Jing Ouyang Ouyang, J., McDonald, M., & Zhu, Y. (2013). Temperature-dependent material properties of Z-shaped MEMS thermal actuators made of single crystalline silicon. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 23(12). https://doi.org/10.1088/0960-1317/23/12/125036 Ouyang, J., & Zhu, Y. (2012). Z-Shaped MEMS Thermal Actuators: Piezoresistive Self-Sensing and Preliminary Results for Feedback Control. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21(3), 596–604. https://doi.org/10.1109/jmems.2012.2189361