@article{zweber_wagner_deyoung_carbonell_2009, title={Mechanism of extreme ultraviolet photoresist development with a supercritical CO2 compatible salt}, volume={25}, DOI={10.1021/la8043158}, number={11}, journal={Langmuir}, author={Zweber, A. E. and Wagner, M. and DeYoung, J. and Carbonell, R. G.}, year={2009}, pages={6176–6190} }
 @article{zweber_wagner_carbonell_2009, title={Sorption of CO2 and a CO2 compatible salt into an extreme ultraviolet photoresist film on a SiO2 substrate}, volume={113}, DOI={10.1021/jp900481j}, number={29}, journal={Journal of Physical Chemistry. B, Condensed Matter, Materials, Surfaces, Interfaces & Biophysical}, author={Zweber, A. E. and Wagner, M. and Carbonell, R. G.}, year={2009}, pages={9687–9693} }