Analytical Instrumentation Facility - 2003 Gonzalez, J. C., Silva, M. I. N., Bunker, K. L., Batchelor, A. D., & Russell, P. E. (2003). Electrical characterization of InGaN quantum well p-n heterostructures. MICROELECTRONICS JOURNAL, Vol. 34, pp. 455–457. https://doi.org/10.1016/S0026-2692(03)00072-7 Russell, P. E., Griffis, D. P., & Gonzales Perez, J. C. (2003). Chemically enhanced focused ion beam micro-machining of copper. Washington, DC: U.S. Patent and Trademark Office. Francois-Saint-Cyr, H. G., Stevie, F. A., McKinley, J. M., Elshot, K., Chow, L., & Richardson, K. A. (2003). Diffusion of 18 elements implanted into thermally grown SiO2. JOURNAL OF APPLIED PHYSICS, 94(12), 7433–7439. https://doi.org/10.1063/1.1624487 Wang, J. H., Griffis, D. P., Garcia, R., & Russell, P. E. (2003). Etching characteristics of chromium thin films by an electron beam induced surface reaction. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 18(4), 199–205. https://doi.org/10.1088/0268-1242/18/4/302 Pivovarov, A. L., Stevie, F. A., Griffis, D. P., & Guryanov, G. M. (2003). Optimization of secondary ion mass spectrometry detection limit for N in SiC. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 21(5), 1649–1654. https://doi.org/10.1116/1.1595108