College of Engineering
Displaying all 5 works
Sorted by most recent date added to the index first, which may not be the same as publication date order.
2003 article
Electrical characterization of InGaN quantum well p-n heterostructures
MICROELECTRONICS JOURNAL, Vol. 34, pp. 455–457.
2003 patent
Chemically enhanced focused ion beam micro-machining of copper
Washington, DC: U.S. Patent and Trademark Office.
2003 journal article
Diffusion of 18 elements implanted into thermally grown SiO2
JOURNAL OF APPLIED PHYSICS, 94(12), 7433–7439.
2003 journal article
Etching characteristics of chromium thin films by an electron beam induced surface reaction
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 18(4), 199–205.
2003 journal article
Optimization of secondary ion mass spectrometry detection limit for N in SiC
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 21(5), 1649–1654.