2025 article

HfO<sub>2</sub> Area Selective Deposition via Substrate-Dependent Area Selective Atomic Layer Etching

Keller, L. J., Song, S. K., Margavio, H. R. M., Atanasov, S., Chen, J.-R., & Parsons, G. N. (2025, February 24). CHEMISTRY OF MATERIALS, Vol. 2.

By: L. Keller n, S. Song n, H. Margavio n, S. Atanasov*, J. Chen* & G. Parsons n

topics (OpenAlex): Semiconductor materials and devices; Ferroelectric and Negative Capacitance Devices; Electronic and Structural Properties of Oxides
Sources: Web Of Science, ORCID, NC State University Libraries
Added: February 24, 2025

2016 journal article

Inherent substrate-dependent growth initiation and selective-area atomic layer deposition of TiO2 using "water-free" metal-halide/metal alkoxide reactants

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(1).

By: S. Atanasov n, B. Kalanyan n & G. Parsons n

Contributors: S. Atanasov n, B. Kalanyan n & G. Parsons n

topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Catalytic Processes in Materials Science
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UN Sustainable Development Goal Categories
6. Clean Water and Sanitation (OpenAlex)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

2016 journal article

Using Hydrogen To Expand the Inherent Substrate Selectivity Window During Tungsten Atomic Layer Deposition

CHEMISTRY OF MATERIALS, 28(1), 117–126.

By: B. Kalanyan n, P. Lemaire n, S. Atanasov n, M. Ritz n & G. Parsons n

Contributors: B. Kalanyan n, P. Lemaire n, S. Atanasov n, M. Ritz n & G. Parsons n

topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Copper Interconnects and Reliability
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

2015 journal article

Platinum-Free Cathode for Dye-Sensitized Solar Cells Using Poly(3,4-ethylenedioxythiophene) (PEDOT) Formed via Oxidative Molecular Layer Deposition

ACS APPLIED MATERIALS & INTERFACES, 7(7), 3866–3870.

By: D. Kim n, S. Atanasov n, P. Lemaire n, K. Lee n & G. Parsons n

Contributors: D. Kim n, S. Atanasov n, P. Lemaire n, K. Lee n & G. Parsons n

author keywords: PEDOT; molecular layer deposition; PEDOT; dye-sensitized solar cells; cathode
topics (OpenAlex): TiO2 Photocatalysis and Solar Cells; Analytical Chemistry and Sensors; Conducting polymers and applications
TL;DR: PEDOT-coated m-ITO by oMLD shows power conversion efficiency, comparable to 7.26% of Pt, and higher than that of planar PEDOT coatings, which is 4.85%. (via Semantic Scholar)
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UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (Web of Science; OpenAlex)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

2014 journal article

Highly Conductive and Conformal Poly(3,4-ethylenedioxythiophene) (PEDOT) Thin Films via Oxidative Molecular Layer Deposition

CHEMISTRY OF MATERIALS, 26(11), 3471–3478.

By: S. Atanasov n, M. Losego n, B. Gong n, E. Sachet n, J. Maria n, P. Williams n, G. Parsons n

Contributors: S. Atanasov n, M. Losego n, B. Gong n, E. Sachet n, J. Maria n, P. Williams n, G. Parsons n

topics (OpenAlex): Conducting polymers and applications; Semiconductor materials and devices; Advanced Memory and Neural Computing
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

2014 journal article

Highly adsorptive, MOF-functionalized nonwoven fiber mats for hazardous gas capture enabled by atomic layer deposition

Advanced Materials Interfaces, 1(4).

By: J. Zhao, M. Losego, P. Lemaire, P. Williams, B. Gong, S. Atanasov, T. Blevins, C. Oldham ...

Source: NC State University Libraries
Added: August 6, 2018

2014 journal article

Improved cut-resistance of Kevlar (R) using controlled interface reactions during atomic layer deposition of ultrathin (< 50 angstrom) inorganic coatings

Improved cut-resistance of Kevlar (R) using controlled interface reactions during atomic layer deposition of ultrathin (< 50 angstrom) inorganic coatings. JOURNAL OF MATERIALS CHEMISTRY A, 2(41), 17371–17379.

By: S. Atanasov n, C. Oldham n, K. Slusarski*, J. Taggart-Scarff*, S. Sherman*, K. Senecal*, S. Filocamo*, Q. McAllister*, E. Wetzel*, G. Parsons n

Contributors: S. Atanasov n, C. Oldham n, K. Slusarski*, J. Taggart-Scarff*, S. Sherman*, K. Senecal*, S. Filocamo*, Q. McAllister*, E. Wetzel*, G. Parsons n

topics (OpenAlex): Semiconductor materials and devices; Copper Interconnects and Reliability; Diamond and Carbon-based Materials Research
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

2013 review

Mechanisms and reactions during atomic layer deposition on polymers

[Review of ]. COORDINATION CHEMISTRY REVIEWS, 257(23-24), 3323–3331.

By: G. Parsons n, S. Atanasov n, E. Dandley n, C. Devine n, B. Gong n, J. Jur n, K. Lee n, C. Oldham n ...

Contributors: G. Parsons n, S. Atanasov n, E. Dandley n, C. Devine n, B. Gong n, J. Jur n, K. Lee n, C. Oldham n ...

author keywords: Atomic layer deposition; Polymers; Thin films; Inorganic coatings; Al2O3
topics (OpenAlex): Semiconductor materials and devices; Copper Interconnects and Reliability; Electronic and Structural Properties of Oxides
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

2013 journal article

Solid Electrolyte Interphase on Lithium-Ion Carbon Nanofiber Electrodes by Atomic and Molecular Layer Deposition

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 160(11), A1971–A1978.

By: A. Loebl n, C. Oldham n, C. Devine n, B. Gong n, S. Atanasov n, G. Parsons n, P. Fedkiw n

Contributors: A. Loebl n, C. Oldham n, C. Devine n, B. Gong n, S. Atanasov n, G. Parsons n, P. Fedkiw n

topics (OpenAlex): Advancements in Battery Materials; Semiconductor materials and devices; Advanced Battery Materials and Technologies
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Sources: Web Of Science, NC State University Libraries, ORCID
Added: August 6, 2018

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