Rachel Nye

College of Engineering

Works (7)

2023 article

Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition

Nye, R. A., Van Dongen, K., De Simone, D., Oka, H., Parsons, G. N., & Delabie, A. (2023, February 23). CHEMISTRY OF MATERIALS.

By: R. Nye, K. Van Dongen*, D. De Simone*, H. Oka*, G. Parsons & A. Delabie*

Source: Web Of Science
Added: March 20, 2023

2022 journal article

Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO(2 )area-selective deposition

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, 21(4).

By: R. Nye, K. Van Dongen*, H. Oka*, D. De Simone*, G. Parsons & A. Delabie*

author keywords: extreme ultraviolet lithography; photoresist; area-selective deposition; atomic layer deposition; TiO2; polymethacrylate
Source: Web Of Science
Added: March 6, 2023

2022 article

Improving polymethacrylate EUV resists with TiO2 area-selective deposition

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIX, Vol. 12055.

By: R. Nye, K. Van Dongen, H. Oka, H. Furutani, G. Parsons, D. De Simone, A. Delabie

author keywords: EUV lithography; Photoresist; Area-selective deposition; ALD; TiO2; Polymethacrylate
Source: Web Of Science
Added: September 12, 2022

2022 journal article

Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition

APPLIED PHYSICS LETTERS, 121(8).

By: R. Nye, S. Song n, K. Van Dongen*, A. Delabie* & G. Parsons

Source: Web Of Science
Added: November 21, 2022

2021 article

In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors

Nye, R. A., Wang, S., Uhlenbrock, S., Smythe, J. A., III, & Parsons, G. N. (2021, December 27). DALTON TRANSACTIONS.

By: R. Nye, S. Wang, S. Uhlenbrock, J. Smythe & G. Parsons

Source: Web Of Science
Added: January 24, 2022

2020 article

Shock Initiation of Reactive Nanolaminates

SHOCK COMPRESSION OF CONDENSED MATTER - 2019, Vol. 2272.

By: S. Matveev*, D. Dlott*, P. Hanusova*, J. Maria, R. Nye & G. Parsons

Source: Web Of Science
Added: March 1, 2021

2020 journal article

Understanding Molecular Layer Deposition Growth Mechanisms in Polyurea via Picosecond Acoustics Analysis

CHEMISTRY OF MATERIALS, 32(4), 1553–1563.

By: R. Nye, A. Kelliher*, J. Gaskins*, P. Hopkins* & G. Parsons

Source: Web Of Science
Added: March 23, 2020