Works (2)
2003 journal article
Formation of nanoscale voids and related metallic impurity gettering in high-energy ion-implanted and annealed epitaxial silicon
APPLIED PHYSICS LETTERS, 83(7), 1367–1369.
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2000 article
Gettering issues using MeV ion implantation
Rozgonyi, G. A., Glasko, J. M., Beaman, K. L., & Koveshnikov, S. V. (2000, March 15). MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, Vol. 72, pp. 87–92.
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