Works (2)

Updated: July 5th, 2023 16:02

2003 journal article

Formation of nanoscale voids and related metallic impurity gettering in high-energy ion-implanted and annealed epitaxial silicon

APPLIED PHYSICS LETTERS, 83(7), 1367–1369.

By: A. Kvit n, R. Yankov n, G. Duscher n, G. Rozgonyi n & J. Glasko*

Source: Web Of Science
Added: August 6, 2018

2000 article

Gettering issues using MeV ion implantation

Rozgonyi, G. A., Glasko, J. M., Beaman, K. L., & Koveshnikov, S. V. (2000, March 15). MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, Vol. 72, pp. 87–92.

By: G. Rozgonyi*, J. Glasko*, K. Beaman* & S. Koveshnikov

author keywords: gettering; MeV; ion implantation; Fe; thermal stability; R-p/2
Source: Web Of Science
Added: August 6, 2018