Works (3)
Updated: July 5th, 2023 16:03
2001 journal article
Time-dependent Si etch behavior and its effect on oxide/Si selectivity in CF4+D-2 electron cyclotron resonance plasma etching
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 19(3), 695–700.
UN Sustainable Development Goal Categories
13. Climate Action
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
1998 journal article
Endpoint uniformity sensing and analysis in silicon dioxide plasma etching using in situ mass spectrometry
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 16(6), 2996–3002.
Contributors: J. Chambers*, & G. Parsons
UN Sustainable Development Goal Categories
13. Climate Action
(Web of Science)
Sources: Web Of Science, ORCID
Added: August 6, 2018
1998 journal article
Repair-unit location models for power failures
IEEE TRANSACTIONS ON ENGINEERING MANAGEMENT, 45(1), 57–65.
author keywords: goal programming; power failure; unit location model
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
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