Steven Shannon

Also known as: Steve Shannon; Steven C. Shannon; S.C. Shannon; S. Shannon

https://orcid.org/0000-0001-8317-6949

Works (66)

2020 journal article

Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]

Journal of Applied Physics.

By: C. Qu, S. Lanham, S. Shannon, S. Nam & M. Kushner

Source: ORCID
Added: August 25, 2020

2020 journal article

Power matching to pulsed inductively coupled plasmas

Journal of Applied Physics.

By: C. Qu, S. Lanham, S. Shannon, S. Nam & M. Kushner

Source: ORCID
Added: April 7, 2020

2020 journal article

Radiofrequency phase resolved electron density measurements with the hairpin resonator probe

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 53(14).

By: D. Peterson, K. Ford, J. Brandon, S. Shannon, T. Koh, T. Chua, K. Bera, W. Tian, S. Rauf, P. Kraus

Sources: Web Of Science, ORCID
Added: April 6, 2020

2019 journal article

Complex transients in power modulated inductively-coupled chlorine plasmas

Plasma Sources Science and Technology, 28(2), 025005.

By: T. List, T. Ma, P. Arora, V. Donnelly & S. Shannon

Sources: Web Of Science, ORCID, Crossref
Added: March 18, 2019

2019 journal article

Doppler-free, Stark broadened profiles at low plasma densities in helium

Journal of Quantitative Spectroscopy and Radiative Transfer, 230, 48–55.

By: A. Zafar, E. Martin & S. Shannon

Sources: Web Of Science, ORCID, Crossref
Added: June 17, 2019

2019 report

Electromagnetics Simulations with Vector-valued Finite Elements in MOOSE

In Idaho National Laboratory Report (No. INL/CON-18-52320-Rev000).

By: C. Icenhour, A. Lindsay, R. Martineau & S. Shannon

Source: NC State University Libraries
Added: November 16, 2019

2019 journal article

Measurement of localized plasma perturbation with hairpin resonator probes

Physics of Plasmas, 26(1), 013510.

By: K. Ford, D. Peterson, J. Brandon, S. Nam, D. Walker & S. Shannon

Sources: NC State University Libraries, ORCID, Crossref
Added: February 18, 2019

2019 journal article

Time-Resolved Electron Density Measurement Characterization of E–H-Modes for Inductively Coupled Plasma Instabilities

IEEE Transactions on Plasma Science, 47(5), 2102–2109.

By: D. Coumou, S. Smith, D. Peterson & S. Shannon

Sources: Web Of Science, ORCID, Crossref
Added: May 28, 2019

2018 journal article

High resolution magnetic field measurements in hydrogen and helium plasmas using active laser spectroscopy

Review of Scientific Instruments, 89(10), 10D126.

By: A. Zafar, E. Martin & S. Shannon

Sources: NC State University Libraries, ORCID, Crossref
Added: November 26, 2018

2017 journal article

Driving frequency fluctuations in pulsed capacitively coupled plasmas

The European Physical Journal D, 71(9).

By: J. Poulose, M. Goeckner, S. Shannon, D. Coumou & L. Overzet

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2017 journal article

Electron neutral collision frequency measurement with the hairpin resonator probe

Plasma Sources Science and Technology, 26(9), 095002.

By: D. Peterson, P. Kraus, T. Chua, L. Larson & S. Shannon

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2017 journal article

IEDF distortion and resolution considerations for RFEA operation at high voltages

Plasma Sources Science and Technology, 26(12), 125001.

By: M. Talley, S. Shannon, L. Chen & J. Verboncoeur

Sources: Crossref, ORCID
Added: August 15, 2019

2017 report

Science challenges in low-temperature plasma science and engineering: Enabling a future based on electricity through non-equalibrium plasma chemistry

[NSF Workshop Report]. National Science Foundation.

By: S. Mededovic Thagard, M. Sankaran, M. Kushner & S. Shannon

Source: NC State University Libraries
Added: November 16, 2019

2017 journal article

Size Dependence of Nanoscale Wear of Silicon Carbide

ACS Applied Materials & Interfaces, 9(2), 1929–1940.

By: C. Tangpatjaroen, D. Grierson, S. Shannon, J. Jakes & I. Szlufarska

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2016 journal article

A temporally and spatially resolved electron density diagnostic method for the edge plasma based on Stark broadening

Review of Scientific Instruments, 87(11), 11E505.

By: A. Zafar, E. Martin, S. Shannon, R. Isler & J. Caughman

Sources: NC State University Libraries, Crossref, ORCID
Added: August 6, 2018

2016 journal article

All The Catalytic Active Sites of MoS2 for Hydrogen Evolution

Journal of the American Chemical Society, 138(51), 16632–16638.

By: G. Li, D. Zhang, Q. Qiao, Y. Yu, D. Peterson, A. Zafar, R. Kumar, S. Curtarolo ...

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2016 journal article

Amorphization resistance of nano-engineered SiC under heavy ion irradiation

Journal of Nuclear Materials, 478, 310–314.

By: K. Imada, M. Ishimaru, H. Xue, Y. Zhang, S. Shannon & W. Weber

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2016 journal article

Dose dependence of helium bubble formation in nano-engineered SiC at 700 °C

Journal of Nuclear Materials, 472, 153–160.

By: C. Chen, Y. Zhang, Y. Wang, M. Crespillo, C. Fontana, J. Graham, G. Duscher, S. Shannon, W. Weber

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2016 journal article

Fully coupled simulation of the plasma liquid interface and interfacial coefficient effects

Journal of Physics D: Applied Physics, 49(23), 235204.

By: A. Lindsay, D. Graves & S. Shannon

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2016 report

Novel Engineered Refractory Materials for Advanced Reactor Applications

By: S. Shannon, J. Eapen, J. Maria & W. Weber

Sources: Crossref, ORCID
Added: August 15, 2019

2015 journal article

Atomistic structures of nano-engineered SiC and radiation-induced amorphization resistance

Journal of Nuclear Materials, 465, 433–437.

By: K. Imada, M. Ishimaru, K. Sato, H. Xue, Y. Zhang, S. Shannon, W. Weber

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2015 journal article

Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas

Journal of Applied Physics, 117(23), 233302.

By: Y. Zhang, A. Zafar, D. Coumou, S. Shannon & M. Kushner

Sources: NC State University Libraries, Crossref, ORCID
Added: August 6, 2018

2015 journal article

Electric field determination in the plasma-antenna boundary of a lower-hybrid wave launcher in Tore Supra through dynamic Stark-effect spectroscopy

Plasma Physics and Controlled Fusion, 57(6), 065011.

By: E. Martin, M. Goniche, C. Klepper, J. Hillairet, R. Isler, C. Bottereau, L. Colas, A. Ekedahl ...

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2015 journal article

Momentum, heat, and neutral mass transport in convective atmospheric pressure plasma-liquid systems and implications for aqueous targets

Journal of Physics D: Applied Physics, 48(42), 424007.

By: A. Lindsay, C. Anderson, E. Slikboer, S. Shannon & D. Graves

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2014 journal article

Competing effects of electronic and nuclear energy loss on microstructural evolution in ionic-covalent materials

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 327, 33–43.

By: Y. Zhang, T. Varga, M. Ishimaru, P. Edmondson, H. Xue, P. Liu, S. Moll, F. Namavar ...

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2014 journal article

Experimental and ab initio study of enhanced resistance to amorphization of nanocrystalline silicon carbide under electron irradiation

Journal of Nuclear Materials, 445(1-3), 181–189.

By: L. Jamison, M. Zheng, S. Shannon, T. Allen, D. Morgan & I. Szlufarska

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2014 journal article

Fertilization of Radishes, Tomatoes, and Marigolds Using a Large-Volume Atmospheric Glow Discharge

Plasma Chemistry and Plasma Processing, 34(6), 1271–1290.

By: A. Lindsay, B. Byrns, W. King, A. Andhvarapou, J. Fields, D. Knappe, W. Fonteno, S. Shannon

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2014 journal article

Ion Energy Distribution Skew Control Using Phase-Locked Harmonic RF Bias Drive

IEEE Transactions on Plasma Science, 42(7), 1880–1893.

By: D. Coumou, D. Clark, T. Kummerer, M. Hopkins, D. Sullivan & S. Shannon

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2014 journal article

Irradiation-induced microstructural change in helium-implanted single crystal and nano-engineered SiC

Journal of Nuclear Materials, 453(1-3), 280–286.

By: C. Chen, Y. Zhang, E. Fu, Y. Wang, M. Crespillo, C. Liu, S. Shannon, W. Weber

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2014 journal article

Probing the plasma near high power wave launchers in fusion devices for static and dynamic electric fields (invited)

Review of Scientific Instruments, 85(11), 11E301.

By: C. Klepper, E. Martin, R. Isler, L. Colas, M. Goniche, J. Hillairet, S. Panayotis, B. Pegourié ...

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2014 journal article

Temperature and irradiation species dependence of radiation response of nanocrystalline silicon carbide

Journal of Materials Research, 29(23), 2871–2880.

By: L. Jamison, K. Sridharan, S. Shannon & I. Szlufarska

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2013 journal article

Origin of radiation tolerance in 3C-SiC with nanolayered planar defects

Applied Physics Letters, 103(3), 033104.

By: M. Ishimaru, Y. Zhang, S. Shannon & W. Weber

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2013 patent

Substrate Cleaning Chamber And Cleaning And Conditioning Methods

By: M. Vineet, B. Karl, P. A, H. J, S. C, M. A, P. D

Source: ORCID
Added: January 10, 2020

2012 journal article

A VHF driven coaxial atmospheric air plasma: electrical and optical characterization

Journal of Physics D: Applied Physics, 45(19), 195204.

By: B. Byrns, D. Wooten, A. Lindsay & S. Shannon

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2012 journal article

Nanoscale engineering of radiation tolerant silicon carbide

Physical Chemistry Chemical Physics, 14(38), 13429.

By: Y. Zhang, M. Ishimaru, T. Varga, T. Oda, C. Hardiman, H. Xue, Y. Katoh, S. Shannon, W. Weber

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2012 journal article

The impact of Langmuir probe geometries on electron current collection and the integral relation for obtaining electron energy distribution functions

Plasma Sources Science and Technology, 21(2), 025003.

By: A. Saghir & S. Shannon

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2011 patent

Improving Plasma Process Uniformity Across A Wafer By Apportioning Power Among Plural Vhf Sources

Source: ORCID
Added: January 10, 2020

2011 journal article

Limitations of Regularization Methods for the Reconstruction of Electron Velocity Distribution Function

IEEE Transactions on Plasma Science, 39(4), 1034–1037.

By: A. El Saghir & S. Shannon

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2011 patent

Method Of Processing A Workpiece In A Plasma Reactor With Variable Height Ground Return Path To Control Plasma Ion Density Uniformity

Source: ORCID
Added: January 10, 2020

2011 patent

Plasma Process Uniformity Across A Wafer By Apportioning Ground Return Path Impedances Among Plural Vhf Sources

Source: ORCID
Added: January 10, 2020

2011 patent

Plasma Process Uniformity Across A Wafer By Controlling A Variable Frequency Coupled To A Harmonic Resonator

Source: ORCID
Added: January 10, 2020

2011 patent

Plasma Process Uniformity Across A Wafer By Controlling Rf Phase Between Opposing Electrodes

Source: ORCID
Added: January 10, 2020

2011 journal article

Reduction of EEDF Measurement Distortion in Regularized Solutions of the Druyvesteyn Relation

IEEE Transactions on Plasma Science, 39(1), 596–602.

By: A. El Saghir & S. Shannon

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2010 journal article

Electron Energy Distribution Function Extraction Using Integrated Step Function Response and Regularization Methods

IEEE Transactions on Plasma Science, 38(2), 156–162.

By: A. El Saghir, C. Kennedy & S. Shannon

Sources: NC State University Libraries, ORCID, Crossref
Added: August 6, 2018

2010 patent

Method For Testing Plasma Reactor Multi-frequency Impedance Match Networks

By: S. C

Source: ORCID
Added: January 10, 2020

2010 patent

Plasma Control Using Dual Cathode Frequency Mixing

By: S. C, G. S, P. Theodoros, H. J, C. G, D. S, P. Alexander, L. Jingbao, S. Taeho, P. Y

Source: ORCID
Added: January 10, 2020

2009 journal article

Guest Editorial Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing

IEEE Transactions on Plasma Science, 37(9), 1662–1664.

By: S. Shannon, R. Kinder, A. Paterson, S. Rauf & P. Ventzek

Sources: ORCID, Crossref
Added: August 15, 2019

2009 patent

Plasma Generation And Control Using Dual Frequency Rf Signals

By: S. C, P. Alexander, P. Theodoros, H. P, G. S & H. J

Source: ORCID
Added: January 10, 2020

2009 journal article

Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing

Ieee Transactions on Plasma Science, 37(9), 1662–1664.

By: S. Shannon, R. Kinder, A. Paterson, S. Rauf & P. Ventzek

Sources: NC State University Libraries, ORCID
Added: August 6, 2018

2008 patent

Dual Bias Frequency Plasma Reactor With Feedback Control Of E.s.c. Voltage Using Wafer Voltage Measurement At The Bias Supply Output

By: Y. Gyoo, H. J, S. C, B. H, L. Wonseok & K. Kwang-soo

Source: ORCID
Added: January 10, 2020

2008 patent

Method Of Feedback Control Of Esc Voltage Using Wafer Voltage Measurement At The Bias Supply Output

By: Y. Gyoo, H. J, S. C, B. H, L. Wonseok & K. Kwang-soo

Source: ORCID
Added: January 10, 2020

2008 patent

Plasma Generation And Control Using A Dual Frequency Rf Source

By: S. C, P. Alex, P. Theodoros, H. P, G. Dennis & T. Yashushi

Source: ORCID
Added: January 10, 2020

2007 journal article

Global Modeling of Magnetized Capacitive Discharges

IEEE Transactions on Plasma Science, 35(5), 1413–1419.

By: M. Carter, D. Hoffman, S. Shannon, P. Ryan & D. Buchberger

Sources: ORCID, Crossref
Added: August 15, 2019

2007 patent

Plasma Control Using Dual Cathode Frequency Mixing

By: S. C, G. S, P. Theodoros, H. J, C. G, D. S, P. Alexander, L. Jingbao, S. Taeho, P. Y

Source: ORCID
Added: January 10, 2020

2007 patent

Plasma Generation And Control Using A Dual Frequency Rf Source

By: S. C, P. Alex, P. Theodoros, H. P, G. Dennis & T. Yashushi

Source: ORCID
Added: January 10, 2020

2006 patent

Plasma Generation And Control Using Dual Frequency Rf Signals

By: S. C, P. Alexander, P. Theodoros, H. P, G. S & H. J

Source: ORCID
Added: January 10, 2020

2005 journal article

Frequency optimization for capacitively coupled plasma source

IEEE Transactions on Plasma Science, 33(2), 382–383.

By: K. Bera, D. Hoffman, S. Shannon, G. Delgadino & Y. Ye

Sources: ORCID, Crossref
Added: August 15, 2019

2005 patent

Plasma Control Using Dual Cathode Frequency Mixing

By: S. C, G. S, P. Theodoros, H. J, C. G, D. S, P. Alexander, L. Jingbao, S. Taeho, P. Y

Source: ORCID
Added: January 10, 2020

2005 patent

Plasma Generation And Control Using A Dual Frequency Rf Source

By: S. C, P. Alex, P. Theodoros, H. P, G. Dennis & T. Yashushi

Source: ORCID
Added: January 10, 2020

2005 journal article

The impact of frequency mixing on sheath properties: Ion energy distribution and Vdc∕Vrf interaction

Journal of Applied Physics, 97(10), 103304.

By: S. Shannon, D. Hoffman, J. Yang, A. Paterson & J. Holland

Sources: ORCID, Crossref
Added: August 15, 2019

2001 journal article

A reconstruction algorithm for a spatially resolved plasma optical emission spectroscopy sensor

Journal of Quantitative Spectroscopy and Radiative Transfer, 68(1), 101–115.

By: J. Holloway, S. Shannon, S. Sepke & M. Brake

Sources: ORCID, Crossref
Added: August 15, 2019

2000 journal article

Optical emission reference data for the GEC reference cell

IEEE Transactions on Plasma Science, 28(6), 2187–2193.

By: C. Collard, S. Shannon, J. Holloway & M. Brake

Sources: ORCID, Crossref
Added: August 15, 2019

1999 journal article

Spatially resolved fluorine actinometry

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 17(5), 2703–2708.

By: S. Shannon, J. Holloway & M. Brake

Sources: ORCID, Crossref
Added: August 15, 2019

1997 journal article

A spatially resolved optical emission sensor for plasma etch monitoring

Applied Physics Letters, 71(11), 1467–1468.

By: S. Shannon, J. Holloway, K. Flippo & M. Brake

Sources: ORCID, Crossref
Added: August 15, 2019

thesis

A Glow Discharge Tomography Sensor for Monitoring Etch Uniformity

Shannon, S. (Masters Thesis).

By: S. Shannon

Source: NC State University Libraries
Added: November 16, 2019

thesis

Spatially resolved analysis of plasma etch discharges using a novel optical emission spectroscopy sensor

Shannon, S. (Ph.D. Thesis).

By: S. Shannon

Source: NC State University Libraries
Added: November 16, 2019

Employment

2008 - present

North Carolina State University Raleigh, NC, US
Associate Professor Nuclear Engineering

1999 - 2007

Applied Materials Inc Santa Clara, CA, US
Dielectric Etch

2000 - 2007

San Jose State University San Jose, CA, US
Adjunct Professor Chemical and Materials Engineering

Education

1995 - 1999

University of Michigan Ann Arbor, MI, US
Ph.D. Nuclear Engineering and Radiological Sciences

1995 - 1997

University of Michigan Ann Arbor, MI, US
M.S.E. Nuclear Engineering and Radiological Sciences

1991 - 1995

University of Michigan Ann Arbor, MI, US
B.S.E. Nuclear Engineering and Radiological Sciences

1988 - 1991

Catholic Central High School Novi, MI, US
High School Diploma