Works Published in 2004
Displaying all 8 works
Sorted by most recent date added to the index first, which may not be the same as publication date order.
2004 article
Circuit editing of copper and low-k dielectrics in nanotechnology devices
Mosselveld, F., Makarov, VV, Lundquist, T. R., Griffis, D. P., & Russell, P. E. (2004, June). JOURNAL OF MICROSCOPY, Vol. 214, pp. 246–251.
author keywords: copper etching; device modification; low-k dielectrics
onlinelibrary.wiley.com (publisher PDF)
Source: Web Of Science
Added: August 6, 2018
2004 article
Utilization of electron impact ionization of gaseous and sputtered species in the secondary ion acceleration region of a magnetic sector SIMS instrument
Pivovarov, A., Gu, C., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 781–785.
author keywords: charge neutralization; electron gun; negative secondary ions; magnetic sector
Source: Web Of Science
Added: August 6, 2018
2004 article
Special Issue - Secondary Ion Mass Spectrometry SIMS XIV - Proceedings of the Fourteenth International Conference on Secondary Ion Mass Spectrometry and Related Topics - San Diego, California, USA, September 14-19, 2003 - Preface
Hunter, J., Schueler, B. W., & Stevie, F. A. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 1–2.
Source: Web Of Science
Added: August 6, 2018
2004 article
O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices
Kachan, M., Hunter, J., Kouzminov, D., Pivovarov, A., Gu, J., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 684–687.
author keywords: Cs cluster ions; GaN; depth resolution
Source: Web Of Science
Added: August 6, 2018
2004 article
Improved charge neutralization method for depth profiling of bulk insulators using O-2(+) primary beam on a magnetic sector SIMS instrument
Pivovarov, A. L., Stevie, F. A., & Griffis, D. P. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 786–790.
author keywords: charge neutralization; electron gun; magnetic sector
Source: Web Of Science
Added: August 6, 2018
2004 article
Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 22, pp. 350–354.
Sources: Web Of Science, ORCID
Added: August 6, 2018
2004 journal article
Diffusion profiles of high dosage Cr and V ions implanted into silicon
JOURNAL OF APPLIED PHYSICS, 96(2), 1053–1058.
Source: Web Of Science
Added: August 6, 2018
2004 article
Site-specific SIMS backside analysis
Gu, C., Garcia, R., Pivovarov, A., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 663–667.
author keywords: SfMS; backside analysis; semiconductors; patterned wafers
Sources: Web Of Science, ORCID
Added: August 6, 2018
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