Holger Saare

Chemical & Biomolecular G&T

Works (4)

Updated: August 5th, 2023 05:00

2023 article

Comparison of BCl3, TiCl4, and SOCl2 chlorinating agents for atomic layer etching of TiO2 and ZrO2 using tungsten hexafluoride

Saare, H., Xie, W., & Parsons, G. N. (2023, June 20). Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, Vol. 41.

By: H. Saare n, W. Xie n & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Plasma Diagnostics and Applications; Electronic and Structural Properties of Oxides
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: June 22, 2023

2022 article

Comparative In Situ Study of the Initial Growth Trends of Atomic Layer-Deposited Al2O3 Films

Saare, H., Dianat, G., & Parsons, G. N. (2022, April 18). The Journal of Physical Chemistry C, Vol. 4, pp. 7036–7046.

By: H. Saare n, G. Dianat n & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Catalytic Processes in Materials Science
Sources: Web Of Science, ORCID, NC State University Libraries
Added: June 6, 2022

2020 article

Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching

Saare, H., Song, S. K., Kim, J.-S., & Parsons, G. N. (2020, September 8). Journal of Applied Physics, Vol. 128.

By: H. Saare n, S. Song n, J. Kim n & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Advanced Memory and Neural Computing
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
6. Clean Water and Sanitation (OpenAlex)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: October 12, 2020

2019 article

Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO2

Song, S. K., Saare, H., & Parsons, G. N. (2019, June 12). Chemistry of Materials, Vol. 31, pp. 4793–4804.

By: S. Song n, H. Saare n & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Plasma Diagnostics and Applications
Sources: Web Of Science, ORCID, NC State University Libraries
Added: July 29, 2019

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