Works (5)

Updated: July 5th, 2023 15:46

2018 journal article

Thermal atomic layer deposition of Sn metal using SnCl4 and a vapor phase silyl dihydropyrazine reducing agent

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36(6).

By: E. Stevens n, M. Mousa n & G. Parsons n 

co-author countries: United States of America 🇺🇸
Sources: Web Of Science, ORCID
Added: December 10, 2018

2015 journal article

Atmospheric pressure synthesis of photoluminescent hybrid materials by sequential organometallic vapor infiltration into polyethylene terephthalate fibers

JOURNAL OF APPLIED PHYSICS, 117(4).

By: H. Akyildiz n, M. Mousa n & J. Jur n

co-author countries: United States of America 🇺🇸
Source: Web Of Science
Added: August 6, 2018

2015 journal article

Precise Nanoscale Surface Modification and Coating of Macroscale Objects: Open-Environment in Loco Atomic Layer Deposition on an Automobile

ACS APPLIED MATERIALS & INTERFACES, 7(35), 19523–19529.

By: M. Mousa n, C. Oldham n & G. Parsons n 

co-author countries: United States of America 🇺🇸

Contributors: M. Mousa n, C. Oldham n & G. Parsons n 

author keywords: atomic layer deposition; in loco; open-environment ALD; metal oxides; ALD delivery head
Sources: Web Of Science, ORCID
Added: August 6, 2018

2014 journal article

Atmospheric Pressure Atomic Layer Deposition of Al2O3 Using Trimethyl Aluminum and Ozone

LANGMUIR, 30(13), 3741–3748.

By: M. Mousa n, C. Oldham n & G. Parsons n 

co-author countries: United States of America 🇺🇸

Contributors: M. Mousa n, C. Oldham n & G. Parsons n 

Sources: Web Of Science, ORCID
Added: August 6, 2018

2012 journal article

Effect of temperature and gas velocity on growth per cycle during Al2O3 and ZnO atomic layer deposition at atmospheric pressure

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 30(1).

By: M. Mousa*, C. Oldham*, J. Jur* & G. Parsons* 

Contributors: M. Mousa*, C. Oldham*, J. Jur* & G. Parsons* 

Sources: Web Of Science, ORCID
Added: August 6, 2018

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