Mariah, J. Ritz

Works (1)

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2016 journal article

Using hydrogen to expand the inherent substrate selectivity window during tungsten atomic layer deposition

Chemistry of Materials, 28(1), 117–126.

By: B. Kalanyan, P. Lemaire, S. Atanasov, M. Ritz & G. Parsons

Source: NC State University Libraries
Added: August 6, 2018