@article{coumou_clark_kummerer_hopkins_sullivan_shannon_2014, title={Ion energy distribution skew control using phase-locked harmonic RF bias driveion energy distribution skew control using phase-locked harmonic RF bias drive}, volume={42}, DOI={10.1109/tps.2014.2326600}, number={7}, journal={IEEE Transactions on Plasma Science}, author={Coumou, D. J. and Clark, D. H. and Kummerer, T. and Hopkins, M. and Sullivan, D. and Shannon, S.}, year={2014}, pages={1880–1893} }