College of Engineering
Displaying all 8 works
Sorted by most recent date added to the index first, which may not be the same as publication date order.
2004 journal article
Circuit editing of copper and low-k dielectrics in nanotechnology devices
Journal of Microscopy, 214(2004 Jun), 246–251.
2004 journal article
Utilization of electron impact ionization of gaseous and sputtered species in the secondary ion acceleration region of a magnetic sector SIMS instrument
Applied Surface Science, 231-232(2004 June 15), 781–785.
2004 journal article
Preface - Special Issue - Secondary Ion Mass Spectrometry SIMS XIV
Applied Surface Science, 231-232(2004 June 15), 1–2.
2004 journal article
O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices
Applied Surface Science, 231-232(2004 June 15), 684–687.
2004 journal article
Improved charge neutralization method for depth profiling of bulk insulators using O-2(+) primary beam on a magnetic sector SIMS instrument
Applied Surface Science, 231-232(2004 June 15), 786–790.
2004 journal article
Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion
Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 22(1), 350–354.
2004 journal article
Diffusion profiles of high dosage Cr and V ions implanted into silicon
Journal of Applied Physics, 96(2), 1053–1058.
2004 journal article
Site-specific SIMS backside analysis
Applied Surface Science, 231-232(2004 June 15), 663–667.