2021 article
A Row-Column (RC) Addressed 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array on a Glass Substrate
Sanders, J. L., Biliroglu, A. O., Wu, X., Adelegan, O. J., Yamaner, F. Y., & Oralkan, O. (2021, March). IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, Vol. 68, pp. 767–776.
author keywords: Electrodes; Substrates; Imaging; Impedance measurement; Two dimensional displays; Glass; Acoustics; Capacitive micromachined ultrasonic transducer (CMUT); glass substrate; row-column (RC) array; ultrasound imaging
TL;DR:
A row-column capacitive micromachined ultrasonic transducer array fabricated using anodic bonding on a borosilicate glass substrate is presented to reduce the bottom electrode-to-substrate capacitive coupling and improves the relative response of the elements when top or bottom electrodes are used as the “signal” (active) electrode.
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(Web of Science)
Source: Web Of Science
Added: April 5, 2021
This article presents a row-column (RC) capacitive micromachined ultrasonic transducer (CMUT) array fabricated using anodic bonding on a borosilicate glass substrate. This is shown to reduce the bottom electrode-to-substrate capacitive coupling. This subsequently improves the relative response of the elements when top or bottom electrodes are used as the “signal” (active) electrode. This results in a more uniform performance for the two cases. Measured capacitance and resonant frequency, pulse-echo signal amplitude, and frequency response are presented to support this. Biasing configurations with varying ac and dc arrangements are applied and subsequently explored. Setting the net dc bias voltage across an off element to zero is found to be most effective to minimize spurious transmission. To achieve this, a custom switching circuit was designed and implemented. This circuit was also used to obtain orthogonal B-mode cross-sectional images of a rotationally asymmetric target.