Displaying all 6 works
Sorted by most recent date added to the index first, which may not be the same as publication date order.
2002 article
Improvements in focused ion beam micromachining of interconnect materials
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 2700–2704.
2002 journal article
Utilizing the SIMS technique in the study of grain boundary diffusion along twist grain boundaries in the Cu(Ni) system
ACTA MATERIALIA, 50(20), 5079–5084.
2002 article
Secondary ion mass spectrometry induced damage adjacent to analysis craters in silicon
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 20, pp. 1663–1666.
2002 journal article
XPS analysis of FIB-milled Si
SURFACE AND INTERFACE ANALYSIS, 33(12), 907–913.
2002 journal article
In-fab techniques for baselining implant dose, contamination
Solid State Technology, 45(8), 63-.
2002 article
Comparison of secondary ion mass spectroscopy analysis of ultrashallow phosphorus using Cs+, O-2(+), and CsC6- primary ion beams
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 507–511.
