I-Te Chen

College of Engineering

2019 journal article

Increasing etching depth of sapphire nanostructures using multilayer etching mask

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 37(6).

By: Y. Chen, I. Chen & C. Chang

Source: Web Of Science
Added: April 14, 2020

2019 review

Recent progress in near-field nanolithography using light interactions with colloidal particles: from nanospheres to three-dimensional nanostructures

[Review of ]. NANOTECHNOLOGY, 30(35).

By: X. Zhang, I. Chen & C. Chang

Source: Web Of Science
Added: July 1, 2019