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Works (7)
2023 journal article
Comparison of BCl3, TiCl4, and SOCl2 chlorinating agents for atomic layer etching of TiO2 and ZrO2 using tungsten hexafluoride
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 41(4).

2022 journal article
Creating hierarchically porous banana paper-metal organic framework (MOF) composites with multifunctionality
APPLIED MATERIALS TODAY, 28.
2021 article
Freestanding Metal Organic Framework-Based Multifunctional Membranes Fabricated via Pseudomorphic Replication toward Liquid- and Gas-Hazards Abatement
Dai, Z., Pradeep, S., Zhu, J., Xie, W., Barton, H. F., Si, Y., … Parsons, G. N. (2021, October 24). ADVANCED MATERIALS INTERFACES, Vol. 10.
2020 journal article
Thermal atomic layer etching of metallic tungsten via oxidation and etch reaction mechanism using O-2 or O-3 for oxidation and WCl6 as the chlorinating etchant
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 38(2).

2018 journal article
Control of Micro- and Mesopores in Carbon Nanofibers and Hollow Carbon Nanofibers Derived from Cellulose Diacetate via Vapor Phase Infiltration of Diethyl Zinc
ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 6(11), 13844–13853.
2018 journal article
Thermally Driven Self-Limiting Atomic Layer Etching of Metallic Tungsten Using WF6 and O-2
ACS APPLIED MATERIALS & INTERFACES, 10(10), 9147–9154.

2018 journal article
Thermally Stable and Tough Coatings and Films Using Vinyl Silylated Lignin
ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 6(2), 1988–1998.