Jung-Sik Kim

College of Engineering

Works (7)

Updated: July 5th, 2023 14:33

2023 article

Self-Aligned Nanopatterning and Controlled Lateral Growth by Dual-Material Orthogonal Area-Selective Deposition of Poly(3,4-ethylenedioxythiophene) and Tungsten

Oh, H., Kim, J.-S., Margavio, H. R. M., & Parsons, G. N. (2023, May 22). Chemistry of Materials, Vol. 35, pp. 4375–4384.

By: H. Oh n, J. Kim n, H. Margavio n & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Molecular Junctions and Nanostructures; Electronic and Structural Properties of Oxides
Sources: Web Of Science, ORCID, NC State University Libraries
Added: June 22, 2023

2022 article

Growth behavior and substrate selective deposition of polypyrrole, polythiophene, and polyaniline by oxidative chemical vapor deposition and molecular layer deposition

Kim, J.-S., Oh, H., & Parsons, G. N. (2022, September 30). Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, Vol. 40.

By: J. Kim n, H. Oh n & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Analytical Chemistry and Sensors; Molecular Junctions and Nanostructures
Sources: Web Of Science, ORCID, NC State University Libraries
Added: October 17, 2022

2022 article

Modeling of deposit formation in mesoporous substrates via atomic layer deposition: Insights from pore‐scale simulation

Gu, H., Lee, D. T., Corkery, P., Miao, Y., Kim, J. S., Yuan, Y., … Tsapatsis, M. (2022, August 25). AIChE Journal, Vol. 9.

By: H. Gu *, D. Lee *, P. Corkery *, Y. Miao *, J. Kim n, Y. Yuan *, Z. Xu *, G. Dai* ...

author keywords: atomic layer deposition; membrane; mesoporous substrate; pore constriction; zeolitic imidazolate framework
topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Catalytic Processes in Materials Science
Sources: Web Of Science, ORCID, NC State University Libraries
Added: September 12, 2022

2021 article

Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching

Song, S. K., Kim, J.-S., Margavio, H. R. M., & Parsons, G. N. (2021, June 25). ACS Nano, Vol. 15, pp. 12276–12285.

By: S. Song n, J. Kim n, H. Margavio n & G. Parsons n 

author keywords: area-selective deposition; etching; patterning; orthogonal; self-aligned
topics (OpenAlex): Semiconductor materials and devices; Copper Interconnects and Reliability; ZnO doping and properties
TL;DR: This work introduces low-temperature chemically self-aligned film growth via simultaneous thin film deposition and etching in adjacent regions on a nanopatterned surface and shows capacity for self- aligned dielectric patterning via favorable deposition of AlF3 on Al2O3 with simultaneous atomic layer etching of sacrificial ZnO. (via Semantic Scholar)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 23, 2021

2021 article

Nanopatterned Area-Selective Vapor Deposition of PEDOT on SiO2 vs Si-H: Improved Selectivity Using Chemical Vapor Deposition vs Molecular Layer Deposition

Kim, J.-S., & Parsons, G. N. (2021, November 22). Chemistry of Materials, Vol. 11, pp. 9221–9230.

By: J. Kim n & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Advanced Sensor and Energy Harvesting Materials; Nanowire Synthesis and Applications
Sources: Web Of Science, ORCID, NC State University Libraries
Added: March 7, 2022

2021 article

Oxidative molecular layer deposition of PEDOT using volatile antimony(V) chloride oxidant

Volk, A. A., Kim, J.-S., Jamir, J., Dickey, E. C., & Parsons, G. N. (2021, April 22). Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, Vol. 39, p. 032413.

By: A. Volk n, J. Kim n, J. Jamir n, E. Dickey n  & G. Parsons n 

Contributors: A. Volk n, J. Kim n, J. Jamir n, E. Dickey n  & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Conducting polymers and applications; Advanced Memory and Neural Computing
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
6. Clean Water and Sanitation (OpenAlex)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: April 23, 2021

2020 article

Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching

Saare, H., Song, S. K., Kim, J.-S., & Parsons, G. N. (2020, September 8). Journal of Applied Physics, Vol. 128.

By: H. Saare n, S. Song n, J. Kim n & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Advanced Memory and Neural Computing
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
6. Clean Water and Sanitation (OpenAlex)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: October 12, 2020

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