Mariah, J. Ritz

Kalanyan, B., Lemaire, P. C., Atanasov, S. E., Ritz, M. J., & Parsons, G. N. (2016). Using Hydrogen To Expand the Inherent Substrate Selectivity Window During Tungsten Atomic Layer Deposition. CHEMISTRY OF MATERIALS, 28(1), 117–126. https://doi.org/10.1021/acs.chemmater.5b03319