Analytical Instrumentation Facility

College of Engineering

Works Published in 2004

copy embed code
Copy Embed Code Experiment

You can embed this resource into your own website. To do so, either use the code generated by us, or use the link and tweak the rest to your preferences. Copy the respective code or link below.

Displaying all 8 works

Sorted by most recent date added to the index first, which may not be the same as publication date order.

2023 2022 2021 2020 2019 2018 2017

2004 article

Circuit editing of copper and low-k dielectrics in nanotechnology devices

Mosselveld, F., Makarov, VV, Lundquist, T. R., Griffis, D. P., & Russell, P. E. (2004, June). JOURNAL OF MICROSCOPY, Vol. 214, pp. 246–251.

By: F. Mosselveld, . Makarov, T. Lundquist, D. Griffis n & P. Russell n

author keywords: copper etching; device modification; low-k dielectrics
Source: Web Of Science
Added: August 6, 2018

2004 article

Utilization of electron impact ionization of gaseous and sputtered species in the secondary ion acceleration region of a magnetic sector SIMS instrument

Pivovarov, A., Gu, C., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 781–785.

By: A. Pivovarov n, C. Gu n, F. Stevie n & D. Griffis n

author keywords: charge neutralization; electron gun; negative secondary ions; magnetic sector
Source: Web Of Science
Added: August 6, 2018

2004 article

Special Issue - Secondary Ion Mass Spectrometry SIMS XIV - Proceedings of the Fourteenth International Conference on Secondary Ion Mass Spectrometry and Related Topics - San Diego, California, USA, September 14-19, 2003 - Preface

Hunter, J., Schueler, B. W., & Stevie, F. A. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 1–2.

By: J. Hunter*, B. Schueler & F. Stevie n

Source: Web Of Science
Added: August 6, 2018

2004 article

O-2(+) versus Cs+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices

Kachan, M., Hunter, J., Kouzminov, D., Pivovarov, A., Gu, J., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 684–687.

By: M. Kachan, J. Hunter, D. Kouzminov, A. Pivovarov*, J. Gu, F. Stevie*, D. Griffis*

author keywords: Cs cluster ions; GaN; depth resolution
Source: Web Of Science
Added: August 6, 2018

2004 article

Improved charge neutralization method for depth profiling of bulk insulators using O-2(+) primary beam on a magnetic sector SIMS instrument

Pivovarov, A. L., Stevie, F. A., & Griffis, D. P. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 786–790.

By: A. Pivovarov n, F. Stevie n & D. Griffis n

author keywords: charge neutralization; electron gun; magnetic sector
Source: Web Of Science
Added: August 6, 2018

2004 article

Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol. 22, pp. 350–354.

By: C. Gu n, A. Pivovarov n, R. Garcia n , F. Stevie n, D. Griffis n, J. Moran*, L. Kulig*, J. Richards*

Sources: Web Of Science, ORCID
Added: August 6, 2018

2004 journal article

Diffusion profiles of high dosage Cr and V ions implanted into silicon

JOURNAL OF APPLIED PHYSICS, 96(2), 1053–1058.

By: P. Zhang*, F. Stevie n, R. Vanfleet *, R. Neelakantan*, M. Klimov*, D. Zhou*, L. Chow*

Source: Web Of Science
Added: August 6, 2018

2004 article

Site-specific SIMS backside analysis

Gu, C., Garcia, R., Pivovarov, A., Stevie, F., & Griffis, D. (2004, June 15). APPLIED SURFACE SCIENCE, Vol. 231, pp. 663–667.

By: C. Gu n, R. Garcia n , A. Pivovarov n, F. Stevie n & D. Griffis n

author keywords: SfMS; backside analysis; semiconductors; patterned wafers
Sources: Web Of Science, ORCID
Added: August 6, 2018