Analytical Instrumentation Facility

College of Engineering

Works Published in 1997

copy embed code
Copy Embed Code Experiment

You can embed this resource into your own website. To do so, either use the code generated by us, or use the link and tweak the rest to your preferences. Copy the respective code or link below.

Displaying all 2 works

Sorted by most recent date added to the index first, which may not be the same as publication date order.

2023 2022 2021 2020 2019 2018 2017

1997 journal article

Rapid thermal chemical vapor deposition of in situ boron doped polycrystalline silicon germanium films on silicon dioxide for complimentary metal oxide semiconductor applications

Applied Physics Letters, 71(23), 3388–3390.

By: V. Li n, M. Mirabedini n, R. Kuehn n, J. Wortman n, M. Ozturk n, D. Batchelor n, K. Christensen n, D. Maher n

Source: NC State University Libraries
Added: August 6, 2018

1997 journal article

Optimization of process conditions for selective silicon epitaxy using disilane, hydrogen, and chlorine

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 144(9), 3309–3315.

By: P. ONeil n, M. Ozturk n, K. Violette n, D. Batchelor n, K. Christensen n & D. Maher n

Source: Web Of Science
Added: August 6, 2018