Analytical Instrumentation Facility

College of Engineering

Works Published in 2004

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Displaying all 8 works

Sorted by most recent date added to the index first, which may not be the same as publication date order.

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2004 journal article

Circuit editing of copper and low-k dielectrics in nanotechnology devices

Journal of Microscopy, 214(2004 Jun), 246–251.

By: F. Mosselveld*, V. Makarov*, T. Lundquist*, D. Griffis & P. Russell

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Utilization of electron impact ionization of gaseous and sputtered species in the secondary ion acceleration region of a magnetic sector SIMS instrument

Applied Surface Science, 231-232(2004 June 15), 781–785.

By: A. Pivovarov, C. Gu n, F. Stevie & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Preface - Special Issue - Secondary Ion Mass Spectrometry SIMS XIV

Applied Surface Science, 231-232(2004 June 15), 1–2.

By: J. Hunter, B. Schueler & F. Stevie

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices

Applied Surface Science, 231-232(2004 June 15), 684–687.

By: M. Kachan n, J. Hunter*, D. Kouzminov*, A. Pivovarov, J. Gu n, F. Stevie, D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Improved charge neutralization method for depth profiling of bulk insulators using O-2(+) primary beam on a magnetic sector SIMS instrument

Applied Surface Science, 231-232(2004 June 15), 786–790.

By: A. Pivovarov, F. Stevie & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion

Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 22(1), 350–354.

By: C. Gu, A. Pivovarov, R. Garcia, F. Stevie, D. Griffis, J. Moran, L. Kulig, J. Richards

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Diffusion profiles of high dosage Cr and V ions implanted into silicon

Journal of Applied Physics, 96(2), 1053–1058.

By: P. Zhang, F. Stevie, R. Vanfleet, R. Neelakantan, M. Klimov, D. Zhou, L. Chow

Source: NC State University Libraries
Added: August 6, 2018

2004 journal article

Site-specific SIMS backside analysis

Applied Surface Science, 231-232(2004 June 15), 663–667.

By: C. Gu, R. Garcia, A. Pivovarov, F. Stevie & D. Griffis

Source: NC State University Libraries
Added: August 6, 2018