Theresa Kummerer

Coumou, D. J., Clark, D. H., Kummerer, T., Hopkins, M., Sullivan, D., & Shannon, S. (2014). Ion Energy Distribution Skew Control Using Phase-Locked Harmonic RF Bias Drive. IEEE Transactions on Plasma Science, 42(7), 1880–1893. https://doi.org/10.1109/tps.2014.2326600