Analytical Instrumentation Facility - 2021

Alcala, R., Richter, C., Materano, M., Lomenzo, P. D., Zhou, C., Jones, J. L., … Schroeder, U. (2021). Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 54(3). https://doi.org/10.1088/1361-6463/abbc98