Jung-Sik Kim

College of Engineering

2021 journal article

Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching

ACS NANO.

By: S. Song, J. Kim, H. Margavio & G. Parsons

Source: Web Of Science
Added: August 23, 2021

2021 journal article

Oxidative molecular layer deposition of PEDOT using volatile antimony(V) chloride oxidant

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 39(3).

Source: Web Of Science
Added: May 17, 2021

2020 journal article

Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching

JOURNAL OF APPLIED PHYSICS, 128(10).

By: H. Saare, S. Song, J. Kim & G. Parsons

Source: Web Of Science
Added: October 12, 2020