Sorption of CO2 and a CO2 Compatible Salt into an Extreme Ultraviolet Photoresist Film on a SiO2 Substrate
JOURNAL OF PHYSICAL CHEMISTRY B, 113(29), 9687–9693.
MeSH headings :
Adsorption; Carbon Dioxide / chemistry; Diffusion; Membranes, Artificial; Pressure; Salts / chemistry; Silicon Dioxide / chemistry; Solutions; Surface Properties; Temperature; Ultraviolet Rays
Source: Web Of Science
Added: August 6, 2018