Hannah Rose Marie Margavio

College of Engineering

Works (14)

Updated: September 8th, 2025 12:51

2025 article

Controlled Air Gap Formation between W and TiO 2 Films via Sub‐Surface TiO 2 Atomic Layer Etching

Margavio, H. R. M., Nguyen, J., Vong, M. H., Carroll, N. M., Singh, I., Arellano, N., & Parsons, G. N. (2025, August 7). Advanced Materials Technologies, Vol. 8.

By: H. Margavio n, J. Nguyen n, M. Vong n, N. Carroll n, I. Singh *, N. Arellano *, G. Parsons n 

author keywords: air gap; atomic layer etching; Integrated deposition and etching; sub-surface etching
topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; ZnO doping and properties
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 8, 2025

2025 article

Electron Inversion and Tunneling at Silicon Thermal Oxide Interfaces for Solar-Driven Molecular Catalysis to Syngas

He, S., Bottum, S. R., Dickenson, J. C., Margavio, H. R. M., Keller, N. D., Oyetade, O. A., … Cahoon, J. F. (2025, March 18). Journal of the American Chemical Society, Vol. 3.

By: S. He*, S. Bottum *, J. Dickenson *, H. Margavio n, N. Keller *, O. Oyetade *, R. Gentile *, T. Teitsworth * ...

topics (OpenAlex): Electronic and Structural Properties of Oxides; Electrocatalysts for Energy Conversion; CO2 Reduction Techniques and Catalysts
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Sources: Web Of Science, NC State University Libraries
Added: March 31, 2025

2025 article

HfO2 Area Selective Deposition via Substrate-Dependent Area Selective Atomic Layer Etching

Keller, L. J., Song, S. K., Margavio, H. R. M., Atanasov, S., Chen, J.-R., & Parsons, G. N. (2025, February 24). Chemistry of Materials, Vol. 2.

By: L. Keller n, S. Song n, H. Margavio n, S. Atanasov*, J. Chen * & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Ferroelectric and Negative Capacitance Devices; Electronic and Structural Properties of Oxides
Sources: Web Of Science, ORCID, NC State University Libraries
Added: February 24, 2025

2025 article

Illuminating the mechanistic impacts of an Fe-quaterpyridine functionalized crystalline poly(triazine imide) semiconductor for photocatalytic CO 2 reduction

McGuigan, S., Tereniak, S. J., Smith, A., Jana, S., Donley, C. L., Collins, L., … Maggard, P. A. (2025, January 1). Inorganic Chemistry Frontiers, Vol. 6.

By: S. McGuigan*, S. Tereniak *, A. Smith n, S. Jana*, C. Donley *, L. Collins n , N. Ghorai *, Y. Xu * ...

topics (OpenAlex): Covalent Organic Framework Applications; Advanced Photocatalysis Techniques; CO2 Reduction Techniques and Catalysts
Sources: Web Of Science, ORCID, NC State University Libraries
Added: June 25, 2025

2025 article

“Three‐Color” Chemical Selectivity between Oxide, Nitride, and Silicon: Area‐Selective Deposition of Metal Oxide and Polymer on SiN and Si‐H versus SiO 2

Thelven, J. M., Margavio, H. R. M., Oh, H., Efaw, C. M., Davis, P. H., Graugnard, E., & Parsons, G. N. (2025, August 23). Advanced Materials Technologies, Vol. 8.

By: J. Thelven n, H. Margavio n, H. Oh n, C. Efaw *, P. Davis *, E. Graugnard *, G. Parsons n 

author keywords: atomic layer deposition; area-selective deposition
topics (OpenAlex): Semiconductor materials and devices; Nanowire Synthesis and Applications; Molecular Junctions and Nanostructures
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 23, 2025

2024 article

Covalent Functionalization of Silicon with Plasma-Grown “Fuzzy” Graphene: Robust Aqueous Photoelectrodes for CO2 Reduction by Molecular Catalysts

Oyetade, O. A., Wang, Y., He, S., Margavio, H. R. M., Bottum, S. R., Rooney, C. L., … Cahoon, J. F. (2024, July 12). ACS Applied Materials & Interfaces, Vol. 7.

By: O. Oyetade *, Y. Wang *, S. He*, H. Margavio n, S. Bottum *, C. Rooney *, H. Wang *, C. Donley * ...

author keywords: fuzzy graphene; plasma-enhancedchemical vapor deposition; CO2 reduction; solar fuels; cobaltphthalocyanine
topics (OpenAlex): CO2 Reduction Techniques and Catalysts; Advanced Photocatalysis Techniques; Molecular Junctions and Nanostructures
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: July 15, 2024

2024 article

Low‐Temperature Dual‐Material Area‐Selective Deposition: Molybdenum Hexafluoride‐Mediated SiO2 Fluorination/Passivation for Self‐Aligned Molybdenum/Metal Oxide Nanoribbons

Oh, H., Thelven, J. M., Margavio, H. R. M., & Parsons, G. N. (2024, April 25). Advanced Functional Materials, Vol. 4.

By: H. Oh n, J. Thelven n, H. Margavio n & G. Parsons n 

author keywords: atomic layer deposition; dual-material area-selective deposition; fluorination/passivation; self-aligned Mo/metal oxide nanoribbons
topics (OpenAlex): Semiconductor materials and devices; ZnO doping and properties; Catalytic Processes in Materials Science
Sources: Web Of Science, ORCID, NC State University Libraries
Added: May 1, 2024

2024 article

Oxidation Temperature-Dependent Electrochemical Doping of WO3 Deposited via Atomic Layer Deposition

Bredar, A. R. C., Margavio, H. R. M., Donley, C., Spinner, N., Amin, N., Parsons, G. N., & Dempsey, J. L. (2024, December 9). The Journal of Physical Chemistry C, Vol. 128, pp. 21539–21550.

By: A. Bredar *, H. Margavio n, C. Donley *, N. Spinner, N. Amin n, G. Parsons n , J. Dempsey *

topics (OpenAlex): Ga2O3 and related materials; Transition Metal Oxide Nanomaterials; Gas Sensing Nanomaterials and Sensors
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: December 9, 2024

2024 article

Photoelectrochemical Proton-Coupled Electron Transfer of TiO2 Thin Films on Silicon

Nedzbala, H. S., Westbroek, D., Margavio, H. R. M., Yang, H., Noh, H., Magpantay, S. V., … Mayer, J. M. (2024, April 2). Journal of the American Chemical Society, Vol. 4.

By: H. Nedzbala *, D. Westbroek*, H. Margavio n, H. Yang n, H. Noh *, S. Magpantay*, C. Donley *, A. Kumbhar *, G. Parsons n , J. Mayer *

topics (OpenAlex): Advanced Photocatalysis Techniques; TiO2 Photocatalysis and Solar Cells; Electrocatalysts for Energy Conversion
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: April 8, 2024

2024 article

Simultaneous Co-localized TiO2 Etching and W Atomic Layer Deposition Using WF6 as a Dual-Functional Reactant

Margavio, H. R. M., Arellano, N., Singh, I., Wojtecki, R., & Parsons, G. N. (2024, September 23). Chemistry of Materials, Vol. 9.

By: H. Margavio n, N. Arellano *, I. Singh *, R. Wojtecki * & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Ferroelectric and Negative Capacitance Devices
Sources: Web Of Science, ORCID, NC State University Libraries
Added: September 30, 2024

2024 article

“Dual-Tone” Area-Selective Deposition: Selectivity Inversion of Polymer on Patterned Si/SiO2 Starting Surfaces

Carroll, N. M., Margavio, H. R. M., & Parsons, G. N. (2024, February 27). Chemistry of Materials, Vol. 2.

By: N. Carroll n, H. Margavio n & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Copper Interconnects and Reliability; Nanofabrication and Lithography Techniques
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: March 1, 2024

2023 article

SRC-led materials research: 40 years ago, and now

Zhirnov, V., Chen, M. E., Malakoutian, M., Margavio, H. R. M., Pawliczak, E., Reidy, K., … Younkin, T. (2023, November 3). MRS Advances.

By: V. Zhirnov *, M. Chen *, M. Malakoutian *, H. Margavio n, E. Pawliczak *, K. Reidy *, W. Yanez *, T. Younkin *

topics (OpenAlex): Semiconductor materials and devices; Advancements in Semiconductor Devices and Circuit Design; Ferroelectric and Negative Capacitance Devices
TL;DR: A selected group of distinguished SRC Scholars have been invited to present their research in the context of the potential impact that their work will drive for the future of microelectronics. (via Semantic Scholar)
Source: Web Of Science
Added: November 27, 2023

2023 article

Self-Aligned Nanopatterning and Controlled Lateral Growth by Dual-Material Orthogonal Area-Selective Deposition of Poly(3,4-ethylenedioxythiophene) and Tungsten

Oh, H., Kim, J.-S., Margavio, H. R. M., & Parsons, G. N. (2023, May 22). Chemistry of Materials, Vol. 35, pp. 4375–4384.

By: H. Oh n, J. Kim n, H. Margavio n & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Molecular Junctions and Nanostructures; Electronic and Structural Properties of Oxides
Sources: Web Of Science, ORCID, NC State University Libraries
Added: June 22, 2023

2021 article

Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching

Song, S. K., Kim, J.-S., Margavio, H. R. M., & Parsons, G. N. (2021, June 25). ACS Nano, Vol. 15, pp. 12276–12285.

By: S. Song n, J. Kim n, H. Margavio n & G. Parsons n 

author keywords: area-selective deposition; etching; patterning; orthogonal; self-aligned
topics (OpenAlex): Semiconductor materials and devices; Copper Interconnects and Reliability; ZnO doping and properties
TL;DR: This work introduces low-temperature chemically self-aligned film growth via simultaneous thin film deposition and etching in adjacent regions on a nanopatterned surface and shows capacity for self- aligned dielectric patterning via favorable deposition of AlF3 on Al2O3 with simultaneous atomic layer etching of sacrificial ZnO. (via Semantic Scholar)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 23, 2021

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