2019 conference paper

A novel monolithic array of multiple metal oxide sensors for E-Nose applications via selective on-chip annealing of nanolayered ALD stacks

2019 IEEE SENSORS. Presented at the 2019 IEEE SENSORS.

By: A. Tanneeru, F. Akbulut*, B. Lee n & V. Misra n

co-author countries: Türkiye 🇹🇷 United States of America 🇺🇸

Event: 2019 IEEE SENSORS

Source: Crossref
Added: July 7, 2020

We propose a novel approach towards building a low-power multi-material gas sensor array for E-nose applications via selective on-chip annealing of atomic layer deposited (ALD) multilayer metal oxide stacks. Thin heater membranes, arranged into crossbar arrays, can be used for selective on-chip annealing to convert ALD multilayer stacks into a variety of sensing surfaces that can empower E-nose machine learning for detection of variety of gases with desired specificity. This paper demonstrates the feasibility of this novel approach and utilizes pattern recognition algorithms to show a pathway to adapt this sensor platform for integration with CMOS/MEMS technologies.