Steven Christopher Shannon

Also known as: Steve Shannon; Steven C. Shannon; S.C. Shannon; S. Shannon

Works (81)

Updated: July 8th, 2024 04:30

2024 journal article

Estimation of mean electron energy in helium surface ionization waves on dielectric substrates

Journal of Physics D: Applied Physics.

By: J. Morsell, C. Dechant, G. Gall, D. Trosan, A. Lietz*, K. Stapelmann*, S. Shannon*

Source: ORCID
Added: June 8, 2024

2024 journal article

Science challenges and research opportunities for plasma applications in microelectronics

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 42(4).

By: D. Graves*, C. Labelle*, M. Kushner*, E. Aydil*, V. Donnelly*, J. Chang*, P. Mayer, L. Overzet* ...

Sources: ORCID, Web Of Science, NC State University Libraries
Added: June 8, 2024

2024 journal article

The MOOSE electromagnetics module

SOFTWAREX, 25.

By: C. Icenhour n, A. Lindsay*, C. Permann*, R. Martineau, D. Green* & S. Shannon n

author keywords: Electromagnetics; Simulation; Multiphysics; MOOSE
UN Sustainable Development Goal Categories
9. Industry, Innovation and Infrastructure (OpenAlex)
Sources: Web Of Science, NC State University Libraries
Added: February 12, 2024

2023 journal article

Design, Modeling, and Analysis of a Compact-External Electromagnetic Pumping System for Pool-Type Liquid Metal-Cooled Fast Reactors

ANNALS OF NUCLEAR ENERGY, 193.

By: M. Shutayfi n, A. Raj*, J. Eapen n & S. Shannon n

author keywords: Electromagnetic pump; Liquid metal-cooled reactor; Outside-vessel pumping; Pool type
Sources: ORCID, Web Of Science, NC State University Libraries
Added: July 19, 2023

2023 journal article

Design, Modeling, and Analysis of a Compact-External Electromagnetic Pumping System for Pool-Type Liquid Metal-Cooled Fast Reactors

ANNALS OF NUCLEAR ENERGY, 193.

By: M. Shutayfi, A. Raj, J. Eapen & S. Shannon

author keywords: Electromagnetic pump; Liquid metal-cooled reactor; Outside-vessel pumping; Pool type
UN Sustainable Development Goal Categories
Sources: Web Of Science, NC State University Libraries
Added: August 28, 2023

2023 journal article

Effect of dielectric target properties on plasma surface ionization wave propagation

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 56(14).

By: J. Morsell n, N. Bhatt n, C. Dechant n & S. Shannon n

author keywords: plasma-surface interactions; surface ionization wave; plasma jet; dielectric properties
Sources: ORCID, Web Of Science, NC State University Libraries
Added: March 1, 2023

2023 journal article

Effect of focus ring with external circuit on cathode edge sheath dynamics in a capacitively coupled plasma

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 41(3).

By: Y. Xiao n, J. Brandon n, J. Morsell n, S. Nam*, K. Bae*, J. Lee*, S. Shannon n

UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Sources: ORCID, Web Of Science, NC State University Libraries
Added: April 28, 2023

2023 journal article

Plasma surface ionization wave interactions with single channels

PLASMA SOURCES SCIENCE & TECHNOLOGY, 32(9).

By: J. Morsell n, D. Trosan n, K. Stapelmann n & S. Shannon n

author keywords: plasma surface ionization wave; atmospheric pressure plasma; plasma surface interactions; guided streamer; APPJ
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Sources: ORCID, Web Of Science, NC State University Libraries
Added: September 15, 2023

2023 journal article

Verification and validation of the open-source plasma fluid code: Zapdos*,**

COMPUTER PHYSICS COMMUNICATIONS, 291.

author keywords: Plasma; Finite element method; Open-source; Verification and validation; Method of manufactured solutions; Fluid approximation
UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Sources: Web Of Science, NC State University Libraries
Added: August 14, 2023

2023 journal article

Verification methods for drift-diffusion reaction models for plasma simulations

PLASMA SOURCES SCIENCE & TECHNOLOGY, 32(4).

By: C. DeChant n, C. Icenhour n, S. Keniley*, A. Lindsay*, G. Gall n, K. Hizon*, D. Curreli*, S. Shannon n

author keywords: verification; method of manufactured solutions; convergence studies; electromagnetic simulations; analytical solutions; plasma fluid simulations
Sources: ORCID, Web Of Science, NC State University Libraries
Added: April 20, 2023

2022 journal article

Comparison of glancing-angle scatterings on different materials in a high aspect ratio plasma etching process using molecular dynamics simulation

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(5).

By: Y. Du n, F. Kruger*, S. Nam*, H. Lee*, S. Yoo*, J. Eapen n, M. Kushner*, S. Shannon n

UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Sources: ORCID, Web Of Science, NC State University Libraries
Added: September 2, 2022

2021 journal article

Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma

Plasma Sources Science and Technology, 5.

By: D. Peterson, Y. Xiao, K. Ford, P. Kraus & S. Shannon*

author keywords: electron temperature; plasma diagnostic; pulsed plasma; hairpin resonator probe; collision frequency; microwave resonator
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
13. Climate Action (Web of Science)
Source: ORCID
Added: May 19, 2021

2021 journal article

Focus ring geometry influence on wafer edge voltage distribution for plasma processes

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films.

By: Y. Xiao n, Y. Du n, C. Smith n, S. Nam*, H. Lee*, J. Lee*, S. Shannon n

UN Sustainable Development Goal Categories
10. Reduced Inequalities (OpenAlex)
13. Climate Action (Web of Science)
Source: ORCID
Added: June 12, 2021

2021 journal article

Modulating power delivery in a pulsed ICP discharge via the incorporation of negative feedback mechanisms

JOURNAL OF APPLIED PHYSICS, 130(16).

By: C. Smith n, S. Nam*, K. Bae*, J. Lee* & S. Shannon n

UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
13. Climate Action (Web of Science)
Sources: ORCID, Web Of Science, NC State University Libraries
Added: October 27, 2021

2020 journal article

Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]

Journal of Applied Physics.

By: C. Qu*, S. Lanham*, S. Shannon n, S. Nam* & M. Kushner*

UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Source: ORCID
Added: August 25, 2020

2020 journal article

Power matching to pulsed inductively coupled plasmas

Journal of Applied Physics.

By: C. Qu*, S. Lanham*, S. Shannon n, S. Nam* & M. Kushner*

UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
13. Climate Action (Web of Science)
Source: ORCID
Added: April 7, 2020

2020 journal article

Radiofrequency phase resolved electron density measurements with the hairpin resonator probe

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 53(14).

By: D. Peterson n, K. Ford n, J. Brandon n, S. Shannon n, T. Koh*, T. Chua*, K. Bera*, W. Tian*, S. Rauf*, P. Kraus*

author keywords: radiofrequency sheath; plasma probe diagnostics; capacitively coupled plasma; hairpin resonator probe; plasma oscillations; nanosecond time resolution
UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Sources: Web Of Science, NC State University Libraries
Added: April 6, 2020

2019 journal article

Complex transients in power modulated inductively-coupled chlorine plasmas

Plasma Sources Science and Technology, 28(2), 025005.

By: T. List*, T. Ma*, P. Arora*, V. Donnelly* & S. Shannon n

author keywords: pulsed plasmas; chlorine plasmas; instabilities; electronegative plasmas; capacitive to inductive transitions
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
13. Climate Action (Web of Science)
Sources: Web Of Science, NC State University Libraries, Crossref
Added: March 18, 2019

2019 journal article

Doppler-free, Stark broadened profiles at low plasma densities in helium

Journal of Quantitative Spectroscopy and Radiative Transfer, 230, 48–55.

By: A. Zafar n, E. Martin* & S. Shannon n

author keywords: Stark broadening; Low-density; Quasi-static; Doppler-free
UN Sustainable Development Goal Categories
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: June 17, 2019

2019 report

Electromagnetics Simulations with Vector-valued Finite Elements in MOOSE

In Idaho National Laboratory Report (No. INL/CON-18-52320-Rev000).

By: C. Icenhour, A. Lindsay, R. Martineau & S. Shannon

Source: NC State University Libraries
Added: November 16, 2019

2019 journal article

Measurement of localized plasma perturbation with hairpin resonator probes

Physics of Plasmas, 26(1), 013510.

By: K. Ford n, D. Peterson n, J. Brandon n, S. Nam n, D. Walker n & S. Shannon n

UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Sources: Web Of Science, NC State University Libraries, Crossref
Added: February 18, 2019

2019 journal article

Time-Resolved Electron Density Measurement Characterization of E–H-Modes for Inductively Coupled Plasma Instabilities

IEEE Transactions on Plasma Science, 47(5), 2102–2109.

By: D. Coumou*, S. Smith*, D. Peterson n & S. Shannon n

author keywords: Electromagnetic propagation; frequency response; ionization; meteorology; microwave antennas; microwave circuits; microwave measurement; plasma density; plasma diagnostics; plasma measurements; plasma properties; plasma sheaths; plasma simulation; plasma sources; plasma stability; plasma temperature; plasmas; radio frequency; RF signals; signal processing
UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: May 28, 2019

2018 journal article

High resolution magnetic field measurements in hydrogen and helium plasmas using active laser spectroscopy

Review of Scientific Instruments, 89(10), 10D126.

By: A. Zafar n, E. Martin* & S. Shannon n

TL;DR: The diagnostic relies on measuring a high resolution spectral profile using Doppler-free saturation spectroscopy (DFSS) and then fitting the spectrum to a quantum mechanical model and has been successfully employed to measure the magnetic field in magnetized, low-temperature, high-density, hydrogen and helium plasmas. (via Semantic Scholar)
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: November 26, 2018

2017 journal article

Driving frequency fluctuations in pulsed capacitively coupled plasmas

The European Physical Journal D, 71(9).

By: J. Poulose*, M. Goeckner*, S. Shannon n, D. Coumou* & L. Overzet*

UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
13. Climate Action (Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2017 journal article

Electron neutral collision frequency measurement with the hairpin resonator probe

Plasma Sources Science and Technology, 26(9), 095002.

By: D. Peterson n, P. Kraus*, T. Chua*, L. Larson & S. Shannon n

author keywords: hairpin resonator; collision frequency; plasma diagnostic
UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Sources: Web Of Science, NC State University Libraries, Crossref
Added: August 6, 2018

2017 journal article

IEDF distortion and resolution considerations for RFEA operation at high voltages

Plasma Sources Science and Technology, 26(12), 125001.

By: M. Talley n, S. Shannon n, L. Chen & J. Verboncoeur*

author keywords: retarding field energy analyzer; space charge; high voltage; ion flux energy distribution function; ion velocity distribution function
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
13. Climate Action (Web of Science)
Sources: Crossref, NC State University Libraries, Web Of Science
Added: August 6, 2018

2017 report

Science challenges in low-temperature plasma science and engineering: Enabling a future based on electricity through non-equalibrium plasma chemistry

[NSF Workshop Report]. National Science Foundation.

By: S. Mededovic Thagard, M. Sankaran, M. Kushner & S. Shannon

Source: NC State University Libraries
Added: November 16, 2019

2017 journal article

Size Dependence of Nanoscale Wear of Silicon Carbide

ACS Applied Materials & Interfaces, 9(2), 1929–1940.

By: C. Tangpatjaroen*, D. Grierson*, S. Shannon n, J. Jakes* & I. Szlufarska*

author keywords: silicon carbide; silicon; atomic force microscopy; nanoscale friction; nanoscale wear
TL;DR: The decrease in the relative wear resistance of SiC compared to that of Si is attributed to a transition from a wear regime dominated by the materials' resistance to plastic deformation to a regime dominatedby the materials’ resistance to interfacial shear. (via Semantic Scholar)
Sources: Web Of Science, NC State University Libraries, Crossref
Added: August 6, 2018

2016 journal article

A temporally and spatially resolved electron density diagnostic method for the edge plasma based on Stark broadening

Review of Scientific Instruments, 87(11), 11E505.

By: A. Zafar n, E. Martin*, S. Shannon n, R. Isler* & J. Caughman*

TL;DR: The quasi-static approach used to calculate the Doppler-free spectral line profile is outlined here and the results from the model are presented for H-δ spectra for electron densities of 1010-1013 cm-3. (via Semantic Scholar)
UN Sustainable Development Goal Categories
Sources: Web Of Science, Crossref, NC State University Libraries
Added: August 6, 2018

2016 journal article

All The Catalytic Active Sites of MoS2 for Hydrogen Evolution

Journal of the American Chemical Society, 138(51), 16632–16638.

By: G. Li n, D. Zhang*, Q. Qiao*, Y. Yu n, D. Peterson n, A. Zafar*, R. Kumar n, S. Curtarolo* ...

TL;DR: It is demonstrated that, in addition to the well-known catalytically active edge sites, sulfur vacancies provide another major active site for the HER, while the catalytic activity of grain boundaries is much weaker. (via Semantic Scholar)
UN Sustainable Development Goal Categories
Sources: Web Of Science, NC State University Libraries, Crossref
Added: August 6, 2018

2016 journal article

Amorphization resistance of nano-engineered SiC under heavy ion irradiation

Journal of Nuclear Materials, 478, 310–314.

By: K. Imada*, M. Ishimaru*, H. Xue*, Y. Zhang*, S. Shannon n & W. Weber*

author keywords: Nanostructured materials; Carbides; Amorphization; Scanning/transmission electron microscopy (STEM)
Sources: Web Of Science, NC State University Libraries, Crossref
Added: August 6, 2018

2016 journal article

Dose dependence of helium bubble formation in nano-engineered SiC at 700 °C

Journal of Nuclear Materials, 472, 153–160.

author keywords: SiC; Helium; High temperature; Irradiation effects; TEM; ERDA
Sources: Web Of Science, NC State University Libraries, Crossref
Added: August 6, 2018

2016 journal article

Fully coupled simulation of the plasma liquid interface and interfacial coefficient effects

Journal of Physics D: Applied Physics, 49(23), 235204.

By: A. Lindsay n, D. Graves* & S. Shannon n

author keywords: plasma-liquid interface; DC discharge with water anode; multiphysics simulation
UN Sustainable Development Goal Categories
2. Zero Hunger (OpenAlex)
Sources: Web Of Science, NC State University Libraries, Crossref
Added: August 6, 2018

2016 report

Novel Engineered Refractory Materials for Advanced Reactor Applications

By: S. Shannon n, J. Eapen n, J. Maria n & W. Weber*

Sources: Crossref, NC State University Libraries
Added: August 15, 2019

2015 journal article

Atomistic structures of nano-engineered SiC and radiation-induced amorphization resistance

Journal of Nuclear Materials, 465, 433–437.

By: K. Imada*, M. Ishimaru*, K. Sato*, H. Xue*, Y. Zhang*, S. Shannon n, W. Weber*

author keywords: Nanostructured materials; Carbides; Amorphization; Scanning/transmission electron microscopy (STEM)
Sources: Web Of Science, NC State University Libraries, Crossref
Added: August 6, 2018

2015 journal article

Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas

Journal of Applied Physics, 117(23), 233302.

By: Y. Zhang*, A. Zafar n, D. Coumou*, S. Shannon n & M. Kushner*

UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
13. Climate Action (Web of Science)
Sources: Web Of Science, Crossref, NC State University Libraries
Added: August 6, 2018

2015 journal article

Electric field determination in the plasma-antenna boundary of a lower-hybrid wave launcher in Tore Supra through dynamic Stark-effect spectroscopy

Plasma Physics and Controlled Fusion, 57(6), 065011.

By: E. Martin*, M. Goniche*, C. Klepper*, J. Hillairet*, R. Isler*, C. Bottereau*, L. Colas*, A. Ekedahl* ...

author keywords: optical emission spectroscopy; electric field; lower hybrid current drive; Tore Supra
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Sources: Web Of Science, NC State University Libraries, Crossref
Added: August 6, 2018

2015 journal article

Momentum, heat, and neutral mass transport in convective atmospheric pressure plasma-liquid systems and implications for aqueous targets

Journal of Physics D: Applied Physics, 48(42), 424007.

By: A. Lindsay n, C. Anderson*, E. Slikboer*, S. Shannon n & D. Graves*

author keywords: convective discharges; interfacial concentration gradients; interfacial temperature gradients; coupled momentum; heat; mass transport
Sources: Web Of Science, NC State University Libraries, Crossref
Added: August 6, 2018

2014 report

A low temperature plasma science program: Discovery science for societal benefit

In FESAC Strategic Planning Panel [White paper].

By: M. Kushner, I. Adamovich, E. Aydil, S. Baalrud, E. Barnat, D. Graves, V. Donnelly, D. Economou ...

Source: NC State University Libraries
Added: December 22, 2020

2014 journal article

Competing effects of electronic and nuclear energy loss on microstructural evolution in ionic-covalent materials

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 327, 33–43.

By: Y. Zhang*, T. Varga*, M. Ishimaru*, P. Edmondson*, H. Xue*, P. Liu*, S. Moll, F. Namavar* ...

Contributors: Y. Zhang*, T. Varga*, M. Ishimaru*, P. Edmondson*, H. Xue*, P. Liu*, S. Moll, F. Namavar* ...

author keywords: Ceria; Silicon carbide; Ion irradiation
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (Web of Science; OpenAlex)
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2014 journal article

Experimental and ab initio study of enhanced resistance to amorphization of nanocrystalline silicon carbide under electron irradiation

Journal of Nuclear Materials, 445(1-3), 181–189.

UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (Web of Science; OpenAlex)
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2014 journal article

Fertilization of Radishes, Tomatoes, and Marigolds Using a Large-Volume Atmospheric Glow Discharge

Plasma Chemistry and Plasma Processing, 34(6), 1271–1290.

By: A. Lindsay n, B. Byrns n, W. King n, A. Andhvarapou n, J. Fields n, D. Knappe n, W. Fonteno n, S. Shannon n

Contributors: A. Lindsay n, B. Byrns n, W. King n, A. Andhvarapou n, J. Fields n, D. Knappe n, W. Fonteno n, S. Shannon n

author keywords: Large-volume glow; Atmospheric pressure plasma; Fertilization; Reactive nitrogen and oxygen species
UN Sustainable Development Goal Categories
6. Clean Water and Sanitation (OpenAlex)
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2014 journal article

Ion Energy Distribution Skew Control Using Phase-Locked Harmonic RF Bias Drive

IEEE Transactions on Plasma Science, 42(7), 1880–1893.

By: D. Coumou*, D. Clark n, T. Kummerer n, M. Hopkins*, D. Sullivan* & S. Shannon n

Contributors: D. Coumou*, D. Clark n, T. Kummerer n, M. Hopkins*, D. Sullivan* & S. Shannon n

author keywords: Automatic control; digital control; digital filters; frequency-locked loops; ion energy distribution function (IEDF); phase frequency detector; phase-locked loops; plasma density; plasma properties; plasma sheaths; plasmas; radio frequency (RF); real-time systems; RF signals
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
13. Climate Action (Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2014 journal article

Irradiation-induced microstructural change in helium-implanted single crystal and nano-engineered SiC

Journal of Nuclear Materials, 453(1-3), 280–286.

Contributors: C. Chen*, Y. Zhang*, E. Fu*, Y. Wang*, M. Crespillo*, C. Liu*, S. Shannon n, W. Weber*

UN Sustainable Development Goal Categories
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2014 journal article

Probing the plasma near high power wave launchers in fusion devices for static and dynamic electric fields (invited)

Review of Scientific Instruments, 85(11), 11E301.

By: C. Klepper*, E. Martin n, R. Isler*, L. Colas*, M. Goniche*, J. Hillairet*, S. Panayotis*, B. Pegourié* ...

Contributors: C. Klepper*, E. Martin n, R. Isler*, L. Colas*, M. Goniche*, J. Hillairet*, S. Panayotis*, B. Pegourie* ...

TL;DR: An exploratory study was carried out in the long-pulse tokamak Tore Supra to determine if electric fields in the plasma around high-power, RF wave launchers could be measured with non-intrusive, passive, optical emission spectroscopy, with a focus on the use of the external electric field Stark effect. (via Semantic Scholar)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2014 journal article

Temperature and irradiation species dependence of radiation response of nanocrystalline silicon carbide

Journal of Materials Research, 29(23), 2871–2880.

By: L. Jamison*, K. Sridharan*, S. Shannon n & I. Szlufarska*

Contributors: L. Jamison*, K. Sridharan*, S. Shannon n & I. Szlufarska*

UN Sustainable Development Goal Categories
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2013 journal article

Origin of radiation tolerance in 3C-SiC with nanolayered planar defects

Applied Physics Letters, 103(3), 033104.

By: M. Ishimaru*, Y. Zhang*, S. Shannon n & W. Weber*

Contributors: M. Ishimaru*, Y. Zhang*, S. Shannon n & W. Weber*

UN Sustainable Development Goal Categories
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2013 patent

Substrate Cleaning Chamber And Cleaning And Conditioning Methods

https://www.lens.org/184-581-960-252-75X

By: M. Vineet, B. Karl, P. A, H. J, S. C, M. A, P. D

Source: ORCID
Added: January 10, 2020

2012 journal article

A VHF driven coaxial atmospheric air plasma: electrical and optical characterization

Journal of Physics D: Applied Physics, 45(19), 195204.

By: B. Byrns n, D. Wooten n, A. Lindsay n & S. Shannon n

Contributors: B. Byrns n, D. Wooten n, A. Lindsay n & S. Shannon n

UN Sustainable Development Goal Categories
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2012 journal article

Nanoscale engineering of radiation tolerant silicon carbide

Physical Chemistry Chemical Physics, 14(38), 13429.

TL;DR: The remarkable radiation resistance in the nano-engineered SiC is attributed to the high-density of SFs within nano-sized grain structures that significantly enhance point defect annihilation. (via Semantic Scholar)
UN Sustainable Development Goal Categories
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2012 chapter

Plasma-Assisted Pattern Transfer at the Nanoscale

In S. Cabrini & S. Kawata (Eds.), Nanofabrication Handbook (pp. 111–126). Boca Raton FL: CRC Press Taylor and Francis Group.

By: S. Shannon

Ed(s): S. Cabrini & S. Kawata

Source: NC State University Libraries
Added: December 22, 2020

2012 journal article

The impact of Langmuir probe geometries on electron current collection and the integral relation for obtaining electron energy distribution functions

Plasma Sources Science and Technology, 21(2), 025003.

By: A. Saghir & S. Shannon*

Contributors: A. El Saghir* & S. Shannon*

UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
13. Climate Action (Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2011 patent

Improving Plasma Process Uniformity Across A Wafer By Apportioning Power Among Plural Vhf Sources

https://www.lens.org/035-374-849-498-503

Steven Shannon

Source: ORCID
Added: January 10, 2020

2011 journal article

Limitations of Regularization Methods for the Reconstruction of Electron Velocity Distribution Function

IEEE Transactions on Plasma Science, 39(4), 1034–1037.

By: A. El Saghir n & S. Shannon n

Contributors: A. El Saghir n & S. Shannon n

author keywords: Electron energy distribution function (EEDF); electron velocity distribution function (EVDF); ill-posed problems; Tikhonov regularization
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
13. Climate Action (Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2011 patent

Method Of Processing A Workpiece In A Plasma Reactor With Variable Height Ground Return Path To Control Plasma Ion Density Uniformity

https://www.lens.org/082-874-457-200-865

Steven Shannon

Source: ORCID
Added: January 10, 2020

2011 patent

Plasma Process Uniformity Across A Wafer By Apportioning Ground Return Path Impedances Among Plural Vhf Sources

https://www.lens.org/004-808-299-268-13X

Steven Shannon

Source: ORCID
Added: January 10, 2020

2011 patent

Plasma Process Uniformity Across A Wafer By Controlling A Variable Frequency Coupled To A Harmonic Resonator

https://www.lens.org/145-961-377-173-552

Steven Shannon

Source: ORCID
Added: January 10, 2020

2011 patent

Plasma Process Uniformity Across A Wafer By Controlling Rf Phase Between Opposing Electrodes

https://www.lens.org/003-021-090-469-410

Steven Shannon

Source: ORCID
Added: January 10, 2020

2011 journal article

Reduction of EEDF Measurement Distortion in Regularized Solutions of the Druyvesteyn Relation

IEEE Transactions on Plasma Science, 39(1), 596–602.

By: A. El Saghir n & S. Shannon n

Contributors: A. El Saghir n & S. Shannon n

author keywords: Electron energy distribution function (EEDF); ill-posed problems; Tikhonov regularization; truncated singular value decomposition (TSVD)
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
13. Climate Action (Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2010 journal article

Electron Energy Distribution Function Extraction Using Integrated Step Function Response and Regularization Methods

IEEE Transactions on Plasma Science, 38(2), 156–162.

By: A. El Saghir n, C. Kennedy n & S. Shannon n

Contributors: A. El Saghir n, C. Kennedy n & S. Shannon n

author keywords: Druyvesteyn; electron energy distribution function (EEDF); Tikhonov regularization
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
13. Climate Action (Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries, Crossref
Added: August 6, 2018

2010 patent

Method For Testing Plasma Reactor Multi-frequency Impedance Match Networks

https://www.lens.org/078-180-755-189-413

By: S. C

Source: ORCID
Added: January 10, 2020

2010 patent

Plasma Control Using Dual Cathode Frequency Mixing

https://www.lens.org/089-103-194-978-761

By: S. C, G. S, P. Theodoros, H. J, C. G, D. S, P. Alexander, L. Jingbao, S. Taeho, P. Y

Source: ORCID
Added: January 10, 2020

2009 journal article

Guest Editorial Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing

IEEE Transactions on Plasma Science, 37(9), 1662–1664.

By: S. Shannon n, R. Kinder*, A. Paterson*, S. Rauf* & P. Ventzek*

Contributors: S. Shannon n, R. Kinder*, A. Paterson*, S. Rauf* & P. Ventzek*

Sources: ORCID, NC State University Libraries, Crossref, NC State University Libraries
Added: August 6, 2018

2009 patent

Plasma Generation And Control Using Dual Frequency Rf Signals

https://www.lens.org/092-968-410-882-459

By: S. C, P. Alexander, P. Theodoros, H. P, G. S & H. J

Source: ORCID
Added: January 10, 2020

2008 patent

Dual Bias Frequency Plasma Reactor With Feedback Control Of E.s.c. Voltage Using Wafer Voltage Measurement At The Bias Supply Output

https://www.lens.org/062-461-753-606-236

By: Y. Gyoo, H. J, S. C, B. H, L. Wonseok & K. Kwang-soo

Source: ORCID
Added: January 10, 2020

2008 patent

Method Of Feedback Control Of Esc Voltage Using Wafer Voltage Measurement At The Bias Supply Output

https://www.lens.org/061-721-158-934-878

By: Y. Gyoo, H. J, S. C, B. H, L. Wonseok & K. Kwang-soo

Source: ORCID
Added: January 10, 2020

2008 patent

Plasma Generation And Control Using A Dual Frequency Rf Source

https://www.lens.org/073-265-216-590-516

By: S. C, P. Alex, P. Theodoros, H. P, G. Dennis & T. Yashushi

Source: ORCID
Added: January 10, 2020

2007 journal article

Global Modeling of Magnetized Capacitive Discharges

IEEE Transactions on Plasma Science, 35(5), 1413–1419.

By: M. Carter, D. Hoffman*, S. Shannon*, P. Ryan* & D. Buchberger*

Contributors: M. Carter, D. Hoffman*, S. Shannon*, P. Ryan* & D. Buchberger*

author keywords: capacitance; electromagnetic analysis; electromagnetic; coupling; electromagnetic fields; electromagnetic heating; electromagnetic measurements; electromagnetic propagation; in absorbing media; electromagnetic propagation in anisotropic media; electromagnetic propagation in dispersive media; electromagnetic propagation in nonhomogeneous media; electromagnetic propagation in nonlinear media; electromagnetic propagation in plasma media; electromagnetic surface waves; magnetic confinement; magnetic field effects; magnetic fields; perpendicular; magnetic anisotropy; plasma applications; plasma confinement; plasma control; plasma devices; plasma generation; plasma heating; plasma materials-processing applications; plasma measurements; plasma properties; plasmas; plasma sheaths; plasma waves
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Sources: ORCID, Crossref, NC State University Libraries
Added: August 15, 2019

2007 patent

Plasma Control Using Dual Cathode Frequency Mixing

https://www.lens.org/198-151-282-809-229

By: S. C, G. S, P. Theodoros, H. J, C. G, D. S, P. Alexander, L. Jingbao, S. Taeho, P. Y

Source: ORCID
Added: January 10, 2020

2007 patent

Plasma Generation And Control Using A Dual Frequency Rf Source

https://www.lens.org/001-723-961-714-703

By: S. C, P. Alex, P. Theodoros, H. P, G. Dennis & T. Yashushi

Source: ORCID
Added: January 10, 2020

2006 patent

Plasma Generation And Control Using Dual Frequency Rf Signals

https://www.lens.org/093-426-771-044-119

By: S. C, P. Alexander, P. Theodoros, H. P, G. S & H. J

Source: ORCID
Added: January 10, 2020

2005 journal article

Frequency optimization for capacitively coupled plasma source

IEEE Transactions on Plasma Science, 33(2), 382–383.

By: K. Bera*, D. Hoffman*, S. Shannon*, G. Delgadino* & Y. Ye*

Contributors: K. Bera*, D. Hoffman*, S. Shannon*, G. Delgadino* & Y. Ye*

author keywords: all-in-one process; capacitively coupled discharge; corner protection; dual damascene; ion energy; plasma density; plasma production efficiency; trench etch; very high frequency
Sources: ORCID, Crossref, NC State University Libraries
Added: August 15, 2019

2005 patent

Plasma Control Using Dual Cathode Frequency Mixing

https://www.lens.org/145-542-565-144-947

By: S. C, G. S, P. Theodoros, H. J, C. G, D. S, P. Alexander, L. Jingbao, S. Taeho, P. Y

Source: ORCID
Added: January 10, 2020

2005 patent

Plasma Generation And Control Using A Dual Frequency Rf Source

https://www.lens.org/118-952-420-673-621

By: S. C, P. Alex, P. Theodoros, H. P, G. Dennis & T. Yashushi

Source: ORCID
Added: January 10, 2020

2005 journal article

The impact of frequency mixing on sheath properties: Ion energy distribution and Vdc∕Vrf interaction

Journal of Applied Physics, 97(10), 103304.

By: S. Shannon*, D. Hoffman*, J. Yang*, A. Paterson* & J. Holland*

Contributors: S. Shannon*, D. Hoffman*, J. Yang*, A. Paterson* & J. Holland*

UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Sources: ORCID, Crossref, NC State University Libraries
Added: August 15, 2019

2001 journal article

A reconstruction algorithm for a spatially resolved plasma optical emission spectroscopy sensor

Journal of Quantitative Spectroscopy and Radiative Transfer, 68(1), 101–115.

By: J. Holloway*, S. Shannon*, S. Sepke* & M. Brake*

Contributors: J. Holloway*, S. Shannon*, S. Sepke* & M. Brake*

author keywords: regularization; plasma processing; plasma tomography
Sources: ORCID, Crossref, NC State University Libraries
Added: August 15, 2019

2000 journal article

Optical emission reference data for the GEC reference cell

IEEE Transactions on Plasma Science, 28(6), 2187–2193.

By: C. Collard*, S. Shannon*, J. Holloway* & M. Brake*

Contributors: C. Collard*, S. Shannon*, J. Holloway* & M. Brake*

author keywords: 2-D plasma profiles; plasma diagnostics; radio frequency plasmas
Sources: ORCID, Crossref, NC State University Libraries
Added: August 15, 2019

1999 journal article

Spatially resolved fluorine actinometry

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 17(5), 2703–2708.

By: S. Shannon*, J. Holloway* & M. Brake*

Contributors: S. Shannon*, J. Holloway* & M. Brake*

Sources: ORCID, Crossref, NC State University Libraries
Added: August 15, 2019

1997 journal article

A spatially resolved optical emission sensor for plasma etch monitoring

Applied Physics Letters, 71(11), 1467–1468.

By: S. Shannon*, J. Holloway*, K. Flippo* & M. Brake*

Contributors: S. Shannon*, J. Holloway*, K. Flippo* & M. Brake*

Sources: ORCID, Crossref, NC State University Libraries
Added: August 15, 2019

thesis

A Glow Discharge Tomography Sensor for Monitoring Etch Uniformity

Shannon, S. (Masters Thesis).

By: S. Shannon

Source: NC State University Libraries
Added: November 16, 2019

thesis

Spatially resolved analysis of plasma etch discharges using a novel optical emission spectroscopy sensor

Shannon, S. (Ph.D. Thesis).

By: S. Shannon

Source: NC State University Libraries
Added: November 16, 2019

Employment

Updated: February 22nd, 2021 14:37

2018 - present

North Carolina State University Raleigh, North Carolina, US
Professor Nuclear Engineering

2008 - 2018

North Carolina State University Raleigh, NC, US
Associate Professor Nuclear Engineering

1999 - 2007

Applied Materials Inc Santa Clara, CA, US
Dielectric Etch

2000 - 2007

San Jose State University San Jose, CA, US
Adjunct Professor Chemical and Materials Engineering

Education

Updated: July 7th, 2017 16:06

1995 - 1999

University of Michigan Ann Arbor, MI, US
Ph.D. Nuclear Engineering and Radiological Sciences

1995 - 1997

University of Michigan Ann Arbor, MI, US
M.S.E. Nuclear Engineering and Radiological Sciences

1991 - 1995

University of Michigan Ann Arbor, MI, US
B.S.E. Nuclear Engineering and Radiological Sciences

1988 - 1991

Catholic Central High School Novi, MI, US
High School Diploma

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