Works (5)

Updated: July 5th, 2023 16:03

1998 journal article

Effects of Si source gases (SiH4 and Si2H6) on polycrystalline- Si1-xGex deposited on oxide by RTCVD

Electrochemical and Solid State Letters, 1(3), 153–155.

By: V. Li, M. Mirabedini, E. Vogel, K. Henson, A. Batchelor, J. Wortman, R. Kuehn

Source: NC State University Libraries
Added: August 6, 2018

1998 journal article

Structure and properties of rapid thermal chemical vapor deposited polycrystalline silicon-germanium films on SiO2 using Si2H6, GeH4, and B2H6 gases

JOURNAL OF APPLIED PHYSICS, 83(10), 5469–5476.

By: V. Li n, M. Mirabedini n, B. Hornung n, H. Heinisch n, M. Xu n, D. Batchelor n, D. Maher n, J. Wortman n, R. Kuehn n

co-author countries: United States of America 🇺🇸
Source: Web Of Science
Added: August 6, 2018

1997 journal article

Rapid thermal chemical vapor deposition of in situ boron doped polycrystalline silicon germanium films on silicon dioxide for complimentary metal oxide semiconductor applications

Applied Physics Letters, 71(23), 3388–3390.

By: V. Li n, M. Mirabedini n, R. Kuehn n, J. Wortman n, M. Ozturk n, D. Batchelor n, K. Christensen n, D. Maher n

co-author countries: United States of America 🇺🇸
Source: NC State University Libraries
Added: August 6, 2018

1992 patent

Thermal memory cell and thermal system evaluation

Washington, DC: U.S. Patent and Trademark Office.

By: K. Swartzel, S. Ganesan, R. Kuehn, R. Hamaker & F. Sadeghi

Source: NC State University Libraries
Added: August 6, 2018

1991 patent

Thermal memory cell and thermal system evaluation

Washington, DC: U.S. Patent and Trademark Office.

By: K. Swartzel, S. Ganesan, R. Kuehn, R. Hamaker & F. Sadeghi

Source: NC State University Libraries
Added: August 6, 2018

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