@article{lee_choi_kirkpatrick_huang_misra_2013, title={Improved high-temperature device transport properties and off-state characteristics of AlGaN/GaN power devices with atomic layer deposition (ALD) HfAlO high-k dielectric}, volume={28}, ISSN={["1361-6641"]}, DOI={10.1088/0268-1242/28/7/074016}, abstractNote={The effect of the atomic layer deposition (ALD) HfAlO high-k dielectric on device transport properties and breakdown characteristics of an AlGaN/GaN metal–oxide–semiconductor hetero-junction field-effect transistor (MOS-HFET) was evaluated based on temperature-dependent measurements. It was found that the MOS-HFET device with a HfAlO gate dielectric shows high-channel mobility greater than the Schottky HFET device for the measured temperature range (25–150 °C). In the case of off-state breakdown characteristics, the MOS-HFET device greatly suppressed gate leakage currents for measured temperatures (25–200 °C) resulting in improvements in off-state breakdown characteristics. In contrast, large gate/drain leakage currents were observed for the Schottky HFET device at high temperature (>100 °C) resulting in about 200 V of breakdown voltage reduction. It was also found that the ALD HfAlO layer reduced surface leakage current by passivating the GaN surface effectively. Therefore, the MOS-HFET structure with the HfAlO gate dielectric is very attractive for GaN-based high-power and high-temperature device applications.}, number={7}, journal={SEMICONDUCTOR SCIENCE AND TECHNOLOGY}, author={Lee, B. and Choi, Y. H. and Kirkpatrick, C. and Huang, A. Q. and Misra, V.}, year={2013}, month={Jul} } @article{lee_kirkpatrick_choi_yang_huang_misra_2012, title={Normally-off AlGaN/GaN MOSHFET using ALD SiO2 tunnel dielectric and ALD HfO2 charge storage layer for power device application}, volume={9}, ISSN={["1862-6351"]}, DOI={10.1002/pssc.201100422}, abstractNote={Abstract}, number={3-4}, journal={PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 9, NO 3-4}, author={Lee, Bongmook and Kirkpatrick, Casey and Choi, Young-hwan and Yang, Xiangyu and Huang, Alex Q. and Misra, Veena}, year={2012}, pages={868–870} } @article{kirkpatrick_lee_choi_huang_misra_2012, title={Threshold voltage stability comparison in AlGaN/GaN FLASH MOS-HFETs utilizing charge trap or floating gate charge storage}, volume={9}, ISSN={["1862-6351"]}, DOI={10.1002/pssc.201100421}, abstractNote={Abstract}, number={3-4}, journal={PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 9, NO 3-4}, author={Kirkpatrick, Casey and Lee, Bongmook and Choi, YoungHwan and Huang, Alex and Misra, Veena}, year={2012}, pages={864–867} }