Amy Elizabeth Zweber

Works (2)

Updated: July 5th, 2023 15:50

2009 journal article

Mechanism of Extreme Ultraviolet Photoresist Development with a Supercritical CO2 Compatible Salt

LANGMUIR, 25(11), 6176–6190.

By: A. Zweber n, M. Wagner, J. DeYoung* & R. Carbonell n

TL;DR: The mechanism of developing an extreme ultraviolet (EUV) commercial photoresist with supercritical carbon dioxide (scCO2) and a CO2 compatible salt (CCS) solution was studied and the CCS partitioning into the resist was found to decrease with increasing temperature, revealing an enthalpy-driven CCS absorption. (via Semantic Scholar)
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Source: Web Of Science
Added: August 6, 2018

2009 journal article

Sorption of CO2 and a CO2 Compatible Salt into an Extreme Ultraviolet Photoresist Film on a SiO2 Substrate

JOURNAL OF PHYSICAL CHEMISTRY B, 113(29), 9687–9693.

By: A. Zweber n, M. Wagner n & R. Carbonell n

MeSH headings : Adsorption; Carbon Dioxide / chemistry; Diffusion; Membranes, Artificial; Pressure; Salts / chemistry; Silicon Dioxide / chemistry; Solutions; Surface Properties; Temperature; Ultraviolet Rays
TL;DR: The sorption behavior of CO2 and the CCS onto a bare SiO2 surface and into the photoresist was studied using a quartz crystal microbalance (QCM) and the adsorption of the C CS was favored and driven by entropy changes. (via Semantic Scholar)
Source: Web Of Science
Added: August 6, 2018

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