2016 conference paper

Room temperature sensing of VOCS by atomic layer deposition of metal oxide

2016 ieee sensors.

co-author countries: United States of America πŸ‡ΊπŸ‡Έ
Source: NC State University Libraries
Added: August 6, 2018

This work demonstrates room temperature sensing of volatile organic compound (VOC) β€” acetone via an ultrathin film metal oxide sensing layer. Atomic layer deposition (ALD) enables a high quality ultrathin film with precise thickness control. The 14nm ultrathin SnO2 thin film was deposited by ALD resulting in VOCs sensing at room temperature. The ultra-low power consumption (less than 50nW) and the room temperature operation of these devices make them compatible with wearable devices for real-time health and environment monitoring.