Works (3)
Updated: July 5th, 2023 16:03
2001 journal article
Time-dependent Si etch behavior and its effect on oxide/Si selectivity in CF4+D-2 electron cyclotron resonance plasma etching
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 19(3), 695–700.
UN Sustainable Development Goal Categories
13. Climate Action
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
1998 journal article
Endpoint uniformity sensing and analysis in silicon dioxide plasma etching using in situ mass spectrometry
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 16(6), 2996–3002.
Contributors: J. Chambers n, n & G. Parsons n
UN Sustainable Development Goal Categories
13. Climate Action
(Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018
1998 journal article
Repair-unit location models for power failures
IEEE TRANSACTIONS ON ENGINEERING MANAGEMENT, 45(1), 57–65.
author keywords: goal programming; power failure; unit location model
UN Sustainable Development Goal Categories
7. Affordable and Clean Energy
(Web of Science)
Source: Web Of Science
Added: August 6, 2018
Citation Index includes data from a number of different sources. If you have questions about the sources of data in the Citation Index or need a set of data which is free to re-distribute, please contact us.
Certain data included herein are derived from the Web of Science© and InCites© (2024) of Clarivate Analytics. All rights reserved. You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.