2003 journal article

Formation of nanoscale voids and related metallic impurity gettering in high-energy ion-implanted and annealed epitaxial silicon

APPLIED PHYSICS LETTERS, 83(7), 1367–1369.

By: A. Kvit, R. Yankov, G. Duscher, G. Rozgonyi & J. Glasko

Source: Web Of Science
Added: August 6, 2018

2000 article

Gettering issues using MeV ion implantation

Rozgonyi, G. A., Glasko, J. M., Beaman, K. L., & Koveshnikov, S. V. (2000, March 15). MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, Vol. 72, pp. 87–92.

By: G. Rozgonyi, J. Glasko, K. Beaman & S. Koveshnikov*

author keywords: gettering; MeV; ion implantation; Fe; thermal stability; R-p/2
Source: Web Of Science
Added: August 6, 2018