2015 journal article
Multipactor Coating for Sapphire RF Windows Using Remote Plasma-Assisted Deposition
IEEE TRANSACTIONS ON PLASMA SCIENCE, 43(8), 2571–2580.
2013 journal article
Band-edge electronic structure and pre-existing defects in remote plasma deposited non-crystalline SiO2 and GeO2
Japanese Journal of Applied Physics, 52(4).
2013 article
Band-edge electronic structures, and pre-existing defects in remote plasma deposited (RPD) non-crystalline (nc-) SiO2 and GeO2
Lucovsky, G. (2013, May). SOLID-STATE ELECTRONICS, Vol. 83, pp. 30–36.
2013 conference paper
Ligand field splittings in core level transitions for transition metal (TM) oxides: Tanabe-Sugano diagrams and (TM) dangling bonds in vacated O-atom defects
Xxist international symposium on the jahn-teller effect 2012, 428.
2013 conference paper
Nano-scale order in hydrogenated amorphous silicon a-Si,H and doped a-Si(H) defect reduction for device applications
2013 14th international conference on ultimate integration on silicon (ulis), 217–220.
2013 journal article
Noncrystalline SiO2 and GeO2: Process induced pre-existing defects and vacated O-atom intrinsic bonding sites
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 31(1).
2013 article
Process induced pre-existing defects in non-crystalline SiO2 and GeO2 at vacated O-atom bonding sites and comparisons with Ge-S(Se) alloy bonding sites
XXIST INTERNATIONAL SYMPOSIUM ON THE JAHN-TELLER EFFECT 2012, Vol. 428.
2013 conference paper
Qualitative and quantitative differences between non-crystalline and nano-crystalline oxides in device technologies
2013 14th international conference on ultimate integration on silicon (ulis), 174–177.
2013 journal article
Remote plasma-processing (RPP), medium range order, and precursor sites for dangling bond defects in "amorphous-Si(H)" alloys: Photovoltaic and thin film transistor devices
SURFACE & COATINGS TECHNOLOGY, 242, 183–186.
2013 journal article
Spectroscopic Detection of Medium Range Order in Device Grade Hydrogenated Amorphous Silicon
JAPANESE JOURNAL OF APPLIED PHYSICS, 52(4).
2013 journal article
Transport through singlet states in resistive memory materials: Magneli-phase, TinO2n-1 for 9 >= n > 3, and TiO2-HfO2 alloys
Transport through singlet states in resistive memory materials: Magneli-phase, TinO2n-1 for 9 >= n > 3, and TiO2-HfO2 alloys. Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 31(1).
2012 article
O-Vacancies in (i) Nano-Crystalline HfO2 and (i) Non-Crystalline SiO2 and Si3N4 Studied by X-ray Absorption Spectroscopy
Lucovsky, G., Miotti, L., & Bastos, K. P. (2012, June). JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, Vol. 12, pp. 4811–4819.
2012 article
Spectroscopic Detection of Hopping Induced Mixed Valence for Ti and Sc in GdSc1-xTixO3 for x > 0.165
Lucovsky, G., Miotti, L., Bastos, K. P., Adamo, C., & Schlom, D. G. (2012, June). Spectroscopic Detection of Hopping Induced Mixed Valence for Ti and Sc in GdSc1-xTixO3 for x > 0.165. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, Vol. 12, pp. 4749–4756.
2011 journal article
Bond-specific reaction kinetics during the oxidation of (111) Si: Effect of n-type doping
Applied Physics Letters, 98(2).
2011 journal article
Characterizing the effects of etch-induced material modification on the crystallization properties of nitrogen doped Ge2Sb2Te5
JOURNAL OF APPLIED PHYSICS, 109(3).
2011 journal article
Intermixing between HfO2 and GeO2 films deposited on Ge(001) and Si(001): Role of the substrate
APPLIED PHYSICS LETTERS, 98(13).
2011 article
Many-Electron Multiplet Theory Applied to O-Vacancies in (i) Nanocrystalline HfO2 and (ii) Non-crystalline SiO2 and Si Oxynitride Alloys
VIBRONIC INTERACTIONS AND THE JAHN-TELLER EFFECT: THEORY AND APPLICATIONS, Vol. 23, pp. 193–211.
2011 journal article
Many-electron multiplet theory applied to o-atom vacancies in high-k dielectrics
Japanese Journal of Applied Physics. Part 1, Regular Papers, Short Notes & Review Papers, 50(4).
2011 journal article
Multiplet theory for conduction band edge and O-Vacancy defect states in SiO2, Si3N4, and Si oxynitride alloy thin films
Japanese Journal of Applied Physics. Part 1, Regular Papers, Short Notes & Review Papers, 50(4).
2011 journal article
Nanoscale depth-resolved electronic properties of SiO2/SiOx/SiO2 for device-tolerant electronics
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 29(1).
2011 journal article
Non-crystalline SiO(2): processing induced pre-existing defects associated with vacated O-atom intrinsic bonding sites
Journal of Optoelectronics and Advanced Materials, 13(11-12), 1359–1363.
2011 journal article
O-vacancies in (i) nanocrystalline HfO2 and (i) noncrystalline SiO2 and Si3N4 studied by x-ray absorption spectroscopy
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 29(1).
2011 journal article
O-vacancies in transition metal (TM) oxides: Coordination and local site symmetry of transition and negative ion states in TM2O3 and TMO2 oxides
Microelectronic Engineering, 88(7), 1471–1474.
2011 article
Radiation effects in new materials for nano-devices (invited)
Schrimpf, R. D., Fleetwood, D. M., Alles, M. L., Reed, R. A., Lucovsky, G., & Pantelides, S. T. (2011, July). MICROELECTRONIC ENGINEERING, Vol. 88, pp. 1259–1264.
2011 article
Remote Plasma Enhanced Chemical Deposition of Non-Crystalline GeO2 on Ge and Si Substrates
Lucovsky, G., & Zeller, D. (2011, September). JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, Vol. 11, pp. 7974–7981.
2011 article
Remote Plasma Processing of Sapphire Substrates for Deposition of TiN and TiO2
Lucovsky, G., & Kim, J. (2011, September). JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, Vol. 11, pp. 7962–7968.
2011 journal article
Remote plasma-deposited GeO2 with quartz-like Ge- and O-local bonding: Band-edge state and O-vacancy comparisons with SiO2
Microelectronic Engineering, 88(7), 1537–1540.
2011 article
Spectroscopic Detection of Hopping Induced Mixed Valence of Ti and Sc in GdSc1-xTixO3 for x Greater than Percolation Threshold of 0.16
VIBRONIC INTERACTIONS AND THE JAHN-TELLER EFFECT: THEORY AND APPLICATIONS, Vol. 23, pp. 361–376.
2011 journal article
Spectroscopic detection of hopping induced mixed valence for Ti and Sc in GdSc1-xTixO3 for x greater than the percolation threshold of similar to 0.16
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 29(1).
2011 journal article
Spectroscopic detection of medium range order in device quality hydrogenated amorphous silicon, a-Si(H)
Journal of Optoelectronics and Advanced Materials, 13(11-12), 1586–1589.
2010 conference paper
A microscopic bonding model for the compositional dependence of the first sharp diffraction peak (FSDP) in GexSe1-x alloys
Physica status solidi c - current topics in solid state physics, vol 7 no 3-4, 7(3-4), 889–892.
2010 article
Analysis of the forgotten parts of the Ge K edge spectra: life before the EXAFS oscillations
PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 7 NO 3-4, Vol. 7, pp. 844–847.
2010 journal article
Enhanced leakage current properties of Ni-doped Ba0.6Sr0.4TiO3 thin films driven by modified band edge state
Journal of Applied Physics, 107(2).
2010 article
Ge doped HfO2 thin films investigated by x-ray absorption spectroscopy
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 28, pp. 693–696.
2010 article
Monoclinic textured HfO2 films on GeOxNy/Ge(100) stacks using interface reconstruction by controlled thermal processing
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 28, pp. 662–664.
2010 article
Nano-regime Length Scales Extracted from the First Sharp Diffraction Peak in Non-crystalline SiO2 and Related Materials: Device Applications
Lucovsky, G., & Phillips, J. C. (2010, March). NANOSCALE RESEARCH LETTERS, Vol. 5, pp. 550–558.
2010 journal article
Strain-reducing chemical bonding self-organizations in nanocrystalline composites and non-crystalline glasses and thin films
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 207(3), 631–634.
2010 journal article
Untitled
Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 28(6), P1–1.
2009 article
Application of non-linear optical second harmonic generation and X-ray absorption and spectroscopies to defect related properties of Hf silicate and Hf Si oxynitride gate dielectrics
MICROELECTRONIC ENGINEERING, Vol. 86, pp. 1654–1657.
2009 book
Bonds and bands in semiconductors
New York: Momentum Press.
2009 article
Comparisons between intrinsic bonding defects in d(0) transition metal oxide such as HfO2, and impurity atom defects in d(0) complex oxides such as GdScO3
Lucovsky, G., Chung, K.-B., Miotti, L., Bastos, K. P., Amado, C., & Schlom, D. (2009, December). SOLID-STATE ELECTRONICS, Vol. 53, pp. 1273–1279.
2009 article
Controlled chemical phase separation in binary and ternary composites: A pathway to isotropic optical and electrical behavior for device applications
Lucovsky, G. (2009, May). PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, Vol. 206, pp. 915–918.
2009 journal article
Extrinsic interface formation of HfO2 and Al2O3/GeOx gate stacks on Ge (100) substrates
JOURNAL OF APPLIED PHYSICS, 106(4).
2009 journal article
Instability of incorporated nitrogen in HfO2 films grown on strained Si0.7Ge0.3 layers
APPLIED PHYSICS LETTERS, 94(4).
2009 journal article
Intrinsic bonding defects in thin-film non-crystalline solids: Amorphous silicon (a-Si), hydrogenated amorphous silicon (a-Si:H), amorphous selenium (a-Se) and amorphous selenium-arsenic alloys (a-AsxSe1-x)
PHILOSOPHICAL MAGAZINE, 89(28-30), 2449–2460.
2009 conference paper
Long range cooperative and local Jahn-Teller effects in nanocrystalline transition metal thin films
Jahn-teller effect: fundamentals and implications for physics and chemistry, 97, 767–808.
2009 article
Microscopic description of strain-reducing chemical bonding self-organizations in non-crystalline alloys
Lucovsky, G., & Phillips, J. C. (2009, May). PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, Vol. 206, pp. 885–891.
2009 conference paper
Predeposition plasma nitridation process applied to Ge substrates to passivate interfaces between crystalline-Ge substrates and Hf-based high-K dielectrics
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 27(1), 294–299.
2009 journal article
Preparation of Native Oxide and Carbon-Minimized Ge Surface by NH4OH-Based Cleaning for High-k/Ge MOS Gate Stacks
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 156(11), H813–H817.
2009 article
Spectroscopic differentiation between O-atom vacancy and divacancy defects, respectively, in TiO2 and HfO2 by X-ray absorption spectroscopy
MICROELECTRONIC ENGINEERING, Vol. 86, pp. 1676–1679.
2009 article
Strain-eliminating chemical bonding self-organizations within intermediate phase (IP) windows in chalcogenide, oxide and nitride non-crystalline bulk glasses and deposited thin film binary, ternary and quaternary alloys
Lucovsky, G., & Phillips, J. C. (2009, October 1). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 355, pp. 1786–1791.
2009 journal article
Symmetry determined medium range order (MRO) contributions to the first sharp diffraction peak (FSDP) in non-crystalline oxide and chalcogenide glasses
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 246(8), 1806–1812.
2009 conference paper
The influence of nitrogen doping on the chemical and local bonding environment of amorphous and crystalline Ge2Sb2Te5
Materials and physics for nonvolatile memories, 1160, 163–168.
2009 journal article
Thermal evolution and electrical correlation of defect states in Hf-based high-k dielectrics on n-type Ge (100): Local atomic bonding symmetry
Journal of Applied Physics, 106(7).
2008 article
Bond constraint theory and the quest for the glass computer
Agarwal, S. C., Paesler, M. A., Baker, D. A., Taylor, P. C., Lucovsky, G., & Edwards, A. (2008, February). PRAMANA-JOURNAL OF PHYSICS, Vol. 70, pp. 245–254.
2008 journal article
Bond constraint theory studies of chalcogenide phase change memories
Journal of Non-Crystalline Solids, 354(19-25), 2706–2710.
2008 journal article
Bulk defects in nano-crystalline and in non-crystalline HfO2-based thin film dielectrics
THIN SOLID FILMS, 517(1), 437–440.
2008 journal article
Chemical bonding and graded interfacial transition regions at transition metal, Hf(Zr),/high-k gate dielectric, Hf(Zr)O(2), interfaces
THIN SOLID FILMS, 517(1), 343–345.
2008 article
Defect scaling in non-crystalline floppy/under-constrained and rigid/over-constrained thin films: Applications to a-Se, a-Si, and a-Si(H)
Lucovsky, G., Kasap, S. O., & Phillips, J. C. (2008, May 1). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 354, pp. 2724–2727.
2008 journal article
Elimination of GeO2 and Ge3N4 interfacial transition regions and defects at n-type Ge interfaces: A pathway for formation of n-MOS devices on Ge substrates
Applied Surface Science, 254(23), 7933–7937.
2008 article
Interfacial transition regions at germanium/Hf oxide based dielectric interfaces: Qualitative differences between non-crystalline Hf Si oxynitride and nanocrystalline HfO2 gate stacks
Lucovsky, G., Lee, S., Long, J. P., Seo, H., & Luening, J. (2009, March). MICROELECTRONIC ENGINEERING, Vol. 86, pp. 224–234.
2008 journal article
Length scale discontinuities between non-crystalline and nano-crystalline thin films: Chemical bonding self-organization, broken constraints and reductions of macroscopic strain
Journal of Non-Crystalline Solids, 354(19-25), 2702–2705.
2008 journal article
Low energy electron-excited nanoscale luminescence spectroscopy studies of intrinsic defects in HfO2 and SiO2-HfO2-SiO2-Si stacks
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 26(1), 232–243.
2008 article
Reversible chemical phase separation in on-state of art ReWritable (RW) Ge2Sb2Te5 optical phase change memories
Lucovsky, G., & Phillips, J. C. (2008, May 1). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 354, pp. 2753–2756.
2008 journal article
Suppression of Ge-O and Ge-N bonding at Ge-HfO2 and Ge-TiO2 interfaces by deposition onto plasma-nitrided passivated Ge substrates
THIN SOLID FILMS, 517(1), 155–158.
2008 journal article
Suppression of defect states in HfSiON gate dielectric films on n-type Ge(100) substrates
APPLIED PHYSICS LETTERS, 93(18).
2007 journal article
A new class of intermediate phases in non-crystalline films based on a confluent double percolation mechanism
Journal of Physics. Condensed Matter, 19(45).
2007 journal article
A self-consistent model for defect states in a-Si and a-Si : H
Journal of Materials Science. Materials in Electronics., 18, S463–467.
2007 review
Band edge electronic structure of transition metal/rare earth oxide dielectrics
[Review of ]. Rare Earth Oxide Thin Films: Growth , Characterization , and Applications, 106, 285–311. Berlin: Springer-Verlag Berlin.
2007 journal article
Bond constraint theory and EXAFS studies of local bonding structures of Ge2Sb2Te4, Ge2Sb2Te5, and Ge2Sb2Te7
Journal of Optoelectronics and Advanced Materials, 9(10), 2996–3001.
2007 article
Chemical self-organization length scales in non- and nano-crystalline thin films
Lucovsky, G., & Phillips, J. C. (2007, October). SOLID-STATE ELECTRONICS, Vol. 51, pp. 1308–1318.
2007 article
Defect reduction by suppression of pi-bonding coupling in nano- and non-crystalline high-(medium)-kappa gate dielectrics
MICROELECTRONIC ENGINEERING, Vol. 84, pp. 2350–2353.
2007 journal article
Defect reduction in non-crystalline and nano-crystalline thin films: chemical bonding self-organizations and minimization of macroscopic strain
Journal of Optoelectronics and Advanced Materials, 9(10), 2989–2995.
2007 article
EXAFS study of local order in the amorphous chalcogenide semiconductor Ge2Sb2Te5
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, Vol. 68, pp. 873–877.
2007 journal article
Effect of Ga on the structure of Ge-Se-Ga glasses from thermal analysis, Raman and XPS measurements
Journal of Materials Science. Materials in Electronics., 18, S367–370.
2007 journal article
Intermediate phases in binary and ternary alloys. How far can we go with a semi-empirical bond-constraint theory?
Journal of Optoelectronics and Advanced Materials, 9(10), 2979–2988.
2007 journal article
Intermediate phases in binary and ternary alloys: a new perspective on semi-empirical bond constraint theory
Journal of Physics. Condensed Matter, 19(45).
2007 article
Intrinsic electronically active defects in transition metal elemental oxides
Lucovsky, G., Seo, H., Lee, S., Fleming, L. B., Ulrich, M. D., Luning, J., … Bersuker, G. (2007, April). JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, Vol. 46, pp. 1899–1909.
2007 article
Jahn-Teller d-state term splittings in Ti, Zr, and Hf elemental oxides: Intrinsic bonding/anti-bonding states and conduction/valence band edge intrinsic defects
Lucovsky, G. (2007, July 16). JOURNAL OF MOLECULAR STRUCTURE, Vol. 838, pp. 187–192.
2007 article
Length scales for coherent pi-bonding interactions in complex high-k oxide dielectrics and their interfaces
MICROELECTRONIC ENGINEERING, Vol. 84, pp. 2298–2301.
2007 article
Local bonding arrangements in amorphous Ge2Sb2Te5: the importance of Ge and Te bonding
Baker, D. A., Paesler, M. A., & Lucovsky, G. (2007, October). JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, Vol. 18, pp. S399–S403.
2007 article
Metal gate electrodes for devices with high-k gate dielectrics: Zr/ZrO2 and Hf/HfO2 intrinsic interfacial transition regions
MICROELECTRONIC ENGINEERING, Vol. 84, pp. 2259–2262.
2007 article
Metal gate electrodes: Theoretical studies of Zr/ZrO2 and Hf/HfO2 interfaces
Lucovsky, G., & Whitten, J. L. (2007, September 15). SURFACE SCIENCE, Vol. 601, pp. 4138–4143.
2007 journal article
Origin of charge density at LaAlO3 on SrTiO3 heterointerfaces: Possibility of intrinsic doping
PHYSICAL REVIEW LETTERS, 98(19).
2007 article
Spectroscopic and electrical detection of intermediate phases and chemical bonding self-organizations in (i) dielectric films for semiconductor devices, and (ii) chalcogenide alloys for optical memory devices
Lucovsky, G., Baker, D. A., Paesler, M. A., & Phillips, J. C. (2007, June 15). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 353, pp. 1713–1722.
2007 article
Spectroscopic studies of O-vacancy defects in transition metal oxides
Lucovsky, G., Luening, J., Fleming, L. B., Ulrich, M. D., Rowe, J. E., Seo, H., … Bersuker, G. (2007, October). JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, Vol. 18, pp. S263–S266.
2007 article
Studies of bonding defects, and defect state suppression in HfO2 by soft X-ray absorption and photoelectron spectroscopies
Lucovsky, G., Seo, H., Fleming, L. B., Luening, J., Lysaght, P., & Bersuker, G. (2007, September 15). SURFACE SCIENCE, Vol. 601, pp. 4236–4241.
2007 journal article
Suppression of Ge-O and Ge-N bonding at Ge-HfO2 and Ge-TiO2 interfaces by deposition onto plasma-nitrided passivated Ge substrates: Integration issues Ge gate stacks into advanced devices
MICROELECTRONICS RELIABILITY, 48(3), 364–369.
2007 article
Total dose and bias temperature stress effects for HfSiON on Si MOS capacitors
Chen, D. K., Mamouni, E. E., Zhou, X. J., Schrimpf, R. D., Fleetwood, D. M., Galloway, K. F., … Cressler, J. D. (2007, December). IEEE TRANSACTIONS ON NUCLEAR SCIENCE, Vol. 54, pp. 1931–1937.
2006 article
"Thermal stability of TiO2, ZrO2, or HfO2 on Si(100) by photoelectron emission microscopy" (vol 99, pg 023519, 2006)
Zeman, M. C., Fulton, C. C., Lucovsky, G., Nemanich, R. J., & Yang, W. C. (2006, May 15). JOURNAL OF APPLIED PHYSICS, Vol. 99.
2006 article
A study of conduction band edge states in complex oxides by X-ray absorption spectroscopy
Fulton, C. C., Edge, L. F., Lucovsky, G., & Luning, J. (2006, November). RADIATION PHYSICS AND CHEMISTRY, Vol. 75, pp. 1934–1938.
2006 journal article
Application of bond constraint theory to the switchable optical memory material Ge2Sb2Te5
PHYSICAL REVIEW LETTERS, 96(25).
2006 article
Band edge electronic structure of transition metal/rare earth oxide dielectrics
Lucovsky, G. (2006, October 31). APPLIED SURFACE SCIENCE, Vol. 253, pp. 311–321.
2006 article
Comparison of ultrathin SiO2/Si(100) and SiO2/Si(111) interfaces from soft x-ray photoelectron spectroscopy
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 24, pp. 2132–2137.
2006 article
Detection of nanocrystallinity by X-ray absorption spectroscopy in thin film transition metal/rare-earth atom, elemental and complex oxides
Edge, L. F., Schlom, D. G., Stemmer, S., Lucovsky, G., & Luning, J. (2006, November). RADIATION PHYSICS AND CHEMISTRY, Vol. 75, pp. 1608–1612.
2006 journal article
Differences between charge trapping states in irradiated nano-crystalline HfO2 and non-crystalline Hf silicates
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 53(6), 3644–3648.
2006 article
EXAFS study of amorphous Ge2Sb2Te5
Baker, D. A., Paesler, M. A., Lucovsky, G., & Taylor, P. C. (2006, June 15). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 352, pp. 1621–1623.
2006 journal article
EXAFS study of local order in the amorphous chalcogenide semiconductor Ge2Sb2Te5
Journal of Optoelectronics and Advanced Materials, 8(6), 2039–2043.
2006 journal article
Electronic properties of the Zr-ZrO2-SiO2-Si(100) gate stack structure
JOURNAL OF APPLIED PHYSICS, 99(6).
2006 article
Intrinsic bonding defects in transition metal elemental oxides
MICROELECTRONICS RELIABILITY, Vol. 46, pp. 1623–1628.
2006 article
Intrinsic nanocrystalline grain-boundary and oxygen atom vacancy defects in ZrO2 and HfO2
Lucovsky, G., Hinkle, C. L., Fulton, C. C., Stoute, N. A., Seo, H., & Luning, J. (2006, November). RADIATION PHYSICS AND CHEMISTRY, Vol. 75, pp. 2097–2101.
2006 article
Network disruption and modification in arsenic and germanium chalcogenides by the addition of univalent metal sulfides and selenides: Comparisons with network disruption and modification in zirconium silicate alloys
Lucovsky, G., & Phillips, J. C. (2006, June 15). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 352, pp. 1534–1538.
2006 article
Reduction of bonding constraints by self-organization in gate dielectrics for a-Si : H thin film transistors (TFTs) and crystalline Si field effect transistors (FETs)
Lucovsky, G., & Phillips, J. C. (2006, June 15). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 352, pp. 1711–1714.
2006 article
Reduction of bulk and interface defects by network self-organizations in gate dielectrics for silicon thin film and field effect transistors (TFTs and FETs, respectively)
Lucovsky, G., & Phillips, J. C. (2006, November 15). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 352, pp. 4509–4516.
2006 journal article
Reduction of defects by network self-organizations in non-crystalline dielectrics and semiconductors: a tribute to Professor Radu Grigorovici on the occasion of his 95(th) birthday
Journal of Optoelectronics and Advanced Materials, 8(6), 1969–1978.
2006 article
Suppression of Jahn-Teller term-split band edge states in the x-ray absorption spectra of non-crystalline Zr silicates and Si oxynitride alloys, and alloys of ZrO2 with Y2O3
Lucovsky, G., Fulton, C. C., Ju, B. S., Stoute, N. A., Tao, S., Aspnes, D. E., & Luening, J. (2006, November). RADIATION PHYSICS AND CHEMISTRY, Vol. 75, pp. 1591–1595.
2006 journal article
Thermal stability of TiO2, ZrO2, or HfO2 on Si(100) by photoelectron emission microscopy
JOURNAL OF APPLIED PHYSICS, 99(2).
2005 article
Bond strain and defects at interfaces in high-k gate stacks
MICROELECTRONICS RELIABILITY, Vol. 45, pp. 770–778.
2005 article
Conduction band states of transition metal (TM) high-k gate dielectrics as determined from X-ray absorption spectra
MICROELECTRONICS RELIABILITY, Vol. 45, pp. 827–830.
2005 article
Conduction band-edge d-states in high-k dielectrics due to Jahn-Teller term splittings
Lucovsky, G., Fulton, C. C., Zhang, Y., Luning, J., Edge, L., Whitten, J. L., … Afanase'v, VV. (2005, August 22). THIN SOLID FILMS, Vol. 486, pp. 129–135.
2005 journal article
Conduction band-edge states associated with the removal of d-state degeneracies by the Jahn-Teller effect
IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 5(1), 65–83.
2005 article
Defects and defect relaxation at internal interfaces between high-k transition metal and rare earth dielectrics and interfacial native oxides in metal oxide semiconductor (MOS) structures
Lucovsky, G., & Phillips, J. C. (2005, August 22). THIN SOLID FILMS, Vol. 486, pp. 200–204.
2005 article
Final state effects in VUV and soft X-ray absorption spectra of transition metal oxides and silicate alloys: comparisons between experiment and ab initio calculations
Lucovsky, G., Zhang, Y., Fulton, C. C., Zou, Y., Nemanich, R. J., Ade, H., & Whitten, J. L. (2005, June). JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, Vol. 144, pp. 917–919.
2005 article
Intrinsic band edge traps in nano-crystalline HfO2 gate dielectrics
Lucovsky, G., Zhang, Y., Luning, J., Afanase'v, VV, Stesmans, A., Zollner, S., … Whitten, J. L. (2005, June). MICROELECTRONIC ENGINEERING, Vol. 80, pp. 110–113.
2005 journal article
Non-crystalline oxides and chalcogenides: A new paradigm based on ab initio quantum chemistry calculations for short range order and properties, and bond-constraint theory for network connectivity, network disruption and chemical phase separation
Journal of Optoelectronics and Advanced Materials, 7(4), 1691–1706.
2005 journal article
Self-organization and the physics of glassy networks
PHILOSOPHICAL MAGAZINE, 85(32), 3823–3838.
2005 article
Studies of the coupling of final d*-states in mixed Hf and Ti oxides (HfO2)(x)(TiOx)(1-x) and other complex oxides
Fulton, C. C., Lucovsky, G., Zhang, Y., Zou, Y., Nemanich, R. J., Ade, H., & Whitten, J. L. (2005, June). JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, Vol. 144, pp. 913–916.
2004 article
A novel approach for determining the effective tunneling mass of electrons in HfO2 and other high-K alternative gate dielectrics for advanced CMOS devices
Hinkle, C. L., Fulton, C., Nemanich, R. J., & Lucovsky, G. (2004, April). MICROELECTRONIC ENGINEERING, Vol. 72, pp. 257–262.
2004 article
A spectroscopic phase separation study distinguishing between chemical with different degrees of crystallinity in Zr(Hf) silicate alloys
Lucovsky, G., Rayner, G. B., Kang, D., Hinkle, C. L., & Hong, J. G. (2004, September 20). SURFACE SCIENCE, Vol. 566, pp. 772–776.
2004 article
A spectroscopic study distinguishing between chemical phase separation with different degrees of crystallinity in Hf(Zr) silicate alloys
Lucovsky, G., Rayner, G. B., Kang, D., Hinkle, C. L., & Hong, J. G. (2004, July 15). APPLIED SURFACE SCIENCE, Vol. 234, pp. 429–433.
2004 journal article
Ab initio theory calculations of the electronic structure of nc-AS(2)S(3) and GeS2: an intrinsic mechanism for reversible photo-darkening
Journal of Non-Crystalline Solids, 338-40(Jun 15 2004), 543–547.
2004 journal article
Band alignment between (100)Si and complex rare earth/transition metal oxides
APPLIED PHYSICS LETTERS, 85(24), 5917–5919.
2004 article
Bond strain and defects at Si-SiO2 and internal dielectric interfaces in high-k gate stacks
Lucovsky, G., & Phillips, J. C. (2004, November 10). JOURNAL OF PHYSICS-CONDENSED MATTER, Vol. 16, pp. S5139–S5151.
2004 article
Chemical phase separation in Zr silicate alloys: a spectroscopic study distinguishing between chemical phase separation with different degree of micro- and nano-crystallinity
Rayner, G. B., Kang, D., Hinkle, C. L., Hong, J. G., & Lucovsky, G. (2004, April). MICROELECTRONIC ENGINEERING, Vol. 72, pp. 304–309.
2004 article
Chemical phase separation in Zr silicate alloys: a spectroscopic study distinguishing between chemical phase separation with different degrees of micro- and nano-crystallinity
Rayner, G. B., Kang, D., & Lucovsky, G. (2004, June 15). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 338, pp. 151–154.
2004 journal article
Electron trapping in metal-insulator-semiconductor structures on n-GaN with SiO2 and Si3N4 dielectrics
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 22(6), 2379–2383.
2004 article
Enhanced tunneling in stacked gate dielectrics with ultra-thin HfO2 (ZrO2) layers sandwiched between thicker SiO2 layers
Hinkle, C. L., Fulton, C., Nemanich, R. J., & Lucovsky, G. (2004, September 20). SURFACE SCIENCE, Vol. 566, pp. 1185–1189.
2004 journal article
Enhanced tunneling in stacked gate dielectrics with ultra-thin HfO2 layers sandwiched between thicker SiO2 layers
Applied Surface Science, 234(37990), 240–245.
2004 journal article
Interface instabilities and electronic properties of ZrO2 on silicon (100)
JOURNAL OF APPLIED PHYSICS, 96(5), 2665–2673.
2004 journal article
Interfacial strain-induced self-organization in semiconductor dielectric gate stacks. I. Strain relief at the Si-SiO2 interface
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 22(4), 2087–2096.
2004 journal article
Interfacial strain-induced self-organization in semiconductor dielectric gate stacks. II. Strain-relief at internal dielectric interfaces between SiO2 and alternative gate dielectrics
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 22(4), 2097–2104.
2004 article
Local atomic structure and infrared effective charges in tetrahedrally-bonded glasses from ab initio theory electronic structure calculations
Lucovsky, G., Mowrer, T., Sremaniak, L. S., & Whitten, J. L. (2004, June 15). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 338, pp. 155–158.
2004 journal article
Low-temperature preparation of GaN-SiO2 interfaces with low defect density. I. Two-step remote plasma-assisted oxidation-deposition process
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 22(6), 2402–2410.
2004 journal article
Low-temperature preparation of GaN-SiO2 interfaces with low defect density. II. Remote plasma-assisted oxidation of GaN and nitrogen incorporation\
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 22(6), 2411–2418.
2004 patent
Methods of forming binary noncrystalline oxide analogs of silicon dioxide
Washington, DC: U.S. Patent and Trademark Office.
2004 journal article
Microscopic bonding and macroscopic strain relaxations at Si-SiO2 interfaces
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 78(4), 453–459.
2004 journal article
Nitrogen bonding, stability, and transport in AlON films on Si
APPLIED PHYSICS LETTERS, 84(24), 4992–4994.
2004 patent
Non-crystalline oxides for use in microelectronic, optical, and other applications
Washington, DC: U.S. Patent and Trademark Office.
2004 journal article
Process-dependent band structure changes of transition-metal (Ti,Zr,Hf) oxides on Si (100)
APPLIED PHYSICS LETTERS, 84(4), 580–582.
2004 article
Reductions in interface defects, D-it, by post oxidation plasma-assisted nitridation of GaN-SiO2 interfaces in MOS devices
Bae, C., & Lucovsky, G. (2004, September 20). SURFACE SCIENCE, Vol. 566, pp. 356–360.
2004 article
Reductions in interface defects, D-it, by post oxidation plasma-assisted nitridation of GaN-SiO2 interfaces in MOS devices
Bae, C., & Lucovsky, G. (2004, April). MICROELECTRONIC ENGINEERING, Vol. 72, pp. 236–240.
2004 article
Reductions in interface defects, D-it, by post-oxidation plasma-assisted nitridation of GaN-SiO2 interfaces in MOS devices
Bae, C., & Lucovsky, G. (2004, July 15). APPLIED SURFACE SCIENCE, Vol. 234, pp. 475–479.
2004 review
Remote plasma-assisted oxidation of SiC: a low temperature process for SiC-SiO2 interface formation that eliminates interfacial Si oxycarbide transition regions
[Review of ]. JOURNAL OF PHYSICS-CONDENSED MATTER, 16(17), S1815–S1837.
2004 article
Separate and independent control of interfacial band alignments and dielectric constants in transition metal rare earth complex oxides
Lucovsky, G., Zhang, Y., Whitten, J. L., Schlom, D. G., & Freeouf, J. L. (2004, April). MICROELECTRONIC ENGINEERING, Vol. 72, pp. 288–293.
2004 article
Spectroscopic characterization of high k dielectrics: Applications to interface electronic structure and stability against chemical phase separation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 22, pp. 1301–1308.
2004 article
Spectroscopic studies of metal high-k dielectrics: transition metal oxides and silicates, and complex rare earth/transition metal oxides
Lucovsky, G., Hong, J. G., Fulton, C. C., Zou, Y., Nemanich, R. J., Ade, H., … Freeouf, J. L. (2004, August). PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, Vol. 241, pp. 2221–2235.
2004 article
Spectroscopic studies of the electrical structure of transition metal and rare earth complex oxides
Lucovsky, G., Zhang, Y., Whitten, J. L., Schlom, D. G., & Freeouf, J. L. (2004, March). PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, Vol. 21, pp. 712–716.
2004 journal article
Suppression of subcutaneous oxidation during the deposition of amorphous lanthanum aluminate on silicon
APPLIED PHYSICS LETTERS, 84(23), 4629–4631.
2004 journal article
Surface passivation of n-GaN by nitrided-thin-Ga2O3/SiO2 and Si3N4 films
JOURNAL OF APPLIED PHYSICS, 96(5), 2674–2680.
2004 journal article
Work-function difference between Al and n-GaN from Al-gated n-GaN/nitrided-thin-Ga2O3/SiO2 metal oxide semiconductor structures
Applied Physics Letters, 84(26), 5413–5415.
2004 article
X-ray absorption spectra for transition metal high-kappa dielectrics: Final state differences for intra- and inter-atomic transitions
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 22, pp. 2132–2138.
2003 journal article
A new approach for calculating the electronic structure and vibrational properties of non-crystalline solids: Effective charges for infrared-active normal mode vibrations in oxide and chalcogenide materials
Journal of Non-Crystalline Solids, 326(2003 Oct 1), 14-.
2003 journal article
American Vacuum Society leadership in electronic materials processing: Past, present, and future
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 21(5), S175–S181.
2003 article
Band offset energies in zirconium silicate Si alloys
Lucovsky, G., Rayner, B., Zhang, Y., Appel, G., & Whitten, J. (2003, June 30). APPLIED SURFACE SCIENCE, Vol. 216, pp. 215–222.
2003 journal article
Band offset measurements of the GaN (0001)/HfO2 interface
Journal of Applied Physics, 94(11), 7155–7158.
2003 journal article
Band offset measurements of the Si3N4/GaN (0001) interface
JOURNAL OF APPLIED PHYSICS, 94(6), 3949–3954.
2003 patent
Binary non-crystalline oxide analogs of silicon dioxide for use in gate dielectrics
Washington, DC: U.S. Patent and Trademark Office.
2003 journal article
Breakdown and reliability of p-MOS devices with stacked RPECVD oxide/nitride gate dielectric under constant voltage stress
MICROELECTRONICS RELIABILITY, 44(2), 207–212.
2003 article
Contributions to the infrared effective charges of oxides and chalcogenides from equilibrium charge and dynamic charge redistribution during normal mode motions
Sremaniak, L. S., Whitten, J. L., Menon, M., & Lucovsky, G. (2003, May 15). APPLIED SURFACE SCIENCE, Vol. 212, pp. 839–843.
2003 article
Device-quality GaN-dielectric interfaces by 300 degrees C remote plasma processing
Bae, C., Rayner, G. B., & Lucovsky, G. (2003, June 30). APPLIED SURFACE SCIENCE, Vol. 216, pp. 119–123.
2003 article
Electronic structure of transition metal high-k dielectrics: interfacial band offset energies for microelectronic devices
Lucovsky, G., Raynor, G. B., Zhang, Y., Fulton, C. C., Nemanich, R. J., Appel, G., … Whitten, J. L. (2003, May 15). APPLIED SURFACE SCIENCE, Vol. 212, pp. 563–569.
2003 article
Electronic structure of transition metal/rare earth alternative high-K gate dielectrics: interfacial band alignments and intrinsic defects
MICROELECTRONICS RELIABILITY, Vol. 43, pp. 1417–1426.
2003 article
Low temperature semiconductor surface passivation for nanoelectronic device applications
Bae, C., & Lucovsky, G. (2003, June 10). SURFACE SCIENCE, Vol. 532, pp. 759–763.
2003 journal article
Measurement of the band offsets of SiO2 on clean n- and p-type GaN(0001)
JOURNAL OF APPLIED PHYSICS, 93(7), 3995–4004.
2003 article
Oxide formation and passivation for micro- and nano-electronic devices
Bae, C., & Lucovsky, G. (2003, May 15). APPLIED SURFACE SCIENCE, Vol. 212, pp. 644–648.
2003 article
Remote plasma-assisted nitridation (RPN): applications to Zr and Hf silicate alloys and Al2O3
Hinkle, C., & Lucovsky, G. (2003, June 30). APPLIED SURFACE SCIENCE, Vol. 216, pp. 124–132.
2003 journal article
Soft x-ray photoelectron spectroscopy of (HfO2)(x)(SiO2)(1-x) high-k gate-dielectric structures
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 21(4), 1777–1782.
2003 journal article
Spectroscopic study of chemical phase separation in zirconium silicate alloys
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 21(4), 1783–1791.
2003 journal article
Structural dependence of breakdown characteristics and electrical degradation in ultrathin RPECVD oxide/nitride gate dielectrics under constant voltage stress
SOLID-STATE ELECTRONICS, 47(1), 71–76.
2003 journal article
Thermal stability of plasma-nitrided aluminum oxide films on Si
APPLIED PHYSICS LETTERS, 84(1), 97–99.
2002 article
A molecular orbital model for the electronic structure of transition metal atoms in silcate and aluminate alloys
Lucovsky, G., Whitten, J. L., & Zhang, Y. (2002, May 8). APPLIED SURFACE SCIENCE, Vol. 190, pp. 48–55.
2002 article
A molecular orbital model for the electronic structure of transition metal atoms in silicate and aluminate alloys
Lucovsky, G., Whitten, J. L., & Zhang, Y. (2002, November). SOLID-STATE ELECTRONICS, Vol. 46, pp. 1687–1697.
2002 article
Amorphous morphology, thermal stability and electronic structure of non-crystalline transition-metal elemental and binary oxides, and chalcogenides
Lucovsky, G. (2002, April 1). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 299, pp. 231–237.
2002 journal article
Characterization of charge-carrier dynamics in thin oxide layers on silicon by second harmonic generation
Physical Review. B, Condensed Matter and Materials Physics, 65(19), 193103–193101.
2002 article
Correlations between electronic structure of transition metal atoms and performance of high-k gate dielectrics in advanced Si devices
Lucovsky, G. (2002, May 1). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 303, pp. 40–49.
2002 journal article
Dielectric functions and optical bandgaps of high-K dielectrics for metal-oxide-semiconductor field-effect transistors by far ultraviolet spectroscopic ellipsometry
JOURNAL OF APPLIED PHYSICS, 91(7), 4500–4505.
2002 article
Electron trapping in non-crystalline Ta- and Hf-aluminates for gate dielectric applications in aggressively scaled silicon devices
Johnson, R. S., Hong, J. G., Hinkle, C., & Lucovsky, G. (2002, November). SOLID-STATE ELECTRONICS, Vol. 46, pp. 1799–1805.
2002 journal article
Electron trapping in noncrystalline remote plasma deposited Hf- aluminate alloys for gate dielectric applications
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(3), 1126–1131.
2002 article
Electronic states at the interface of Ti-Si oxide on Si(100)
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 1726–1731.
2002 journal article
Electronic structure of SiO2: Charge redistribution contributions to the dynamic dipoles/effective charges of the infrared active normal modes
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(4), 1710–1719.
2002 journal article
Electronic structure of high-k transition metal oxides and their silicate and aluminate alloys
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(4), 1739–1747.
2002 article
Fixed charge and interface traps at heterovalent interfaces between Si(100) and non-crystalline Al2O3-Ta2O5 alloys
Johnson, R. S., Lucovsky, G., & Hong, J. G. (2002, May 8). APPLIED SURFACE SCIENCE, Vol. 190, pp. 43–47.
2002 journal article
Interface electronic structure of Ta2O5-Al2O3 alloys for Si- field-effect transistor gate dielectric applications
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(4), 1732–1738.
2002 journal article
Issues in high-kappa gate stack interfaces
MRS BULLETIN, 27(3), 212–216.
Contributors: V. Misra* , * & G. Parsons*
2002 article
Long-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation
Choi, B. K., Fleetwood, D. M., Schrimpf, R. D., Massengill, L. W., Galloway, K. F., Shaneyfelt, M. R., … Lucovsky, G. (2002, December). IEEE TRANSACTIONS ON NUCLEAR SCIENCE, Vol. 49, pp. 3045–3050.
2002 journal article
Low-temperature Ar/N-2 remote plasma nitridation of SiO2 thin films
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 20(6), 1989–1996.
2002 article
Nonlinear composition dependence of x-ray photoelectron spectroscopy and Auger electron spectroscopy features in plasma-deposited zirconium silicate alloy thin films
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 1748–1758.
2002 article
Origins of silicon solar cell passivation by SiNx : H anneal
Boehme, C., & Lucovsky, G. (2002, April 1). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 299, pp. 1157–1161.
2002 journal article
Reaction pathways in remote plasma nitridation of ultrathin SiO2 films
JOURNAL OF APPLIED PHYSICS, 91(1), 48–55.
2002 journal article
Reliability degradation of ultra-thin oxynitride and Al2O3 gate dielectric films owing to heavy-ion irradiation
Electronics Letters, 38(4), 157–158.
2002 article
Simplified bond-hyperpolarizability model of second harmonic generation: Application to Si-dielectric interfaces
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 1699–1705.
2002 article
Total-dose radiation response of hafnium-silicate capacitors
Felix, J. A., Fleetwood, D. M., Schrimpf, R. D., Hong, J. G., Lucovsky, G., Schwank, JR, & Shaneyfelt, M. R. (2002, December). IEEE TRANSACTIONS ON NUCLEAR SCIENCE, Vol. 49, pp. 3191–3196.
2002 journal article
Vertically scaled MOSFET gate stacks and junctions: How far are we likely to go?
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 46(2-3), 299–315.
2002 journal article
Voltage- and temperature-dependent gate capacitance and current model: Application to ZrO2 n-channel MOS capacitor
IEEE TRANSACTIONS ON ELECTRON DEVICES, 49(11), 1969–1978.
2001 article
A molecular orbital model for the electronic structure of transition metal atoms in silicate and aluminate alloys
Lucovsky, G., Whitten, J. L., & Zhang, Y. (2001, November). MICROELECTRONIC ENGINEERING, Vol. 59, pp. 329–334.
2001 journal article
Characteristics of metalorganic remote plasma chemical vapor deposited Al2O3 gate stacks on SiC metal-oxide-semiconductor devices
APPLIED PHYSICS LETTERS, 79(7), 973–975.
2001 article
Chemical and physical limits on the performance of metal silicate high-k gate dielectrics
Lucovsky, G., Rayner, G. B., & Johnson, R. S. (2001, July). MICROELECTRONICS RELIABILITY, Vol. 41, pp. 937–945.
2001 journal article
Dissociation reactions of hydrogen in remote plasma-enhanced chemical-vapor-deposition silicon nitride
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 19(5), 2622–2628.
2001 journal article
Electron traps at interfaces between Si(100) and noncrystalline Al2O3, Ta2O5, and (Ta2O5)(x)(Al2O3)(1-x) alloys
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 19(4), 1606–1610.
2001 journal article
Electronic structure of noncrystalline transition metal silicate and aluminate alloys
APPLIED PHYSICS LETTERS, 79(12), 1775–1777.
2001 journal article
Electronic structure, amorphous morphology and thermal stability of transition metal oxide and chalcogenide alloys
Journal of Optoelectronics and Advanced Materials, 3(2), 155–166.
2001 article
Fixed charge and interface traps at heterovalent interfaces between Si(100) and non-crystalline Al2O3-Ta2O5 alloys
Johnson, R. S., Lucovsky, G., & Hong, J. G. (2001, November). MICROELECTRONIC ENGINEERING, Vol. 59, pp. 385–391.
2001 article
Heavy-ion-induced breakdown in ultra-thin gate oxides and high-k dielectrics
Massengill, L. W., Choi, B. K., Fleetwood, D. M., Schrimpf, R. D., Galloway, K. F., Shaneyfelt, M. R., … Lucovsky, G. (2001, December). IEEE TRANSACTIONS ON NUCLEAR SCIENCE, Vol. 48, pp. 1904–1912.
2001 article
Physical and electrical properties of noncrystalline Al2O3 prepared by remote plasma enhanced chemical vapor deposition
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 19, pp. 1353–1360.
2001 article
Transition from thermally grown gate dielectrics to deposited gate dielectrics for advanced silicon devices: A classification scheme based on bond ionicity
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 19, pp. 1553–1561.
2000 journal article
1.6 nm oxide equivalent gate dielectrics using nitride/oxide (N/O) composites prepared by RPECVD/oxidation process
IEEE ELECTRON DEVICE LETTERS, 21(3), 116–118.
2000 journal article
Application of constraint theory to Si-dielectric interfaces in a-Si: H and poly-Si thin film transistors (TFTs)
Journal of Non-Crystalline Solids, 266(2000 May), 1335–1339.
2000 article
Barrier layer model determined by XPS data for tunneling current reductions at monolayer nitrided Si-SiO(2) interfaces
Niimi, H., Yang, H. Y., Lucovsky, G., Keister, J. W., & Rowe, J. E. (2000, October 9). APPLIED SURFACE SCIENCE, Vol. 166, pp. 485–491.
2000 article
Charge redistribution at GaN-Ga2O3 interfaces: a microscopic mechanism for low defect density interfaces in remote-plasma-processed MOS devices prepared on polar GaN faces
Therrien, R., Lucovsky, G., & Davis, R. (2000, October 9). APPLIED SURFACE SCIENCE, Vol. 166, pp. 513–519.
2000 journal article
Depth-resolved detection and process dependence of traps at ultrathin plasma-oxidized and deposited SiO2/Si interfaces
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 18(3), 1737–1741.
2000 journal article
Formation of nano-crystalline Si by thermal annealing of SiOx, SiCx and SiOyCx amorphous alloys: model systems for advanced device processing
Journal of Non-Crystalline Solids, 266(2000 May), 1009–1014.
2000 journal article
H loss mechanism during anneal of silicon nitride: Chemical dissociation
JOURNAL OF APPLIED PHYSICS, 88(10), 6055–6059.
2000 article
Independent interface and bulk film contributions to reduction of tunneling currents in stacked oxide/nitride gate dielectrics with monolayer nitrided interfaces
Lucovsky, G., Niimi, H., Wu, Y., & Yang, H. (2000, June). APPLIED SURFACE SCIENCE, Vol. 159, pp. 50–61.
2000 journal article
Intrinsic limitations on device performance and reliability from bond-constraint induced transition regions at interfaces of stacked dielectrics
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 18(3), 1742–1748.
2000 journal article
Intrinsic limitations on ultimate device performance and reliability at (i) semiconductor-dielectric interfaces and (ii) internal interfaces in stacked dielectrics
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 18(4), 2179–2186.
2000 article
Limitations for aggressively scaled CMOS Si devices due to bond coordination constraints and reduced band offset energies at Si-high-k dielectric interfaces
Lucovsky, G., & Phillips, J. C. (2000, October 9). APPLIED SURFACE SCIENCE, Vol. 166, pp. 497–503.
2000 article
Low energy electron-excited nanoscale luminescence: A tool to detect trap activation by ionizing radiation
White, B. D., Brillson, L. J., Lee, S. C., Fleetwood, D. M., Schrimpf, R. D., Pantelides, S. T., … Lucovsky, G. (2000, December). IEEE TRANSACTIONS ON NUCLEAR SCIENCE, Vol. 47, pp. 2276–2280.
2000 journal article
Microscopic model for enhanced dielectric constants in low concentration SiO2-rich noncrystalline Zr and Hf silicate alloys
APPLIED PHYSICS LETTERS, 77(18), 2912–2914.
2000 article
New approach for the fabrication of device-quality Ge/GeO2/SiO2 interfaces using low temperature remote plasma processing
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 18, pp. 1230–1233.
2000 article
Plasma processed ultra-thin SiO2 interfaces far advanced silicon NMOS and PMOS devices: applications to Si-oxide Si oxynitride, Si-oxide Si nitride and Si-oxide transition metal oxide stacked gate dielectrics
Lucovsky, G., Yang, H. Y., Wu, Y., & Niimi, H. (2000, October 17). THIN SOLID FILMS, Vol. 374, pp. 217–227.
2000 article
Separate and independent reductions in direct tunneling in oxide/nitride stacks with monolayer interface nitridation associated with the (i) interface nitridation and (ii) increased physical thickness
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 18, pp. 1163–1168.
2000 journal article
The effects of interfacial sub-oxide transition regions and monolayer level nitridation on tunneling currents in silicon devices
IEEE ELECTRON DEVICE LETTERS, 21(2), 76–78.
2000 journal article
The performance and reliability of PMOSFET's with ultrathin silicon nitride/oxide stacked gate dielectrics with nitrided Si-SiO2 interfaces prepared by remote plasma enhanced CVD and post-deposition rapid thermal annealing
IEEE TRANSACTIONS ON ELECTRON DEVICES, 47(7), 1361–1369.
2000 journal article
Time-dependent dielectric wearout technique with temperature effect for reliability test of ultrathin (< 2.0 nm) single layer and dual layer gate oxides
Time-dependent dielectric wearout technique with temperature effect for reliability test of ultrathin (< 2.0 nm) single layer and dual layer gate oxides. MICROELECTRONICS RELIABILITY, 40(12), 1987–1995.
1999 journal article
Band offsets for ultrathin SiO2 and Si3N4 films on Si(111) and Si(100) from photoemission spectroscopy
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 17(4), 1831–1835.
1999 journal article
Bonding constraint-induced defect formation at Si-dielectric interfaces and internal interfaces in dual-layer gate dielectrics
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 17(4), 1806–1812.
1999 journal article
Bonding constraints and defect formation at interfaces between crystalline silicon and advanced single layer and composite gate dielectrics
APPLIED PHYSICS LETTERS, 74(14), 2005–2007.
1999 article
Cathodoluminescence spectroscopy of nitrided SiO2-Si interfaces
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 17, pp. 1258–1262.
1999 article
Charge redistribution at GaN-Ga2O3 interfaces: A microscopic mechanism for low defect density interfaces in remote plasma processed MOS devices prepared on polar GaN faces
Therrien, R., Niimi, H., Gehrke, T., Lucovsky, G., & Davis, R. (1999, September). MICROELECTRONIC ENGINEERING, Vol. 48, pp. 303–306.
1999 article
Charge redistribution at GaN-Ga2O3 interfaces: A microscopic mechanism for low defect density interfaces in remote plasma processed MOS devices prepared on polar GaN faces
Therrien, R., Lucovsky, G., & Davis, R. F. (1999, November 16). PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, Vol. 176, pp. 793–796.
1999 journal article
Improvement of gate dielectric reliability for p plus poly MOS devices using remote PECVD top nitride deposition ultra-thin (2.4-6 nm) gate oxides
MICROELECTRONICS RELIABILITY, 39(3), 365–372.
1999 journal article
Interfacial properties of ultrathin pure silicon nitride formed by remote plasma enhanced chemical vapor deposition
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 17(4), 1836–1839.
1999 journal article
Monolayer-level controlled incorporation of nitrogen at Si-SiO(2) interfaces using remote plasma processing
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 17(6), 3185–3196.
1999 journal article
Monolayer-level controlled incorporation of nitrogen in ultrathin gate dielectrics using remote plasma processing: Formation of stacked 'N-O-N' gate dielectrics
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 17(6), 2610–2621.
1999 article
Reaction/annealing pathways for forming ultrathin silicon nitride films for composite oxide-nitride gate dielectrics with nitrided crystalline silicon-dielectric interfaces for application in advanced complementary metal-oxide-semiconductor devices
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 17, pp. 1340–1351.
1999 article
Silicon oxide/silicon nitride dual-layer films: a stacked gate dielectric for the 21st century
Lucovsky, G. (1999, September 1). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 254, pp. 26–37.
1999 article
Stability of Si-O-F low-K dielectrics: attack by water molecules as function of near-neighbor Si-F bonding arrangements
Yang, H., & Lucovsky, G. (1999, September 1). JOURNAL OF NON-CRYSTALLINE SOLIDS, Vol. 254, pp. 128–133.
1999 article
Structure of ultrathin SiO2/Si(111) interfaces studied by photoelectron spectroscopy
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 17, pp. 1250–1257.
1999 journal article
Suppression of boron transport out of p(+) polycrystalline silicon at polycrystalline silicon dielectric interfaces
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 17(4), 1813–1822.
1999 article
The effects of chemical bonding and band offset constraints at Si-dielectric interfaces on the integration of alternative high-K dielectrics into aggressively-scaled CMOS Si devices
Lucovsky, G., & Phillips, J. C. (1999, September). MICROELECTRONIC ENGINEERING, Vol. 48, pp. 291–294.
1999 article
The effects of interfacial suboxide transition regions on direct tunneling in oxide and stacked oxide-nitride gate dielectrics
Yang, H., Niimi, H., Wu, Y., Lucovsky, G., Keister, J. W., & Rowe, J. E. (1999, September). MICROELECTRONIC ENGINEERING, Vol. 48, pp. 307–310.
1999 article
Thermochemical stability of silicon-oxygen-carbon alloy thin films: A model system for chemical and structural relaxation at SiC-SiO2 interfaces
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 17, pp. 2170–2177.
1999 journal article
Time dependent dielectric wearout (TDDW) technique for reliability of ultrathin gate oxides
IEEE ELECTRON DEVICE LETTERS, 20(6), 262–264.
1999 journal article
Ultrathin nitrided gate dielectrics: Plasma processing, chemical characterization, performance, and reliability
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 43(3), 301–326.
1998 article
A unified chemical bonding model for defect generation in a-SiH: Photo-induced defects in photovoltaic devices and current-induced defects in TFTs
Yang, H., & Lucovsky, G. (1998, March). JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, Vol. 37, pp. 1082–1090.
1998 journal article
Atomic structure and thermal stability of silicon suboxides in bulk thin films and in transition regions at Si-SiO2 interfaces
Journal of Non-Crystalline Solids, 230 (part A)(1998 May), 1–14.
1998 journal article
Cathodoluminescence measurements of suboxide band-tail and Si dangling bond states at ultrathin Si-SiO2 interfaces
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 16(4), 2177–2181.
1998 journal article
Controlled nitrogen incorporation at Si-SiO2 interfaces by remote plasma-assisted processing
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 37(2), 709–714.
1998 journal article
Coupled electron-hole dynamics at the Si/SiO2 interface
PHYSICAL REVIEW LETTERS, 81(19), 4224–4227.
1998 journal article
Depth-dependent spectroscopic defect characterization of the interface between plasma-deposited SiO(2) and silicon
APPLIED PHYSICS LETTERS, 73(6), 791–793.
1998 article
Differences between silicon oxycarbide regions at SiC-SiO(2) prepared by plasma-assisted oxidation and thermal oxidations
Lucovsky, G., Niimi, H., Golz, A., & Kurz, H. (1998, January). APPLIED SURFACE SCIENCE, Vol. 123, pp. 435–439.
1998 journal article
Heterointerface dipoles: Applications to (a) Si-SiO2, (b) nitrided Si-N-SiO2, and (c) SiC-SiO2 interfaces
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 16(4), 2191–2198.
1998 journal article
Interface electronic transition observed by optical second-harmonic spectroscopy in beta-GaN/GaAs(001) heterostructures
PHYSICAL REVIEW B, 57(7), 3722–3725.
1998 journal article
Interface formation and thermal stability of advanced metal gate and ultrathin gate dielectric layers
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 16(4), 2154–2158.
1998 article
Interface studies of tungsten nitride and titanium nitride composite metal gate electrodes with thin dielectric layers
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 16, pp. 1757–1761.
1998 article
Interfacial sub-oxide regions at Si-SiO2 interfaces: minimization by post-oxidation rapid thermal anneal
Lucovsky, G., Koh, K., Chaflin, B., & Hinds, B. (1998, January). APPLIED SURFACE SCIENCE, Vol. 123, pp. 490–495.
1998 journal article
Investigation of postoxidation thermal treatments of Si/SiO2 interface in relationship to the kinetics of amorphous Si suboxide decomposition
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 16(4), 2171–2176.
1998 journal article
Low-temperature (<450 degrees C), plasma-assisted deposition of poly-Si thin films on SiO2 and glass through interface engineering (vol 15, pg 1035, 1997)
Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 16(1), 207.
1998 journal article
Minimization of dangling bond defects in hydrogenated silicon nitride dielectrics for thin film transistors (TFTs)
Journal of Non-Crystalline Solids, 230 (part B)(1998), 1221–1225.
1998 journal article
Modeled tunnel currents for high dielectric constant dielectrics
IEEE TRANSACTIONS ON ELECTRON DEVICES, 45(6), 1350–1355.
1998 article
Monolayer incorporation of nitrogen at Si-SiO2 interfaces: Interface characterization and electrical properties
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 16, pp. 356–364.
1998 article
Monolayer nitrogen atom incorporation at buried Si-SiO2 interfaces: Preparation by remote plasma oxidation/nitridation and characterization by on-line auger electron spectroscopy
Lucovsky, G., Niimi, H., Koh, K., & Green, M. L. (1998, February). SURFACE REVIEW AND LETTERS, Vol. 5, pp. 167–173.
1998 article
Optimization of nitrided gate dielectrics by plasma-assisted and rapid thermal processing
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Vol. 16, pp. 1721–1729.
1998 article
Plasma-engineered Si-SiO2 interfaces: monolayer nitrogen atom incorporation by low-temperature remote plasma-assisted oxidation in N2O
Koh, K., Niimi, H., & Lucovsky, G. (1998, January). SURFACE & COATINGS TECHNOLOGY, Vol. 98, pp. 1524–1528.
1998 journal article
Reaction pathways for intrinsic and extrinsic defect metastability in light-soaked hydrogenated amorphous silicon - the Staebler-Wronski effect
Journal of Non-Crystalline Solids, 230 (part A)(1998 May), 281–286.
1998 article
Stability of Si-O-F low-K dielectrics: Attack by water molecules as function of near-neighbor Si-F bonding arrangements
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 16, pp. 1525–1528.
1998 journal article
Study of SiOx decomposition kinetics and formation of Si nanocrystals in an SiOx matrix
Journal of Non-Crystalline Solids, 230 (part A)(1998 May), 507–512.
1998 journal article
Tunneling currents through ultrathin oxide/nitride dual layer gate dielectrics for advanced microelectronic devices
JOURNAL OF APPLIED PHYSICS, 83(4), 2327–2337.
1998 journal article
Ultrathin nitride/oxide (N/O) gate dielectrics for p(+)-polysilicon gated PMOSFET's prepared by a combined remote plasma enhanced CVD thermal oxidation process
IEEE ELECTRON DEVICE LETTERS, 19(10), 367–369.
1998 article
Ultrathin oxide gate dielectrics prepared by low temperature remote plasma-assisted oxidation
Niimi, H., & Lucovsky, G. (1998, January). SURFACE & COATINGS TECHNOLOGY, Vol. 98, pp. 1529–1533.
1998 journal article
Ultrathin oxide-nitride gate dielectric MOSFET's
IEEE ELECTRON DEVICE LETTERS, 19(4), 106–108.
1997 article
Elimination of sub-oxide transition regions at Si-SiO2 interfaces by rapid thermal annealing at 900 degrees C
Lucovsky, G., Banerjee, A., Niimi, H., Koh, K., Hinds, B., Meyer, C., … Kurz, H. (1997, June). APPLIED SURFACE SCIENCE, Vol. 117, pp. 202–206.
1997 article
Fluorine atom induced decreases to the contribution of infrared vibrations to the static dielectric constant of Si-O-F alloy films
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 15, pp. 836–843.
1997 article
Hydrogen atom participation in metastable defect formation at Si-SiO2 interfaces
Lucovsky, G., Yang, H., Jing, Z., & Whitten, J. L. (1997, June). APPLIED SURFACE SCIENCE, Vol. 117, pp. 192–197.
1997 article
Local atomic bonding in fluorinated silicon oxides: Bond-ionicity-controlled contributions of infrared-active vibrations to the static dielectric constant
Lucovsky, G., & Yang, H. (1997, March). JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, Vol. 36, pp. 1368–1373.
1997 article
Local dipole field contributions to bond-stretching silicon-hydrogen vibrational modes on flat and vicinal Si(111) surfaces
Yang, H. Y., & Lucovsky, G. (1997, October). SURFACE REVIEW AND LETTERS, Vol. 4, pp. 891–896.
1997 conference paper
Low pH chemical etch route for smooth H-terminated Si(100) and study of subsequent chemical stability
Environmental, safety, and health issues in IC production: Symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A. (Materials Research Society Symposium proceedings, no. 447), 191–196. Pittsburgh, PA: Materials Research Society.
1997 article
Low-temperature (<450 degrees C), plasma-assisted deposition of poly-Si thin films on SiO2 and glass through interface engineering
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 15, pp. 1035–1040.
1997 article
Minimization of sub-oxide transition regions at Si-SiO2 interfaces by 900 degrees C rapid thermal annealing
Lucovsky, G., Banerjee, A., Hinds, B., Claflin, B., Koh, K., & Yang, H. (1997, June). MICROELECTRONIC ENGINEERING, Vol. 36, pp. 207–210.
1997 journal article
Plasma-assisted formation of low defect density SiC-SiO2 interfaces
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 15(4), 1097–1104.
1997 journal article
The role of hydrogen atoms in metastable defect formation at Si-SiO2 interfaces and in hydrogenated amorphous Si (a-Si:H)
Physica Status Solidi. A, Applications and Materials Science, 159(1997), 5–10.
1997 article
Ultra-thin gate dielectrics prepared by low-temperature remote plasma-assisted oxidation
Niimi, H., Koh, K., & Lucovsky, G. (1997, May). NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol. 127, pp. 364–368.
1993 journal article
CENTER FOR ADVANCED ELECTRONIC MATERIALS PROCESSING
PROCEEDINGS OF THE IEEE, 81(1), 42–59.
1993 journal article
Femtosecond spectroscopic study of ultrafast carrier relaxation in hydrogenated amorphous silicon a-Si:H
Journal of Applied Physics, 73, 1235.
1993 patent
Method for determining interface properties of semiconductor materials by photoreflectance
Washington, DC: U.S. Patent and Trademark Office.
1993 journal article
Optical-detection of photoconductivity in hydrogenated amorphous silicon, a-Si:H, in the subpicosecond time-domain
Journal of Non-Crystalline Solids, 166, 575–578.
1993 journal article
Transport processes of optically generated free carriers in amorphous silicon, a-Si:H in the femtosecond time regime
Physical Review, B(47), 3593.
1990 journal article
ANNEALING OF INTRINSIC AND PHOTOINDUCED DEFECTS IN HYDROGENATED AMORPHOUS-SILICON
THIN SOLID FILMS, 193(1-2), 577–587.
Contributors: G. Parsons n , C. Wang n & n
1990 journal article
Post-deposition relaxation of electronic defects in hydrogenated amorphous silicon
Applied Physics Letters, 56, 1895–1897.
1990 journal article
Silicon-hydrogen bond-stretching vibrations in hydrogenated amorphous silicon, nitrogen alloys
Physical Review, B(41), 1664–1667.
1990 journal article
Ultrafast recombination and trapping in amorphous silicon
Physical Review, B(41), 2879–2884.
1989 journal article
Defects in a-Si:H films produced by remote plasma enhanced CVD
Journal of Non-Crystalline Solids, 107, 295–300.
1989 journal article
Dependence of the chemical, electrical and photoelectronic properties of a-Si:H/Si3N4 interfaces on the deposition sequence
Journal of Non-Cyrstalline Solids, 114.
1989 journal article
EFFECTS OF THE NEAREST NEIGHBORS AND THE ALLOY MATRIX ON SIH STRETCHING VIBRATIONS IN THE AMORPHOUS SIOR-H (0-LESS-THAN-R-LESS-THAN-2) ALLOY SYSTEM
PHYSICAL REVIEW B, 40(3), 1795–1805.
1989 journal article
Mass and optical emission spectroscopic studies of the gas phase during the deposition of SiO2 and a-Si:H by remote plasma enhanced chemical vapor deposition
Journal of Vacuum Science & Technology, A(7), 1115–1123.
1989 journal article
Precursors for the deposition of amorphous silicon hydrogen alloys by remote plasma enhanced CVD
Journal of Vacuum Science & Technology, A(7), 1124–1129.
1989 journal article
Reduction of defects by high temperature (180 degrees c-240 degrees c) annealing in room temperature deposited hydrogenated amorphous silicon
Journal of Non-Crystalline Solids, 114.
1988 journal article
Properties of intrinsic and doped a-Si:H deposited by remote plasma enhanced chemical vapor deposition
Journal of Vacuum Science & Technology, A(6), 1912–1916.
1988 journal article
RAMAN-SCATTERING CHARACTERIZATION OF CARBON BONDING IN DIAMOND AND DIAMONDLIKE THIN-FILMS
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 6(3), 1783–1787.
1988 journal article
Spectroscopic emission studies of O2/He and N2/He plasmas in remote plasma enhanced chemical vapor deposition
Journal of Vacuum Science & Technology, A(6), 1849–1854.
1987 journal article
Low-temperature growth of silicon dioxide films - a study of chemical bonding by ellipsometry and infrared-spectroscopy
Journal of Vacuum Science & Technology. B, Microelectronics Processing and Phenomena, 5(2), 530–537.
1987 journal article
OPTICAL AND ELECTRICAL-PROPERTIES OF A-SI-H FILMS GROWN BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION (RPECVD)
JOURNAL OF NON-CRYSTALLINE SOLIDS, 97-8, 1375–1378.
Contributors: G. Parsons n , D. Tsu n & n
1987 journal article
Photoelectronic properties of a-Si:H and a-Ge:H thin films in surface cell structures
Journal of Vacuum Science & Technology, A(5), 1655–1660.
1986 journal article
Deposition of a-Si,Sn:H alloy films by reactive magnetron sputtering from separate Si and Sn targets
Journal of Vacuum Science & Technology, A(4), 470–474.
1986 journal article
INFRARED SPECTROSCOPIC STUDY OF SIOX FILMS PRODUCED BY PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 4(3), 689–694.
1985 journal article
HYDROGEN LOCALIZATION NEAR BORON IN SILICON
APPLIED PHYSICS LETTERS, 46(4), 421–423.
1985 journal article
Low defect density Si,Ge:H alloy films produced by magnetron sputtering from separate Si and Ge cathodes
Journal of Non-Crystalline Solids, 77 & 78, 885–889.
Citation Index includes data from a number of different sources. If you have questions about the sources of data in the Citation Index or need a set of data which is free to re-distribute, please contact us.
Certain data included herein are derived from the Web of Science© and InCites© (2024) of Clarivate Analytics. All rights reserved. You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.