Analytical Instrumentation Facility

Works Published in 2002

search works

Displaying all 6 works

Sorted by most recent date added to the index first, which may not be the same as publication date order.

2002 article

Improvements in focused ion beam micromachining of interconnect materials

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 2700–2704.

By: J. Gonzalez n, M. Silva n, D. Griffis n & P. Russell n

UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Source: Web Of Science
Added: August 6, 2018

2002 journal article

Utilizing the SIMS technique in the study of grain boundary diffusion along twist grain boundaries in the Cu(Ni) system

ACTA MATERIALIA, 50(20), 5079–5084.

By: S. Schwarz*, B. Kempshall*, L. Giannuzzi* & F. Stevie n

author keywords: SIMS; grain boundary diffusion; Cu(Ni); twist grain boundaries
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy (OpenAlex)
Source: Web Of Science
Added: August 6, 2018

2002 article

Secondary ion mass spectrometry induced damage adjacent to analysis craters in silicon

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, Vol. 20, pp. 1663–1666.

By: M. Clark*, K. Jones* & F. Stevie n

UN Sustainable Development Goal Categories
Source: Web Of Science
Added: August 6, 2018

2002 journal article

XPS analysis of FIB-milled Si

SURFACE AND INTERFACE ANALYSIS, 33(12), 907–913.

By: A. Ferryman*, J. Fulghum*, L. Giannuzzi* & F. Stevie n

author keywords: XPS; FIB; Si; surface oxidation; Ga contamination; spectra-from-images
Source: Web Of Science
Added: August 6, 2018

2002 journal article

In-fab techniques for baselining implant dose, contamination

Solid State Technology, 45(8), 63-.

By: R. Santiesteban, J. McKinley, F. Stevie, P. Flatch & O. Rodriguez

Source: NC State University Libraries
Added: August 6, 2018

2002 article

Comparison of secondary ion mass spectroscopy analysis of ultrashallow phosphorus using Cs+, O-2(+), and CsC6- primary ion beams

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 20, pp. 507–511.

Source: Web Of Science
Added: August 6, 2018

Citation Index includes data from a number of different sources. If you have questions about the sources of data in the Citation Index or need a set of data which is free to re-distribute, please contact us.

Certain data included herein are derived from the Web of Science© and InCites© (2024) of Clarivate Analytics. All rights reserved. You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.