Rachel Nye

College of Engineering

Works (5)

2022 article

Improving polymethacrylate EUV resists with TiO2 area-selective deposition

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIX.

By: R. Nye, K. Van Dongen, H. Oka, H. Furutani, G. Parsons, D. De Simone, A. Delabie

Source: Web Of Science
Added: September 12, 2022

2022 journal article

Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition

APPLIED PHYSICS LETTERS.

By: R. Nye, S. Song, K. Van Dongen, A. Delabie & G. Parsons

Source: Web Of Science
Added: November 21, 2022

2021 article

In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors

Nye, R. A., Wang, S., Uhlenbrock, S., Smythe, J. A., III, & Parsons, G. N. (2021, December 27). DALTON TRANSACTIONS.

By: R. Nye, S. Wang, S. Uhlenbrock, J. Smythe & G. Parsons

Source: Web Of Science
Added: January 24, 2022

2020 article

Shock Initiation of Reactive Nanolaminates

SHOCK COMPRESSION OF CONDENSED MATTER - 2019.

By: S. Matveev, D. Dlott, P. Hanusova, J. Maria, R. Nye & G. Parsons

Source: Web Of Science
Added: March 1, 2021

2020 journal article

Understanding Molecular Layer Deposition Growth Mechanisms in Polyurea via Picosecond Acoustics Analysis

CHEMISTRY OF MATERIALS, 32(4), 1553–1563.

By: R. Nye, A. Kelliher, J. Gaskins, P. Hopkins & G. Parsons

Source: Web Of Science
Added: March 23, 2020