2018 journal article
Rapid Fabrication and Characterization of SERS Substrates
Procedia Manufacturing, 26, 580–586.
Surface enhanced Raman spectroscopy (SERS) is a surface-sensitive detection technique that dramatically increases the scattering signals of the analytes compared to traditional Raman spectroscopy. Rapid and low-cost fabrication of SERS substrates with easily tunable features remains a challenge, although many SERS substrates with high enhancement factors (EF) were investigated. Here, we report a novel and rapid approach of fabricating SERS substrates using ultrasonic vibration assisted nanomachining. Grids patterns with easily tuned dimensions were fabricated on PMMA surfaces. SERS substrates were fabricated after coating an 80 nm gold layer on the patterned silicon after reactive ion etching (RIE) using the patterned PMMA as the mask. Probing molecules of R6G with the area density of 2.8 × 10-12 M/mm2 can be detected, achieving an EF of 3.11 × 103. Results show a pattern with higher grids density tends to achieve a higher EF.