Analytical Instrumentation Facility

College of Engineering

Works Published in 2004

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Displaying all 8 works

Sorted by most recent date added to the index first, which may not be the same as publication date order.

2004 article

Circuit editing of copper and low-k dielectrics in nanotechnology devices

Mosselveld, F., Makarov, VV, Lundquist, T. R., Griffis, D. P., & Russell, P. E. (2004, June). JOURNAL OF MICROSCOPY, Vol. 214, pp. 246–251.

By: F. Mosselveld, . Makarov, T. Lundquist, D. Griffis n & P. Russell n

author keywords: copper etching; device modification; low-k dielectrics
Source: Web Of Science
Added: August 6, 2018

2004 article

Utilization of electron impact ionization of gaseous and sputtered species in the secondary ion acceleration region of a magnetic sector SIMS instrument

Pivovarov, A., Gu, C., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 781–785.

By: A. Pivovarov n, C. Gu n, F. Stevie n & D. Griffis n

author keywords: charge neutralization; electron gun; negative secondary ions; magnetic sector
Source: Web Of Science
Added: August 6, 2018

2004 article

Special Issue - Secondary Ion Mass Spectrometry SIMS XIV - Proceedings of the Fourteenth International Conference on Secondary Ion Mass Spectrometry and Related Topics - San Diego, California, USA, September 14-19, 2003 - Preface

Hunter, J., Schueler, B. W., & Stevie, F. A. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 1–2.

By: J. Hunter*, B. Schueler & F. Stevie n

Source: Web Of Science
Added: August 6, 2018

2004 article

O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices

Kachan, M., Hunter, J., Kouzminov, D., Pivovarov, A., Gu, J., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 684–687.

By: M. Kachan, J. Hunter, D. Kouzminov, A. Pivovarov*, J. Gu, F. Stevie*, D. Griffis*

author keywords: Cs cluster ions; GaN; depth resolution
Source: Web Of Science
Added: August 6, 2018

2004 article

Improved charge neutralization method for depth profiling of bulk insulators using O-2(+) primary beam on a magnetic sector SIMS instrument

Pivovarov, A. L., Stevie, F. A., & Griffis, D. P. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 786–790.

author keywords: charge neutralization; electron gun; magnetic sector
Source: Web Of Science
Added: August 6, 2018

2004 article

Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 22, pp. 350–354.

By: C. Gu n, A. Pivovarov n, R. Garcia n, F. Stevie n, D. Griffis n, J. Moran*, L. Kulig*, J. Richards*

Sources: Web Of Science, ORCID
Added: August 6, 2018

2004 journal article

Diffusion profiles of high dosage Cr and V ions implanted into silicon

JOURNAL OF APPLIED PHYSICS, 96(2), 1053–1058.

By: P. Zhang*, F. Stevie n, R. Vanfleet*, R. Neelakantan*, M. Klimov*, D. Zhou*, L. Chow*

Source: Web Of Science
Added: August 6, 2018

2004 article

Site-specific SIMS backside analysis

Gu, C., Garcia, R., Pivovarov, A., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 663–667.

author keywords: SfMS; backside analysis; semiconductors; patterned wafers
Sources: Web Of Science, ORCID
Added: August 6, 2018