Yao Du

College of Engineering

Works (1)

Updated: April 11th, 2023 10:13

2022 journal article

Comparison of glancing-angle scatterings on different materials in a high aspect ratio plasma etching process using molecular dynamics simulation

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(5).

By: Y. Du n, F. Kruger *, S. Nam *, H. Lee*, S. Yoo *, J. Eapen n, M. Kushner *, S. Shannon n 

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