2009 journal article

Mechanism of extreme ultraviolet photoresist development with a supercritical CO2 compatible salt

Langmuir, 25(11), 6176–6190.

By: A. Zweber, M. Wagner, J. DeYoung & R. Carbonell

Source: NC State University Libraries
Added: August 6, 2018

2009 journal article

Sorption of CO2 and a CO2 compatible salt into an extreme ultraviolet photoresist film on a SiO2 substrate

Journal of Physical Chemistry. B, Condensed Matter, Materials, Surfaces, Interfaces & Biophysical, 113(29), 9687–9693.

By: A. Zweber, M. Wagner & R. Carbonell

Source: NC State University Libraries
Added: August 6, 2018