@inproceedings{gray_muth_carr_2016, title={A MEMS infrared thermopile with phononic crystal structures and carbon nanotube absorption layer}, DOI={10.1109/icsens.2016.7808771}, abstractNote={We have fabricated MEMS infrared thermopiles from a silicon-on-insulator substrate where the buried oxide layer was used to form a membrane for thermal isolation of the detection area. The silicon wires of the thermocouples were patterned with a phononic crystal structure that consisted of 200nm holes on a 400nm pitch. The silicon was degenerately doped using a spin on dopant process to create the p, n-type regions. The absorption layer used was a 20um tall vertically-aligned, multi-walled, carbon nanotube layer. We measured the performance of our devices to have a D∗ of 3 ∗ 107 cmHz0.5W−1 and a time response of 5–8 msec. We believe the performance of our design can be improved to exceed a D∗ of 108 cmHz0.5W−1 by patterning the absorption layer.}, booktitle={2016 ieee sensors}, author={Gray, K. F. and Muth, J. F. and Carr, W.}, year={2016} } @article{cox_gray_muth_2011, title={Underwater optical communication using a modulating retroreflector}, volume={52}, number={5}, journal={Sea Technology}, author={Cox, W. and Gray, K. and Muth, J.}, year={2011}, pages={47–49} } @inproceedings{cox_gray_simpson_cochenour_hughes_muth_2010, title={A MEMS Blue/Green retroreflecting modulator for underwater optical communications}, DOI={10.1109/oceans.2010.5664432}, abstractNote={Short range, high bandwidth underwater optical communications links are potentially useful for retrieving stored information from underwater systems. However many underwater systems have limited power capacity or limited weight budget. The use of a modulating retroreflector eliminates the need for a transmitting laser on the data bearing platform and reduces the pointing requirements by retroreflecting the modulated light back to the interrogating source. Blue/green operation of a MEMS Fabry-Perot modulator was demonstrated at data rates of 500 kbps and 1 Mbps in a 7.7 meter tank with water conditions varied by the addition of Maalox as a scattering agent.}, booktitle={Oceans 2010}, author={Cox, W. C. and Gray, K. F. and Simpson, J. A. and Cochenour, B. and Hughes, B. L. and Muth, J. F.}, year={2010} }