2020 journal article

Suspended single-crystalline oxide structures on silicon through wet-etch techniques: Effects of oxygen vacancies and dislocations on etch rates

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 38(1).

By: Z. Lim, M. Chrysler, A. Kumar, J. Mauthe, D. Kumah, C. Richardson, J. Lebeau, J. Ngai

Source: ORCID
Added: April 22, 2020