Rachel Nye

College of Engineering

Works (12)

Updated: March 1st, 2025 05:01

2025 article

Connection Length Controlled Sound Speed and Thermal Conductivity of Hybrid Metalcone Films

Hoque, M. S. B., Nye, R. A., Zare, S., Atkinson, S., Wang, S., Jones, A. H., … Hopkins, P. E. (2025, February 10). NANO LETTERS, Vol. 2.

By: M. Hoque *, R. Nye n, S. Zare *, S. Atkinson  n, S. Wang n, A. Jones, J. Gaskins, G. Parsons n , P. Hopkins *

author keywords: Molecular layer deposition; thermal conductivity; vibrational lifetime; metalcone
topics (OpenAlex): Thermal properties of materials; Ferroelectric and Piezoelectric Materials; Thermal Expansion and Ionic Conductivity
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UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: February 10, 2025

2024 journal article

Vapor-phase zeolitic imidazolate framework-8 growth on fibrous polymer substrates

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 42(1).

By: R. Nye n, N. Carroll  n, S. Morgan n  & G. Parsons n 

topics (OpenAlex): Metal-Organic Frameworks: Synthesis and Applications; MXene and MAX Phase Materials; Gas Sensing Nanomaterials and Sensors
Sources: Web Of Science, ORCID, NC State University Libraries
Added: January 6, 2024

2023 article

A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2 Atomic Layer Deposition

Kaneda, Y., Nye, R. A., Marques, E. A., Armini, S., Delabie, A., Setten, M. J., & Pourtois, G. (2023, May 22). JOURNAL OF PHYSICAL CHEMISTRY C.

By: Y. Kaneda, R. Nye n, E. Marques *, S. Armini *, A. Delabie *, M. Setten *, G. Pourtois *

topics (OpenAlex): Semiconductor materials and devices; Catalytic Processes in Materials Science; Electronic and Structural Properties of Oxides
Source: Web Of Science
Added: July 3, 2023

2023 journal article

Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 41(3).

By: K. Van Dongen *, R. Nye n, J. Clerix *, C. Sixt*, D. De Simone * & A. Delabie *

topics (OpenAlex): Semiconductor materials and devices; Ferroelectric and Negative Capacitance Devices; Copper Interconnects and Reliability
Source: Web Of Science
Added: April 11, 2023

2023 article

Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition

Nye, R. A., Van Dongen, K., De Simone, D., Oka, H., Parsons, G. N., & Delabie, A. (2023, February 23). CHEMISTRY OF MATERIALS, Vol. 2.

By: R. Nye n, K. Van Dongen *, D. De Simone *, H. Oka*, G. Parsons n  & A. Delabie *

topics (OpenAlex): Advancements in Photolithography Techniques; Integrated Circuits and Semiconductor Failure Analysis; Nanofabrication and Lithography Techniques
Sources: Web Of Science, ORCID, NC State University Libraries
Added: March 20, 2023

2023 article

Quantified Uniformity and Selectivity of TiO2 Films in 45-nm Half Pitch Patterns Using Area-Selective Deposition Supercycles

Nye, R. A. A., Van Dongen, K., Marneffe, J.-F., Parsons, G. N. N., & Delabie, A. (2023, June 17). ADVANCED MATERIALS INTERFACES, Vol. 6.

By: R. Nye n, K. Van Dongen *, J. Marneffe *, G. Parsons n  & A. Delabie *

author keywords: area-selective deposition; nanopatterns; supercycles; TiO2; uniformity
topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Copper Interconnects and Reliability
Sources: Web Of Science, NC State University Libraries
Added: June 26, 2023

2022 journal article

Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO(2 )area-selective deposition

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, 21(4).

By: R. Nye n, K. Van Dongen *, H. Oka*, D. De Simone *, G. Parsons n  & A. Delabie *

author keywords: extreme ultraviolet lithography; photoresist; area-selective deposition; atomic layer deposition; TiO2; polymethacrylate
topics (OpenAlex): Advancements in Photolithography Techniques; Nanofabrication and Lithography Techniques; Semiconductor materials and devices
Sources: Web Of Science, NC State University Libraries
Added: March 6, 2023

2022 article

Improving polymethacrylate EUV resists with TiO2 area-selective deposition

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIX, Vol. 12055.

By: R. Nye n, K. Van Dongen *, H. Oka*, H. Furutani*, G. Parsons n , D. De Simone *, A. Delabie *

author keywords: EUV lithography; Photoresist; Area-selective deposition; ALD; TiO2; Polymethacrylate
topics (OpenAlex): Advancements in Photolithography Techniques; Integrated Circuits and Semiconductor Failure Analysis; Semiconductor materials and devices
Sources: Web Of Science, NC State University Libraries
Added: September 12, 2022

2022 journal article

Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition

APPLIED PHYSICS LETTERS, 121(8).

By: R. Nye n, S. Song  n, K. Van Dongen *, A. Delabie * & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Catalytic Processes in Materials Science
Sources: Web Of Science, ORCID, NC State University Libraries
Added: November 21, 2022

2021 article

In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors

Nye, R. A., Wang, S., Uhlenbrock, S., Smythe, J. A., III, & Parsons, G. N. (2021, December 27). DALTON TRANSACTIONS, Vol. 51.

By: R. Nye n, S. Wang n, S. Uhlenbrock*, J. Smythe* & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Surface Modification and Superhydrophobicity; Advanced Sensor and Energy Harvesting Materials
TL;DR: In situ ellipsometry and quartz crystal microbalance are used to explore growth initiation and growth rate evolution during MLD of polyurea using aromatic p-phenylene diisocyanate or aliphatic 1,6-hexamethylene diisOCyanate combined with ethylenediamine or 1, 6-hexanediamine co-reactants to provide useful insight into mechanisms needed to control growth of ultra-thin organic films for advanced applications. (via Semantic Scholar)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: January 24, 2022

2020 article

Shock Initiation of Reactive Nanolaminates

SHOCK COMPRESSION OF CONDENSED MATTER - 2019, Vol. 2272.

By: S. Matveev *, D. Dlott *, P. Hanusova*, J. Maria*, R. Nye n & G. Parsons n 

topics (OpenAlex): Energetic Materials and Combustion; High-pressure geophysics and materials; Combustion and Detonation Processes
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UN Sustainable Development Goal Categories
Sources: Web Of Science, NC State University Libraries
Added: March 1, 2021

2020 journal article

Understanding Molecular Layer Deposition Growth Mechanisms in Polyurea via Picosecond Acoustics Analysis

CHEMISTRY OF MATERIALS, 32(4), 1553–1563.

By: R. Nye n, A. Kelliher *, J. Gaskins *, P. Hopkins * & G. Parsons n 

topics (OpenAlex): Semiconductor materials and devices; Metal and Thin Film Mechanics; Electronic and Structural Properties of Oxides
Sources: Web Of Science, ORCID, NC State University Libraries
Added: March 23, 2020

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