Yao Du

College of Engineering

Works (1)

Updated: April 11th, 2023 10:13

2022 article

Comparison of glancing-angle scatterings on different materials in a high aspect ratio plasma etching process using molecular dynamics simulation

Du, Y., Krüger, F., Nam, S. K., Lee, H., Yoo, S., Eapen, J., … Shannon, S. (2022, September 1). Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, Vol. 9.

By: Y. Du n, F. Krüger *, S. Nam *, H. Lee*, S. Yoo *, J. Eapen n, M. Kushner *, S. Shannon n 

topics (OpenAlex): Ion-surface interactions and analysis; Plasma Diagnostics and Applications; Semiconductor materials and devices
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