2009 journal article

Mechanism of Extreme Ultraviolet Photoresist Development with a Supercritical CO2 Compatible Salt

LANGMUIR, 25(11), 6176–6190.

By: A. Zweber n, M. Wagner, J. DeYoung* & R. Carbonell n

Source: Web Of Science
Added: August 6, 2018

2009 journal article

Sorption of CO2 and a CO2 Compatible Salt into an Extreme Ultraviolet Photoresist Film on a SiO2 Substrate

JOURNAL OF PHYSICAL CHEMISTRY B, 113(29), 9687–9693.

By: A. Zweber n, M. Wagner n & R. Carbonell n

MeSH headings : Adsorption; Carbon Dioxide / chemistry; Diffusion; Membranes, Artificial; Pressure; Salts / chemistry; Silicon Dioxide / chemistry; Solutions; Surface Properties; Temperature; Ultraviolet Rays
Source: Web Of Science
Added: August 6, 2018

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