Analytical Instrumentation Facility

College of Engineering

Works Published in 2002

Sorted by most recent date added to the index first, which may not be the same as publication date order.

2002 journal article

Improvements in focused ion beam micromachining of interconnect materials

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(6), 2700–2704.

By: J. Gonzalez, M. Da Silva, D. Griffis & P. Russell

Source: NC State University Libraries
Added: August 6, 2018

2002 journal article

Utilizing the SIMS technique in the study of grain boundary diffusion along twist grain boundaries in the Cu(Ni) system

Acta Materialia, 50(20), 5079–5084.

By: S. Schwarz, B. Kempshall, L. Giannuzzi & F. Stevie

Source: NC State University Libraries
Added: August 6, 2018

2002 journal article

Secondary ion mass spectrometry induced damage adjacent to analysis craters in silicon

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 20(5), 1663–1666.

By: M. Clark, K. Jones & F. Stevie

Source: NC State University Libraries
Added: August 6, 2018

2002 journal article

XPS analysis of FIB-milled Si

Surface and Interface Analysis, 33(12), 907–913.

By: A. Ferryman, J. Fulghum, L. Giannuzzi & F. Stevie

Source: NC State University Libraries
Added: August 6, 2018

2002 journal article

In-fab techniques for baselining implant dose, contamination

Solid State Technology, 45(8), 63-.

By: R. Santiesteban, J. McKinley, F. Stevie, P. Flatch & O. Rodriguez

Source: NC State University Libraries
Added: August 6, 2018

2002 journal article

Comparison of secondary ion mass spectroscopy analysis of ultrashallow phosphorus using Cs+, O-2(+), and CsC6- primary ion beams

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(2), 507–511.

Source: NC State University Libraries
Added: August 6, 2018