Mariah, J. Ritz

Works (1)

Updated: July 5th, 2023 15:39

2015 article

Using Hydrogen To Expand the Inherent Substrate Selectivity Window During Tungsten Atomic Layer Deposition

Kalanyan, B., Lemaire, P. C., Atanasov, S. E., Ritz, M. J., & Parsons, G. N. (2015, December 15). Chemistry of Materials, Vol. 28, pp. 117–126.

By: B. Kalanyan n, P. Lemaire n, S. Atanasov n, M. Ritz n & G. Parsons n 

Contributors: B. Kalanyan n, P. Lemaire n, S. Atanasov n, M. Ritz n & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Copper Interconnects and Reliability
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

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