Yao Du

College of Engineering

Works (1)

Updated: April 11th, 2023 10:13

2022 journal article

Comparison of glancing-angle scatterings on different materials in a high aspect ratio plasma etching process using molecular dynamics simulation

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(5).

co-author countries: Korea (Republic of) 🇰🇷 United States of America 🇺🇸
Sources: Web Of Science, ORCID
Added: September 2, 2022