2003 journal article

Formation of nanoscale voids and related metallic impurity gettering in high-energy ion-implanted and annealed epitaxial silicon

Applied Physics Letters, 83(7), 1367–1369.

By: A. Kvit, R. Yankov, G. Duscher, G. Rozgonyi & J. Glasko

Source: NC State University Libraries
Added: August 6, 2018

2000 journal article

Gettering issues using MeV ion implantation

Materials Science & Engineering. B, Solid-State Materials for Advanced Technology, 72(2-3), 87–92.

By: G. Rozgonyi, J. Glasko, K. Beaman & S. Koveshnikov

Source: NC State University Libraries
Added: August 6, 2018