2023 article
Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition
Nye, R. A., Van Dongen, K., De Simone, D., Oka, H., Parsons, G. N., & Delabie, A. (2023, February 23). CHEMISTRY OF MATERIALS.
2022 journal article
Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO(2 )area-selective deposition
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, 21(4).
2022 article
Improving polymethacrylate EUV resists with TiO2 area-selective deposition
ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIX, Vol. 12055.
2022 journal article
Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition
APPLIED PHYSICS LETTERS, 121(8).
2021 article
In situ analysis of growth rate evolution during molecular layer deposition of ultra-thin polyurea films using aliphatic and aromatic precursors
Nye, R. A., Wang, S., Uhlenbrock, S., Smythe, J. A., III, & Parsons, G. N. (2021, December 27). DALTON TRANSACTIONS.
2020 article
Shock Initiation of Reactive Nanolaminates
SHOCK COMPRESSION OF CONDENSED MATTER - 2019, Vol. 2272.
2020 journal article
Understanding Molecular Layer Deposition Growth Mechanisms in Polyurea via Picosecond Acoustics Analysis
CHEMISTRY OF MATERIALS, 32(4), 1553–1563.