Jung-Sik Kim

College of Engineering

Works (6)

2022 journal article

Growth behavior and substrate selective deposition of polypyrrole, polythiophene, and polyaniline by oxidative chemical vapor deposition and molecular layer deposition

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(6).

By: J. Kim, H. Oh & G. Parsons

Source: Web Of Science
Added: October 17, 2022

2022 article

Modeling of deposit formation in mesoporous substrates via atomic layer deposition: Insights from pore-scale simulation

Gu, H., Lee, D. T., Corkery, P., Miao, Y., Kim, J.-S., Yuan, Y., … Tsapatsis, M. (2022, September 7). AICHE JOURNAL.

By: H. Gu*, D. Lee*, P. Corkery*, Y. Miao*, J. Kim, Y. Yuan*, Z. Xu*, G. Dai* ...

author keywords: atomic layer deposition; membrane; mesoporous substrate; pore constriction; zeolitic imidazolate framework
Source: Web Of Science
Added: September 12, 2022

2021 journal article

Multimaterial Self-Aligned Nanopatterning by Simultaneous Adjacent Thin Film Deposition and Etching

ACS NANO, 15(7), 12276–12285.

By: S. Song, J. Kim, H. Margavio & G. Parsons

author keywords: area-selective deposition; etching; patterning; orthogonal; self-aligned
Source: Web Of Science
Added: August 23, 2021

2021 journal article

Nanopatterned Area-Selective Vapor Deposition of PEDOT on SiO2 vs Si-H: Improved Selectivity Using Chemical Vapor Deposition vs Molecular Layer Deposition

CHEMISTRY OF MATERIALS, 33(23), 9221–9230.

By: J. Kim & G. Parsons

Source: Web Of Science
Added: March 7, 2022

2021 journal article

Oxidative molecular layer deposition of PEDOT using volatile antimony(V) chloride oxidant

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 39(3).

By: A. Volk, J. Kim, J. Jamir, E. Dickey & G. Parsons

Sources: Web Of Science, ORCID
Added: April 23, 2021

2020 journal article

Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching

JOURNAL OF APPLIED PHYSICS, 128(10).

By: H. Saare, S. Song, J. Kim & G. Parsons

Source: Web Of Science
Added: October 12, 2020