Analytical Instrumentation Facility

College of Engineering

Works Published in 2003

Sorted by most recent date added to the index first, which may not be the same as publication date order.

2003 journal article

Electrical characterization of InGaN quantum well p-n heterostructures

Microelectronics Journal, 34(5-8), 455–457.

By: J. Gonzalez, M. Da Silva, K. Bunker, A. Batchelor & P. Russell

Source: NC State University Libraries
Added: August 6, 2018

2003 patent

Chemically enhanced focused ion beam micro-machining of copper

Washington, DC: U.S. Patent and Trademark Office.

By: P. Russell, D. Griffis & J. Gonzales Perez

Source: NC State University Libraries
Added: August 6, 2018

2003 journal article

Diffusion of 18 elements implanted into thermally grown SiO2

Journal of Applied Physics, 94(12), 7433–7439.

By: H. Francois-Saint-Cyr, F. Stevie, J. Mckinley, K. Elshot, L. Chow & K. Richardson

Source: NC State University Libraries
Added: August 6, 2018

2003 journal article

Etching characteristics of chromium thin films by an electron beam induced surface reaction

Semiconductor Science and Technology, 18(4), 199–205.

By: J. Wang, D. Griffis, R. Garcia & P. Russell

Source: NC State University Libraries
Added: August 6, 2018

2003 journal article

Optimization of secondary ion mass spectrometry detection limit for N in SiC

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 21(5), 1649–1654.

By: A. Pivovarov, F. Stevie, D. Griffis & G. Guryanov

Source: NC State University Libraries
Added: August 6, 2018