Works (2)
2009 journal article
Mechanism of Extreme Ultraviolet Photoresist Development with a Supercritical CO2 Compatible Salt
LANGMUIR, 25(11), 6176–6190.

2009 journal article
Sorption of CO2 and a CO2 Compatible Salt into an Extreme Ultraviolet Photoresist Film on a SiO2 Substrate
JOURNAL OF PHYSICAL CHEMISTRY B, 113(29), 9687–9693.