Holger Saare
Chemical & Biomolecular G&T
Works (4)
Updated: August 5th, 2023 05:00
2023 journal article
Comparison of BCl3, TiCl4, and SOCl2 chlorinating agents for atomic layer etching of TiO2 and ZrO2 using tungsten hexafluoride
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 41(4).
UN Sustainable Development Goal Categories
13. Climate Action
(Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: June 22, 2023
2022 journal article
Comparative In Situ Study of the Initial Growth Trends of Atomic Layer-Deposited Al(2)O(3 )Films br
JOURNAL OF PHYSICAL CHEMISTRY C, 126(16), 7036–7046.
Sources: Web Of Science, ORCID, NC State University Libraries
Added: June 6, 2022
2020 journal article
Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching
JOURNAL OF APPLIED PHYSICS, 128(10).
UN Sustainable Development Goal Categories
6. Clean Water and Sanitation
(OpenAlex)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: October 12, 2020
2019 journal article
Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO2
CHEMISTRY OF MATERIALS, 31(13), 4793–4804.
Sources: Web Of Science, ORCID, NC State University Libraries
Added: July 29, 2019
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