A Row-Column (RC) Addressed 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array on a Glass Substrate

Sanders, J. L., Biliroglu, A. O., Wu, X., Adelegan, O. J., Yamaner, F. Y., & Oralkan, O. (2021, March). IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, Vol. 68, pp. 767–776.