2018 conference paper
Building Blocks of a New ALD E-Nose - A First Step: N-Type and P-Type ALD Sensors
2018 IEEE SENSORS. Presented at the 2018 IEEE Sensors.
Event: 2018 IEEE Sensors
UN Sustainable Development Goal Categories
11. Sustainable Cities and Communities
(OpenAlex)
Source: Crossref
Added: July 7, 2020
We constructed the basic building blocks of a new type of low-power sensor array with an n-type Sn02 sensor and p-type CuO sensor. Both sensors have sensing film deposited by atomic layer deposition with thickness of 6.5 nm for Sn02 and 20 nm for CuO, which are in an order thickness of their respective Debye lengths. Unique response values for ozone and acetone were seen with Sn02 and CuO in the tested concentration ranges while CuO was seen to be more selective to humidity than Sn02. The impact, reason for choosing these building blocks and the mathematical rationale behind choosing relevant data features are discussed.