College of Engineering
Sorted by most recent date added to the index first, which may not be the same as publication date order.
2004 journal article
Circuit editing of copper and low-k dielectrics in nanotechnology devices
Journal of Microscopy, 214(2004 Jun), 246–251.
2004 journal article
Utilization of electron impact ionization of gaseous and sputtered species in the secondary ion acceleration region of a magnetic sector SIMS instrument
Applied Surface Science, 231-232(2004 June 15), 781–785.
2004 journal article
Preface - Special Issue - Secondary Ion Mass Spectrometry SIMS XIV
Applied Surface Science, 231-232(2004 June 15), 1–2.
2004 journal article
O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices
Applied Surface Science, 231-232(2004 June 15), 684–687.
2004 journal article
Improved charge neutralization method for depth profiling of bulk insulators using O-2(+) primary beam on a magnetic sector SIMS instrument
Applied Surface Science, 231-232(2004 June 15), 786–790.
2004 journal article
Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 22(1), 350–354.
2004 journal article
Diffusion profiles of high dosage Cr and V ions implanted into silicon
Journal of Applied Physics, 96(2), 1053–1058.
2004 journal article
Site-specific SIMS backside analysis
Applied Surface Science, 231-232(2004 June 15), 663–667.