Dennis Martin Maher

Works (18)

Updated: March 10th, 2025 12:14

2006 journal article

A comparison of thickness values for very thin SiO2 films by using ellipsometric, capacitance-voltage, and HRTEM measurements

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 153(1), F12–F19.

By: J. Ehrstein*, C. Richter *, D. Chandler-Horowitz*, E. Vogel*, C. Young  n, S. Shah n, D. Maher n, B. Foran, P. Hung, A. Diebold

topics (OpenAlex): Semiconductor materials and devices; Integrated Circuits and Semiconductor Failure Analysis; Electron and X-Ray Spectroscopy Techniques
Source: Web Of Science
Added: August 6, 2018

2001 journal article

Effects of surface pretreatments on interface structure during formation of ultra-thin yttrium silicate dielectric films on silicon

APPLIED SURFACE SCIENCE, 181(1-2), 78–93.

By: J. Chambers n, B. Busch*, W. Schulte*, T. Gustafsson*, E. Garfunkel *, S. Wang n, D. Maher n, T. Klein*, G. Parsons n 

Contributors: J. Chambers n, B. Busch*, W. Schulte*, T. Gustafsson*, E. Garfunkel *, S. Wang n, D. Maher n, T. Klein*, G. Parsons n 

author keywords: X-ray photoelectron spectroscopy; transmission electron microscopy; capacitance-voltage curve
topics (OpenAlex): Semiconductor materials and devices; Copper Interconnects and Reliability; Semiconductor materials and interfaces
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

1999 journal article

A low-thermal-budget in situ doped multilayer silicon epitaxy process for MOSFET channel engineering

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(3), 1189–1196.

By: I. Ban*, M. Ozturk*, V. Misra* , J. Wortman*, D. Venables n & D. Maher n

topics (OpenAlex): Advancements in Semiconductor Devices and Circuit Design; Semiconductor materials and devices; Silicon Carbide Semiconductor Technologies
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

1999 journal article

Effects of oxygen during selective silicon epitaxial growth using disilane and chlorine

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(6), 2344–2352.

By: . PA O'Neil, M. Ozturk*, A. Batchelor*, M. Xu & D. Maher*

topics (OpenAlex): Semiconductor materials and devices; Silicon and Solar Cell Technologies; Semiconductor materials and interfaces
Source: Web Of Science
Added: August 6, 2018

1999 journal article

Effects of oxygen on selective silicon deposition using disilane

MATERIALS LETTERS, 38(6), 418–422.

By: . PA O'Neil, M. Ozturk n, A. Batchelor n & D. Maher n

author keywords: silicon; CVD; disilane; selective silicon deposition
topics (OpenAlex): Silicon and Solar Cell Technologies; Semiconductor materials and devices; Silicon Nanostructures and Photoluminescence
Source: Web Of Science
Added: August 6, 2018

1999 journal article

Evidence of aluminum silicate formation during chemical vapor deposition of amorphous Al2O3 thin films on Si(100)

APPLIED PHYSICS LETTERS, 75(25), 4001–4003.

By: T. Klein n, D. Niu n, W. Epling  n, W. Li n, D. Maher n, C. Hobbs*, R. Hegde*, I. Baumvol*, G. Parsons n 

Contributors: T. Klein n, D. Niu n, W. Epling  n, W. Li n, D. Maher n, C. Hobbs*, R. Hegde*, I. Baumvol*, G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Silicon Nanostructures and Photoluminescence; Ion-surface interactions and analysis
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

1999 journal article

Growth of selective silicon epitaxy using disilane and chlorine on heavily implanted substrates - I. Role of implanted BF2

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(8), 3070–3078.

By: . PA O'Neil, M. Ozturk*, A. Batchelor n, D. Venables n, M. Xu n & D. Maher n

topics (OpenAlex): Silicon and Solar Cell Technologies; Semiconductor materials and devices; Semiconductor materials and interfaces
Source: Web Of Science
Added: August 6, 2018

1999 journal article

Growth of selective silicon epitaxy using disilane and chlorine on heavily implanted substrates - II. Role of implanted arsenic

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(8), 3079–3086.

By: . PA O'Neil, M. Ozturk*, A. Batchelor n, D. Venables n & D. Maher n

topics (OpenAlex): Silicon and Solar Cell Technologies; Silicon Nanostructures and Photoluminescence; Semiconductor materials and interfaces
Source: Web Of Science
Added: August 6, 2018

1999 journal article

Quality of selective silicon epitaxial films deposited using disilane and chlorine

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 146(6), 2337–2343.

By: . PA O'Neil, M. Ozturk*, A. Batchelor*, M. Xu* & D. Maher*

topics (OpenAlex): Semiconductor materials and devices; Silicon Nanostructures and Photoluminescence; Semiconductor materials and interfaces
Source: Web Of Science
Added: August 6, 2018

1999 article

Thermochemical stability of silicon-oxygen-carbon alloy thin films: A model system for chemical and structural relaxation at SiC-SiO2 interfaces

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 17, pp. 2170–2177.

By: D. Wolfe n, B. Hinds n, F. Wang n, G. Lucovsky n, B. Ward n, M. Xu  n, R. Nemanich n, D. Maher n

topics (OpenAlex): Diamond and Carbon-based Materials Research; Semiconductor materials and devices; Advanced ceramic materials synthesis
Source: Web Of Science
Added: August 6, 2018

1998 article

Factors affecting two-dimensional dopant profiles obtained by transmission electron microscopy of etched p-n junctions in Si

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 16, pp. 471–475.

By: S. Neogi*, D. Venables n, Z. Na* & D. Maher n

topics (OpenAlex): Silicon and Solar Cell Technologies; Semiconductor materials and interfaces; Integrated Circuits and Semiconductor Failure Analysis
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
Source: Web Of Science
Added: August 6, 2018

1998 journal article

Structure and properties of rapid thermal chemical vapor deposited polycrystalline silicon-germanium films on SiO2 using Si2H6, GeH4, and B2H6 gases

JOURNAL OF APPLIED PHYSICS, 83(10), 5469–5476.

By: V. Li n, M. Mirabedini n, B. Hornung n, H. Heinisch n, M. Xu n, D. Batchelor n, D. Maher n, J. Wortman n, R. Kuehn n

topics (OpenAlex): Thin-Film Transistor Technologies; Silicon Nanostructures and Photoluminescence; Silicon and Solar Cell Technologies
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
14. Life Below Water (OpenAlex)
Source: Web Of Science
Added: August 6, 2018

1997 journal article

Effects of Debye-Waller factors and compositional uncertainties on the 200 structure factor refinement in gamma-TiAl

PHILOSOPHICAL MAGAZINE LETTERS, 75(5), 261–270.

By: S. Swaminathan, I. Jones, D. Maher*, A. Johnson & H. Fraser

topics (OpenAlex): Intermetallics and Advanced Alloy Properties; Rare-earth and actinide compounds; Advanced Chemical Physics Studies
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
Source: Web Of Science
Added: August 6, 2018

1997 journal article

Mapping two-dimensional arsenic distributions in silicon using dopant-selective chemical etching technique

JOURNAL OF APPLIED PHYSICS, 82(11), 5811–5815.

By: S. Neogi*, D. Venables n, Z. Ma*, D. Maher n, M. Taylor * & S. Corcoran*

topics (OpenAlex): Silicon and Solar Cell Technologies; Integrated Circuits and Semiconductor Failure Analysis; Semiconductor materials and interfaces
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
Source: Web Of Science
Added: August 6, 2018

1997 journal article

Optimization of process conditions for selective silicon epitaxy using disilane, hydrogen, and chlorine

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 144(9), 3309–3315.

By: P. ONeil n, M. Ozturk n, K. Violette n, D. Batchelor n, K. Christensen n & D. Maher n

topics (OpenAlex): Silicon and Solar Cell Technologies; Thin-Film Transistor Technologies; Semiconductor materials and devices
Source: Web Of Science
Added: August 6, 2018

1997 journal article

Precise and accurate refinements of the 220 structure factor for silicon by the systematic-row CBED method

ULTRAMICROSCOPY, 69(3), 169–183.

By: S. Swaminathan *, S. Altynov*, I. Jones *, N. Zaluzec *, D. Maher n & H. Fraser *

topics (OpenAlex): Crystallography and Radiation Phenomena; Electron and X-Ray Spectroscopy Techniques; X-ray Diffraction in Crystallography
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Source: Web Of Science
Added: August 6, 2018

1997 journal article

Rapid thermal chemical vapor deposition of in situ boron doped polycrystalline silicon germanium films on silicon dioxide for complimentary metal oxide semiconductor applications

Applied Physics Letters, 71(23), 3388–3390.

By: V. Li n, M. Mirabedini n, R. Kuehn n, J. Wortman n, M. Ozturk n, D. Batchelor n, K. Christensen n, D. Maher n

topics (OpenAlex): Semiconductor materials and devices; Silicon Nanostructures and Photoluminescence; Semiconductor materials and interfaces
Source: NC State University Libraries
Added: August 6, 2018

1993 journal article

CENTER FOR ADVANCED ELECTRONIC MATERIALS PROCESSING

PROCEEDINGS OF THE IEEE, 81(1), 42–59.

By: N. Masnari n, . Hauser n, G. Lucovsky n, D. Maher n, R. Markunas*, M. Ozturk n, J. Wortman n

topics (OpenAlex): Advancements in Semiconductor Devices and Circuit Design; Semiconductor materials and devices; Integrated Circuits and Semiconductor Failure Analysis
Source: Web Of Science
Added: August 6, 2018

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