Works (1)

Updated: July 5th, 2023 15:39

2016 journal article

Using Hydrogen To Expand the Inherent Substrate Selectivity Window During Tungsten Atomic Layer Deposition

CHEMISTRY OF MATERIALS, 28(1), 117–126.

By: B. Kalanyan n, P. Lemaire n, S. Atanasov n, M. Ritz n & G. Parsons n

co-author countries: United States of America 🇺🇸

Contributors: B. Kalanyan n, P. Lemaire n, S. Atanasov n, M. Ritz n & G. Parsons n

Sources: Web Of Science, ORCID
Added: August 6, 2018

Citation Index includes data from a number of different sources. If you have questions about the sources of data in the Citation Index or need a set of data which is free to re-distribute, please contact us.

Certain data included herein are derived from the Web of Science© and InCites© (2024) of Clarivate Analytics. All rights reserved. You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.