https://doi.org/10.1021/la061898u Peng, Q., Hojo, D., Park, K. J., & Parsons, G. N. (2008). Low temperature metal oxide film deposition and reaction kinetics in supercritical carbon dioxide. THIN SOLID FILMS, 516(15), 4997–5003. https://doi.org/10.1016/j.tsf.2007.10.057 Na, J.-S., Ayres, J., Chandra, K. L., Gorman, C. B., & Parsons, G. N. (2007). Real-time conductivity analysis through single-molecule electrical junctions. Nanotechnology, 18(42), 424001. https://doi.org/10.1088/0957-4484/18/42/424001 Gougousi, T., Terry, D. B., & Parsons, G. N. (2006). Charge generation during oxidation of thin Hf metal films on silicon. THIN SOLID FILMS, 513(1-2), 201–205. https://doi.org/10.1016/j.tsf.2006.02.004 Park, K. J., & Parsons, G. N. (2006). Selective area atomic layer deposition of rhodium and effective work function characterization in capacitor structures. APPLIED PHYSICS LETTERS, 89(4). https://doi.org/10.1063/1.2234846 Chu, C., & Parsons, G. N. (2006). Solvent enhanced resist flow for room temperature imprint lithography. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 24(2), 818–822. https://doi.org/10.1116/1.2180258 Barua, D., Gougousi, T., Young, E. D., & Parsons, G. N. (2006). Supercritical-carbon dioxide-assisted cyclic deposition of metal oxide and metal thin films. APPLIED PHYSICS LETTERS, 88(9). https://doi.org/10.1063/1.2181651 Parsons, G. N., Huff, H. R., & Gilmer, D. C. (2005). Designing interface composition and structure in high dielectric constant gate stacks. High Dielectric Constant Materials, 16, 287–310. Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=CCC&KeyUT=CCC:000227551500010&KeyUID=CCC:000227551500010 Kelly, M. J., Han, J. H., Musgrave, C. B., & Parsons, G. N. (2005). In-situ infrared spectroscopy and density functional theory modeling of hafnium alkylamine adsorption on Si-OH and Si-H surfaces. CHEMISTRY OF MATERIALS, 17(21), 5305–5314. https://doi.org/10.1021/cm051064h Gougousi, T., Barua, D., Young, E. D., & Parsons, G. N. (2005). Metal oxide thin films deposited from metal organic precursors in supercritical CO2 solutions. CHEMISTRY OF MATERIALS, 17(20), 5093–5100. https://doi.org/10.1021/cm0510965 Park, K. J., Doub, J. M., Gougousi, T., & Parsons, G. N. (2005). Microcontact patterning of ruthenium gate electrodes by selective area atomic layer deposition. APPLIED PHYSICS LETTERS, 86(5). https://doi.org/10.1063/1.1852079 Sivasubramani, P., Zhao, P., Kim, M. J., Gnade, B. E., Wallace, R. M., Edge, L. F., … Secula, E. M. (2005). Thermal stability studies of advanced gate stack structures on Si (100). In Characterization and Metrology for ULSI Technology 2005 (Vol. 788, pp. 156–160). Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000233588000023&KeyUID=WOS:000233588000023 Park, K. J., & Parsons, G. N. (2004). Bulk and interface charge in low temperature silicon nitride for thin film transistors on plastic substrates. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 22(6), 2256–2260. https://doi.org/10.1116/1.1795822 Niu, D., Ashcraft, R. W., Hinkle, C., & Parsons, G. N. (2004). Effect of N-2 plasma on yttrium oxide and yttrium-oxynitride dielectrics. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 22, pp. 445–451. https://doi.org/10.1116/1.1666880 Lucovsky, G., & Parsons, G. N. (2004). Non-crystalline oxides for use in microelectronic, optical, and other applications. Washington, DC: U.S. Patent and Trademark Office. Gougousi, T., & Parsons, G. N. (2004). Postdeposition reactivity of sputter-deposited high-dielectric-constant films with ambient H2O and carbon-containing species. JOURNAL OF APPLIED PHYSICS, 95(3), 1391–1396. https://doi.org/10.1063/1.1636513 Ulrich, M. D., Rowe, J. E., Niu, D., & Parsons, G. N. (2003). Bonding and structure of ultrathin yttrium oxide films for Si field effect transistor gate dielectric applications. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 21, pp. 1792–1797. https://doi.org/10.1116/1.1593647 Gougousi, T., Niu, D., Ashcraft, R. W., & Parsons, G. N. (2003). Carbonate formation during post-deposition ambient exposure of high-k dielectrics. APPLIED PHYSICS LETTERS, 83(17), 3543–3545. https://doi.org/10.1063/1.1623316 Niu, D., Ashcraft, R. W., Chen, Z., Stemmer, S., & Parsons, G. N. (2003). Chemical, physical, and electrical characterizations of oxygen plasma assisted chemical vapor deposited yttrium oxide on silicon. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 150(5), F102–F109. https://doi.org/10.1149/1.1566415 Parsons, G. N., Chambers, J. J., & Kelly, M. J. (2003). High dielectric constant metal silicates formed by controlled metal-surface reactions. Washington, DC: U.S. Patent and Trademark Office. Gougousi, T., Kelly, M. J., Parsons, G. N., King, T. J., Yu, B., Lander, R. J. P., & Saito, S. (2003). Kinetics of charge generation during formation of Hf and Zr silicate dielectrics. In Comos Front-End Materials and Process Technology (Vol. 765, pp. 79–84). Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000186232900011&KeyUID=WOS:000186232900011 Gougousi, T., Kelly, M. J., Terry, D. B., & Parsons, G. N. (2003). Properties of La-silicate high-K dielectric films formed by oxidation of La on silicon. JOURNAL OF APPLIED PHYSICS, 93(3), 1691–1696. https://doi.org/10.1063/1.1531818 Gupta, A., Yang, H., & Parsons, G. N. (2002). Ab initio analysis of silyl precursor physisorption and hydrogen abstraction during low temperature silicon deposition. SURFACE SCIENCE, 496(3), 307–317. https://doi.org/10.1016/S0039-6028(01)01467-4 Bray, K. R., Gupta, A., & Parsons, G. (2002). Effect of hydrogen on adsorbed precursor diffusion kinetics during hydrogenated amorphous silicon deposition. Applied Physics Letters, 80(13), 2356–2358. https://doi.org/10.1063/1.1467616 Niu, D., Ashcraft, R. W., Chen, Z., Stemmer, S., & Parsons, G. N. (2002). Electron energy-loss spectroscopy analysis of interface structure of yttrium oxide gate dielectrics on silicon. APPLIED PHYSICS LETTERS, 81(4), 676–678. https://doi.org/10.1063/1.1496138 Niu, D., Ashcraft, R. W., Kelly, M. J., Chambers, J. J., Klein, T. M., & Parsons, G. N. (2002). Elementary reaction schemes for physical and chemical vapor deposition of transition metal oxides on silicon for high-k gate dielectric applications. JOURNAL OF APPLIED PHYSICS, 91(9), 6173–6180. https://doi.org/10.1063/1.1468253 Niu, D., Ashcraft, R. W., Stemmer, S., Parsons, G. N., Huff, H. R., Fabry, L., & Kishino, S. (2002). Interface reactions during oxygen plasma assisted chemical vapor deposition of yttrium oxide on silicon. In Semiconductor Silicon 2002, Vols 1 and 2 (Vol. 2002, pp. 429–439). Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000180812100038&KeyUID=WOS:000180812100038 Misra, V., Lucovsky, G., & Parsons, G. N. (2002). Issues in high-kappa gate stack interfaces. MRS BULLETIN, 27(3), 212–216. https://doi.org/10.1557/mrs2002.73 Stemmer, S., Klenov, D. O., Chen, Z. Q., Niu, D., Ashcraft, R. W., & Parsons, G. N. (2002). Reactions of Y2O3 films with (001) Si substrates and with polycrystalline Si capping layers. APPLIED PHYSICS LETTERS, 81(4), 712–714. https://doi.org/10.1063/1.1496500 Gougousi, T., Kelly, M. J., & Parsons, G. N. (2002). The role of the OH species in high-k/polycrystalline silicon gate electrode interface reactions. APPLIED PHYSICS LETTERS, 80(23), 4419–4421. https://doi.org/10.1063/1.1485122 Niu, D., Ashcraft, R. W., & Parsons, G. N. (2002). Water absorption and interface reactivity of yttrium oxide gate dielectrics on silicon. APPLIED PHYSICS LETTERS, 80(19), 3575–3577. https://doi.org/10.1063/1.1477268 Chambers, J. J., Busch, B. W., Schulte, W. H., Gustafsson, T., Garfunkel, E., Wang, S., … Parsons, G. N. (2001). Effects of surface pretreatments on interface structure during formation of ultra-thin yttrium silicate dielectric films on silicon. APPLIED SURFACE SCIENCE, 181(1-2), 78–93. https://doi.org/10.1016/S0169-4332(01)00373-7 Chambers, J. J., & Parsons, G. N. (2001). Physical and electrical characterization of ultrathin yttrium silicate insulators on silicon. JOURNAL OF APPLIED PHYSICS, 90(2), 918–933. https://doi.org/10.1063/1.1375018 Bray, K. R., & Parsons, G. N. (2002). Surface transport kinetics in low-temperature silicon deposition determined from topography evolution. PHYSICAL REVIEW B, 65(3). https://doi.org/10.1103/physrevb.65.035311 Gupta, A., & Parsons, G. N. (2000). Bond strain, chemical induction, and OH incorporation in low-temperature (350-100 degrees C) plasma deposited silicon dioxide films. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 18, pp. 1764–1769. https://doi.org/10.1116/1.591468 Yang, C. S., Smith, L. L., Arthur, C. B., & Parsons, G. N. (2000). Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 18, pp. 683–689. https://doi.org/10.1116/1.591259 Parsons, G. N. (2000, May). Surface reactions in very low temperature (< 150 degrees C) hydrogenated amorphous silicon deposition, and applications to thin film transistors. JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 266, pp. 23–30. https://doi.org/10.1016/s0022-3093(99)00713-9 Chambers, J. J., & Parsons, G. N. (2000). Yttrium silicate formation on silicon: Effect of silicon preoxidation and nitridation on interface reaction kinetics. APPLIED PHYSICS LETTERS, 77(15), 2385–2387. https://doi.org/10.1063/1.1316073 Klein, T. M., Niu, D., Epling, W. S., Li, W., Maher, D. M., Hobbs, C. C., … Parsons, G. N. (1999). Evidence of aluminum silicate formation during chemical vapor deposition of amorphous Al2O3 thin films on Si(100). APPLIED PHYSICS LETTERS, 75(25), 4001–4003. https://doi.org/10.1063/1.125519 Klein, T. M., Anderson, T. M., Chowdhury, A. I., & Parsons, G. N. (1999). Hydrogenated silicon nitride thin films deposited between 50 and 250 degrees C using nitrogen/silane mixtures with helium dilution. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 17, pp. 108–112. https://doi.org/10.1116/1.582104 Klein, T. M., Anderson, T. M., Chowdhury, A. I., & Parsons, G. N. (1999). Plasma enhanced chemical vapor deposited silicon nitride thin films deposited at very low temperatures for thin film transistors on plastic substrates". Journal of Vacuum Science & Technology, A(17), 108–112. Chambers, J. J., Min, K., & Parsons, G. N. (1998). Endpoint uniformity sensing and analysis in silicon dioxide plasma etching using in situ mass spectrometry. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 16(6), 2996–3002. https://doi.org/10.1116/1.590332 Fryer, P. M., Colgan, E., Galligan, E., Graham, W., Horton, R., Jenkins, L., … Seager, C. H. (1998). High conductivity gate metallurgy for TFT/LCD's. In Flat-Panel Display Materials-1998 (Vol. 508, pp. 37–46). 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Journal of Vacuum Science Technology a-Vacuum Surfaces and Films, 16(3), 1316–1320. https://doi.org/10.1116/1.581144 Parsons, G. N., Yang, C. S., Klein, T. M., Smith, L., Schropp, R., Branz, H. M., … Wagner, S. (1998). Reaction processes for low temperature (< 150 degrees C) plasma enhanced deposition of hydrogenated amorphous silicon thin film transistors on transparent plastic substrates. Amorphous and Microcrystalline Silicon Technology-1998, 507, 19–24. Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000079335700003&KeyUID=WOS:000079335700003 Parsons, G. N., Yang, C. S., Klein, T. M., Smith, L., Tsai, C. C., Fahlen, T. S., & Seager, C. H. (1998). Reaction processes for low temperature (< 150 degrees C) plasma enhanced deposition of hydrogenated amorphous silicon thin film transistors on transparent plastic substrates. In Flat-Panel Display Materials-1998 (Vol. 508, pp. 19–24). Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000077248500003&KeyUID=WOS:000077248500003 Yang, C. S., Read, W. W., Arthur, C., Srinivasan, E., & Parsons, G. N. (1998). Self-aligned gate and source drain contacts in inverted-staggered a-Si : H thin-film transistors fabricated using selective area silicon PECVD. IEEE ELECTRON DEVICE LETTERS, 19(6), 180–182. https://doi.org/10.1109/55.678536 Chowdhury, A. I., Klein, T. M., Anderson, T. M., & Parsons, G. N. (1998). Silane consumption and conversion analysis in amorphous silicon and silicon nitride plasma deposition using in situ mass spectroscopy. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 16, pp. 1852–1856. https://doi.org/10.1116/1.581117 Allieri, B., Depero, L. E., Sangaletti, L., Antonini, L., Bettinelli, M., Parsons, G. N., … Seager, C. H. (1998). Synthesis and characterization of luminescent ZnO powders produced by thermally-induced doping. In Flat-Panel Display Materials-1998 (Vol. 508, pp. 275–280). Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000077248500042&KeyUID=WOS:000077248500042 Choi, Y. W., Lee, J. N., Jang, T. W., Ahn, B., Parsons, G. N., Tsai, C. C., … Seager, C. H. (1998). Thin film transistors fabricated with poly-Si films crystallized by microwave annealing. In Flat-Panel Display Materials-1998 (Vol. 508, pp. 139–144). Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000077248500021&KeyUID=WOS:000077248500021 Yang, C. S., Read, W. W., Arthur, C. B., Parsons, G. N., Fulks, R. T., Slobodin, D. E., & Yuzuriha, T. H. (1997). Comparison of conventional and self-aligned a-Si:H thin film transistors. In Flat Panel Display Materials Iii (Vol. 471, pp. 179–184). Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1997BJ69K00027&KeyUID=WOS:A1997BJ69K00027 Srinivasan, E., Lloyd, D. A., & Parsons, G. N. (1997). Dominant monohydride bonding in hydrogenated amorphous silicon thin films formed by plasma enhanced chemical vapor deposition at room temperature. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 15(1), 77–84. https://doi.org/10.1116/1.580480 Srinivasan, E., & Parsons, G. N. (1997). Hydrogen elimination and phase transitions in pulsed-gas plasma deposition of amorphous and microcrystalline silicon. JOURNAL OF APPLIED PHYSICS, 81(6), 2847–2855. https://doi.org/10.1063/1.364309 Smith, L. L., Srinivasan, E., & Parsons, G. N. (1997). Investigation of substrate dependent nucleation of plasma-deposited microcrystalline silicon on glass and silicon substrates using atomic force microscopy. JOURNAL OF APPLIED PHYSICS, 82(12), 6041–6046. https://doi.org/10.1063/1.366471 Srinivasan, E., Parsons, G. N., Wagner, S., Hack, M., Schiff, E. A., Schropp, R., & Shimizu, I. (1997). Real-time kinetic analysis of hydrogen abstraction and etching reactions using pulsed-gas PECVD of amorphous and microcrystalline silicon. In Amorphous and Microcrystalline Silicon Technology - 1997 (Vol. 467, pp. 501–506). Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000071462000075&KeyUID=WOS:000071462000075 Chowdhury, A. I., Read, W. W., Rubloff, G. W., Tedder, L. L., & Parsons, G. N. (1997). Real-time process sensing and metrology in amorphous and selective area silicon plasma enhanced chemical vapor deposition using in situ mass spectrometry. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 15(1), 127–132. https://doi.org/10.1116/1.589237 Srinivasan, E., Yang, H., & Parsons, G. N. (1996). Ab initio calculation of hydrogen abstraction energetics from silicon hydrides. JOURNAL OF CHEMICAL PHYSICS, 105(13), 5467–5471. https://doi.org/10.1063/1.472387 Tedder, L. L., Rubloff, G. W., Cohaghan, B. F., & Parsons, G. (1996). Dynamic rate and thickness metrology during poly-Si rapid thermal chemical vapor deposition from SiH4 using real time in situ mass spectrometry. Journal of Vacuum Science Technology a-Vacuum Surfaces and Films, 14(2), 267–270. https://doi.org/10.1116/1.579887 Tedder, L. L., Rubloff, G. W., Conaghan, B. F., & Parsons, G. N. (1996). Dynamic rate and thickness metrology during poly-Si rapid thermal chemical vapor deposition from SiH4 using real time in situ mass spectrometry (vol 14, pg 267, 1996). Journal of Vacuum Science Technology a-Vacuum Surfaces and Films, 14(4), 2680. https://doi.org/10.1116/1.580187 Srinivasan, E., Lloyd, D. A., Fang, M., Parsons, G. N., Hack, M., Schiff, E. A., … Matsuda, A. (1996). Inert gas dilution and ion bombardment effects in room temperature (35 degrees C) plasma deposition of a-Si:H. In Amorphous Silicon Technology - 1996 (Vol. 420, pp. 399–404). Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1996BH07P00064&KeyUID=WOS:A1996BH07P00064 TEDDER, L. L., RUBLOFF, G. W., SHAREEF, I., ANDERLE, M., KIM, D. H., & PARSONS, G. N. (1995). REAL-TIME PROCESS AND PRODUCT DIAGNOSTICS IN RAPID THERMAL CHEMICAL-VAPOR-DEPOSITION USING IN-SITU MASS-SPECTROMETRIC SAMPLING. 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INCORPORATION OF POLYHYDRIDE BONDING GROUPS INTO THIN-FILMS OF HYDROGENATED AMORPHOUS-SILICON (A-SI-H). Journal of Non-Crystalline Solids, 114, 154–156. https://doi.org/10.1016/0022-3093(89)90097-5 LUCOVSKY, G., PARSONS, G. N., WANG, C., DAVIDSON, B. N., & TSU, D. V. (1989). LOW-TEMPERATURE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON (A-SI-H) - CONTROL OF POLYHYDRIDE INCORPORATION AND ITS EFFECTS ON THIN-FILM PROPERTIES. Solar Cells, 27(1-4), 121–136. https://doi.org/10.1016/0379-6787(89)90022-7 Tsu, D. V., Parsons, G. N., Lucovsky, G., & Watkins, M. W. (1989). Mass and optical emission spectroscopic studies of the gas phase during the deposition of SiO2 and a-Si:H by remote plasma enhanced chemical vapor deposition. Journal of Vacuum Science & Technology, A(7), 1115–1123. TSU, D. V., PARSONS, G. N., LUCOVSKY, G., & WATKINS, M. W. (1989). 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Journal of Non-Crystalline Solids, 114, 573–575. https://doi.org/10.1016/0022-3093(89)90654-6 Parsons, G., TSU, D. V., & LUCOVSKY, G. (1988). PROPERTIES OF INTRINSIC AND DOPED A-SI-H DEPOSITED BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION. Journal of Vacuum Science Technology a-Vacuum Surfaces and Films, 6(3), 1912–1916. https://doi.org/10.1116/1.575244 TSU, D. V., Parsons, G., & LUCOVSKY, G. (1988). SPECTROSCOPIC EMISSION STUDIES OF O2/HE AND N2/HE PLASMAS IN REMOTE PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION. Journal of Vacuum Science Technology a-Vacuum Surfaces and Films, 6(3), 1849–1854. https://doi.org/10.1116/1.575267 COOK, J. W., PARSONS, G. N., KUSANO, C., & LUCOVSKY, G. (1987). BONDING DEFECTS IN AMORPHOUS-SILICON ALLOYS. Solar Cells, 21, 387–397. https://doi.org/10.1016/0379-6787(87)90137-2 PARSONS, G. N., TSU, D. V., & LUCOVSKY, G. (1987). OPTICAL AND ELECTRICAL-PROPERTIES OF A-SI-H FILMS GROWN BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION (RPECVD). JOURNAL OF NON-CRYSTALLINE SOLIDS, 97-8, 1375–1378. https://doi.org/10.1016/0022-3093(87)90329-2 PARSONS, G. N., KUSANO, C., & LUCOVSKY, G. (1987). PHOTOELECTRONIC PROPERTIES OF A-SI=H AND A-GE=H THIN-FILMS IN SURFACE CELL STRUCTURES. Journal of Vacuum Science Technology a-Vacuum Surfaces and Films, 5(4), 1655–1660. https://doi.org/10.1116/1.574541 Parsons, G. N., Kusano, C., & Lucovsky, G. (1987). Photoelectronic properties of a-Si:H and a-Ge:H thin films in surface cell structures. Journal of Vacuum Science & Technology, A(5), 1655–1660. PARSONS, G. N., COOK, J. W., LUCOVSKY, G., LIN, S. Y., & MANTINI, M. J. (1986). DEPOSITION OF ALPHA-SI,SN H ALLOY-FILMS BY REACTIVE MAGNETRON SPUTTERING FROM SEPARATE SI AND SN TARGETS. Journal of Vacuum Science Technology a-Vacuum Surfaces and Films, 4(3), 470–474. https://doi.org/10.1116/1.573910 Parsons, G. N., Cook, J. W., Jr., Lucovsky, G., Lin, S. Y., & Mantini, M. J. (1986). Deposition of a-Si,Sn:H alloy films by reactive magnetron sputtering from separate Si and Sn targets. Journal of Vacuum Science & Technology, A(4), 470–474. RUDDER, R. A., Parsons, G., COOK, J. W., & LUCOVSKY, G. (1985). LOW DEFECT DENSITY A-SI,GE-H ALLOY-FILMS PRODUCED BY MAGNETRON SPUTTERING FROM SEPARATE SI AND GE CATHODES. Journal of Non-Crystalline Solids, 77-8, 885–888. https://doi.org/10.1016/0022-3093(85)90802-6 KAMIENIECKI, E., & PARSONS, G. N. (1983). CHARACTERIZATION OF SEMICONDUCTOR ELECTROLYTE SYSTEMS BY SURFACE PHOTO-VOLTAGE MEASURED CAPACITANCE. Journal of the Electrochemical Society, 130(8), C329. Retrieved from http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1983RC47600386&KeyUID=WOS:A1983RC47600386 Kamieniecki, E., & Parsons, G. N. (1983). Characterization of semiconductor electrolyte systems by surface photovoltage measured capacitance. Journal of the Electrochemical Society, 130(8), C329.