Works (13)

Updated: May 28th, 2024 08:08

2018 article

Effects of LaSiO<italic>x</italic> Thickness and Forming Gas Anneal Temperature on Threshold Voltage Instability of 4H-SiC MOSFETs With LaSiO<italic>x</italic>

Yang, X., Lee, B., & Misra, V. (2018, November 6). IEEE Transactions on Electron Devices, Vol. 66, pp. 539–545.

By: X. Yang n, B. Lee n & V. Misra n

author keywords: Atomic layer deposition (ALD); forming gas anneal (FGA) lanthanum silicate (LaSiOx); mobility; SiC; threshold voltage
topics (OpenAlex): Silicon Carbide Semiconductor Technologies; Semiconductor materials and devices; Advancements in Semiconductor Devices and Circuit Design
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Sources: Web Of Science, NC State University Libraries, ORCID
Added: January 14, 2019

2016 journal article

Electrical Characteristics of SiO2 Deposited by Atomic Layer Deposition on 4H–SiC After Nitrous Oxide Anneal

IEEE Transactions on Electron Devices, 63(7), 2826–2830.

By: X. Yang n, B. Lee n & V. Misra n

author keywords: Atomic layer deposition (ALD); charge; MOSFETs; SiC; SiO2; threshold voltage
topics (OpenAlex): Semiconductor materials and devices; Silicon Carbide Semiconductor Technologies; Advancements in Semiconductor Devices and Circuit Design
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Sources: Web Of Science, NC State University Libraries, Crossref
Added: August 6, 2018

2015 article

High Mobility 4H-SiC Lateral MOSFETs Using Lanthanum Silicate and Atomic Layer Deposited SiO<sub>2</sub>

Yang, X., Lee, B., & Misra, V. (2015, February 3). IEEE Electron Device Letters, Vol. 36, pp. 312–314.

By: X. Yang n, B. Lee n & V. Misra n

author keywords: Atomic layer deposition; lanthanum silicate; mobility; SiC
topics (OpenAlex): Silicon Carbide Semiconductor Technologies; Semiconductor materials and devices; Advancements in Semiconductor Devices and Circuit Design
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Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2015 journal article

Investigation of Lanthanum Silicate Conditions on 4H-SiC MOSFET Characteristics

IEEE Transactions on Electron Devices, 62(11), 3781–3785.

By: X. Yang n, B. Lee n & V. Misra n

author keywords: Atomic layer deposition (ALD); ALD SiO2; lanthanum silicate (LaSiOx); mobility; silicon carbide (SiC)
topics (OpenAlex): Semiconductor materials and devices; Silicon Carbide Semiconductor Technologies; Copper Interconnects and Reliability
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Sources: Web Of Science, NC State University Libraries, Crossref
Added: August 6, 2018

2014 article

High Mobility 4H-SiC MOSFETs Using Lanthanum Silicate Interface Engineering and ALD Deposited SiO<sub>2</sub>

Yang, X. Y., Lee, B. M., & Misra, V. (2014, February 26). Materials Science Forum, Vol. 778-780, pp. 557–561.

By: X. Yang n, B. Lee n & V. Misra n

author keywords: 4H-SiC; ALD; La2O3; MOS; Mobility
topics (OpenAlex): Semiconductor materials and devices; Silicon Carbide Semiconductor Technologies; Copper Interconnects and Reliability
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Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2012 article

Atomic Layer Deposition of $\hbox{SiO}_{2}$ for AlGaN/GaN MOS-HFETs

Kirkpatrick, C. J., Lee, B., Suri, R., Yang, X., & Misra, V. (2012, July 19). IEEE Electron Device Letters, Vol. 33, pp. 1240–1242.

By: C. Kirkpatrick n, B. Lee n, R. Suri n, X. Yang n & V. Misra n

author keywords: Atomic layer deposition (ALD); GaN; heterostructure field-effect transistor (HFET); metal-oxide-semiconductor heterojunction field-effect transistor (MOS-HFET); SiO2
topics (OpenAlex): GaN-based semiconductor devices and materials; Semiconductor materials and devices; Ga2O3 and related materials
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2012 article

Normally‐off AlGaN/GaN MOSHFET using ALD SiO2 tunnel dielectric and ALD HfO2 charge storage layer for power device application

Lee, B., Kirkpatrick, C., Choi, Y., Yang, X., Huang, A. Q., & Misra, V. (2012, February 29). Physica Status Solidi. C, Conferences and Critical Reviews/Physica Status Solidi. C, Current Topics in Solid State Physics, Vol. 9, pp. 868–870.

By: B. Lee n, C. Kirkpatrick n, Y. Choi n, X. Yang n, A. Huang n & V. Misra n

author keywords: enhancement mode; GaN-MOSHFET; normally-off; atomic layer deposition
topics (OpenAlex): GaN-based semiconductor devices and materials; Semiconductor materials and devices; Ga2O3 and related materials
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Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2011 article

Investigation of the Origin of $V_{T}/V_{\rm FB}$ Modulation by $\hbox{La}_{2}\hbox{O}_{3}$ Capping Layer Approaches for NMOS Application: Role of La Diffusion, Effect of Host High- $k$ Layer, and Interface Properties

Lee, B., Novak, S. R., Lichtenwalner, D. J., Yang, X., & Misra, V. (2011, July 26). IEEE Transactions on Electron Devices, Vol. 58, pp. 3106–3115.

By: B. Lee n, S. Novak n, D. Lichtenwalner n, X. Yang n & V. Misra n

author keywords: Advanced gate stack; high-k dielectrics; V-T control; work-function modulation
topics (OpenAlex): Semiconductor materials and devices; Electronic and Structural Properties of Oxides; Advancements in Semiconductor Devices and Circuit Design
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2011 article

Performance improvement of AlGaN/GaN high electron mobility transistors with atomic layer deposition (ALD) of SiO2 and HfAlO dielectrics

Kirkpatrick, C., Lee, B., Yang, X., & Misra, V. (2011, June 20). Physica Status Solidi. C, Conferences and Critical Reviews/Physica Status Solidi. C, Current Topics in Solid State Physics, Vol. 8.

By: C. Kirkpatrick n, B. Lee n, X. Yang n & V. Misra n

author keywords: GaN; HFET; MOS-HFET; ALD
topics (OpenAlex): GaN-based semiconductor devices and materials; Semiconductor materials and devices; Ga2O3 and related materials
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7. Affordable and Clean Energy (OpenAlex)
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2010 article

Low-Frequency Noise Measurements of AlGaN/GaN Metal&#x2013;Oxide&#x2013;Semiconductor Heterostructure Field-Effect Transistors With HfAlO Gate Dielectric

Kayis, C., Leach, J. H., Zhu, C. Y., Wu, M., Li, X., Ozgur, Ü., … Handel, P. H. (2010, August 10). IEEE Electron Device Letters, Vol. 31, pp. 1041–1043.

By: C. Kayis*, J. Leach*, C. Zhu*, M. Wu*, X. Li*, Ü. Ozgur*, H. Morkoc*, X. Yang n, V. Misra n, P. Handel*

author keywords: Gate dielectric; generation-recombination (G-R); metal-oxide-semiconductor heterostructure field-effect transistor (MOS-HFET); noise measurement
topics (OpenAlex): Semiconductor materials and devices; Advancements in Semiconductor Devices and Circuit Design; GaN-based semiconductor devices and materials
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7. Affordable and Clean Energy (OpenAlex)
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2010 article

Platinum Nanoparticles Grown by Atomic Layer Deposition for Charge Storage Memory Applications

Novak, S., Lee, B., Yang, X., & Misra, V. (2010, January 1). Journal of The Electrochemical Society, Vol. 157, pp. H589–592.

By: S. Novak n, B. Lee n, X. Yang n & V. Misra n

topics (OpenAlex): Semiconductor materials and devices; Advanced Memory and Neural Computing; Ferroelectric and Negative Capacitance Devices
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7. Affordable and Clean Energy (OpenAlex)
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2010 article

Technique to improve performance of Al2O3 interpoly dielectric using a La2O3 interface scavenging layer for floating gate memory structures

Jayanti, S., Yang, X., Lichtenwalner, D. J., & Misra, V. (2010, March 1). Applied Physics Letters, Vol. 96.

By: S. Jayanti n, X. Yang n, D. Lichtenwalner n & V. Misra n

author keywords: aluminium compounds; dielectric materials; flash memories; lanthanum compounds; silicon compounds; transmission electron microscopy
topics (OpenAlex): Semiconductor materials and devices; Integrated Circuits and Semiconductor Failure Analysis; Advancements in Semiconductor Devices and Circuit Design
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7. Affordable and Clean Energy (OpenAlex)
Sources: Web Of Science, NC State University Libraries
Added: August 6, 2018

2010 article

Ultimate scalability of TaN metal floating gate with incorporation of high-K blocking dielectrics for Flash memory applications

Jayanti, S., Yang, N. X., Suri, R., & Misra, V. (2010, December 1). 2010 International Electron Devices Meeting - Technical Digest.

By: S. Jayanti n, N. Yang n, R. Suri n & V. Misra n

topics (OpenAlex): Semiconductor materials and devices; Copper Interconnects and Reliability; Ferroelectric and Negative Capacitance Devices
TL;DR: Results indicate that high-K based IPD in conjunction with ultra-thin TaN metal FG can enable further scaling of NAND Flash memory beyond conventional oxide-nitride-oxide (ONO) based I PD technology. (via Semantic Scholar)
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7. Affordable and Clean Energy (OpenAlex)
Sources: NC State University Libraries, NC State University Libraries
Added: August 6, 2018

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