Works (7)
Updated: August 5th, 2023 05:00
2023 journal article
Comparison of BCl3, TiCl4, and SOCl2 chlorinating agents for atomic layer etching of TiO2 and ZrO2 using tungsten hexafluoride
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 41(4).
UN Sustainable Development Goal Categories
13. Climate Action
(Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: June 22, 2023
2022 journal article
Creating hierarchically porous banana paper-metal organic framework (MOF) composites with multifunctionality
APPLIED MATERIALS TODAY, 28.
author keywords: lignocellulosic biomass; Banana fiber; Gas sorption; Antibacterial matrix; MOF-fiber composites; VOC sensor
Sources: Web Of Science, ORCID, NC State University Libraries
Added: May 22, 2022
2021 article
Freestanding Metal Organic Framework-Based Multifunctional Membranes Fabricated via Pseudomorphic Replication toward Liquid- and Gas-Hazards Abatement
Dai, Z., Pradeep, S., Zhu, J., Xie, W., Barton, H. F., Si, Y., … Parsons, G. N. (2021, October 24). ADVANCED MATERIALS INTERFACES, Vol. 10.
author keywords: Al-based metal-organic frameworks; freestanding MOF membrane; hazardous chemicals
Sources: Web Of Science, ORCID, NC State University Libraries
Added: November 1, 2021
2020 journal article
Thermal atomic layer etching of metallic tungsten via oxidation and etch reaction mechanism using O-2 or O-3 for oxidation and WCl6 as the chlorinating etchant
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 38(2).
UN Sustainable Development Goal Categories
13. Climate Action
(Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: March 16, 2020
2018 journal article
Control of Micro- and Mesopores in Carbon Nanofibers and Hollow Carbon Nanofibers Derived from Cellulose Diacetate via Vapor Phase Infiltration of Diethyl Zinc
ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 6(11), 13844–13853.
author keywords: Vapor infiltration synthesis; Carbon nanofibers; Hollow carbon nanofibers; Diethyl zinc; ZnO Atomic layer deposition (ALD); Cellulose diacetate; Thermoplastics
Sources: Web Of Science, NC State University Libraries, ORCID
Added: December 3, 2018
2018 journal article
Thermally Driven Self-Limiting Atomic Layer Etching of Metallic Tungsten Using WF6 and O-2
ACS APPLIED MATERIALS & INTERFACES, 10(10), 9147–9154.
author keywords: atomic layer etching; ALE; W; WF6; O-2; W selectivity on SiO2 and Si-H
TL;DR:
This work demonstrates a thermally driven ALE process for tungsten (W) using sequential exposures of O2 and WF6 and finds O2 to be more controllable for precise metal removal per cycle than W, where the stronger oxidant leads to a larger mass removal rate per cycle.
(via Semantic Scholar)
UN Sustainable Development Goal Categories
13. Climate Action
(Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018
2017 journal article
Thermally Stable and Tough Coatings and Films Using Vinyl Silylated Lignin
ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 6(2), 1988–1998.
author keywords: Lignin; Reactive extrusion; Vinyl silylated lignin; Polyacrylonitrile; Copolymers; Films; Coatings
Source: Web Of Science
Added: August 6, 2018
Citation Index includes data from a number of different sources. If you have questions about the sources of data in the Citation Index or need a set of data which is free to re-distribute, please contact us.
Certain data included herein are derived from the Web of Science© and InCites© (2024) of Clarivate Analytics. All rights reserved. You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.