Mariah, J. Ritz

Works (1)

Updated: July 5th, 2023 15:39
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2016 journal article

Using Hydrogen To Expand the Inherent Substrate Selectivity Window During Tungsten Atomic Layer Deposition

CHEMISTRY OF MATERIALS, 28(1), 117–126.

By: B. Kalanyan n, P. Lemaire n, S. Atanasov n, M. Ritz n & G. Parsons n 

Sources: Web Of Science, ORCID
Added: August 6, 2018