@article{lucovsky_rayner_kang_hinkle_hong_2004, title={A spectroscopic phase separation study distinguishing between chemical with different degrees of crystallinity in Zr(Hf) silicate alloys}, volume={566}, ISSN={["0039-6028"]}, DOI={10.1016/j.susc.2004.06.010}, abstractNote={Abstract Chemical phase separation at device processing temperatures is an important issue for integration of Zr and Hf silicates alloys into advanced CMOS devices. Chemical phase separation into ZrO 2 and SiO 2 has been detected by different spectroscopic techniques, including Fourier transform infra red, X-ray photoelectron, and X-ray absorption spectroscopy, as well as X-ray diffraction and high resolution transmission electron microscopy imaging as well. Comparisons between these techniques for Zr silicates identify an unambiguous approach to distinguishing between chemical phase separation with different degrees of micro- and nano-crystallinity.}, journal={SURFACE SCIENCE}, author={Lucovsky, G and Rayner, GB and Kang, D and Hinkle, CL and Hong, JG}, year={2004}, month={Sep}, pages={772–776} }
 @article{lucovsky_rayner_kang_hinkle_hong_2004, title={A spectroscopic study distinguishing between chemical phase separation with different degrees of crystallinity in Hf(Zr) silicate alloys}, volume={234}, ISSN={["0169-4332"]}, DOI={10.1016/j.apsusc.2004.05.075}, abstractNote={Abstract Chemical phase separation at device processing temperatures is an important issue for integration of Zr and Hf silicates alloys into advanced complementary metal oxide semiconductor (CMOS) devices. Chemical phase separation into ZrO 2 and SiO 2 has been detected by different spectroscopic techniques, including Fourier transform infrared, X-ray photoelectron, and X-ray absorption spectroscopy, as well as X-ray diffraction and high resolution transmission electron microscopy imaging as well. Comparisons between these techniques for Zr silicates identify an unambiguous approach to distinguishing between chemical phase separation with different degrees of micro- and nano-crystallinity.}, number={1-4}, journal={APPLIED SURFACE SCIENCE}, author={Lucovsky, G and Rayner, GB and Kang, D and Hinkle, CL and Hong, JG}, year={2004}, month={Jul}, pages={429–433} }
 @article{rayner_kang_lucovsky_2004, title={Chemical phase separation in Zr silicate alloys: a spectroscopic study distinguishing between chemical phase separation with different degrees of micro- and nano-crystallinity}, volume={338}, ISSN={["1873-4812"]}, DOI={10.1016/j.jnoncrysol.2004.02.042}, abstractNote={Chemical phase separation is an important issue for process integration of non-crystalline Zr and Hf silicate alloys into advanced microelectronic devices. Chemical phase separation of Zr silicates into ZrO2 and SiO2 has been detected by different spectroscopic techniques, including Fourier transform infrared, X-ray photoelectron, X-ray absorption, and extended X-ray absorption fine structure spectroscopies, as well as X-ray diffraction and high resolution transmission electron microscopy imaging. This combination of techniques identifies an unambiguous way to distinguish between chemical phase separation with different degrees of micro- and nano-crystallinity. This is important since all modes of chemical separation degrade dielectric properties required for device applications.}, journal={JOURNAL OF NON-CRYSTALLINE SOLIDS}, author={Rayner, GB and Kang, D and Lucovsky, G}, year={2004}, month={Jun}, pages={151–154} }
 @article{tyler_zhirnov_kvit_kang_hren_2003, title={Electron emission from diamond nanoparticles on metal tips}, volume={82}, ISSN={["0003-6951"]}, DOI={10.1063/1.1570498}, abstractNote={Single-crystalline diamond nanoparticles (∼5 nm in scale) have been deposited onto molybdenum needles (with radii <100 nm), and their effects on field emission behavior were measured. Combined transmission electron microscopy observations, field emission measurements, and diamond depositions allowed for direct comparison of the effects of various amounts of nanodiamond coating on the field emission properties of a coated metal field emitter. In the limit, field emission from a single isolated diamond nanoparticle is compared here with that from an uncoated metal emitter and from a coating comprised of several layers of nanoparticles.}, number={17}, journal={APPLIED PHYSICS LETTERS}, author={Tyler, T and Zhirnov, VV and Kvit, AV and Kang, D and Hren, JJ}, year={2003}, month={Apr}, pages={2904–2906} }
 @article{rayner_kang_zhang_lucovsky_2002, title={Nonlinear composition dependence of x-ray photoelectron spectroscopy and Auger electron spectroscopy features in plasma-deposited zirconium silicate alloy thin films}, volume={20}, ISSN={["2166-2746"]}, DOI={10.1116/1.1493788}, abstractNote={The local bonding of Zr, Si, and O atoms in plasma-deposited, and post-deposition annealed Zr silicate pseudobinary alloys [(ZrO2)x(SiO2)1−x] was studied by x-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES). Systematic decreases in XPS binding energies, and increases in AES kinetic energies with alloy composition x are consistent with an empirical chemical bonding model based on electronegativity equalization; however, there are significant departures from the predicted linear composition dependencies of that model. Deviations from linearity in the XPS compositional dependencies are correlated with dipolar network atom fields as determined from ab initio calculations. The nonlinearities in the x dependence of ZrMVV and OKVV AES spectral features are determined primarily by oxygen–atom coordination dependent shifts in valence band offset energies. The energy spread in the compositional dependence of binding energies (∼1.85 eV) for the XPS Zr 3d5/2 and Si 2p features combined with x-ray absorption spectroscopy data indicates that the conduction band offset energies between the Si substrate and Zr silicate dielectrics are alloy composition independent. Changes in O 1s XPS features in alloys with x∼0.3 to 0.6 as function of annealing temperature are consistent with a previously identified chemical phase separation that occurs after 60 s anneals at 900 °C in a nonoxidizing ambient, Ar.}, number={4}, journal={JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B}, author={Rayner, GB and Kang, D and Zhang, Y and Lucovsky, G}, year={2002}, pages={1748–1758} }
 @article{liu_chiu_morton_kang_zhirnov_hren_cuomo_2001, title={Band gap structure and electron emission property of chemical-vapor-deposited diamond films}, volume={45}, ISSN={["0038-1101"]}, DOI={10.1016/S0038-1101(00)00210-0}, abstractNote={The structures of the band gap and defect states of chemical-vapor-deposited diamond films were investigated by photoluminescence spectroscopy, covering wavelength from visible to vacuum ultraviolet (VUV). Band gaps ranging from 5.5 to 3.2 eV were measured for natural, polycrystalline, and amorphous diamond films. Low voltage field emissions were obtained from wide band gap films with band gap states distributed close to the conduction band and extended deeply into the band gap. Amorphous diamond film with a narrower band gap could not provide low field emission.}, number={6}, journal={SOLID-STATE ELECTRONICS}, author={Liu, JJ and Chiu, DYT and Morton, DC and Kang, DH and Zhirnov, VV and Hren, JJ and Cuomo, JJ}, year={2001}, month={Jun}, pages={915–919} }
 @article{kang_zhirnov_wojak_preble_choi_hren_cuomo_1999, title={Investigation of thickness effects on AlN coated metal tips by in situ I-V measurement}, volume={17}, ISSN={["1071-1023"]}, DOI={10.1116/1.590608}, abstractNote={The effects of the aluminum nitride coating thickness on molybdenum emitter tips were investigated by an in situ I–V measurement technique inside a typical magnetron sputtering system. AlN was deposited on Mo tips using a dc-modulated 1 kW power source at 200 °C. Each I/V measurement was carried out immediately following a 15 s AlN deposition. Significantly improved field emission was observed as well as a strong emission thickness dependence, which we attribute to the influence of space charge.}, number={2}, journal={JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B}, author={Kang, DH and Zhirnov, VV and Wojak, GJ and Preble, EA and Choi, WB and Hren, JJ and Cuomo, JJ}, year={1999}, pages={632–634} }
 @article{kang_cuomo, title={Surface treatment effects on the electron emission characteristics of ultra thin AlN coated molybdenum tips}, volume={3}, number={3}, journal={Journal of Ceramic Processing Research}, author={Kang, D. and Cuomo, J. J.}, pages={228–230} }