Kyungjin Min

Works (3)

Updated: July 5th, 2023 16:03

2001 journal article

Time-dependent Si etch behavior and its effect on oxide/Si selectivity in CF4+D-2 electron cyclotron resonance plasma etching

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 19(3), 695–700.

By: K. Min n, H. Lamb n & . Hauser n

UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Source: Web Of Science
Added: August 6, 2018

1998 journal article

Endpoint uniformity sensing and analysis in silicon dioxide plasma etching using in situ mass spectrometry

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 16(6), 2996–3002.

By: J. Chambers n, K. Min n & G. Parsons n 

Contributors: J. Chambers n, K. Min n & G. Parsons n 

UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
13. Climate Action (Web of Science)
Sources: Web Of Science, ORCID, NC State University Libraries
Added: August 6, 2018

1998 journal article

Repair-unit location models for power failures

IEEE TRANSACTIONS ON ENGINEERING MANAGEMENT, 45(1), 57–65.

By: M. Yao n & K. Min*

author keywords: goal programming; power failure; unit location model
UN Sustainable Development Goals Color Wheel
UN Sustainable Development Goal Categories
Source: Web Of Science
Added: August 6, 2018

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